Coating inspection method

Information

  • Patent Grant
  • 9664626
  • Patent Number
    9,664,626
  • Date Filed
    Thursday, October 31, 2013
    11 years ago
  • Date Issued
    Tuesday, May 30, 2017
    7 years ago
Abstract
A reflectometry method and other methods for detecting discontinuities in a chemical vapor deposition (CVD) coating are disclosed. The method includes several steps. A thermoplastic vessel wall (710) is provided having an outside surface, an inside surface, and a CVD coating on at least one of the inside and outside surfaces. The vessel wall and the CVD coating have different indices of refraction. Electromagnetic energy (718) is impinged on multiple positions of the CVD coating under conditions effective to cause energy to reflect from the multiple positions of the CVD coating. The reflected energy is analyzed to determine whether the reflected energy includes at least one artifact of a discontinuity in the CVD coating.
Description

The present disclosure relates to the technical field of fabrication of coated vessels for storing biologically active compounds or blood. For example, the disclosure relates to a vessel processing system for coating of a vessel, vessel processing system for coating and inspection of a vessel, to a portable vessel holder for a vessel processing system, to a plasma enhanced chemical vapour deposition apparatus for coating an interior surface of a vessel, to a method for coating an interior surface of a vessel, to a method for coating an inspection of a vessel, to a method of processing a vessel, to the use of a vessel processing system, to a computer-readable medium and to a program element.


The present disclosure also relates to improved methods for processing vessels, for example multiple identical vessels used for venipuncture and other medical sample collection, pharmaceutical preparation storage and delivery, and other purposes. Such vessels are used in large numbers for these purposes, and must be relatively economical to manufacture and yet highly reliable in storage and use.


BACKGROUND OF THE DISCLOSURE

Evacuated blood collection tubes are used for drawing blood from a patient for medical analysis. The tubes are sold evacuated. The patient's blood is communicated to the interior of a tube by inserting one end of a double-ended hypodermic needle into the patient's blood vessel and impaling the closure of the evacuated blood collection tube on the other end of the double-ended needle. The vacuum in the evacuated blood collection tube draws the blood (or more precisely, the blood pressure of the patient pushes the blood) through the needle into the evacuated blood collection tube, increasing the pressure within the tube and thus decreasing the pressure difference causing the blood to flow. The blood flow typically continues until the tube is removed from the needle or the pressure difference is too small to support flow.


Evacuated blood collection tubes should have a substantial shelf life to facilitate efficient and convenient distribution and storage of the tubes prior to use. For example, a one-year shelf life is desirable, and progressively longer shelf lives, such as 18 months, 24 months, or 36 months, are also desired in some instances. The tube desirably remains essentially fully evacuated, at least to the degree necessary to draw enough blood for analysis (a common standard is that the tube retains at least 90% of the original draw volume), for the full shelf life, with very few (optimally no) defective tubes being provided.


A defective tube is likely to cause the phlebotomist using the tube to fail to draw sufficient blood. The phlebotomist might then need to obtain and use one or more additional tubes to obtain an adequate blood sample.


Prefilled syringes are commonly prepared and sold so the syringe does not need to be filled before use. The syringe can be prefilled with saline solution, a dye for injection, or a pharmaceutically active preparation, for some examples.


Commonly, the prefilled syringe is capped at the distal end, as with a cap, and is closed at the proximal end by its drawn plunger. The prefilled syringe can be wrapped in a sterile package before use. To use the prefilled syringe, the packaging and cap are removed, optionally a hypodermic needle or another delivery conduit is attached to the distal end of the barrel, the delivery conduit or syringe is moved to a use position (such as by inserting the hypodermic needle into a patient's blood vessel or into apparatus to be rinsed with the contents of the syringe), and the plunger is advanced in the barrel to inject the contents of the barrel.


One important consideration in manufacturing pre-filled syringes is that the contents of the syringe desirably will have a substantial shelf life, during which it is important to isolate the material filling the syringe from the barrel wall containing it, to avoid leaching material from the barrel into the prefilled contents or vice versa.


Since many of these vessels are inexpensive and used in large quantities, for certain applications it will be useful to reliably obtain the necessary shelf life without increasing the manufacturing cost to a prohibitive level. It is also desirable for certain applications to move away from glass vessels, which can break and are expensive to manufacture, in favor of plastic vessels which are rarely broken in normal use (and if broken do not form sharp shards from remnants of the vessel, like a glass tube would). Glass vessels have been favored because glass is more gas tight and inert to pre-filled contents than untreated plastics. Also, due to its traditional use, glass is well accepted, as it is known to be relatively innocuous when contacted with medical samples or pharmaceutical preparations and the like.


A further consideration when regarding syringes is to ensure that the plunger can move at a constant speed and with a constant force when it is pressed into the barrel. For this purpose, a lubricity layer, either on one or on both of the barrel and the plunger, is desirable.


U.S. Published Patent Application 20070229844 A1, Holz et al., incorporated here by reference in its entirety, discusses, “a method of measuring layer thicknesses and layer homogeneities in transparent, internally lubricant- and water-repulsion-coated containers, wherein a lens (2) focuses polychromatic light on to the internal coating (1B) of the container (1), the reflected light is detected again, coupled into a spectrometer and registered by way of a sensitive multichannel detector (7), and corresponding signals are transferred to an electronic evaluation means (8) which digitises the signals and computes the layer thickness from the interference pattern.” Holz et al. discusses the use of this method to measure the thickness of baked on silicone oil coatings used as a lubricant or water repellent coating on syringes and other containers.


A non-exhaustive list of other patent documents of possible relevance includes U.S. Pat. Nos. 6,068,884 and 4,844,986 and U.S. Published Applications 20060046006 and 20040267194.


SUMMARY OF THE INVENTION

An aspect of the disclosure is a reflectometry method for detecting discontinuities in a CVD coating. The method can be carried out as follows.


An at least partially transparent thermoplastic vessel wall is provided. The vessel wall has an outside surface, an inside surface, and a CVD coating on at least one of the inside and outside surfaces. The vessel wall and the CVD coating have different indices of refraction.


Electromagnetic energy is impinged on multiple positions of the CVD coating under conditions effective to cause energy to reflect from the multiple positions of the CVD coating. The reflected energy is analyzed to determine whether the reflected energy includes at least one artifact of a discontinuity in the CVD coating.


The present method can be employed to measure any of the coatings described in this disclosure, for example, on any of the vessels described in this disclosure.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is a schematic diagram showing a vessel processing system according to an embodiment of the disclosure.



FIG. 2 is a schematic sectional view of a vessel holder in a coating station according to an embodiment of the disclosure.



FIG. 3 is a view similar to FIG. 2 of vessel inspection apparatus.



FIG. 4 is a schematic sectional view of a light source and detector for vessel inspection apparatus, with a vessel in place.



FIG. 5 is a detail view similar to FIG. 4 of a light source and detector that are reversed compared to the corresponding parts of FIG. 3.



FIG. 6 is an exploded longitudinal sectional view of a syringe and cap adapted for use as a prefilled syringe.



FIG. 7 is a perspective view of a blood collection tube assembly having a closure according to still another embodiment of the disclosure.



FIG. 8 is a fragmentary section of the blood collection tube and closure assembly of FIG. 7.



FIG. 9 is an isolated section of an elastomeric insert of the closure of FIGS. 7 and 8.



FIG. 10 is a schematic view showing outgassing of a material through a coating.



FIG. 11 is a schematic sectional view of a test set-up for causing outgassing of the wall of a vessel to the interior of the vessel and measurement of the outgassing using a measurement cell interposed between the vessel and a source of vacuum.



FIG. 12 is a plot of outgassing mass flow rate measured on the test-set-up of FIG. 11 for multiple vessels.



FIG. 13 is a bar graph showing a statistical analysis of the endpoint data shown in FIG. 12.



FIG. 14 is a perspective view of a double-walled blood collection tube assembly according to still another embodiment of the disclosure.



FIG. 15 is an exploded view of a two-piece syringe barrel and Luer lock fitting. The syringe barrel is usable with the vessel treatment and inspection apparatus of FIGS. 1-6.



FIG. 16 is an assembled view of the two-piece syringe barrel and Luer lock fitting of FIG. 15.



FIG. 17 is a plot of outgassing mass flow rate measured in Example 9.



FIG. 18 is a schematic view of an embodiment of apparatus useful for carrying out the present disclosure.



FIG. 19 is a schematic view of another embodiment of apparatus useful for carrying out the present disclosure.



FIG. 20 is a more detailed view of the map 726 of FIG. 19.



FIG. 21 is a more detailed view of the map 724 of FIG. 19.





The following reference characters are used in the drawing figures:















20
Vessel processing system


22
Injection molding machine


24
Visual inspection station


26
Inspection station (pre-coating)


28
Coating station


30
Inspection station (post-coating)


32
Optical source transmission station (thickness)


34
Optical source transmission station (defects)


36
Output


38
Vessel holder


40
Vessel holder


42
Vessel holder


44
Vessel holder


46
Vessel holder


48
Vessel holder


50
Vessel holder


52
Vessel holder


54
Vessel holder


56
Vessel holder


58
Vessel holder


60
Vessel holder


62
Vessel holder


64
Vessel holder


66
Vessel holder


68
Vessel holder


70
Conveyor


72
Transfer mechanism (on)


74
Transfer mechanism (off)


80
Vessel


82
Opening


84
Closed end


86
Wall


88
Interior surface


90
Barrier layer


92
Vessel port


94
Vacuum duct


96
Vacuum port


98
Vacuum source


100
O-ring (of 92)


102
O-ring (of 96)


104
Gas inlet port


106
O-ring (of 100)


108
Probe (counter electrode)


110
Gas delivery port (of 108)


114
Housing (of 50 or 112)


116
Collar


118
Exterior surface (of 80)


132
Light source


134
Side channel


144
PECVD gas source


160
Electrode


162
Power supply


164
Sidewall (of 160)


166
Sidewall (of 160)


168
Closed end (of 160)


170
Light source (FIG. 4)


172
Detector


174
Pixel (of 172)


176
Interior surface (of 172)


182
Aperture (of 186)


184
Wall (of 186)


186
Integrating sphere


220
Bearing surface (FIG. 2)


222
Bearing surface (FIG. 2)


224
Bearing surface (FIG. 2)


226
Bearing surface (FIG. 2)


228
Bearing surface (FIG. 2)


230
Bearing surface (FIG. 2)


232
Bearing surface (FIG. 2)


234
Bearing surface (FIG. 2)


236
Bearing surface (FIG. 2)


238
Bearing surface (FIG. 2)


240
Bearing surface (FIG. 2)


250
Syringe barrel


252
Syringe


254
Interior surface (of 250)


256
Back end (of 250)


258
Plunger (of 252)


260
Front end (of 250)


262
Cap


264
Interior surface (of 262)


268
Vessel


270
Closure


272
Interior facing surface


274
Lumen


276
Wall-contacting surface


278
Inner surface (of 280)


280
Vessel wall


282
Stopper


284
Shield


286
Lubricity layer


288
Barrier layer


346
Wall


348
Coating (on 346)


350
Permeation path


354
Gas molecule


355
Gas molecule


356
Interface (between 346 and 348)


357
Gas molecule


358
PET vessel


359
Gas molecule


360
Seal


362
Measurement cell


364
Vacuum pump


366
Arrows


368
Conical passage


370
Bore


372
Bore


374
Chamber


376
Chamber


378
Diaphragm


380
Diaphragm


382
Conductive surface


384
Conductive surface


386
Bypass


390
Plot (glass tube)


392
Plot (PET uncoated)


394
Main plot (SiO2 coated)


396
Outliers (SiO2 coated)


544
Syringe


546
Plunger


548
Body


550
Barrel


552
Interior surface (of 550)


554
Coating


556
Luer fitting


558
Luer taper


560
Internal passage (of 558)


562
Internal surface


564
Coupling


566
Male part (of 564)


568
Female part (of 564)


570
Barrier layer


572
Locking collar


602
Syringe exterior barrier layer


604
Lumen


606
Barrel exterior surface


630
Plots for uncoated COC


632
Plots for SiOx coated COC


634
Plots for glass


710
Vessel wall


712
Outside surface


714
Inside surface


716
CVD coating


718
Impinging electromagnetic energy


720
Source (of 18)


722
Reflected energy


724
Map (bar graph)


726
Map (shaded chart)


728
Image sensor (CCD)


730
Processor


732
Artifact


734
Partially silvered mirror


736
Lens


738
Focal point


740
Lens


742
Spectrometer


744
Multichannel detector









DEFINITIONS

The following terms are used in this specification in the sense indicated here. A “discontinuity” is broadly defined as an area of a coating on a substrate that either is thinner than other areas, or that is absent altogether (i.e. an uncoated area). An example of a coating that is absent altogether would be a pinhole defect in the coating.


“At least partially transparent” as used here in reference to a material or object means that enough of the energy impinging on the object can be transmitted through the material or object to allow the reflected energy to be analyzed to determine the presence or absence of discontinuities in the coating.


The “color” of polychromatic energy is defined as its proportion of different wavelengths, which can be either visible or invisible to the human eye or a combination of both. For example, assume that (1) a first beam of polychromatic energy is composed of a 10 Watts per meter squared (W/m2) component of 500 nm wavelength, a 3 W/m2 component of 600 nm wavelength, and a 5 W/m2 component of 700 nm wavelength; (2) a second beam of polychromatic energy is composed of a 10 W/m2 component of 500 nm wavelength, a 10 W/m2 component of 600 nm wavelength, and a 5 W/m2 component of 700 nm wavelength; and (3) a third beam of polychromatic energy is composed of a 2 W/m2 component of 500 nm wavelength, a 0.6 W/m2 component of 600 nm wavelength, and a 1 W/m2 component of 700 nm wavelength. The first beam and second beam are different colors as used herein because the second beam has relatively more 600 nm energy than the first, in relation to the intensities of the other wavelengths. The first and third beams are the same color. One is 20% as intense as the other, but both have the same proportions of 600 nm, 700 nm, and 800 nm component intensities.


A CVD coating analyzed as described in this specification can be prepared, for example, by plasma enhanced chemical vapor deposition treatment (PECVD), as described for example in U.S. Pat. No. 7,985,188, incorporated by reference above.


RF is radio frequency; sccm is standard cubic centimeters per minute.


The term “at least” in the context of the present disclosure means “equal or more” than the integer following the term. The word “comprising” does not exclude other elements or steps, and the indefinite article “a” or “an” does not exclude a plurality unless indicated otherwise.


“First” and “second” or similar references to, e.g., processing stations or processing devices refer to the minimum number of processing stations or devices that are present, but do not necessarily represent the order or total number of processing stations and devices. These terms do not limit the number of processing stations or the particular processing carried out at the respective stations.


For purposes of the present disclosure, an “organosilicon precursor” is a compound having at least one of the linkage:




embedded image



which is a tetravalent silicon atom connected to an oxygen atom and an organic carbon atom (an organic carbon atom being a carbon atom bonded to at least one hydrogen atom). A volatile organosilicon precursor, defined as such a precursor that can be supplied as a vapor in a PECVD apparatus, is an optional organosilicon precursor. Optionally, the organosilicon precursor is selected from the group consisting of a linear siloxane, a monocyclic siloxane, a polycyclic siloxane, a polysilsesquioxane, an alkyl trimethoxysilane, a linear silazane, a monocyclic silazane, a polycyclic silazane, a polysilsesquiazane, and a combination of any two or more of these precursors.


In the context of the present disclosure, “essentially no oxygen” or (synonymously) “substantially no oxygen” is added to the gaseous reactant in some embodiments. This means that some residual atmospheric oxygen can be present in the reaction space, and residual oxygen fed in a previous step and not fully exhausted can be present in the reaction space, which are defined here as essentially no oxygen present. Essentially no oxygen is present in the gaseous reactant if the gaseous reactant comprises less than 1 vol % O2, for example less than 0.5 vol % O2, and optionally is O2-free. If no oxygen is added to the gaseous reactant, or if no oxygen at all is present during PECVD, this is also within the scope of “essentially no oxygen.”


A “vessel” in the context of the present disclosure can be any type of vessel with at least one opening and a wall defining an interior surface. The term “at least” in the context of the present disclosure means “equal or more” than the integer following the term. Thus, a vessel in the context of the present disclosure has one or more openings. One or two openings, like the openings of a sample tube (one opening) or a syringe barrel (two openings) are preferred. If the vessel has two openings, they can be of same or different size. If there is more than one opening, one opening can be used for the gas inlet for a PECVD coating method according to the present disclosure, while the other openings are either capped or open. A vessel according to the present disclosure can be a sample tube, e.g. for collecting or storing biological fluids like blood or urine, a syringe (or a part thereof, for example a syringe barrel) for storing or delivering a biologically active compound or composition, e.g. a medicament or pharmaceutical composition, a vial for storing biological materials or biologically active compounds or compositions, a pipe, e.g. a catheter for transporting biological materials or biologically active compounds or compositions, or a cuvette for holding fluids, e.g. for holding biological materials or biologically active compounds or compositions.


A vessel can be of any shape, a vessel having a substantially cylindrical wall adjacent to at least one of its open ends being preferred. Generally, the interior wall of the vessel is cylindrically shaped, like, e.g. in a sample tube or a syringe barrel. Sample tubes and syringes or their parts (for example syringe barrels) are contemplated.


A “hydrophobic layer” in the context of the present disclosure means that the coating lowers the wetting tension of a surface coated with the coating, compared to the corresponding uncoated surface. Hydrophobicity is thus a function of both the uncoated substrate and the coating. The same applies with appropriate alterations for other contexts wherein the term “hydrophobic” is used. The term “hydrophilic” means the opposite, i.e. that the wetting tension is increased compared to reference sample. The present hydrophobic layers are primarily defined by their hydrophobicity and the process conditions providing hydrophobicity, and optionally can have a composition according to the empirical composition or sum formula SiwOxCyHz, for example where w is 1, x is from about 0.5 to about 2.4, y is from about 0.6 to about 3, and z is from about 2 to about 9, optionally where w is 1, x is from about 0.5 to 1, y is from about 2 to about 3, and z is from 6 to about 9. These values of w, x, y, and z are applicable to the empirical composition SiwOxCyHz throughout this specification. The values of w, x, y, and z used throughout this specification should be understood as ratios or an empirical formula (e.g. for a coating), rather than as a limit on the number or type of atoms in a molecule. For example, octamethylcyclotetrasiloxane, which has the molecular composition Si4O4C8H24, can be described by the following empirical formula, arrived at by dividing each of w, x, y, and z in the molecular formula by 4, the largest common factor: Si1O1C2H6. The values of w, x, y, and z are also not limited to integers. For example, (acyclic) octamethyltrisiloxane, molecular composition Si3O2C8H24, is reducible to Si1O0.67C2.67H8.


“Wetting tension” is a specific measure for the hydrophobicity or hydrophilicity of a surface. An optional wetting tension measurement method in the context of the present disclosure is ASTM D 2578 or a modification of the method described in ASTM D 2578. This method uses standard wetting tension solutions (called dyne solutions) to determine the solution that comes nearest to wetting a plastic film surface for exactly two seconds. This is the film's wetting tension. The procedure utilized is varied herein from ASTM D 2578 in that the substrates are not flat plastic films, but are tubes made according to the Protocol for Forming PET Tube.


