Number | Name | Date | Kind |
---|---|---|---|
5668024 | Tsai et al. | Sep 1997 | |
5707896 | Chiang et al. | Jan 1998 | |
6013577 | Kimizuka | Jan 2000 |
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Apt Poly-Si Gate With Nitrogen-Doped Poly-Si Layer For Deep Submicron Prospects. Kanagawa Inspec PN B9308-2570F-004, May 1991.* |
Stanley Wolf and Richard N. Tauber; Silicon Processing for the VLSI Era, vol. 1—Process Technology; p. 1; 1986. |
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