Distinctions are made in this disclosure among “permeation,” “leakage,” and “surface diffusion” or “outgassing.”


“Permeation” as used here in reference to a vessel is traverse of a material through a wall 346 or other obstruction, as from the outside of the vessel to the inside or vice versa along the path 350 in FIG. 10 or the reverse of that path.


“Outgassing” refers to the movement of an absorbed or adsorbed material such as the gas molecule 354 or 357 or 359 outward from within the wall 346 or coating 348 in FIG. 10, for example through the coating 348 (if present) and into the vessel 358 (to the right in FIG. 10). Outgassing can also refer to movement of a material such as 354 or 357 out of the wall 346, to the left as shown in FIG. 10, thus to the outside of the vessel 357 as illustrated. Outgassing can also refer to the removal of adsorbed material from the surface of an article, for example the gas molecule 355 from the exposed surface of the barrier coating 90.


“Leakage” refers to the movement of a material around the obstruction represented by the wall 346 and coating 348 rather than through or off the surface of the obstruction, as by passing between a closure and the wall of a vessel closed with a closure.


Permeation is indicative of the rate of gas movement through a material, devoid of gaps/defects and not relating to leaks or outgassing. Referring to FIG. 10, which shows a vessel wall or other substrate 346 having a barrier coating 348, permeation is traverse of a gas entirely through the substrate 346 and coating 348 along the path 350 through both layers. Permeation is regarded as a thermodynamic, thus relatively slow, process.


Permeation measurements are very slow, as the permeating gas must past entirely through an unbroken wall of the plastic article. In the case of evacuated blood collection tubes, a measurement of permeation of gas through its wall is conventionally used as a direct indication of the propensity of the vessel to lose vacuum over time, but commonly is an extremely slow measurement, commonly requiring a test duration of six days, thus not fast enough to support on-line coating inspection. Such testing is ordinarily used for off-line testing of a sample of vessels.


Permeation testing also is not a very sensitive measurement of the barrier efficacy of a thin coating on a thick substrate. Since all the gas flow is through both the coating and the substrate, variations in flow through the thick substrate will introduce variation that is not due to the barrier efficacy of the coating per se.


Surface diffusion and outgassing are synonyms. Each term refers to fluid initially adsorbed on or absorbed in a wall 346, such as the wall of a vessel, and caused to pass into the adjacent space by some motivating force, such as drawing a vacuum (creating air movement indicated by the arrow 352 of FIG. 10) within a vessel having a wall to force fluid out of the wall into the interior of the vessel. Outgassing or diffusion is regarded as a kinetic, relatively quick process. It is contemplated that, for a wall 346 having substantial resistance to permeation along the path 350, outgassing will quickly dislodge the molecules such as 354 that are closest to the interface 356 between the wall 346 and the barrier layer 348. This differential outgassing is suggested by the large number of molecules such as 354 near the interface 356 shown as outgassing, and by the large number of other molecules such as 358 that are further from the interface 356 and are not shown as outgassing.


DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present disclosure will now be described more fully with reference to the accompanying drawings, in which several embodiments are shown. This disclosure can, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth here. Rather, these embodiments are examples of the disclosure, which has the full scope indicated by the language of the claims. Like numbers refer to like or corresponding elements throughout.



FIGS. 1, 2, and 4 show a method for processing a vessel 80 to provide a coating or layer. The method can be carried out as follows.


A vessel 80 can be provided having an opening 82 and a wall 86 defining an interior surface 88. As one embodiment, the vessel 80 can be formed in and then removed from a mold. Quickly moving the vessel 80 from the mold 22 to the vessel port 92 reduces the dust or other impurities that can reach the surface 88 and occlude or prevent adhesion of the barrier or other type of coating 90. Also, the sooner a vacuum is drawn on the vessel 80 after it is made, the less chance any particulate impurities have of adhering to the interior surface 88.


The substrate or vessel wall can comprise glass or a polymer, for example a polycarbonate polymer, an olefin polymer, a cyclic olefin copolymer, a polypropylene polymer, a polyester polymer, a polyethylene terephthalate polymer or a combination of any two or more of these.


A vessel holder such as 50 comprising a vessel port 92 can be provided. The opening 82 of the vessel 80 can be seated on the vessel port 92. Before, during, or after seating the opening 82 of the vessel 80 on the vessel port 92, the vessel holder such as 40 (for example in FIG. 3) can be transported into engagement with one or more of the bearing surfaces 220-240 to position the vessel holder 40 with respect to the processing device or station such as 24.


One, more than one, or all of the processing stations such as 24-34, as illustrated by the station 24 shown in FIG. 3, can include a bearing surface, such as one or more of the bearing surfaces 220, 222, 224, 226, 228, 230, 232, 234, 236, 238, or 240, for supporting one or more vessel holders such as 40 in a predetermined position while processing the interior surface 88 of the seated vessel 80 at the processing station or device such as 24. These bearing surfaces can be part of stationary or moving structure, for example tracks or guides that guide and position the vessel holder such as 40 while the vessel is being processed. For example, the downward-facing bearing surfaces 222 and 224 locate the vessel holder 40 and act as a reaction surface to prevent the vessel holder 40 from moving upward when the probe 108 is being inserted into the vessel holder 40. The reaction surface 236 locates the vessel holder and prevents the vessel holder 40 from moving to the left while a vacuum source 98 (per FIG. 2) is seated on the vacuum port 96. The bearing surfaces 220, 226, 228, 232, 238, and 240 similarly locate the vessel holder 40 and prevent horizontal movement during processing. The bearing surfaces 230 and 234 similarly locate the vessel holder such as 40 and prevent it from moving vertically out of position. Thus, a first bearing surface, a second bearing surface, a third bearing surface, or more can be provided at each of the processing stations such as 24-34.


The interior surface 88 of the seated vessel 80 can be processed via the vessel port 92 at the first processing station, which can be, as one example, the barrier application or other type of coating station 28 shown in FIG. 2. In the apparatus of FIG. 1, the vessel coating station 28 can be, for example, a PECVD apparatus as further described below, operated under suitable conditions to deposit a SiOx barrier or other type of coating 90 on the interior surface 88 of a vessel 80, as shown in FIG. 2.


Referring especially to FIGS. 1 and 2, the processing station 28 can include an electrode 160 fed by a radio frequency power supply 162 for providing an electric field for generating plasma within the vessel 80 during processing. In this embodiment, the probe 108 is also electrically conductive and is grounded, thus providing a counter-electrode within the vessel 80. Alternatively, in any embodiment the outer electrode 160 can be grounded and the probe 108 directly connected to the power supply 162.


In the embodiment of FIG. 2, the outer electrode 160 can either be generally cylindrical or a generally U-shaped elongated channel as illustrated in FIG. 2. Each illustrated embodiment has one or more sidewalls, such as 164 and 166, and optionally a top end 168, disposed about the vessel 80 in close proximity.


The first processing device such as the probe 108 can be moved into operative engagement with the vessel holder 50, or vice versa. The interior surface 88 of the seated vessel 80 is processed via the vessel port 92 using the first processing device or probe 108.


The barrier layer can be a full or partial coating of any of the presently described barrier layers.


The thickness of this and other coatings can be measured, for example, by transmission electron microscopy (TEM).


The TEM can be carried out, for example, as follows. Samples can be prepared for Focused Ion Beam (FIB) cross-sectioning in two ways. Either the samples can be first coated with a thin layer of carbon (50-100 nm thick) and then coated with a sputtered layer of platinum (50-100 nm thick) using a K575X Emitech coating system, or the samples can be coated directly with the protective sputtered Pt layer. The coated samples can be placed in an FEI FIB200 FIB system. An additional layer of platinum can be FIB-deposited by injection of an oregano-metallic gas while rastering the 30 kV gallium ion beam over the area of interest. The area of interest for each sample can be chosen to be a location half way down the length of the syringe barrel. Thin cross sections measuring approximately 15 μm (“micrometers”) long, 2 μm wide and 15 μm deep can be extracted from the die surface using a proprietary in-situ FIB lift-out technique. The cross sections can be attached to a 200 mesh copper TEM grid using FIB-deposited platinum. One or two windows in each section, measuring 8 μm wide, can be thinned to electron transparency using the gallium ion beam of the FEI FIB.


Cross-sectional image analysis of the prepared samples can be performed utilizing either a Transmission Electron Microscope (TEM), or a Scanning Transmission Electron Microscope (STEM), or both. All imaging data can be recorded digitally. For STEM imaging, the grid with the thinned foils can be transferred to a Hitachi HD2300 dedicated STEM. Scanning transmitted electron images can be acquired at appropriate magnifications in atomic number contrast mode (ZC) and transmitted electron mode (TE). The following instrument settings can be used.


















Instrument
Scanning Transmission




Electron Microscope



Manufacturer/Model
Hitachi HD2300



Accelerating Voltage
200 kV



Objective Aperture
#2



Condenser Lens 1 Setting
1.672



Condenser Lens 2 Setting
1.747



Approximate Objective Lens Setting
5.86



ZC Mode Projector Lens
1.149



TE Mode Projector Lens
0.7



Image Acquisition



Pixel Resolution
1280 × 960



Acquisition Time
20 sec.(×4)










For TEM analysis the sample grids can be transferred to a Hitachi HF2000 transmission electron microscope. Transmitted electron images can be acquired at appropriate magnifications. The relevant instrument settings used during image acquisition can be those given below.















Instrument
Transmission Electron Microscope


Manufacturer/Model
Hitachi HF2000


Accelerating Voltage
200 kV


Condenser Lens 1
0.78


Condenser Lens 2
0


Objective Lens
6.34


Condenser Lens Aperture
#1


Objective Lens Aperture for imaging
#3


Selective Area Aperture for SAD
N/A









The vessel holder 50 and seated vessel 80 can be transported from the first processing station 28 to a second processing station, for example the processing station 32. The interior surface 88 of the seated vessel 80 can be processed via the vessel port 92 at the second processing station such as 32.


One suitable processing station such as 32 is provided to employ reflectometry to measure the integrity of the barrier coating. Referring to FIGS. 18-21, apparatus and methods for vessel inspection are shown, employing reflectometry analysis as disclosed for example in US 2007/0229844 A1. This analysis can be carried out in any of the inspection stations. The apparatus includes a vessel, in this case a thermoplastic syringe barrel defining a generally cylindrical vessel wall 710. Note that a thermoplastic syringe barrel is not disclosed in US 2007/0229844 A1. The vessel wall 710 can be any part of any of the vessels defined in this description. The thermoplastic vessel wall 710 has an outside surface 712, an inside surface 714, and a CVD coating 716 on at least one of the inside and outside surfaces 712, 714. The CVD coating can be any of the lubricity, barrier, or hydrophobic coatings defined in this description. The vessel wall 710 and the CVD coating 716 optionally have different indices of refraction. This is useful so energy can be reflected from an interface between the vessel wall 710 and the CVD coating 716.


Electromagnetic energy 718 generated from an energy source 720, which can be a laser or a non-coherent energy source, can be impinged on the CVD coating 716. Various arrangements can be used.


In the embodiment of FIG. 18, the impinging energy 718 is polychromatic and passes through a partially silvered mirror 734 which transmits a portion of the energy 718, as illustrated, and also reflects a portion of the energy 718 toward the bottom of the figure. The reflected energy is not used in the illustrated apparatus, although detection apparatus for analyzing the color, intensity, or other features of the impinging energy 718 optionally can be provided in line with the beam of reflected energy.


The energy 718 is focused by a lens 736 to be concentrated at a focal point 738. The energy 722 is reflected from the CVD coating. The reflected energy 722 normally will be a different color from the impinging energy 718, as certain wavelengths are reinforced and others are canceled to form an interference pattern due to reflection of the impinging energy 718 from different points, such as the near and far surfaces of the coating 716.


The reflected energy 722 follows a reverse path through the lens 736, is partially reflected upward by the partially silvered mirror 734 (and in this case the transmitted portion is not used), and is directed to apparatus generally including a lens 740, a spectrometer 742, and a multichannel detector 744 for providing data indicative of the intensity of different detected wavelengths of the reflected energy 722. The data is input to the processor 730, which is programmed to determine the color of the reflected energy 722, and from that the thickness of the coating 718 at the point of measurement.


The embodiment of FIG. 19 is a different arrangement for making an imagewise record or map of the reflected light 722 from different portions of the coating 716, showing at least one artifact 732 of a discontinuity in the CVD coating 716 (if such a discontinuity is present and detectable). Two illustrations of such maps are 724 and 726.


The map 724 is a one-dimensional map showing the thickness of the coating 716 along a line scanned by relative movement between the focal point 738 and the vessel wall 710, which can either be due to rotation or axial movement of the vessel 710 or focal point 738 relative to each other. To inspect multiple scan lines or the entire vessel, multiple such scans can be made. If the scanned line is axial, the remainder of the vessel is scanned by progressively rotating the vessel wall 710 between each scan to scan a circumferentially displaced line. Alternatively the scanned line can be circumferential and the vessel can progressively be moved axially to scan additional lines needed to cover the entire vessel.


The map 726 is a two-dimensional map, showing by color or shading differences the thickness of the coating 716 over an area, which optionally can be a cylindrical section of the vessel wall 710 or a greater or lesser area of the entire vessel. For example, a dark artifact 732 is shown. In the event of a pinhole or other break in the coating 716, it is contemplated that little or no light will be reflected back from the coating, leaving as an artifact on the map 726 a dark spot where little or no light is reflected back, corresponding to the position of the pinhole. Since this artifact represents a region of very low intensity of all wavelengths, it optionally can be detected without resolving the reflected energy 722 by wavelength.


The present reflectometry method for detecting discontinuities in a chemical vapor deposition CVD coating can be carried out as follows.


A thermoplastic vessel wall 710 can be provided having an outside surface 712, an inside surface 714, and a CVD coating 716 on at least one of the inside and outside surfaces 712, 714. The vessel wall 710 and the CVD coating 716 have different indices of refraction, which is a precondition for providing reflected light from both interfaces with the coating 716—the interface between the wall 710 and the coating 716, and the interface between the coating 716 and the space within the vessel wall 710. It is contemplated that reflections from these respective interfaces occur due to this difference in indices of refraction. The respective reflections from these two interfaces produce an interference pattern in the reflected energy 722, which allows a calculation of the thickness of the coating 718.


The method is carried out by impinging electromagnetic energy 718 from an energy source 720 on multiple positions of the CVD coating 716 under conditions effective to cause energy 722 to reflect from the multiple positions of the CVD coating 716. The reflected energy 722 is analyzed to determine whether the reflected energy 722 includes at least one artifact 732 of a discontinuity in the CVD coating 716.


In one optional variation of any embodiment of the method, the energy source 720 provides energy 718 within at least a portion of the wavelength range from 40 to 1100 nm.


Another optional variation of any embodiment of the method includes mapping the reflected energy 722 to the multiple positions of the CVD coating 716, producing a map 724 or 726.


Another optional variation of any embodiment of the method includes recording the map 724 or 726 of the reflected energy 722.


Another optional variation of any embodiment of the method includes recording the map 724 or 726 by a charge-coupled device image sensor 728 configured for converting the recorded map 724 or 726 to a data stream.


In another optional variation of any embodiment of the method, the analyzing step is carried out by a processor 730 programmed for analyzing the data stream to find at least one artifact 732 representing a discrete area of the image of contrasting brightness relative to the background of the discrete area, representing a discontinuity.


Another optional variation of any embodiment of the method includes determining the area of the discontinuity.


Another optional variation of any embodiment of the method includes configuring the processor 730 to determine the aggregate area of all discontinuities detected in the CVD coating 716.


In another optional variation of any embodiment of the method the impinging energy 718 is polychromatic.


In another optional variation of any embodiment of the method the reflected energy 722 contains interference patterns resulting from its interaction with the CVD coating 716.


In another optional variation of any embodiment of the method the color of the reflected energy 722 differs from the color of the impinging energy 718.


In another optional variation of any embodiment of the method the vessel wall 710 is at least partially transparent.


In another optional variation of any embodiment of the method the vessel wall 710 is positioned such that the impinging energy 718 passes through the vessel wall 710 to reach the CVD coating 716. This is desirable because the method optionally can be carried out without inserting any structure within any part of the vessel.


In another optional variation of any embodiment of the method the vessel wall 710 is positioned such that the reflected energy 722 passes through the vessel wall 710 before the reflected energy 722 is analyzed. This is desirable because the method optionally can be carried out without inserting any structure within any part of the vessel.


In another optional variation of any embodiment of the method the vessel wall 710 is positioned such that the impinging energy 718 impinges inwardly on the outside of the vessel wall 710 and reflects from a CVD coating 716 positioned on the inside of the vessel wall 710. Again, this is desirable because the method optionally can be carried out without inserting any structure within any part of the vessel, even for a coating disposed on the inside surface of the vessel wall.


Many variations of the basic structure described above and shown in FIGS. 18-21 are contemplated, including the following variations which are usable separately or together in practicing the present technology.


A rule of thumb is that the X-ray, gamma ray, or electron beam energy source 720 desirably can have a suitable wavelength of the infrared, visible light, ultraviolet light, X-ray, gamma ray, or electron beam energy on the same order of magnitude as the thickness of the coating to be measured. Measurement of very thin coatings, such as those having a thickness of 5 to 1000 nm, optionally 10 to 500 nm, optionally 10 to 500 nm, optionally 10 to 200 nm, optionally 20 to 200 nm, optionally 20 to 100 nm, is contemplated.


The discontinuity detector 730 can be a computer processor programmed for analyzing the data stream to find at least one artifact representing a discrete area of the image of contrasting brightness relative to the background of the discrete area.


One option is that the discontinuity detector 730 can be configured to determine the area of an artifact. Another option is that the discontinuity detector 730 can be configured to determine the aggregate area of one or more artifacts. Determining the areas of artifacts may be important if the CVD coating 720 is intended to be a gas barrier coating, such as the SiOx coatings described in this specification, and the inspection method is being used to determine the continuity of the coating. If the artifact is a break in the coating, such as a pinhole, the area of the artifact(s) can be used to provide an indication of the gas leakage rate of the discontinuity.


Commercial equipment analogous to that shown in FIGS. 18 and 19, contemplated for practicing the present disclosure, is available from RAP.ID Particle Systems GmbH, Berlin, Germany. Such equipment can be modified by a person skilled in the art to specifically look for discontinuities, instead of or additional to mapping the coating thickness.


Still another processing device such as a light source 170 (FIG. 4) can be provided for further processing vessels such as 80. A vessel 80 is provided having an opening 82 and a wall 86 defining an interior surface 88. A vessel holder 50 is provided comprising a vessel port 92. The opening 82 of the vessel 80 is seated on the vessel port 92.


The other processing device such as 170 (FIG. 4) is then moved into operative engagement with the vessel holder 50, or vice versa. The interior surface 88 of the seated vessel 80 is processed via the vessel port 92 using the other processing device such as the light source 170.


Optionally, any number of additional processing steps can be provided. For example, a yet another processing device 34 can be provided for processing vessels 80. The processing device 34 can be moved into operative engagement with the vessel holder 50, or vice versa. The interior surface of the seated vessel 80 can be processed via the vessel port 92 using the processing device 34.


VI. Vessel Inspection


A vessel processing method is contemplated for any of the inspection stations in which the interior surface of the vessel is inspected for defects before and/or after applying the barrier coating or other coatings.


In an embodiment, the station or device 26 (which can also function as the station or device 28 for applying a coating) can be used as follows for barometric vessel inspection of the vessel as molded. With either or both of the valves 136 and 148 open, the vessel 80 can be evacuated to a desired degree, optionally to a very low pressure such as less than 10 Torr, optionally less than 1 Torr. Whichever of the valves 136 and 148 is initially open can then be closed, isolating the evacuated interior 154 of the vessel 80 and the pressure gauge 152 from ambient conditions and from the vacuum source 98. The change in pressure over a measurement time, whether due to the ingress of gas through the vessel wall or outgassing from the material of the wall and/or a coating on the vessel wall, can then be sensed and used to calculate the rate of ingress of ambient gas into the vessel 80 as mounted on the vessel holder 44. For the present purpose, outgassing is defined as the release of adsorbed or occluded gases or water vapor from the vessel wall, optionally in at least a partial vacuum.


Another optional modification can be to provide the ambient gas at a higher pressure than atmospheric pressure. This again can increase the rate of gas transfer through a barrier or other type of layer, providing a measurable difference in a shorter time than if a lower ambient pressure were provided. Or, gas can be introduced into the vessel 80 at a higher than atmospheric pressure, again increasing the transfer rate through the wall 86.


Optionally, the vessel inspection at the station or by the device 26 can be modified by providing an inspection gas, such as helium, on an upstream side with respect to the substrate, either within or outside the vessel 80, and detecting it on the downstream side. A low-molecular-weight gas, such as hydrogen, or a less expensive or more available gas, such as oxygen or nitrogen, can also be used as an inspection gas.


Helium is contemplated as an inspection gas that can increase the rate of leak or permeation detection, as it will pass through an imperfect barrier or other type of coating, or past a leaking seal, much more quickly than the usual ambient gases such as nitrogen and oxygen in ordinary air. Helium has a high transfer rate through many solid substrates or small gaps because it: (1) is inert, so it is not adsorbed by the substrate to any great degree, (2) is not ionized easily, so its molecules are very compact due to the high level of attraction between its electrons and nucleus, and (3) has a molecular weight of 4, as opposed to nitrogen (molecular weight 28) and oxygen (molecular weight 32), again making the molecules more compact and easily passed through a porous substrate or gap. Due to these factors, helium will travel through a barrier having a given permeability much more quickly than many other gases. Also, the atmosphere contains an extremely small proportion of helium naturally, so the presence of additional helium can be relatively easy to detect, particularly if the helium is introduced within the vessel 80 and detected outside the vessel 80 to measure leakage and permeation. The helium can be detected by a pressure drop upstream of the substrate or by other means, such as spectroscopic analysis of the downstream gas that has passed through the substrate.


An example of barometric vessel inspection by determining the oxygen concentration from O2 fluorescence detection follows.


An Excitation Source (Ocean Optics USB-LS-450 Pulsed Blue LED), fiber assembly (Ocean Optics QBIF6000-VIS-NIR), a spectrometer (USB4000-FL Fluorescence Spectrometer), an oxygen sensor probe (Ocean Optics FOXY-R), and a vacuum feed through adaptor (like VFT-1000-VIS-275) connected to a vacuum source are used. A vacuum can be applied to remove the ambient air, and when the vessel is at a defined pressure any oxygen content that has leaked or permeated in to refill the vessel from the ambient air can be determined using the detection system. A coated tube replaces the uncoated tube and O2 concentration measurement can be taken. The coated tube will demonstrate reproducibly different atmospheric oxygen content than the uncoated sample due to differential O2 surface absorption on the coated tube (an SiOx surface, versus the uncoated PET or glass surface) and/or a change in O2 diffusion rate from the surface. Detection time can be less than one second.


These barometric methods should not be considered limited to a specific gas sensed (helium detection or other gases can be considered) or a specific apparatus or arrangement.


Another station or device shown in FIG. 1 is a post-coating processing station or device 30, which can be configured to inspect the interior surface of a vessel 80 for defects, as by measuring the air pressure loss or mass flow rate or volume flow rate through a vessel wall or outgassing of a vessel wall to be sure the vessel has been coated. The post-coating device 30 can operate similarly to the pre-coating inspection device 26, except that better performance (less leakage or permeation at given process conditions) optionally can be required to pass the inspection provided by the device 30, since in the illustrated embodiment a barrier or other type of coating has been applied by the station or device 28 before the station or device 30 is reached. Less leakage or permeation at the station or device 30 indicates that the barrier coating is functioning at least to a degree.


An outgassing test can be carried out by the device 30, for example. An outgassing test is described in U.S. Pat. No. 7,985,188, incorporated by reference above, as well as by FIGS. 10-13 and 17 and the accompanying text of the present disclosure. The outgassing test is specifically contemplated for use with a reflectometry test as described in this specification to measure the respective characteristics of particular vessels being processed.


In the case of a coated wall, the inventors have found that diffusion/outgassing can be used to determine the coating integrity. Optionally, a pressure differential can be provided across the barrier layer by at least partially evacuating the lumen or interior space of the vessel. This can be done, for example, by connecting the lumen via a duct to a vacuum source to at least partially evacuate the lumen. For example, referring to FIG. 10, an uncoated PET wall 346 of a vessel that has been exposed to ambient air will outgas from its interior surface a certain number of oxygen and other gas molecules such as 354 for some time after a vacuum is drawn. If the same PET wall is coated on the interior with a barrier coating 348, the barrier coating will stop, slow down, or reduce this outgassing. This is true for example of an SiOx barrier coating 348, which outgasses less than a plastic surface. By measuring this differential of outgassing between coated and uncoated PET walls, the barrier effect of the coating 348 for the outgassed material can be rapidly determined.


If the barrier coating 348 is imperfect, due to known or theoretical holes, cracks, gaps or areas of insufficient thickness or density or composition, the PET wall will outgas preferentially through the imperfections, thus increasing the total amount of outgassing. The primary source of the collected gas is from the dissolved gas or vaporizable constituents in the (sub)surface of the plastic article next to the coating, not from outside the article. The amount of outgassing beyond a basic level (for example the amount passed or released by a standard coating with no imperfections, or the least attainable degree of imperfection, or an average and acceptable degree of imperfection) can be measured in various ways to determine the integrity of the coating.


The measurement can be carried out, for example, by providing an outgassing measurement cell communicating between the lumen and the vacuum source.


The measurement cell can implement any of a variety of different measurement technologies. One example of a suitable measurement technology is micro-flow technology. For example, the mass flow rate of outgassed material can be measured. The measurement can be carried out in a molecular flow mode of operation. An exemplary measurement is a determination of the volume of gas outgassed through the barrier layer per interval of time.


The outgassed gas on the lower-pressure side of the barrier layer can be measured under conditions effective to distinguish the presence or absence of the barrier layer. Optionally, the conditions effective to distinguish the presence or absence of the barrier layer include a test duration of less than one minute, or less than 50 seconds, or less than 40 seconds, or less than 30 seconds, or less than 20 seconds, or less than 15 seconds, or less than 10 seconds, or less than 8 seconds, or less than 6 seconds, or less than 4 seconds, or less than 3 seconds, or less than 2 seconds, or less than 1 second.


Optionally, the measurement of the presence or absence of the barrier layer can be confirmed to at least a six-sigma level of certainty within any of the time intervals identified above.


Optionally, the outgassed gas on the lower-pressure side of the barrier layer is measured under conditions effective to determine the barrier improvement factor (BIF) of the barrier layer, compared to the same material without a barrier layer. A BIF can be determined, for example, by providing two groups of identical containers, adding a barrier layer to one group of containers, testing a barrier property (such as the rate of outgassing in micrograms per minute or another suitable measure) on containers having a barrier, doing the same test on containers lacking a barrier, and taking a ratio of the properties of the materials with versus without a barrier. For example, if the rate of outgassing through the barrier is one-third the rate of outgassing without a barrier, the barrier has a BIF of 3.


Optionally, outgassing of a plurality of different gases can be measured, in instances where more than one type of gas is present, such as both nitrogen and oxygen in the case of outgassed air. Optionally, outgassing of substantially all or all of the outgassed gases can be measured. Optionally, outgassing of substantially all of the outgassed gases can be measured simultaneously, as by using a physical measurement like the combined mass flow rate of all gases.


Measuring the number or partial pressure of individual gas species (such as oxygen or helium) outgassed from the sample can be done more quickly than barometric testing, but the rate of testing is reduced to the extent that only a fraction of the outgassing is of the measured species. For example, if nitrogen and oxygen are outgassed from the PET wall in the approximately 4:1 proportion of the atmosphere, but only oxygen outgassing is measured, the test would need to be run five times as long as an equally sensitive test (in terms of number of molecules detected to obtain results of sufficient statistical quality) that measures all the species outgassed from the vessel wall.


For a given level of sensitivity, it is contemplated that a method that accounts for the volume of all species outgassed from the surface will provide the desired level of confidence more quickly than a test that measures outgassing of a specific species, such as oxygen atoms. Consequently, outgassing data having practical utility for in-line measurements can be generated. Such in-line measurements can optionally be carried out on every vessel manufactured, thus reducing the number of idiosyncratic or isolated defects and potentially eliminating them (at least at the time of measurement).


In a practical measurement, a factor changing the apparent amount of outgassing is leakage past an imperfect seal, such as the seal of the vessel seated on a vacuum receptacle as the vacuum is drawn in the outgassing test. Leakage means a fluid bypassing a solid wall of the article, for example fluid passing between a blood tube and its closure, between a syringe plunger and syringe barrel, between a container and its cap, or between a vessel mouth and a seal upon which the vessel mouth is seated (due to an imperfect or mis-seated seal). The word “leakage” is usually indicative of the movement of gas/gas through an opening in the plastic article.


Leakage and (if necessary in a given situation) permeation can be factored into the basic level of outgassing, so an acceptable test result assures both that the vessel is adequately seated on the vacuum receptacle (thus its seated surfaces are intact and properly formed and positioned), the vessel wall does not support an unacceptable level of permeation (thus the vessel wall is intact and properly formed), and the coating has sufficient barrier integrity.


Outgassing can be measured in various ways, as by barometric measurement (measuring the pressure change within the vessel in a given amount of time after the initial vacuum is drawn) or by measuring the partial pressure or flow rate of gas outgassed from the sample. Equipment is available that measures a mass flow rate in a molecular flow mode of operation. An example of commercially available equipment of this type employing Micro-Flow Technology is available from ATC, Inc., Indianapolis, Ind. See U.S. Pat. Nos. 5,861,546, 6,308,556, 6,584,828 and EP1356260, which are incorporated by reference here, for a further description of this known equipment. See also Example 3 in this specification, showing an example of outgassing measurement to distinguish barrier coated polyethylene terephthalate (PET) tubes from uncoated tubes very rapidly and reliably.


For a vessel made of polyethylene terephthalate (PET), the microflow rate is much different for the SiOx coated surface versus an uncoated surface. For example, in Working Example 3 in this specification, the microflow rate for PET was 8 or more micrograms after the test had run for 30 seconds, as shown in FIG. 12. This rate for uncoated PET was much higher than the measured rate for SiOx-coated PET, which was less than 6 micrograms after the test had run for 30 sec, again as shown in FIG. 12.


One possible explanation for this difference in flow rate is that uncoated PET contains roughly 0.7 percent equilibrium moisture; this high moisture content is believed to cause the observed high microflow rate. With an SiOx-coated PET plastic, the SiOx coating can have a higher level of surface moisture than an uncoated PET surface. Under the testing conditions, however, the barrier coating is believed to prevent additional desorption of moisture from the bulk PET plastic, resulting in a lower microflow rate. The microflow rates of oxygen or nitrogen from the uncoated PET plastic versus the SiOx coated PET would also be expected to be distinguishable.


Modifications of the above test for a PET tube might be appropriate when using other materials. For example, polyolefin plastics tend to have little moisture content. An example of a polyolefin having low moisture content is TOPAS® cyclic olefin copolymer (COC), having an equilibrium moisture content (0.01 percent) and moisture permeation rate much lower than for PET. In the case of COC, uncoated COC plastic can have microflow rate similar to, or even less than, SiOx-coated COC plastic. This is most likely due to the higher surface moisture content of the SiOx-coating and the lower equilibrium bulk moisture content and lower permeation rate of an uncoated COC plastic surface. This makes differentiation of uncoated and coated COC articles more difficult.


The present disclosure shows that exposure of the to-be-tested surfaces of COC articles to moisture (uncoated and coated) results in improved and consistent microflow separation between uncoated and SiOx-coated COC plastics. This is shown in Example 9 in this specification and FIG. 17. The moisture exposure can be simply exposure to relative humidity ranging from 35%-100%, either in a controlled relative humidity room or direct exposure to a warm (humidifier) or cold (vaporizer) moisture source, with the latter preferred.


While the validity and scope of the disclosure are not limited according to the accuracy of this theory, it appears the moisture doping or spiking of the uncoated COC plastic increases its moisture or other outgassable content relative to the already saturated SiOx-coated COC surface. This can also be accomplished by exposing the coated and uncoated tubes to other gases including oxygen, nitrogen, or their mixtures, for example air.


Thus, before measuring the outgassed gas, the barrier layer can be contacted with water, for example water vapor. Water vapor can be provided, for example, by contacting the barrier layer with air at a relative humidity of 35% to 100%, alternatively 40% to 100%, alternatively 40% to 50%. Instead of or in addition to water, the barrier layer can be contacted with oxygen, nitrogen or a mixture of oxygen and nitrogen, for example ambient air. The contacting time can be from 10 seconds to one hour, alternatively from one minute to thirty minutes, alternatively from 5 minutes to 25 minutes, alternatively from 10 minutes to 20 minutes.


Alternatively, the wall 346 which will be outgassing can be spiked or supplemented from the side opposite a barrier layer 348, for example by exposing the left side of the wall 346 as shown in FIG. 5 to a material that will ingas into the wall 346, then outgas either to the left or to the right as shown in FIG. 10. Spiking a wall or other material such as 346 from the left by ingassing, then measuring outgassing of the spiked material from the right (or vice versa) is distinguished from permeation measurement because the material spiked is within the wall 346 at the time outgassing is measured, as opposed to material that travels the full path 350 through the wall at the time gas presented through the coating is being measured. The ingassing can take place over a long period of time, as one embodiment before the coating 348 is applied, and as another embodiment after the coating 348 is applied and before it is tested for outgassing.


Another potential method to increase separation of microflow response between uncoated and SiOx-coated plastics is to modify the measurement pressure and/or temperature. Increasing the pressure or decreasing the temperature when measuring outgassing can result in greater relative binding of water molecules in SiOx-coated COC than in uncoated COC. Thus, the outgassed gas can be measured at a pressure from 0.1 Torr to 100 Torr, alternatively from 0.2 Torr to 50 Torr, alternatively from 0.5 Torr to 40 Torr, alternatively from 1 Torr to 30 Torr, alternatively from 5 Torr to 100 Torr, alternatively from 10 Torr to 80 Torr, alternatively from 15 Torr to 50 Torr. The outgassed gas can be measured at a temperature from 0° C. to 50° C., alternatively from 0° C. to 21° C., alternatively from 5° C. to 20° C.


Another way contemplated for measuring outgassing, in any embodiment of the present disclosure, is to employ a microcantilever measurement technique. Such a technique is contemplated to allow measurement of smaller mass differences in outgassing, potentially on the order of 10−12 g. (picograms) to 10−15 g. (femtograms). This smaller mass detection permits differentiation of coated versus uncoated surfaces as well as different coatings in less than a second, optionally less than 0.1 sec., optionally a matter of microseconds.


Microcantilever (MCL) sensors in some instances can respond to the presence of an outgassed or otherwise provided material by bending or otherwise moving or changing shape due to the absorption of molecules. Microcantilever (MCL) sensors in some instances can respond by shifting in resonance frequency. In other instances, the MCL sensors can change in both these ways or in other ways. They can be operated in different environments such as gaseous environment, liquids, or vacuum. In gas, microcantilever sensors can be operated as an artificial nose, whereby the bending pattern of a microfabricated array of eight polymer-coated silicon cantilevers is characteristic of the different vapors from solvents, flavors, and beverages. The use of any other type of electronic nose, operated by any technology, is also contemplated.


Several MCL electronic designs, including piezoresistive, piezoelectric, and capacitive approaches, have been applied and are contemplated to measure the movement, change of shape, or frequency change of the MCLs upon exposure to chemicals.


One specific example of measuring outgassing can be carried out as follows. At least one microcantilever is provided that has the property, when in the presence of an outgassed material, of moving or changing to a different shape. The microcantilever is exposed to the outgassed material under conditions effective to cause the microcantilever to move or change to a different shape. The movement or different shape is then detected.


As one example, the movement or different shape can be detected by reflecting an energetic incident beam from a portion of the microcantilever that moves or changes shape, before and after exposing the microcantilever to outgassing, and measuring the resulting deflection of the reflected beam at a point spaced from the cantilever. The shape is optionally measured at a point spaced from the cantilever because the amount of deflection of the beam under given conditions is proportional to the distance of the point of measurement from the point of reflection of the beam.


Several suitable examples of an energetic incident beam are a beam of photons, a beam of electrons, or a combination of two or more of these. Alternatively, two or more different beams can be reflected from the MCL along different incident and/or reflected paths, to determine movement or shape change from more than one perspective. One specifically contemplated type of energetic incident beam is a beam of coherent photons, such as a laser beam. “Photons” as discussed in this specification are inclusively defined to include wave energy as well as particle or photon energy per se.


An alternative example of measurement takes advantage of the property of certain MCLs of changing in resonant frequency when encountering an environmental material in an effective amount to accomplish a change in resonant frequency. This type of measurement can be carried out as follows. At least one microcantilever is provided that resonates at a different frequency when in the presence of an outgassed material. The microcantilever can be exposed to the outgassed material under conditions effective to cause the microcantilever to resonate at a different frequency. The different resonant frequency is then detected by any suitable means.


As one example, the different resonant frequency can be detected by inputting energy to the microcantilever to induce it to resonate before and after exposing the microcantilever to outgassing. The differences between the resonant frequencies of the MCL before and after exposure to outgassing are determined. Alternatively, instead of determining the difference in resonant frequency, an MCL can be provided that is known to have a certain resonant frequency when in the presence of a sufficient concentration or quantity of an outgassed material. The different resonant frequency or the resonant frequency signaling the presence of a sufficient quantity of the outgassed material is detected using a harmonic vibration sensor.


As one example of using MCL technology for measuring outgassing, an MCL device can be incorporated into a quartz vacuum tube linked to a vessel and vacuum pump. A harmonic vibration sensor using a commercially available piezoresistive cantilever, Wheatstone bridge circuits, a positive feedback controller, an exciting piezoactuator and a phase-locked loop (PLL) demodulator can be constructed. See, e.g.,

    • Hayato Sone, Yoshinori Fujinuma and Sumio Hosaka Picogram Mass Sensor Using Resonance Frequency Shift of Cantilever, Jpn. J. Appl. Phys. 43 (2004) 3648;
    • Hayato Sone, Ayumi Ikeuchi, Takashi Izumi, Haruki Okano and Sumio Hosaka Femtogram Mass Biosensor Using Self-Sensing Cantilever for Allergy Check, Jpn. J. Appl. Phys. 43 (2006) 2301).


      To prepare the MCL for detection, one side of the microcantilever can be coated with gelatin. See, e.g., Hans Peter Lang, Christoph Gerber, STM and AFM Studies on (Bio)molecular Systems: Unravelling the Nanoworld, Topics in Current Chemistry, Volume 285/2008. Water vapor desorbing from the evacuated coated vessel surface binds with the gelatin, causing the cantilever to bend and its resonant frequency to change, as measured by laser deflection from a surface of the cantilever. The change in mass of an uncoated vs. coated vessel is contemplated to be resolvable in fractions of seconds and be highly reproducible. The articles cited above in connection with cantilever technology are incorporated here by reference for their disclosures of specific MCLs and equipment arrangements that can be used for detecting and quantifying outgassed species.


Alternative coatings for moisture detection (phosphoric acid) or oxygen detection can be applied to MCLs in place of or in addition to the gelatin coating described above.


It is further contemplated that any of the presently contemplated outgassing test set-ups can be combined with an SiOx coating station. In such an arrangement, the measurement cell 362 could be as illustrated above, using the main vacuum channel for PECVD as the bypass 386. In an embodiment, the measurement cell generally indicated as 362 of FIG. 11 can be incorporated in a vessel holder such as 50 in which the bypass channel 386 is configured as the main vacuum duct 94 and the measurement cell 362 is a side channel.


This combination of the measurement cell 362 with the vessel holder 50 would optionally allow the outgassing measurement to be conducted without breaking the vacuum used for PECVD. Optionally, the vacuum pump for PECVD would be operated for a short, optionally standardized amount of time to pump out some or all of the residual reactant gases remaining after the coating step (a pump-down of less than one Torr, with a further option of admitting a small amount of air, nitrogen, oxygen, or other gas to flush out or dilute the process gases before pumping down). This would expedite the combined processes of coating the vessel and testing the coating for presence and barrier level.


Many other applications for the presently described outgassing measurements and all the other described barrier measurement techniques will be evident to the skilled person after reviewing this specification.


The identity of a vessel 80 measured at two different stations or by two different devices can be ascertained by placing individual identifying characteristics, such as a bar code, other marks, or a radio frequency identification (RFID) device or marker, on each of the vessel holders 38-68 and matching up the identity of vessels measured at two or more different points about the endless conveyor shown in FIG. 1. Since the vessel holders can be reused, they can be registered in a computer database or other data storage structure as they reach the position of the vessel holder 40 in FIG. 1, just after a new vessel 80 has been seated on the vessel holder 40, and removed from the data register at or near the end of the process, for example as or after they reach the position of the vessel holder 66 in FIG. 1 and the processed vessel 80 is removed by the transfer mechanism 74.


A processing station or device 32 can be provided and configured to further inspect a vessel, for example a barrier or other type of coating applied to the vessel, for defects. One embodiment, the station or device 32 determines the optical source transmission of the coating, as a measurement of the thickness of the coating. The barrier or other type of coating, if suitably applied, can make the vessel 80 more transparent, even though additional material has been applied, as it provides a more uniform surface.


Other measures of the thickness of the coating are also contemplated, as by using interference measurements to determine the difference in travel distance between an energy wave that bounces off the inside of the coating 90 (interfacing with the atmosphere within the vessel interior 154) and an energy wave that bounces off the interior surface 88 of the vessel 80 (interfacing with the outside of the coating 90). As is well known, the difference in travel distance can be determined directly, as by measuring the time of arrival of the respective waves with high precision, or indirectly, as by determining what wavelengths of the incident energy are reinforced or canceled, in relation to the test conditions.


Another measurement technique that can be carried out to check coating integrity is an ellipsometric measurement on the device. In this case, a polarized laser beam can be projected either from the inside or the outside of the vessel 80. In the case of a laser beam projected from the inside, the laser beam can be pointed orthogonally at the surface and then either the transmitted or reflected beam can be measured. The change in beam polarity can be measured. Since a coating or treatment on the surface of the device will impact (change) the polarization of the laser beam, changes in the polarity can be the desired result. The changes in the polarity are a direct result of the existence of a coating or treatment on the surface and the amount of change is related to the amount of treatment or coating.


If the polarized beam is projected from the outside of the device, a detector can be positioned on the inside to measure the transmitted component of the beam (and the polarity determined as above). Or, a detector can be placed outside of the device in a position that can correspond to the reflection point of the beam from the interface between the treatment/coating (on the inside of the device). The polarity change(s) can then be determined as detailed above.


In addition to measuring optical properties and/or leak rates as described above, other probes and/or devices can be inserted into the inside of the device and measurements made with a detector apparatus. This apparatus is not limited by the measurement technique or method. Other test methods that employ mechanical, electrical, or magnetic properties, or any other physical, optical, or chemical property, can be utilized.


During the plasma treatment setup, an optical detection system optionally can be used to record the plasma emission spectrum (wavelength and intensity profile), which corresponds to the unique chemical signature of the plasma environment. This characteristic emission spectrum provides confirmation that the coating has been applied and treated. The system also offers a real-time precision measurement and data archive tool for each part processed.


Any of the above methods can include as a step inspecting the interior surface 88 of a vessel 80 for defects at a processing station such as 24, 26, 30, 32, or 34. Inspecting can be carried out, as at the stations 24, 32, and 34, by inserting a detection probe 172 into the vessel 80 via the vessel port 92 and detecting the condition of the vessel interior surface 88 or a barrier or other type of coating 90 using the probe 172. Inspecting can be carried out, as shown in FIG. 5, by radiating energy inward through the vessel wall 86 and vessel interior surface 88 and detecting the energy with the probe 172. Or, inspecting can be carried out by reflecting the radiation from the vessel interior surface 88 and detecting the energy with a detector located inside the vessel 80. Or, inspecting can be carried out by detecting the condition of the vessel interior surface 88 at numerous, closely spaced positions on the vessel interior surface.


Any of the above methods can include carrying out the inspecting step at a sufficient number of positions throughout the vessel interior surface 88 to determine that the barrier or other type of coating 90 will be effective to prevent the pressure within the vessel, when it is initially evacuated and its wall is exposed to the ambient atmosphere, from increasing to more than 20% of the ambient atmospheric pressure during a shelf life of a year.


Any of the above methods can include carrying out the inspecting step within an elapsed time of 30 or fewer seconds per vessel, or 25 or fewer seconds per vessel, or 20 or fewer seconds per vessel, or 15 or fewer seconds per vessel, or 10 or fewer seconds per vessel, or 5 or fewer seconds per vessel, or 4 or fewer seconds per vessel, or 3 or fewer seconds per vessel, or 2 or fewer seconds per vessel, or 1 or fewer seconds per vessel. This can be made possible, for example, by measuring the efficacy of the barrier or other type of coated vessel wall, which can include one measurement for the entire vessel 80, or by inspecting many or even all the points to be inspected in parallel, as by using the charge coupled device as the detector 172 shown or substitutable in FIGS. 3-5. The latter step can be used for detecting the condition of the barrier or other type of coating at numerous, closely spaced positions on the vessel interior surface 88 in a very short overall time.


In any embodiment of the method, a multi-point vessel inspection can be further expedited, if desired, by collecting data using a charge coupled device 172, transporting away the vessel 80 that has just been inspected, and processing the collected data shortly thereafter, while the vessel 80 is moving downstream. If a defect in the vessel 80 is later ascertained due to the data processing, the vessel 80 that is defective can be moved off line at a point downstream of the detection station such as 34 (FIG. 4).


In any of the above embodiments, the inspecting step can be carried out at a sufficient number of positions throughout the vessel 80 interior surface 88 to determine that the barrier or other type of coating 90 will be effective to prevent the initial vacuum level (i.e. initial reduction of pressure versus ambient) within the vessel 80, when it is initially evacuated and its wall 86 is exposed to the ambient atmosphere, from decreasing more than 20%, optionally more than 15%, optionally more than 10%, optionally more than 5%, optionally more than 2%, during a shelf life of at least 12 months, or at least 18 months, or at least two years.


The initial vacuum level can be a high vacuum, i.e. a remaining pressure of less than 10 Torr, or a lesser vacuum such as less than 20 Torr of positive pressure (i.e. the excess pressure over a full vacuum), or less than 50 Torr, or less than 100 Torr, or less than 150 Torr, or less than 200 Torr, or less than 250 Torr, or less than 300 Torr, or less than 350 Torr, or less than 380 Torr of positive pressure. The initial vacuum level of evacuated blood collection tubes, for example, is in many instances determined by the type of test the tube is to be used for, and thus the type and appropriate amount of a reagent that is added to the tube at the time of manufacture. The initial vacuum level is commonly set to draw the correct volume of blood to combine with the reagent charge in the tube.


In any of the above embodiments, the barrier or other type of coating 90 inspecting step can be carried out at a sufficient number of positions throughout the vessel interior surface 88 to determine that the barrier or other type of coating 90 will be effective to prevent the pressure within the vessel 80, when it is initially evacuated and its wall is exposed to the ambient atmosphere, from increasing to more than 15%, or more than 10%, of the ambient atmospheric pressure of the ambient atmospheric pressure during a shelf life of at least one year.


In the embodiment of FIGS. 1 and 4, the processing station or device 34 can be another optical inspection, this time intended to scan or separately measure the properties of at least a portion of the barrier or other type of coating 90, or substantially the entire barrier or other type of coating 90, at numerous, closely spaced positions on the barrier or other type of coating 90. The numerous, closely spaced positions can be, for example, spaced about 1 micron apart, or about 2 microns apart, or about 3 microns apart, or about 4 microns apart, or about 5 microns apart, or about 6 microns apart, or about 7 microns apart, either in every case or on average over at least part of the surface, thus separately measuring some or all small portions of the barrier or other type of coating 90. In an embodiment, a separate scan of each small area of the coating can be useful to find individual pinholes or other defects, and to distinguish the local effects of pinhole defects from more general defects, such as a large area with a coating that is too thin or porous.


The inspection by the station or device 34 can be carried out by inserting a radiation or light source 170 or any other suitable radio frequency, microwave, infrared, visible light, ultraviolet, x-ray, or electron beam source, for example, into the vessel 80 via the vessel port 92 and detecting the condition of the vessel interior surface, for example the barrier coating 90, by detecting radiation transmitted from the radiation source using a detector.


The above vessel holder system can also be used for testing the device. For example, the probe 108 of FIG. 2 having a gas delivery port 110 can be replaced by a light source 170 (FIG. 4). The light source 170 can irradiate the inside of the tube and then subsequent testing can be completed outside of the tube, measuring transmission or other properties. The light source 170 can be extended into the inside of the tube in the same manner that the probe 108 is pushed into the puck or vessel holder 62, although a vacuum and seals are not necessarily required. The light source 170 can be an optical fiber source, a laser, a point (such as an LED) source or any other radiation source. The source can radiate at one or more frequencies from the deep UV (100 nm) into the far infra-red (100 microns) and all frequencies in between. There is no limitation on the source that can be used.


As a specific example see FIG. 4. In FIG. 4 the tube or vessel 80 is positioned in the puck or vessel holder 62 and a light source 170 at the end of the probe 108 has been inserted into the tube. The light source 170 in this case can be a blue LED source of sufficient intensity to be received by the detector 172 surrounding the outside of the vessel 80. The light source 170 can be, for example, a three dimensional charge-coupled-device (CCD) comprising an array of pixels such as 174 on its interior surface 176. The pixels such as 174 receive and detect the illumination radiated through the barrier or other type of coating 90 and vessel wall 86. In this embodiment the detector 172 has a larger inner diameter relative to the vessel 80 than the separation of the electrode 164 and vessel 80 of FIG. 2, and has a cylindrical top portion adjacent to the closed end 84 instead of a hemispherical top portion. The outside detector 172 or can have a smaller radial gap from the vessel 80 and a gap of more uniform dimension at its top portion adjacent to the closed end 84. This can be accomplished, for example, by providing a common center of curvature for the closed end 84 and the top of the detector 172 when the vessel 80 is seated. This variation might provide more uniform inspection of the curved closed end 84 of the vessel 80, although either variation is contemplated to be suitable.


Prior to the light source being turned on, the CCD is measured and the resulting value stored as a background (which can be subtracted from subsequent measurements). The light source 170 is then turned on and measurements taken with the CCD. The resulting measurements can then be used to compute total light transmission (and compared to an uncoated tube to determine the average coating thickness) and defect density (by taking individual photon counts on each element of the CCD and comparing them to a threshold value—if the photon count is lower, then this corresponds to not enough light being transmitted). Low light transmission likely is the result of no or too-thin coating—a defect in the coating on the tube. By measuring the number of adjacent elements that have a low photon count, the defect size can be estimated. By summing the size and number of defects, the tube's quality can be assessed, or other properties determined that might be specific to the frequency of the radiation from the light source 170.


In the embodiment of FIG. 4, energy can be radiated outward through the vessel interior surface, such as through the coating 90 and the vessel wall 86, and detected with a detector 172 located outside the vessel. Various types of detectors 172 can be used.


Since the incident radiation from the source 170 transmitted through the barrier or other type of coating 90 and vessel wall 80 can be greater for a lower angle of incidence (compared to a reference line normal to the vessel wall 80 at any given point), the pixels such as 174 lying on a normal line through the vessel wall 86 will receive more of the radiation than neighboring pixels, though more than one pixel can receive some of the light passing through a given portion of the barrier or other type of coating, and the light passing through more than one given portion of the barrier or other type of coating 90 and vessel wall 80 will be received by a particular pixel such as 174.


The degree of resolution of the pixels such as 174 for detecting radiation passing through a particular portion of the barrier or other type of coating 90 and vessel wall 86 can be increased by placing the CCD so its array of pixels such as 174 is very close to and closely conforms to the contours of the vessel wall 86. The degree of resolution can also be increased by selecting a smaller or essentially point source of light, as shown diagrammatically in FIG. 3, to illuminate the interior of the vessel 80. Using smaller pixels will also improve the resolution of the array of pixels in the CCD.


In FIG. 6 a point light source 132 (laser or LED) is positioned at the end of a rod or probe. (“Point source” refers either to light emanating from a small-volume source resembling a mathematical point, as can be generated by a small LED or a diffusing tip on an optical fiber radiating light in all directions, or to light emanated as a small-cross-section beam, such as coherent light transmitted by a laser.) The point source of light 132 can be either stationary or movable, for example axially movable, while the characteristics of the barrier or other type of coating 90 and vessel wall 80 are being measured. If movable, the point light source 132 can be moved up and down inside of the device (tube) 80. In a similar manner described above, the interior surface 88 of the vessel 80 can be scanned and subsequent measurements made by an external detector apparatus 134 to determine coating integrity. An advantage of this approach is that a linearly polarized or similar coherent light source with specific directionality can be used.


The position of the point source of light 132 can be indexed to the pixels such as 174 so the illumination of the detectors can be determined at the time the detector is at a normal angle with respect to a particular area of the coating 90. In the embodiment of FIG. 4, a cylindrical detector 172, optionally with a curved end matching the curve (if any) of the closed end 84 of a vessel 80, can be used to detect the characteristics of a cylindrical vessel 80.


It will be understood, with reference to FIG. 4, that the inspection station or device 24 or 34 can be modified by reversing the positions of the light or other radiation source 170 and detector 172 so the light radiates through the vessel wall 86 from the exterior to the interior of the vessel 80. If this expedient is selected, in an embodiment a uniform source of incident light or other radiation can be provided by inserting the vessel 80 into an aperture 182 through the wall 184 of an integrating sphere light source 186. An integrating sphere light source will disperse the light or radiation from the source 170 outside the vessel 80 and inside the integrating sphere, so the light passing through the respective points of the wall 86 of the vessel 80 will be relatively uniform. This will tend to reduce the distortions caused by artifacts relating to portions of the wall 86 having different shapes.


In the embodiment of FIG. 5, the detector 172 can be shown to closely conform to the barrier or other type of coating 90 or interior surface 88 of the vessel 80. Since the detector 172 can be on the same side of the vessel wall 86 as the barrier or other type of coating 80, this proximity will tend to increase the resolution of the pixels such as 174, though in this embodiment the detector 172 optionally will be precisely positioned relative to the barrier or other type of coating 90 to avoid scraping one against the other, possibly damaging either the coating or the CCD array. Placing the detector 172 immediately adjacent to the coating 90 also can reduce the effects of refraction by the vessel wall 86, which in the embodiment of FIG. 4 occurs after the light or other radiation passes through the barrier or other type of coating 90, so the signal to be detected can be differentially refracted depending on the local shape of the vessel 80 and the angle of incidence of the light or other radiation.


Other barrier or other type of coating inspection techniques and devices can also, or, be used. For example, fluorescence measurements can be used to characterize the treatment/coating on the device. Using the same apparatus described in FIGS. 4 and 6, a light source 132 or 170 (or other radiation source) can be selected that can interact with the polymer material of the wall 86 and/or a dopant in the polymer material of the wall 86. Coupled with a detection system, this can be used to characterize a range of properties including defects, thicknesses and other performance factors.


Yet another example of inspection is to use x-rays to characterize the treatment/coating and/or the polymer itself. In FIG. 3 or 4, the light source can be replaced with an x-radiation source and the external detector can be of a type to measure the x-ray intensity. Elemental analysis of the barrier or other type of coating can be carried out using this technique.


After molding a device 80, as at the station 22, several potential issues can arise that will render any subsequent treatment or coating imperfect, and possibly ineffective. If the devices are inspected prior to coating for these issues, the devices can be coated with a highly optimized, optionally up to 6-sigma controlled process that will ensure a desired result (or results).


Some of the potential problems that can interfere with treatment and coating include (depending on the nature of the coated article to be produced):


1. Large density of particulate contamination defects (for example, each more than 10 micrometers in its longest dimension), or a smaller density of large particulate contamination (for example, each more than 10 micrometers in its longest dimension).


2. Chemical or other surface contamination (for example silicone mold release or oil).


3. High surface roughness, characterized by either a high/large number of sharp peaks and/or valleys. This can also be characterized by quantifying the average roughness (Ra) which should be less than 100 nm.


4. Any defect in the device such as a hole that will not allow a vacuum to be created.


5. Any defect on the surface of the device that will be used to create a seal (for example the open end of a sample collection tube).


6. Large wall thickness non-uniformities which can impede or modify power coupling through the thickness during treatment or coating.


7. Other defects that will render the barrier or other type of coating ineffective.


To assure that the treatment/coating operation is successful using the parameters in the treatment/coating operation, the device can be pre-inspected for one or more of the above potential issues or other issues. Previously, an apparatus was disclosed for holding a device (a puck or vessel holder such as 38-68) and moving it through a production process, including various tests and a treatment/coating operation. Several possible tests can be implemented to ensure that a device will have the appropriate surface for treatment/coating. These include:


1. Optical Inspection, for example, transmission of radiation through the device, reflection of radiation from the inside of the device or from the outside, absorption of radiation by the device, or interference with radiation by the device.


2. Digital Inspection—for example, using a digital camera that can measure specific lengths and geometries (for example how “round” or otherwise evenly or correctly shaped the open end of a sample collection tube is relative to a reference).


3. Vacuum leak checking or pressure testing.


4. Sonic (ultrasonic) testing of the device.


5. X-ray analysis.


6. Electrical conductivity of the device (the plastic tube material and SiOx have different electrical resistance—on the order of 1020 Ohm-cm for quartz as a bulk material and on the order of 1014 Ohm-cm for polyethylene terephthalate, for example).


7. Thermal conductivity of the device (for example, the thermal conductivity of quartz as a bulk material is about 1.3 W-° K/m, while the thermal conductivity of polyethylene terephthalate is 0.24 W-° K/m).


8. Outgassing of the vessel wall, which optionally can be measured as described below under post-coating inspection to determine an outgassing baseline.


The above testing can be conducted in a station 24 as shown in FIG. 3. In this figure the device (for example a sample collection tube 80) can be held in place and a light source (or other source) 132 can be inserted into the device and an appropriate detector 134 positioned outside of the device to measure the desired result.


In the case of vacuum leak detection, the vessel holder and device can be coupled to a vacuum pump and a measuring device inserted into the tube. The testing can also be conducted as detailed elsewhere in the specification.


The processing station or device 24 can be a visual inspection station, and can be configured to inspect one or more of the interior surface 88 of a vessel, its exterior surface 118, or the interior of its vessel wall 86 between its surfaces 88 and 118 for defects. The inspection of the exterior surface 118, the interior surface 88, or the vessel wall 86 can be carried out from outside the vessel 80, particularly if the vessel is transparent or translucent to the type of radiation and wavelength used for inspection. The inspection of the interior surface 88 can or be facilitated, if desired, by providing an optical fiber probe inserted into the vessel 80 via the vessel port 92, so a view of the inside of the vessel 80 can be obtained from outside the vessel 80. An endoscope or borescope can be used in this environment, for example.


Another expedient illustrated in FIG. 3 can be to insert a light source 132 within a vessel 80. The light transmitted through the vessel wall 86, and artifacts of the vessel 80 made apparent by the light, can be detected from outside the vessel 80, as by using a detector measuring apparatus 134. This station or device 24 can be used, for example, to detect and correct or remove misaligned vessels 80 not properly seated on the vessel port 96 or vessels 80 that have a visible distortion, impurity, or other defect in the wall 86. Visual inspection of the vessel 80 also can be conducted by a worker viewing the vessel 80, instead or in addition to machine inspection.


The processing station or device 26 can be optionally configured to inspect the interior surface 88 of a vessel 80 for defects, and for example to measure the gas pressure loss through the vessel wall 86, which can be done before a barrier or other type of coating is provided. This test can be carried out by creating a pressure difference between the two sides of the barrier coating 90, as by pressurizing or evacuating the interior of the vessel 80, isolating the interior 154 of the vessel 80 so the pressure will remain constant absent leakage around the seal or permeation of gas through the vessel wall, and measuring the pressure change per unit time accumulating from these problems. This measurement will not only reveal any gas coming through the vessel wall 86, but will also detect a leaking seal between the mouth 82 of the vessel and the O-ring or other seal 100, which might indicate either a problem with the alignment of the vessel 80 or with the function of the seal 100. In either case, the tube mis-seating can be corrected or the tube taken out of the processing line, saving time in attempting to achieve or maintain the proper processing vacuum level and preventing the dilution of the process gases by air drawn through a malfunctioning seal.


The above systems can be integrated into a manufacturing and inspection method comprising multiple steps.



FIG. 1 as previously described shows a schematic layout of the steps of one possible method (although this disclosure is not limited to a single concept or approach). First the vessel 80 is visually inspected at the station or by the device 24, which can include dimensional measurement of the vessel 80. If there are any defects found, the device or vessel 80 is rejected and the puck or vessel holder such as 38 is inspected for defects, recycled or removed.


Next the leak rate or other characteristics of the assembly of a vessel holder 38 and seated vessel 80 is tested, as at the station 26, and stored for comparison after coating. The puck or vessel holder 38 then moves, for example, into the coating step 28. The device or vessel 80 is coated with a SiOx or other barrier or other type of coating at a power supply frequency of, for example, 13.56 MHz. Once coated, the vessel holder is retested for its leak rate or other characteristics (this can be carried out as a second test at the testing station 26 or a duplicate or similar station such as 30—the use of a duplicate station can increase the system throughput).


The coated measurement can be compared to the uncoated measurement. If the ratio of these values exceeds a pre-set required level, indicating an acceptable overall coating performance, the vessel holder and device move on. An alternative optical testing station 32, for example, follows with a blue light source and an external integrating sphere detector to measure the total light transmitted through the tube. The value can be required to exceed a pre-set limit at which the device is rejected or recycled for additional coating. Next (for devices that are not rejected), a second optical testing station 34 can be used. In this case a point light source can be inserted inside of the tube or vessel 80 and pulled out slowly while measurements are taken with a tubular CCD detector array outside of the tube. The data is then computationally analyzed to determine the defect density distribution. Based on the measurements the device is either approved for final packaging or rejected.


The above data optionally can be logged and plotted (for example, electronically) using statistical process control techniques to ensure up to 6-sigma quality.


PECVD Treated Vessels


Vessels are contemplated having a barrier coating 90 (shown in FIG. 2, for example), which can be an SiOx coating applied to a thickness of at least 2 nm, or at least 4 nm, or at least 7 nm, or at least 10 nm, or at least 20 nm, or at least 30 nm, or at least 40 nm, or at least 50 nm, or at least 100 nm, or at least 150 nm, or at least 200 nm, or at least 300 nm, or at least 400 nm, or at least 500 nm, or at least 600 nm, or at least 700 nm, or at least 800 nm, or at least 900 nm. The coating can be up to 1000 nm, or at most 900 nm, or at most 800 nm, or at most 700 nm, or at most 600 nm, or at most 500 nm, or at most 400 nm, or at most 300 nm, or at most 200 nm, or at most 100 nm, or at most 90 nm, or at most 80 nm, or at most 70 nm, or at most 60 nm, or at most 50 nm, or at most 40 nm, or at most 30 nm, or at most 20 nm, or at most 10 nm, or at most 5 nm thick. Specific thickness ranges composed of any one of the minimum thicknesses expressed above, plus any equal or greater one of the maximum thicknesses expressed above, are expressly contemplated. Additionally contemplated ranges are 1 to 5000 nm, or 10 to 1000 nm, or 10-200 nm, or 20 to 100 nm thick.


The composition (except hydrogen) of the SiOx or other coating can be measured, for example, by X-ray photoelectron spectroscopy (XPS).


A composite coating can be used, such as a carbon-based coating combined with SiOx. This can be done, for example, by changing the reaction conditions or by adding a substituted or unsubstituted hydrocarbon, such as an alkane, alkene, or alkyne, to the feed gas as well as an organosilicon-based compound. See for example U.S. Pat. No. 5,904,952, which states in relevant part: “For example, inclusion of a lower hydrocarbon such as propylene provides carbon moieties and improves most properties of the deposited films (except for light transmission), and bonding analysis indicates the film to be silicon dioxide in nature. Use of methane, methanol, or acetylene, however, produces films that are silicone in nature. The inclusion of a minor amount of gaseous nitrogen to the gas stream provides nitrogen moieties in the deposited films and increases the deposition rate, improves the transmission and reflection optical properties on glass, and varies the index of refraction in response to varied amounts of N2. The addition of nitrous oxide to the gas stream increases the deposition rate and improves the optical properties, but tends to decrease the film hardness.”


A diamond-like carbon (DLC) coating can be formed as the primary or sole coating deposited. This can be done, for example, by changing the reaction conditions or by feeding methane, hydrogen, and helium to a PECVD process. These reaction feeds have no oxygen, so no OH moieties can be formed. For one example, an SiOx coating can be applied on the interior of a tube or syringe barrel and an outer DLC coating can be applied on the exterior surface of a tube or syringe barrel. Or, the SiOx and DLC coatings can both be applied as a single layer or plural layers of an interior tube or syringe barrel coating.


Referring to FIG. 2, the barrier or other type of coating 90 reduces the transmission of atmospheric gases into the vessel 80 through its interior surface 88. Or, the barrier or other type of coating 90 reduces the contact of the contents of the vessel 80 with the interior surface 88. The barrier or other type of coating can comprise, for example, SiOx, amorphous (for example, diamond-like) carbon, or a combination of these.


Any coating described herein can be used for coating a surface, for example a plastic surface. It can further be used as a barrier layer, for example as a barrier against a gas or liquid, optionally against water vapor, oxygen and/or air. It can also be used for preventing or reducing mechanical and/or chemical effects which the coated surface would have on a compound or composition if the surface were uncoated. For example, it can prevent or reduce the precipitation of a compound or composition, for example insulin precipitation or blood clotting or platelet activation.


B. Syringes


The foregoing description has largely addressed applying a barrier coating to a tube with one permanently closed end, such as a blood collection tube or, more generally, a specimen receiving tube 80. The apparatus is not limited to such a device.


Another example of a suitable vessel, shown in FIGS. 20-22, is a syringe barrel 250 for a medical syringe 252. Such syringes 252 are sometimes supplied prefilled with saline solution, a pharmaceutical preparation, or the like for use in medical techniques. Pre-filled syringes 252 are also contemplated to benefit from an SiOx barrier or other type of coating on the interior surface 254 to keep the contents of the prefilled syringe 252 out of contact with the plastic of the syringe, for example of the syringe barrel 250 during storage. The barrier or other type of coating can be used to avoid leaching components of the plastic into the contents of the barrel through the interior surface 254.


A syringe barrel 250 as molded commonly can be open at both the back end 256, to receive a plunger 258, and at the front end 260, to receive a hypodermic needle, a nozzle, or tubing for dispensing the contents of the syringe 252 or for receiving material into the syringe 252. But the front end 260 can optionally be capped and the plunger 258 optionally can be fitted in place before the prefilled syringe 252 is used, closing the barrel 250 at both ends. A cap 262 can be installed either for the purpose of processing the syringe barrel 250 or assembled syringe, or to remain in place during storage of the prefilled syringe 252, up to the time the cap 262 is removed and (optionally) a hypodermic needle or other delivery conduit is fitted on the front end 260 to prepare the syringe 252 for use.


B.1. Assemblies



FIG. 15 is an exploded view and FIG. 16 is an assembled view of a syringe. The syringe barrel can be processed with the vessel treatment and inspection apparatus of FIGS. 1-6, for example.


The installation of a cap 262 makes the barrel 250 a closed-end vessel that can be provided with an SiOx barrier or other type of coating on its interior surface 254 in the previously illustrated apparatus, optionally also providing a coating on the interior 264 of the cap and bridging the interface between the cap interior 264 and the barrel front end 260. Suitable apparatus adapted for this use is analogous to FIG. 2 except for the substitution of the capped syringe barrel 250 for the vessel 80 of FIG. 2.


Protocol for Coating COC Syringe Barrel Interior with SiOx (Used, e.g. in Example 8 and Station 28.)


An injection molded COC syringe barrel was interior coated with SiOx. The apparatus as shown in FIG. 2 was modified to hold a COC syringe barrel with butt sealing at the base of the COC syringe barrel. Additionally a cap was fabricated out of a stainless steel Luer fitting and a polypropylene cap that sealed the end of the COC syringe barrel, allowing the interior of the COC syringe barrel to be evacuated.


The vessel holder 50 was made from Delrin® with an outside diameter of 1.75 inches (44 mm) and a height of 1.75 inches (44 mm). The vessel holder 50 was housed in a Delrin® structure that allowed the device to move in and out of the electrode 160.


The electrode 160 was made from copper with a Delrin® shield. The Delrin® shield was conformal around the outside of the copper electrode 160. The electrode 160 measured approximately 3 inches (76 mm) high (inside) and was approximately 0.75 inches (19 mm) wide. The COC syringe barrel was inserted into the vessel holder 50, base sealing with an Viton® O-rings.


The COC syringe barrel was carefully moved into the sealing position over the extended (stationary) ⅛-inch (3-mm.) diameter brass probe or counter electrode 108 and pushed against a copper plasma screen. The copper plasma screen was a perforated copper foil material (K&S Engineering Part #LXMUW5 Copper mesh) cut to fit the outside diameter of the COC syringe barrel and was held in place by a abutment surface 494 that acted as a stop for the COC syringe barrel insertion. Two pieces of the copper mesh were fit snugly around the brass probe or counter electrode 108 insuring good electrical contact.


The probe or counter electrode 108 extended approximately 20 mm into the interior of the COC syringe barrel and was open at its end. The brass probe or counter electrode 108 extended through a Swagelok® fitting located at the bottom of the vessel holder 50, extending through the vessel holder 50 base structure. The brass probe or counter electrode 108 was grounded to the casing of the RF matching network.


The gas delivery port 110 was connected to a stainless steel assembly comprised of Swagelok® fittings incorporating a manual ball valve for venting, a thermocouple pressure gauge and a bypass valve connected to the vacuum pumping line. In addition, the gas system was connected to the gas delivery port 110 allowing the process gases, oxygen and hexamethyldisiloxane (HMDSO) to be flowed through the gas delivery port 110 (under process pressures) into the interior of the COC syringe barrel.


The gas system was comprised of a Aalborg® GFC17 mass flow meter (Cole Parmer Part # EW-32661-34) for controllably flowing oxygen at 90 sccm (or at the specific flow reported for a particular example) into the process and a PEEK capillary (OD 1/16-inch (3-mm) ID 0.004 inches (0.1 mm)) of length 49.5 inches (1.26 m). The PEEK capillary end was inserted into liquid hexamethyldisiloxane (Alfa Aesar® Part Number L16970, NMR Grade). The liquid HMDSO was pulled through the capillary due to the lower pressure in the COC syringe barrel during processing. The HMDSO was then vaporized into a vapor at the exit of the capillary as it entered the low pressure region.


To ensure no condensation of the liquid HMDSO past this point, the gas stream (including the oxygen) was diverted to the pumping line when it was not flowing into the interior of the COC syringe barrel for processing via a Swagelok® 3-way valve.


Once the COC syringe barrel was installed, the vacuum pump valve was opened to the vessel holder 50 and the interior of the COC syringe barrel. An Alcatel rotary vane vacuum pump and blower comprised the vacuum pump system. The pumping system allowed the interior of the COC syringe barrel to be reduced to pressure(s) of less than 150 mTorr while the process gases were flowing at the indicated rates. A lower pumping pressure was achievable with the COC syringe barrel, as opposed to the tube, because the COC syringe barrel has a much smaller internal volume.


After the base vacuum level was achieved, the vessel holder 50 assembly was moved into the electrode 160 assembly. The gas stream (oxygen and HMDSO vapor) was flowed into the brass gas delivery port 110 (by adjusting the 3-way valve from the pumping line to the gas delivery port 110). The pressure inside the COC syringe barrel was approximately 200 mTorr as measured by a capacitance manometer (MKS) installed on the pumping line near the valve that controlled the vacuum. In addition to the COC syringe barrel pressure, the pressure inside the gas delivery port 110 and gas system was also measured with the thermocouple vacuum gauge that was connected to the gas system. This pressure was typically less than 8 Torr.


When the gas was flowing to the interior of the COC syringe barrel, the RF power supply was turned on to its fixed power level. A ENI ACG-6 600 Watt RF power supply was used (at 13.56 MHz) at a fixed power level of approximately 30 Watts. The RF power supply was connected to a COMDEL CPMX1000 auto match that matched the complex impedance of the plasma (to be created in the COC syringe barrel) to the 50 ohm output impedance of the ENI ACG-6 RF power supply. The forward power was 30 Watts (or whatever value is reported in a working example) and the reflected power was 0 Watts so that the power was delivered to the interior of the COC syringe barrel. The RF power supply was controlled by a laboratory timer and the power on time set to 5 seconds (or the specific time period reported for a particular example).


Upon initiation of the RF power, a uniform plasma was established inside the interior of the COC syringe barrel. The plasma was maintained for the entire 5 seconds (or other coating time indicated in a specific example) until the RF power was terminated by the timer. The plasma produced a silicon oxide coating of approximately 20 nm thickness (or the thickness reported in a specific example) on the interior of the COC syringe barrel surface.


After coating, the gas flow was diverted back to the vacuum line and the vacuum valve was closed. The vent valve was then opened, returning the interior of the COC syringe barrel to atmospheric pressure (approximately 760 Torr). The COC syringe barrel was then carefully removed from the vessel holder 50 assembly (after moving the vessel holder 50 assembly out of the electrode 160 assembly).


EXAMPLES
Example 1

Interference Patterns from Reflectance Measurements—Prophetic Example


Using a UV-Visible Source (Ocean Optics DH2000-BAL Deuterium Tungsten 200-1000 nm), a fiber optic reflection probe (combination emitter/collector Ocean Optics QR400-7 SR/BX with approximately 3 mm probe area), miniature detector (Ocean Optics HR4000CG UV-NIR Spectrometer), and software converting the spectrometer signal to a transmittance/wavelength graph on a laptop computer, an uncoated PET tube Becton Dickinson (Franklin Lakes, N.J., USA) Product No. 366703 13×75 mm (no additives) is scanned (with the probe emitting and collecting light radially from the centerline of the tube, thus normal to the coated surface) both about the inner circumference of the tube and longitudinally along the inner wall of the tube, with the probe, with no observable interference pattern observed. Then a Becton Dickinson Product No. 366703 13×75 mm (no additives) SiOx plasma-coated BD 366703 tube is coated with a 20 nanometer thick SiO2 coating as described in Protocol for Coating Tube Interior with SiOx This tube is scanned in a similar manner as the uncoated tube. A clear interference pattern is observed with the coated tube, in which certain wavelengths were reinforced and others canceled in a periodic pattern, indicating the presence of a coating on the PET tube.


Example 2

Enhanced Light Transmission from Integrating Sphere Detection


The equipment used was a Xenon light source (Ocean Optics HL-2000-HP-FHSA—20 W output Halogen Lamp Source (185-2000 nm)), an Integrating Sphere detector (Ocean Optics ISP-80-8-I) machined to accept a PET tube into its interior, and HR2000+ES Enhanced Sensitivity UV.VIS spectrometer, with light transmission source and light receiver fiber optic sources (QP600-2-UV-VIS—600 um Premium Optical FIBER, UV/VIS, 2 m), and signal conversion software (SP ECTRASUITE—Cross-platform Spectroscopy Operating SOFTWARE). An uncoated PET tube made according to the Protocol for Forming PET Tube was inserted onto a TEFZEL Tube Holder (Puck), and inserted into the integrating sphere. With the Spectrasuite software in absorbance mode, the absorption (at 615 nm) was set to zero. An SiOx coated tube made according to the Protocol for Forming PET Tube and coated according to the Protocol for Coating Tube Interior with SiOx (except as varied in Table 1) was then mounted on the puck, inserted into the integrating sphere and the absorbance recorded at 615 nm wavelength. The data is recorded in Table 1.


With the SiOx coated tubes, an increase in absorption relative to the uncoated article was observed; increased coating times resulted in increased absorption. The measurement took less than one second.


These spectroscopic methods should not be considered limited by the mode of collection (for example, reflectance vs. transmittance vs. absorbance), the frequency or type of radiation applied, or other parameters.


Example 3

Outgassing Measurement on PET


Present FIG. 11, adapted from FIG. 15 of U.S. Pat. No. 6,584,828, is a schematic view of a test set-up that was used in a working example for measuring outgassing through an SiOx barrier coating 348 applied according to the Protocol for Coating Tube Interior with SiOx on the interior of the wall 346 of a PET tube 358 made according to the Protocol for Forming PET Tube seated with a seal 360 on the upstream end of a Micro-Flow Technology measurement cell generally indicated at 362.


A vacuum pump 364 was connected to the downstream end of a commercially available measurement cell 362 (an Intelligent Gas Leak System with Leak Test Instrument Model ME2, with second generation IMFS sensor, (10μ/min full range), Absolute Pressure Sensor range: 0-10 Torr, Flow measurement uncertainty: +/−5% of reading, at calibrated range, employing the Leak-Tek Program for automatic data acquisition (with PC) and signatures/plots of leak flow vs. time. This equipment is supplied by ATC Inc.), and was configured to draw gas from the interior of the PET vessel 358 in the direction of the arrows through the measurement cell 362 for determination of the mass flow rate outgassed vapor into the vessel 358 from its walls.


The measurement cell 362 shown and described schematically here was understood to work substantially as follows, though this information might deviate somewhat from the operation of the equipment actually used. The cell 362 has a conical passage 368 through which the outgassed flow is directed. The pressure is tapped at two longitudinally spaced lateral bores 370 and 372 along the passage 368 and fed respectively to the chambers 374 and 376 formed in part by the diaphragms 378 and 380. The pressures accumulated in the respective chambers 374 and 376 deflect the respective diaphragms 378 and 380. These deflections are measured in a suitable manner, as by measuring the change in capacitance between conductive surfaces of the diaphragms 378 and 380 and nearby conductive surfaces such as 382 and 384. A bypass 386 can optionally be provided to speed up the initial pump-down by bypassing the measurement cell 362 until the desired vacuum level for carrying out the test is reached.


The PET walls 350 of the vessels used in this test were on the order of 1 mm thick, and the coating 348 was on the order of 20 nm (nanometers) thick. Thus, the wall 350 to coating 348 thickness ratio was on the order of 50,000:1.


To determine the flow rate through the measurement cell 362, including the vessel seal 360, 15 glass vessels substantially identical in size and construction to the vessel 358 were successively seated on the vessel seal 360, pumped down to an internal pressure of 1 Torr, then capacitance data was collected with the measurement cell 362 and converted to an “outgassing” flow rate. The test was carried out two times on each vessel. After the first run, the vacuum was released with nitrogen and the vessels were allowed recovery time to reach equilibrium before proceeding with the second run. Since a glass vessel is believed to have very little outgassing, and is essentially impermeable through its wall, this measurement is understood to be at least predominantly an indication of the amount of leakage of the vessel and connections within the measurement cell 362, and reflects little if any true outgassing or permeation. The results are in Table 2.


The family of plots 390 in FIG. 12 shows the “outgas” flow rate, also in micrograms per minute, of individual tubes corresponding to the second run data in previously-mentioned Table 2. Since the flow rates for the plots do not increase substantially with time, and are much lower than the other flow rates shown, the flow rate is attributed to leakage.


Table 3 and the family of plots 392 in FIG. 12 show similar data for uncoated tubes made according to the Protocol for Forming PET Tube.


This data for uncoated tubes shows much larger flow rates: the increases are attributed to outgas flow of gases captured on or within the inner region of the vessel wall. There is some spread among the vessels, which is indicative of the sensitivity of the test to small differences among the vessels and/or how they are seated on the test apparatus.


Table 4 and the families of plots 394 and 396 in FIG. 12 show similar data for an SiOx barrier coating 348 applied according to the Protocol for Coating PET Tube Interior with SiOx on the interior of the wall 346 of a PET tube made according to the Protocol for Forming PET Tube.


The family of curves 394 for the SiOx coated, injection-molded PET tubes of this example shows that the SiOx coating acts as a barrier to limit outgassing from the PET vessel walls, since the flow rate is consistently lower in this test than for the uncoated PET tubes. (The SiOx coating itself is believed to outgas very little.) The separation between the curves 394 for the respective vessels indicates that this test is sensitive enough to distinguish slightly differing barrier efficacy of the SiOx coatings on different tubes. This spread in the family 394 is attributed mainly to variations in gas tightness among the SiOx coatings, as opposed to variations in outgassing among the PET vessel walls or variations in seating integrity (which have a much tighter family 392 of curves). The two curves 396 for samples 2 and 4 are outliers, as demonstrated below, and their disparity from other data is believed to show that the SiOx coatings of these tubes are defective. This shows that the present test can very clearly separate out samples that have been processed differently or damaged.


Referring to Tables 8 and 9 previously mentioned and FIG. 13, the data was analyzed statistically to find the mean and the values of the first and third standard deviations above and below the mean (average). These values are plotted in FIG. 13.


This statistical analysis first shows that samples 2 and 4 of Table 4 representing coated PET tubes are clear outliers, more than +3 standard deviations away from the mean. These outliers are, however, shown to have some barrier efficacy, as their flow rates are still clearly distinguished from (lower than) those of the uncoated PET tubes.


This statistical analysis also shows the power of an outgassing measurement to very quickly and accurately analyze the barrier efficacy of nano-thickness barrier coatings and to distinguish coated tubes from uncoated tubes (which are believed to be indistinguishable using the human senses at the present coating thickness). Referring to FIG. 13, coated PET vessels showing a level of outgassing three standard deviations above the mean, shown in the top group of bars, have less outgassing than uncoated PET vessels showing a level of outgassing three standard deviations below the mean, shown in the bottom group of bars. This data shows no overlap of the data to a level of certainty exceeding 6σ (six-sigma).


Based on the success of this test, it is contemplated that the presence or absence of an SiOx coating on these PET vessels can be detected in a much shorter test than this working example, particularly as statistics are generated for a larger number of samples. This is evident, for example from the smooth, clearly separated families of plots even at a time T=12 seconds for samples of 15 vessels, representing a test duration of about one second following the origin at about T=11 seconds.


It is also contemplated, based on this data, that a barrier efficacy for SiOx coated PET vessels approaching that of glass or equal to glass can be obtained by optimizing the SiOx coating.


Example 4 (Omitted)
Example 5

Vacuum Retention Study of Tubes Via Accelerated Ageing


Accelerated ageing offers faster assessment of long term shelf-life products. Accelerated ageing of blood tubes for vacuum retention is described in U.S. Pat. No. 5,792,940, Column 1, Lines 11-49.


Three types of polyethylene terephthalate (PET) 13×75 mm (0.85 mm thick walls) molded tubes were tested:

    • Becton Dickinson Product No. 366703 13×75 mm (no additives) tube (shelf life 545 days or 18 months), closed with Hemogard® system red stopper and uncolored guard [commercial control];
    • PET tubes made according to the Protocol for Forming PET Tube, closed with the same type of Hemogard® system red stopper and uncolored guard [internal control]; and
    • injection molded PET 13×75 mm tubes, made according to the Protocol for Forming PET Tube, coated according to the Protocol for Coating Tube Interior with SiOx, closed with the same type of Hemogard® system red stopper and uncolored guard [sample].


The BD commercial control was used as received. The internal control and samples were evacuated and capped with the stopper system to provide the desired partial pressure (vacuum) inside the tube after sealing. All samples were placed into a three gallon (3.8 L) 304 SS wide mouth pressure vessel (Sterlitech No. 740340). The pressure vessel was pressurized to 48 psi (3.3 atm, 2482 mm. Hg). Water volume draw change determinations were made by (a) removing 3-5 samples at increasing time intervals, (b) permitting water to draw into the evacuated tubes through a 20 gauge blood collection adaptor from a one liter plastic bottle reservoir, (c) and measuring the mass change before and after water draw.


Results are indicated on Table 5.


The Normalized Average Decay Rate is calculated by dividing the time change in mass by the number of pressurization days and initial mass draw [mass change/(days×initial mass)]. The Accelerated Time to 10% Loss (months) is also calculated. Both data are listed in Table 6.


This data indicates that both the commercial control and uncoated internal control have identical vacuum loss rates, and surprisingly, incorporation of a SiOx coating on the PET interior walls improves vacuum retention time by a factor of 2.1.


Example 6

Volatile Components from Plasma Coatings (“Outgassing”)


COC syringe barrel samples made according to the Protocol for Forming COC Syringe barrel, coated with OMCTS (according to the Protocol for Coating COC Syringe Barrel Interior with OMCTS Lubricity layer) or with HMDSO (according to the Protocol for Coating COC Syringe Barrel Interior with HMDSO Coating) were provided. Outgassing gas chromatography/mass spectroscopy (GC/MS) analysis was used to measure the volatile components released from the OMCTS or HMDSO coatings.


The syringe barrel samples (four COC syringe barrels cut in half lengthwise) were placed in one of the 1½″ (37 mm) diameter chambers of a dynamic headspace sampling system (CDS 8400 auto-sampler). Prior to sample analysis, a system blank was analyzed. The sample was analyzed on an Agilent 7890A Gas Chromatograph/Agilent 5975 Mass Spectrometer, using the following parameters, producing the data set out in Table 7:

    • GC Column: 30 m×0.25 mm DB-5MS (J&W Scientific),
      • 0.25 μm film thickness
    • Flow rate: 1.0 ml/min, constant flow mode
    • Detector: Mass Selective Detector (MSD)
    • Injection Mode: Split injection (10:1 split ratio)
    • Outgassing Conditions: 1½″ (37 mm) Chamber, purge for three hour at 85° C., flow 60 ml/min
    • Oven temperature: 40° C. (5 min.) to 300° C. @10° C./min.;
      • hold for 5 min. at 300° C.


The outgassing results from Table 7 clearly indicated a compositional differentiation between the HMDSO-based and OMCTS-based lubricity layers tested. HMDSO-based compositions outgassed trimethylsilanol [(Me)3SiOH] but outgassed no measured higher oligomers containing repeating -(Me)2SiO— moieties, while OMCTS-based compositions outgassed no measured trimethylsilanol [(Me)3SiOH] but outgassed higher oligomers containing repeating -(Me)2SiO— moieties. It is contemplated that this test can be useful for differentiating HMDSO-based coatings from OMCTS-based coatings.


Without limiting the disclosure according to the scope or accuracy of the following theory, it is contemplated that this result can be explained by considering the cyclic structure of OMCTS, with only two methyl groups bonded to each silicon atom, versus the acyclic structure of HMDSO, in which each silicon atom is bonded to three methyl groups. OMCTS is contemplated to react by ring opening to form a diradical having repeating -(Me)2SiO— moieties which are already oligomers, and can condense to form higher oligomers. HMDSO, on the other hand, is contemplated to react by cleaving at one O—Si bond, leaving one fragment containing a single O—Si bond that recondenses as (Me)3SiOH and the other fragment containing no O—Si bond that recondenses as [(Me)3Si]2.


The cyclic nature of OMCTS is believed to result in ring opening and condensation of these ring-opened moieties with outgassing of higher MW oligomers (26 ng/test). In contrast, HMDSO-based coatings are believed not to provide any higher oligomers, based on the relatively low-molecular-weight fragments from HMDSO.


Example 7

Density Determination of Plasma Coatings Using X-Ray Reflectivity (XRR)


Sapphire witness samples (0.5×0.5×0.1 cm) were glued to the inner walls of separate PET tubes, made according to the Protocol for Forming PET tubes. The sapphire witness-containing PET tubes were coated with OMCTS or HMDSO (both according to the Protocol for Coating COC Syringe Barrel Interior with OMCTS Lubricity layer, deviating all with 2× power). The coated sapphire samples were then removed and X-ray reflectivity (XRR) data were acquired on a PANalytical X'Pert diffractometer equipped with a parabolic multilayer incident beam monochromator and a parallel plate diffracted beam collimator. A two layer SiwOxCyHz model was used to determine coating density from the critical angle measurement results. This model is contemplated to offer the best approach to isolate the true SiwOxCyHz coating. The results are shown in Table 8.


Without limiting the disclosure according to the scope or accuracy of the following theory, it is contemplated that there is a fundamental difference in reaction mechanism in the formation of the respective HMDSO-based and OMCTS-based coatings. HMDSO fragments can more easily nucleate or react to form dense nanoparticles which then deposit on the surface and react further on the surface, whereas OMCTS is much less likely to form dense gas phase nanoparticles. OMCTS reactive species are much more likely to condense on the surface in a form much more similar to the original OMCTS monomer, resulting in an overall less dense coating.


Example 8

Thickness Uniformity of PECVD Applied Coatings


Samples were provided of COC syringe barrels made according to the Protocol for Forming COC Syringe barrel and respectively coated with SiOx according to the Protocol for Coating COC Syringe Barrel Interior with SiOx or an OMCTS-based lubricity layer according to the Protocol for Coating COC Syringe Barrel Interior with OMCTS Lubricity layer. Samples were also provided of PET tubes made according to the Protocol for Forming PET Tube, respectively coated and uncoated with SiOx according to the Protocol for Coating Tube Interior with SiOx and subjected to an accelerated aging test. Transmission electron microscopy (TEM) was used to measure the thickness of the PECVD-applied coatings on the samples. The previously stated TEM procedure was used. The method and apparatus described by the SiOx and lubricity layer protocols used in this example demonstrated uniform coating as shown in Table 10.


Example 9

Outgassing Measurement on COC


COC tubes were made according to the Protocol for Forming COC Tube.


Some of the tubes were provided with an interior barrier coating of SiOx according to the Protocol for Coating Tube Interior with SiOx, and other COC tubes were uncoated. Commercial glass blood collection Becton Dickinson 13×75 mm tubes having similar dimensions were also provided as above. The tubes were stored for about 15 minutes in a room containing ambient air at 45% relative humidity and 70° F. (21° C.), and the following testing was done at the same ambient relative humidity. The tubes were tested for outgassing following the ATC microflow measurement procedure and equipment of Example 3 (an Intelligent Gas Leak System with Leak Test Instrument Model ME2, with second generation IMFS sensor, (10μ/min full range), Absolute Pressure Sensor range: 0-10 Torr, Flow measurement uncertainty: +/−5% of reading, at calibrated range, employing the Leak-Tek Program for automatic data acquisition (with PC) and signatures/plots of leak flow vs. time). In the present case each tube was subjected to a 22-second bulk moisture degassing step at a pressure of 1 mm Hg, was pressurized with nitrogen gas for 2 seconds (to 760 millimeters Hg), then the nitrogen gas was pumped down and the microflow measurement step was carried out for about one minute at 1 millimeter Hg pressure.


The result is shown in FIG. 17, which is similar to FIG. 12 generated in Example 3. In FIG. 17, the plots for the uncoated COC tubes are at 630, the plots for the SiOx coated COC tubes are at 632, and the plots for the glass tubes used as a control are at 634. Again, the outgassing measurement began at about 4 seconds, and a few seconds later the plots 630 for the uncoated COC tubes and the plots 632 for the SiOx barrier coated tubes clearly diverged, again demonstrating rapid differentiation between barrier coated tubes and uncoated tubes. A consistent separation of uncoated COC (>2 micrograms at 60 seconds) versus SiOx-coated COC (less than 1.6 micrograms at 60 seconds) was realized.


While the disclosure has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive; the disclosure is not limited to the disclosed embodiments. Other variations to the disclosed embodiments can be understood and effected by those skilled in the art and practising the claimed disclosure, from a study of the drawings, the disclosure, and the appended claims. In the claims, the word “comprising” does not exclude other elements or steps, and the indefinite article “a” or “an” does not exclude a plurality. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any reference signs in the claims should not be construed as limiting the scope.









TABLE 1







OPTICAL ABSORPTION OF SIOx COATED PET


TUBES (NORMALIZED TO UNCOATED PET TUBE)













Average






Absorption

St.


Sample
Coating Time
(@ 615 nm)
Replicates
Dev.














Reference (uncoated)

0.002-0.014
4













A
3
sec
0.021
8
0.001


B
2 × 3
sec
0.027
10
0.002


C
3 × 3
sec
0.033
4
0.003
















TABLE 2







FLOW RATE USING GLASS TUBES












Glass
Run #1
Run #2
Average



Tube
(μg/min.)
(μg/min.)
(μg/min.)
















1
1.391
1.453
1.422



2
1.437
1.243
1.34



3
1.468
1.151
1.3095



4
1.473
1.019
1.246



5
1.408
0.994
1.201



6
1.328
0.981
1.1545



7
Broken
Broken
Broken



8
1.347
0.909
1.128



9
1.171
0.91
1.0405



10
1.321
0.946
1.1335



11
1.15
0.947
1.0485



12
1.36
1.012
1.186



13
1.379
0.932
1.1555



14
1.311
0.893
1.102



15
1.264
0.928
1.096



Average
1.343
1.023
1.183



Max
1.473
1.453
1.422



Min
1.15
0.893
1.0405



Max − Min
0.323
0.56
0.3815



Std.. Dev.
0.097781
0.157895
0.1115087

















TABLE 3







FLOW RATE USING PET TUBES












Uncoated
Run #1
Run #2
Average



PET
(μg/min.)
(μg/min.)
(μg/min.)
















1
10.36
10.72
10.54



2
11.28
11.1
11.19



3
11.43
11.22
11.325



4
11.41
11.13
11.27



5
11.45
11.17
11.31



6
11.37
11.26
11.315



7
11.36
11.33
11.345



8
11.23
11.24
11.235



9
11.14
11.23
11.185



10
11.1
11.14
11.12



11
11.16
11.25
11.205



12
11.21
11.31
11.26



13
11.28
11.22
11.25



14
10.99
11.19
11.09



15
11.3
11.24
11.27



Average
11.205
11.183
11.194



Max
11.45
11.33
11.345



Min
10.36
10.72
10.54



Max − Min
1.09
0.61
0.805



Std. Dev.
0.267578
0.142862
0.195121

















TABLE 4







FLOW RATE FOR SiOx COATED PET TUBES












Coated
Run #1
Run #2
Average



PET
(μg/min.)
(μg/min.)
(μg/min.)
















1
6.834
6.655
6.7445



2
9.682
9.513
Outliers



3
7.155
7.282
7.2185



4
8.846
8.777
Outliers



5
6.985
6.983
6.984



6
7.106
7.296
7.201



7
6.543
6.665
6.604



8
7.715
7.772
7.7435



9
6.848
6.863
6.8555



10
7.205
7.322
7.2635



11
7.61
7.608
7.609



12
7.67
7.527
7.5985



13
7.715
7.673
7.694



14
7.144
7.069
7.1065



15
7.33
7.24
7.285



Average
7.220
7.227
7.224



Max
7.715
7.772
7.7435



Min
6.543
6.655
6.604



Max − Min
1.172
1.117
1.1395



Std. Dev.
0.374267
0.366072
0.365902

















TABLE 5







WATER MASS DRAW (GRAMS)









Pressurization Time (days)















Tube
0
27
46
81
108
125
152
231

















BD PET
3.0


1.9

1.0



(commercial control)


Uncoated PET
4.0

3.1

2.7


(internal control)


SiOX-Coated PET
4.0

3.6

3.3


(example)
















TABLE 6







CALCULATED NORMALIZED AVERAGE VACUUM DECAY


RATE AND TIME TO 10% VACUUM LOSS










Normalized Average
Time to 10%



Decay rate (delta
Loss (months) -


Tube
mL/initial mL · da)
Accelerated





BDPET (commercial control)
0.0038
0.9


Uncoated PET (internal control)
0.0038
0.9


SiOx-Coated PET (example)
0.0018
1.9
















TABLE 7







VOLATILE COMPONENTS FROM SYRINGE OUTGASSING











Coating
Me3SiOH
Higher SiOMe



Monomer
(ng/test)
oligomers (ng/test)














Uncoated COC syringe -
Uncoated
ND
ND


Example


HMDSO-based Coated
HMDSO
58
ND


COC syringe- Example


OMCTS- based Coated
OMCTS
ND
26


COC syringe- Example
















TABLE 8







PLASMA COATING DENSITY FROM XRR DETERMINATION













Density



Sample
Layer
g/cm3







HMDSO-based Coated Sapphire -
SiwOxCyHz
1.21



Example



OMCTS- based Coated Sapphire -
SiwOxCyHz
1.46



Example

















TABLE 9







ATOMIC CONCENTRATIONS (IN PERCENT, NORMALIZED


TO 100% OF ELEMENTS DETECTED) AND TEM THICKNESS












Plasma





Sample
coating
Si
O
C





HMDSO-based
SiwOxCy
0.76 (22.2%)
1 (33.4%)
3.7 (44.4%)


Coated COC


syringe barrel


OMCTS- based
SiwOxCy
0.46 (23.6%)
1 (28%)
4.0 (48.4%)


Coated COC


syringe barrel


HMDSO Monomer-
Si2OC6
  2 (21.8%)
1 (24.1%)

6 (54.1%)



calculated


OMCTS Monomer-
Si4O4C8
 1 (42%)
1 (23.2%)

2 (34.8%)



calculated
















TABLE 10







THICKNESS OF PECVD COATINGS BY TEM











TEM
TEM
TEM


Sample ID
Thickness I
Thickness II
Thickness III





Protocol for Forming
164 nm 
154 nm 
167 nm 


COC Syringe Barrel;


Protocol for Coating


COC Syringe Barrel


Interior with SiOx


Protocol for Forming
55 nm
48 nm
52 nm


COC Syringe Barrel;


Protocol for Coating


COC Syringe Barrel


Interior with OMCTS


Lubricity layer


Protocol for
28 nm
26 nm
30 nm


Forming PET Tube;


Protocol for Coating


Tube Interior with SiOx


Protocol for





Forming PET Tube


(uncoated)








Claims
  • 1. A reflectometry method for detecting discontinuities in a chemical vapor deposition (CVD) coating comprising: providing a thermoplastic vessel wall having an outside surface, an inside surface, and a CVD coating on at least one of the inside and outside surfaces, the vessel wall and the CVD coating having different indices of refraction;impinging electromagnetic energy on multiple positions of the CVD coating under conditions effective to cause energy to reflect from the multiple positions of the CVD coating;analyzing the reflected energy to determine whether the reflected energy includes at least one artifact of a discontinuity in the CVD coating.
  • 2. The method of claim 1, in which the energy source provides energy within at least a portion of the wavelength range from 40 to 1100 nm.
  • 3. The method of claim 1, further comprising mapping the reflected energy to the multiple positions of the CVD coating.
  • 4. The method of claim 3, further comprising recording the map of the reflected energy.
  • 5. The method of claim 4, in which the map is recorded by a charge-coupled device image sensor configured for converting the recorded map to a data stream.
  • 6. The method of claim 1, in which the analyzing step is carried out by a computer processor programmed for analyzing the data stream to find at least one artifact representing a discrete area of the image of contrasting brightness relative to the background of the discrete area, representing a discontinuity.
  • 7. The method of claim 6, in which analyzing comprises determining the area of the discontinuity.
  • 8. The method of claim 6, in which the processor is configured to determine the aggregate area of all discontinuities detected in the CVD coating.
  • 9. The method of claim 1, in which the impinging energy is polychromatic.
  • 10. The method of claim 1, in which the reflected energy contains interference patterns resulting from its interaction with the CVD coating.
  • 11. The method of claim 1, in which the color of the reflected energy differs from the color of the impinging energy.
  • 12. The method of claim 1, in which the vessel wall is at least partially transparent.
  • 13. The method of claim 12, in which the vessel wall is positioned such that the impinging energy passes through the vessel wall to reach the CVD coating.
  • 14. The method of claim 12, in which the vessel wall is positioned such that the reflected energy passes through the vessel wall before the reflected energy is analyzed.
  • 15. The method of claim 12, in which the vessel wall is positioned such that the impinging energy impinges inwardly on the outside of the vessel wall and reflects from a CVD coating positioned on the inside of the vessel wall.
Parent Case Info

Priority is claimed to U.S. Provisional Appl. Ser. No. 61/721,092, filed Nov. 1, 2012. U.S. Ser. No. 12/779,007, filed May 12, 2010, now U.S. Pat. No. 7,985,188, is hereby incorporated herein by reference in its entirety.

PCT Information
Filing Document Filing Date Country Kind
PCT/US2013/067852 10/31/2013 WO 00
Publishing Document Publishing Date Country Kind
WO2014/071061 5/8/2014 WO A
US Referenced Citations (947)
Number Name Date Kind
3274267 Chow Sep 1966 A
3297465 Connell Jan 1967 A
3355947 Karlby Dec 1967 A
3442686 Jones May 1969 A
3448614 Muger Jun 1969 A
3590634 Pasternak Jul 1971 A
3838598 Tompkins Oct 1974 A
3957653 Blecher May 1976 A
4111326 Percarpio Sep 1978 A
4118972 Goeppner Oct 1978 A
4134832 Heimreid Jan 1979 A
4136794 Percarpio Jan 1979 A
4162528 Maldonado Jul 1979 A
4168330 Kaganowicz Sep 1979 A
4186840 Percarpio Feb 1980 A
4187952 Percarpio Feb 1980 A
4226333 Percarpio Oct 1980 A
4289726 Potoczky Sep 1981 A
4290534 Percarpio Sep 1981 A
4293078 Percarpio Oct 1981 A
4338764 Percarpio Jul 1982 A
4391128 McWorter Jul 1983 A
4392218 Plunkett, Jr. Jul 1983 A
4422896 Class Dec 1983 A
4452679 Dunn Jun 1984 A
4478873 Masso Oct 1984 A
4481229 Suzuki Nov 1984 A
4483737 Mantei Nov 1984 A
4484479 Eckhardt Nov 1984 A
4486378 Hirata Dec 1984 A
4522510 Rosencwaig Jun 1985 A
4524089 Haque Jun 1985 A
4524616 Drexel Jun 1985 A
4552791 Hahn Nov 1985 A
4576204 Smallborn Mar 1986 A
4609428 Fujimura Sep 1986 A
4610770 Saito Sep 1986 A
4648107 Latter Mar 1987 A
4648281 Morita Mar 1987 A
4652429 Konrad Mar 1987 A
4664279 Obrist May 1987 A
4667620 White May 1987 A
4668365 Foster May 1987 A
4683838 Kimura Aug 1987 A
4697717 Grippi Oct 1987 A
4703187 Hofling Oct 1987 A
4716491 Ohno Dec 1987 A
4721553 Saito Jan 1988 A
4725481 Ostapchenko Feb 1988 A
4741446 Miller May 1988 A
4756964 Kincaid Jul 1988 A
4767414 Williams Aug 1988 A
4778721 Sliemers Oct 1988 A
4799246 Fischer Jan 1989 A
4808453 Romberg Feb 1989 A
4809876 Tomaswick Mar 1989 A
4810752 Bayan Mar 1989 A
4824444 Nomura Apr 1989 A
4841776 Kawachi Jun 1989 A
4842704 Collins Jun 1989 A
4844986 Karakelle Jul 1989 A
4846101 Montgomery Jul 1989 A
4853102 Tateishi Aug 1989 A
4869203 Pinkhasov Sep 1989 A
4872758 Miyazaki Oct 1989 A
4874497 Matsuoka Oct 1989 A
4880675 Mehta Nov 1989 A
4883686 Doehler Nov 1989 A
4886086 Etchells Dec 1989 A
4894256 Gartner Jan 1990 A
4894510 Nakanishi Jan 1990 A
4897285 Wilhelm Jan 1990 A
4926791 Hirose May 1990 A
4948628 Montgomery Aug 1990 A
4973504 Romberg Nov 1990 A
4978714 Bayan Dec 1990 A
4991104 Miller Feb 1991 A
4999014 Gold Mar 1991 A
5000994 Romberg Mar 1991 A
5009646 Sudo Apr 1991 A
5016564 Nakamura May 1991 A
5021114 Saito Jun 1991 A
5028566 Lagendijk Jul 1991 A
5030475 Ackermann Jul 1991 A
5032202 Tsai Jul 1991 A
5039548 Hirose Aug 1991 A
5041303 Wertheimer Aug 1991 A
5042951 Gold Aug 1991 A
5044199 Drexel Sep 1991 A
5064083 Alexander Nov 1991 A
5067491 Taylor Nov 1991 A
5079481 Moslehi Jan 1992 A
5082542 Moslehi Jan 1992 A
5084356 Deak Jan 1992 A
5085904 Deak Feb 1992 A
5099881 Nakajima Mar 1992 A
5113790 Geisler May 1992 A
5120966 Kondo Jun 1992 A
5131752 Yu Jul 1992 A
5144196 Gegenwart Sep 1992 A
5147678 Foerch Sep 1992 A
5154943 Etzkorn Oct 1992 A
5189446 Barnes Feb 1993 A
5192849 Moslehi Mar 1993 A
5198725 Chen Mar 1993 A
5203959 Hirose Apr 1993 A
5204141 Roberts Apr 1993 A
5209882 Hattori May 1993 A
5216329 Pelleteir Jun 1993 A
5224441 Felts Jul 1993 A
5225024 Hanley Jul 1993 A
5232111 Burns Aug 1993 A
5252178 Moslehi Oct 1993 A
5260095 Affinito Nov 1993 A
5266398 Hioki Nov 1993 A
5271274 Khuri-Yakub Dec 1993 A
5272417 Ohmi Dec 1993 A
5272735 Bryan Dec 1993 A
5275299 Konrad Jan 1994 A
5286297 Moslehi Feb 1994 A
5288560 Sudo Feb 1994 A
5292370 Tsai Mar 1994 A
5294011 Konrad Mar 1994 A
5294464 Geisler Mar 1994 A
5298587 Hu Mar 1994 A
5300901 Krummel Apr 1994 A
5302266 Grabarz Apr 1994 A
5308649 Babacz May 1994 A
5314561 Komiya May 1994 A
5320875 Hu Jun 1994 A
5321634 Obata Jun 1994 A
5330578 Sakama Jul 1994 A
5333049 Ledger Jul 1994 A
5338579 Ogawa et al. Aug 1994 A
5346579 Cook Sep 1994 A
5354286 Mesa Oct 1994 A
5356029 Hogan Oct 1994 A
5361921 Burns Nov 1994 A
5364665 Felts Nov 1994 A
5364666 Williams Nov 1994 A
5372851 Ogawa et al. Dec 1994 A
5374314 Babacz Dec 1994 A
5378510 Thomas Jan 1995 A
5395644 Affinito Mar 1995 A
5396080 Hannotiau Mar 1995 A
5397956 Araki Mar 1995 A
5409782 Murayama Apr 1995 A
5413813 Cruse May 1995 A
5423915 Murata Jun 1995 A
5429070 Campbell Jul 1995 A
5433786 Hu Jul 1995 A
5434008 Felts Jul 1995 A
5439736 Nomura Aug 1995 A
5440446 Shaw Aug 1995 A
5443645 Otoshi Aug 1995 A
5444207 Sekine Aug 1995 A
5449432 Hanawa Sep 1995 A
5452082 Sanger Sep 1995 A
5468520 Williams Nov 1995 A
5470388 Goedicke Nov 1995 A
5472660 Fortin Dec 1995 A
5485091 Verkuil Jan 1996 A
5486701 Norton Jan 1996 A
5494170 Burns Feb 1996 A
5494712 Hu Feb 1996 A
5495958 Konrad Mar 1996 A
5508075 Roulin Apr 1996 A
5510155 Williams Apr 1996 A
5513515 Mayer May 1996 A
5514276 Babcock May 1996 A
5521351 Mahoney May 1996 A
5522518 Konrad Jun 1996 A
5531060 Fayet Jul 1996 A
5531683 Kriesel Jul 1996 A
5536253 Haber Jul 1996 A
5543919 Mumola Aug 1996 A
5545375 Tropsha Aug 1996 A
5547508 Affinito Aug 1996 A
5547723 Williams Aug 1996 A
5554223 Imahashi Sep 1996 A
5555471 Xu Sep 1996 A
5565248 Piester Oct 1996 A
5569810 Tsuji Oct 1996 A
5571366 Ishii Nov 1996 A
5578103 Araujo Nov 1996 A
5591898 Mayer Jan 1997 A
5593550 Stewart Jan 1997 A
5597456 Maruyama Jan 1997 A
5616369 Williams Apr 1997 A
5620523 Maeda Apr 1997 A
5632396 Burns May 1997 A
5633711 Nelson May 1997 A
5643638 Otto Jul 1997 A
5652030 Delperier Jul 1997 A
5654054 Tropsha Aug 1997 A
5656141 Betz Aug 1997 A
5658438 Givens Aug 1997 A
5665280 Tropsha Sep 1997 A
5667840 Tingey Sep 1997 A
5674321 Pu Oct 1997 A
5677010 Esser Oct 1997 A
5679412 Kuehnle Oct 1997 A
5679413 Petrmichl Oct 1997 A
5683771 Tropsha Nov 1997 A
5686157 Harvey Nov 1997 A
5690745 Grunwald Nov 1997 A
5691007 Montgomery Nov 1997 A
5693196 Stewart Dec 1997 A
5699923 Burns Dec 1997 A
5702770 Martin Dec 1997 A
5704983 Thomas et al. Jan 1998 A
5716683 Harvey Feb 1998 A
5718967 Hu Feb 1998 A
5725909 Shaw Mar 1998 A
5733405 Taki Mar 1998 A
5736207 Walther Apr 1998 A
5737179 Shaw Apr 1998 A
5738233 Burns Apr 1998 A
5738920 Knors Apr 1998 A
5744360 Hu Apr 1998 A
5750892 Huang May 1998 A
5763033 Tropsha Jun 1998 A
5766362 Montgomery Jun 1998 A
5769273 Sasaki Jun 1998 A
5779074 Burns Jul 1998 A
5779716 Cano Jul 1998 A
5779802 Borghs Jul 1998 A
5779849 Blalock Jul 1998 A
5788670 Reinhard Aug 1998 A
5792550 Phillips Aug 1998 A
5792940 Ghandhi Aug 1998 A
5798027 Lefebvre Aug 1998 A
5800880 Laurent Sep 1998 A
5807343 Tucker Sep 1998 A
5807605 Tingey Sep 1998 A
5812261 Nelson Sep 1998 A
5814257 Kawata Sep 1998 A
5814738 Pinkerton Sep 1998 A
5820603 Tucker Oct 1998 A
5823373 Sudo Oct 1998 A
5824198 Williams Oct 1998 A
5824607 Trow Oct 1998 A
5833752 Martin Nov 1998 A
5837888 Mayer Nov 1998 A
5837903 Weingand Nov 1998 A
5840167 Kim Nov 1998 A
5849368 Hostettler Dec 1998 A
5853833 Sudo Dec 1998 A
5855686 Rust Jan 1999 A
5861546 Sagi Jan 1999 A
5871700 Konrad Feb 1999 A
5877895 Shaw Mar 1999 A
5880034 Keller Mar 1999 A
5888414 Collins Mar 1999 A
5888591 Gleason Mar 1999 A
5897508 Konrad Apr 1999 A
5900284 Hu May 1999 A
5900285 Walther May 1999 A
5902461 Xu May 1999 A
5904952 Lopata May 1999 A
5913140 Roche Jun 1999 A
5914189 Hasz Jun 1999 A
5919328 Tropsha Jul 1999 A
5919420 Niermann Jul 1999 A
5935391 Nakahigashi Aug 1999 A
5945187 Buch-Rasmussen Aug 1999 A
5951527 Sudo Sep 1999 A
5952069 Tropsha Sep 1999 A
5955161 Tropsha Sep 1999 A
5961911 Hwang Oct 1999 A
5968620 Harvey Oct 1999 A
5972297 Niermann Oct 1999 A
5972436 Walther Oct 1999 A
5985103 Givens Nov 1999 A
6001429 Martin Dec 1999 A
6009743 Mayer Jan 2000 A
6013337 Knors Jan 2000 A
6017317 Newby Jan 2000 A
6018987 Mayer Feb 2000 A
6020196 Hu Feb 2000 A
6027619 Cathey Feb 2000 A
6032813 Niermann Mar 2000 A
6035717 Carodiskey Mar 2000 A
6050400 Taskis Apr 2000 A
6051151 Keller Apr 2000 A
6054016 Tuda Apr 2000 A
6054188 Tropsha Apr 2000 A
6068884 Rose May 2000 A
6077403 Kobayashi Jun 2000 A
6081330 Nelson Jun 2000 A
6082295 Lee Jul 2000 A
6083313 Venkatraman et al. Jul 2000 A
6085927 Kusz Jul 2000 A
6090081 Sudo Jul 2000 A
6093175 Gyure Jul 2000 A
6106678 Shufflebotham Aug 2000 A
6110395 Gibson, Jr. Aug 2000 A
6110544 Yang Aug 2000 A
6112695 Felts Sep 2000 A
6116081 Ghandhi Sep 2000 A
6117243 Walther Sep 2000 A
6118844 Fischer Sep 2000 A
6124212 Fan Sep 2000 A
6125687 McClelland Oct 2000 A
6126640 Tucker Oct 2000 A
6129712 Sudo Oct 2000 A
6136275 Niermann Oct 2000 A
6139802 Niermann Oct 2000 A
6143140 Wang Nov 2000 A
6149982 Plester Nov 2000 A
6153269 Gleason Nov 2000 A
6156152 Ogino Dec 2000 A
6156399 Spallek Dec 2000 A
6156435 Gleason Dec 2000 A
6160350 Sakemi Dec 2000 A
6161712 Savitz Dec 2000 A
6163006 Doughty Dec 2000 A
6165138 Miller Dec 2000 A
6165542 Jaworowski Dec 2000 A
6165566 Tropsha Dec 2000 A
6171670 Sudo Jan 2001 B1
6175612 Sato Jan 2001 B1
6177142 Felts Jan 2001 B1
6180185 Felts Jan 2001 B1
6180191 Felts Jan 2001 B1
6188079 Juvinall Feb 2001 B1
6189484 Yin Feb 2001 B1
6190992 Sandhu Feb 2001 B1
6193853 Yumshtyk Feb 2001 B1
6196155 Setoyama Mar 2001 B1
6197166 Moslehi Mar 2001 B1
6200658 Walther Mar 2001 B1
6200675 Neerinck Mar 2001 B1
6204922 Chalmers Mar 2001 B1
6210791 Skoog Apr 2001 B1
6214422 Yializis Apr 2001 B1
6217716 Fai Lai Apr 2001 B1
6223683 Plester May 2001 B1
6236459 Negahdaripour May 2001 B1
6245190 Masuda Jun 2001 B1
6248219 Wellerdieck Jun 2001 B1
6248397 Ye Jun 2001 B1
6251792 Collins Jun 2001 B1
6254983 Namiki Jul 2001 B1
6261643 Hasz Jul 2001 B1
6263249 Stewart Jul 2001 B1
6271047 Ushio Aug 2001 B1
6276296 Plester Aug 2001 B1
6277331 Konrad Aug 2001 B1
6279505 Plester Aug 2001 B1
6284986 Dietze Sep 2001 B1
6306132 Moorman Oct 2001 B1
6308556 Sagi Oct 2001 B1
6322661 Bailey, III Nov 2001 B1
6331174 Reinhard et al. Dec 2001 B1
6344034 Sudo Feb 2002 B1
6346596 Mallen Feb 2002 B1
6348967 Nelson Feb 2002 B1
6350415 Niermann Feb 2002 B1
6351075 Barankova Feb 2002 B1
6352629 Wang Mar 2002 B1
6354452 DeSalvo Mar 2002 B1
6355033 Moorman Mar 2002 B1
6365013 Beele Apr 2002 B1
6375022 Zurcher Apr 2002 B1
6376028 Laurent Apr 2002 B1
6379757 Iacovangelo Apr 2002 B1
6382441 Carano May 2002 B1
6394979 Sharp May 2002 B1
6396024 Doughty May 2002 B1
6399944 Vasilyev Jun 2002 B1
6402885 Loewenhardt Jun 2002 B2
6410926 Munro Jun 2002 B1
6413645 Graff Jul 2002 B1
6432494 Yang Aug 2002 B1
6432510 Kim Aug 2002 B1
6470650 Lohwasser Oct 2002 B1
6471822 Yin Oct 2002 B1
6475622 Namiki Nov 2002 B2
6482509 Buch-Rasmussen et al. Nov 2002 B2
6486081 Ishikawa Nov 2002 B1
6500500 Okamura Dec 2002 B1
6503579 Murakami Jan 2003 B1
6518195 Collins Feb 2003 B1
6524282 Sudo Feb 2003 B1
6524448 Brinkmann Feb 2003 B2
6539890 Felts Apr 2003 B1
6544610 Minami Apr 2003 B1
6551267 Cohen Apr 2003 B1
6558679 Flament-Garcia et al. May 2003 B2
6562010 Gyure May 2003 B1
6562189 Quiles May 2003 B1
6565791 Laurent May 2003 B1
6582426 Moorman Jun 2003 B2
6582823 Sakhrani et al. Jun 2003 B1
6584828 Sagi Jul 2003 B2
6595961 Hetzler Jul 2003 B2
6597193 Lagowski Jul 2003 B2
6599569 Humele Jul 2003 B1
6599594 Walther Jul 2003 B1
6602206 Niermann Aug 2003 B1
6616632 Sharp Sep 2003 B2
6620139 Plicchi Sep 2003 B1
6620334 Kanno Sep 2003 B2
6623861 Martin Sep 2003 B2
6638403 Inaba Oct 2003 B1
6638876 Levy Oct 2003 B2
6645354 Gorokhovsky Nov 2003 B1
6645635 Muraki Nov 2003 B2
6651835 Iskra Nov 2003 B2
6652520 Moorman Nov 2003 B2
6656540 Sakamoto Dec 2003 B2
6658919 Chatard Dec 2003 B2
6662957 Zurcher Dec 2003 B2
6663601 Hetzler Dec 2003 B2
6663603 Gyure Dec 2003 B1
6670200 Ushio Dec 2003 B2
6673199 Yamartino Jan 2004 B1
6680091 Buch-Rasmussen et al. Jan 2004 B2
6680621 Savtchouk Jan 2004 B2
6683308 Itagaki Jan 2004 B2
6684683 Potyrailo Feb 2004 B2
6702898 Hosoi Mar 2004 B2
6706412 Yializis Mar 2004 B2
6746430 Lubrecht Jun 2004 B2
6749078 Iskra Jun 2004 B2
6752899 Singh Jun 2004 B1
6753972 Hirose Jun 2004 B1
6757056 Meeks Jun 2004 B1
6764714 Wei Jul 2004 B2
6765466 Miyata Jul 2004 B2
6766682 Engle Jul 2004 B2
6774018 Mikhael Aug 2004 B2
6796780 Chatard Sep 2004 B1
6800852 Larson Oct 2004 B2
6808753 Rule Oct 2004 B2
6810106 Sato Oct 2004 B2
6815014 Gabelnick Nov 2004 B2
6818310 Namiki Nov 2004 B2
6822015 Muraki Nov 2004 B2
6827972 Darras Dec 2004 B2
6837954 Carano Jan 2005 B2
6844075 Saak Jan 2005 B1
6853141 Hoffman Feb 2005 B2
6858259 Affinito Feb 2005 B2
6863731 Elsayed-Ali Mar 2005 B2
6864773 Perrin Mar 2005 B2
6866656 Tingey Mar 2005 B2
6872428 Yang Mar 2005 B2
6876154 Appleyard Apr 2005 B2
6885727 Tamura Apr 2005 B2
6887578 Gleason May 2005 B2
6891158 Larson May 2005 B2
6892567 Morrow May 2005 B1
6899054 Bardos May 2005 B1
6905769 Komada Jun 2005 B2
6910597 Iskra Jun 2005 B2
6911779 Madocks Jun 2005 B2
6919107 Schwarzenbach Jul 2005 B2
6919114 Darras Jul 2005 B1
6933460 Vanden Brande Aug 2005 B2
6946164 Huang Sep 2005 B2
6952949 Moore Oct 2005 B2
6960393 Yializis Nov 2005 B2
6962671 Martin Nov 2005 B2
6965221 Lipcsei Nov 2005 B2
6981403 Ascheman Jan 2006 B2
6989675 Kesil Jan 2006 B2
6995377 Darr Feb 2006 B2
7029755 Terry Apr 2006 B2
7029803 Becker Apr 2006 B2
7039158 Janik May 2006 B1
7052736 Wei May 2006 B2
7052920 Ushio May 2006 B2
7059268 Russell Jun 2006 B2
7067034 Bailey, III Jun 2006 B2
7074501 Czeremuszkin Jul 2006 B2
7098453 Ando Aug 2006 B2
7109070 Behle Sep 2006 B2
7112352 Schaepkens Sep 2006 B2
7112541 Xia Sep 2006 B2
7115310 Jaccoud Oct 2006 B2
7118538 Konrad Oct 2006 B2
7119908 Nomoto Oct 2006 B2
7121135 Moore Oct 2006 B2
7130373 Omote Oct 2006 B2
7150299 Hertzler Dec 2006 B2
7160292 Moorman Jan 2007 B2
7180849 Hirokane Feb 2007 B2
7183197 Won Feb 2007 B2
7186242 Gyure Mar 2007 B2
7188734 Konrad Mar 2007 B2
7189290 Hama Mar 2007 B2
7193724 Isei Mar 2007 B2
7198685 Hetzler Apr 2007 B2
7206074 Fujimoto Apr 2007 B2
7214214 Sudo May 2007 B2
7244381 Chatard Jul 2007 B2
7253892 Semersky Aug 2007 B2
7286242 Kim Oct 2007 B2
7288293 Koulik Oct 2007 B2
7297216 Hetzler Nov 2007 B2
7297640 Xie Nov 2007 B2
7300684 Boardman Nov 2007 B2
7303789 Saito Dec 2007 B2
7303790 Delaunay Dec 2007 B2
7306852 Komada Dec 2007 B2
7332227 Hardman Feb 2008 B2
7338576 Ono Mar 2008 B2
7339682 Aiyer Mar 2008 B2
7344766 Sorensen Mar 2008 B1
7348055 Chappa Mar 2008 B2
7348192 Mikami Mar 2008 B2
7362425 Meeks Apr 2008 B2
7381469 Moelle Jun 2008 B2
7390573 Korevaar Jun 2008 B2
7399500 Bicker Jul 2008 B2
7405008 Domine Jul 2008 B2
7409313 Ringermacher Aug 2008 B2
7411685 Takashima Aug 2008 B2
RE40531 Graff Oct 2008 E
7431989 Sakhrani Oct 2008 B2
7438783 Miyata Oct 2008 B2
7444955 Boardman Nov 2008 B2
7455892 Goodwin Nov 2008 B2
7480363 Lasiuk Jan 2009 B2
7488683 Kobayashi Feb 2009 B2
7494941 Kasahara Feb 2009 B2
7507378 Reichenbach Mar 2009 B2
7513953 Felts Apr 2009 B1
7520965 Wei Apr 2009 B2
7521022 Konrad Apr 2009 B2
7534615 Havens May 2009 B2
7534733 Bookbinder May 2009 B2
RE40787 Martin Jun 2009 E
7541069 Tudhope Jun 2009 B2
7547297 Brinkhues Jun 2009 B2
7552620 DeRoos Jun 2009 B2
7553529 Sakhrani Jun 2009 B2
7555934 DeRoos Jul 2009 B2
7569035 Wilmot Aug 2009 B1
7579056 Brown Aug 2009 B2
7582868 Jiang Sep 2009 B2
7586824 Hirokane Sep 2009 B2
7595097 Iacovangelo Sep 2009 B2
7608151 Tudhope Oct 2009 B2
7609605 Hirokane Oct 2009 B2
7618686 Colpo Nov 2009 B2
7624622 Mayer Dec 2009 B1
7625494 Honda Dec 2009 B2
7641636 Moesli Jan 2010 B2
7645696 Dulkin Jan 2010 B1
7648481 Geiger Jan 2010 B2
7682816 Kim Mar 2010 B2
7691308 Brinkhues Apr 2010 B2
7694403 Moulton Apr 2010 B2
7699933 Lizenberg Apr 2010 B2
7704683 Wittenberg Apr 2010 B2
7713638 Moelle May 2010 B2
7736689 Chappa Jun 2010 B2
7740610 Moh Jun 2010 B2
7744567 Glowacki Jun 2010 B2
7744790 Behle Jun 2010 B2
7745228 Schwind Jun 2010 B2
7745547 Auerbach Jun 2010 B1
7749202 Miller Jul 2010 B2
7749914 Honda Jul 2010 B2
7754302 Yamasaki Jul 2010 B2
7766882 Sudo Aug 2010 B2
7780866 Miller Aug 2010 B2
7785862 Kim Aug 2010 B2
7790475 Galbraith Sep 2010 B2
7798993 Lim Sep 2010 B2
7803305 Ahern Sep 2010 B2
7807242 Soerensen Oct 2010 B2
7815922 Chaney Oct 2010 B2
7846293 Iwasaki Dec 2010 B2
7854889 Perot Dec 2010 B2
7867366 McFarland Jan 2011 B1
7901783 Rose Mar 2011 B2
7905866 Haider Mar 2011 B2
7922880 Pradhan Apr 2011 B1
7922958 D'Arrigo Apr 2011 B2
7927315 Sudo Apr 2011 B2
7931955 Behle Apr 2011 B2
7932678 Madocks Apr 2011 B2
7934613 Sudo May 2011 B2
7943205 Schaepkens May 2011 B2
7947337 Kuepper May 2011 B2
7955986 Hoffman Jun 2011 B2
7960043 Harris Jun 2011 B2
7964438 Roca I Cabarrocas Jun 2011 B2
7967945 Glukhoy Jun 2011 B2
7975646 Rius Jul 2011 B2
7985188 Felts Jul 2011 B2
8002754 Kawamura Aug 2011 B2
8025915 Haines Sep 2011 B2
8038858 Bures Oct 2011 B1
8039524 Chappa Oct 2011 B2
8056719 Porret Nov 2011 B2
8062266 McKinnon Nov 2011 B2
8066663 Sudo Nov 2011 B2
8066854 Storey Nov 2011 B2
8070917 Tsukamoto Dec 2011 B2
8075995 Zhao Dec 2011 B2
8092605 Shannon Jan 2012 B2
8101246 Fayet Jan 2012 B2
8101674 Kawauchi Jan 2012 B2
8105294 Araki Jan 2012 B2
8197452 Harding Jun 2012 B2
8227025 Lewis Jul 2012 B2
8258486 Avnery Sep 2012 B2
8268410 Moelle Sep 2012 B2
8273222 Wei Sep 2012 B2
8313455 DiGregorio Nov 2012 B2
8323166 Haines Dec 2012 B2
8389958 Vo-Dinh Mar 2013 B2
8397667 Behle Mar 2013 B2
8409441 Wilt Apr 2013 B2
8418650 Goto Apr 2013 B2
8435605 Aitken et al. May 2013 B2
8475886 Chen et al. Jul 2013 B2
8512796 Felts Aug 2013 B2
8524331 Honda Sep 2013 B2
8592015 Bicker Nov 2013 B2
8603638 Liu Dec 2013 B2
8618509 Vo-Dinh Dec 2013 B2
8623324 Diwu Jan 2014 B2
8633034 Trotter Jan 2014 B2
8747962 Bicker Jun 2014 B2
8802603 D'Souza Aug 2014 B2
8816022 Zhao Aug 2014 B2
9068565 Alarcon Jun 2015 B2
20010000279 Daniels Apr 2001 A1
20010021356 Konrad Sep 2001 A1
20010038894 Komada Nov 2001 A1
20010042510 Plester Nov 2001 A1
20010043997 Uddin Nov 2001 A1
20020006487 O'Connor Jan 2002 A1
20020007796 Gorokhovsky Jan 2002 A1
20020070647 Ginovker Jun 2002 A1
20020117114 Ikenaga Aug 2002 A1
20020125900 Savtchouk Sep 2002 A1
20020130674 Lagowski Sep 2002 A1
20020141477 Akahori Oct 2002 A1
20020153103 Madocks Oct 2002 A1
20020155218 Meyer Oct 2002 A1
20020170495 Nakamura Nov 2002 A1
20020176947 Darras Nov 2002 A1
20020182101 Koulik Dec 2002 A1
20020185226 Lea Dec 2002 A1
20020190207 Levy Dec 2002 A1
20030010454 Bailey, III Jan 2003 A1
20030013818 Hakuta Jan 2003 A1
20030029837 Trow Feb 2003 A1
20030031806 Jinks Feb 2003 A1
20030046982 Chartard Mar 2003 A1
20030102087 Ito Jun 2003 A1
20030119193 Hess Jun 2003 A1
20030159654 Arnold Aug 2003 A1
20030215652 O'Connor Nov 2003 A1
20030219547 Arnold Nov 2003 A1
20030232150 Arnold Dec 2003 A1
20040024371 Plicchi Feb 2004 A1
20040039401 Chow Feb 2004 A1
20040040372 Plester Mar 2004 A1
20040045811 Wang Mar 2004 A1
20040050744 Hama Mar 2004 A1
20040055538 Gorokhovsky Mar 2004 A1
20040071960 Weber Apr 2004 A1
20040082917 Hetzler Apr 2004 A1
20040084151 Kim May 2004 A1
20040125913 Larson Jul 2004 A1
20040135081 Larson Jul 2004 A1
20040149225 Weikart Aug 2004 A1
20040175961 Olsen Sep 2004 A1
20040177676 Moore Sep 2004 A1
20040195960 Czeremuszkin Oct 2004 A1
20040206309 Bera Oct 2004 A1
20040217081 Konrad Nov 2004 A1
20040247948 Behle Dec 2004 A1
20040267194 Sano Dec 2004 A1
20050000962 Crawford Jan 2005 A1
20050010175 Beedon Jan 2005 A1
20050019503 Komada Jan 2005 A1
20050037165 Ahern Feb 2005 A1
20050039854 Matsuyama Feb 2005 A1
20050045472 Nagata Mar 2005 A1
20050057754 Smith Mar 2005 A1
20050073323 Kohno Apr 2005 A1
20050075611 Heltzer Apr 2005 A1
20050075612 Lee Apr 2005 A1
20050161149 Yokota Jul 2005 A1
20050169803 Betz Aug 2005 A1
20050190450 Becker Sep 2005 A1
20050196629 Bariatinsky Sep 2005 A1
20050199571 Geisler Sep 2005 A1
20050206907 Fujimoto Sep 2005 A1
20050211383 Miyata Sep 2005 A1
20050223988 Behle Oct 2005 A1
20050227002 Lizenberg Oct 2005 A1
20050227022 Domine Oct 2005 A1
20050229850 Behle Oct 2005 A1
20050233077 Lizenberg Oct 2005 A1
20050233091 Kumar Oct 2005 A1
20050236346 Whitney Oct 2005 A1
20050260504 Becker Nov 2005 A1
20050284550 Bicker Dec 2005 A1
20060005608 Kitzhoffer Jan 2006 A1
20060013997 Kuepper Jan 2006 A1
20060014309 Sachdev Jan 2006 A1
20060024849 Zhu Feb 2006 A1
20060042755 Holmberg Mar 2006 A1
20060046006 Bastion Mar 2006 A1
20060051252 Yuan Mar 2006 A1
20060051520 Behle Mar 2006 A1
20060076231 Wei Apr 2006 A1
20060086320 Lizenberg Apr 2006 A1
20060099340 Behle May 2006 A1
20060121222 Audrich Jun 2006 A1
20060121613 Havens Jun 2006 A1
20060121623 He Jun 2006 A1
20060127699 Moelle Jun 2006 A1
20060135945 Bankiewicz Jun 2006 A1
20060138326 Jiang Jun 2006 A1
20060150909 Behle Jul 2006 A1
20060169026 Kage Aug 2006 A1
20060178627 Geiger Aug 2006 A1
20060183345 Nguyen Aug 2006 A1
20060192973 Aiyer Aug 2006 A1
20060196419 Tudhope Sep 2006 A1
20060198903 Storey Sep 2006 A1
20060198965 Tudhope Sep 2006 A1
20060200078 Konrad Sep 2006 A1
20060200084 Ito Sep 2006 A1
20060210425 Mirkarimi Sep 2006 A1
20060228497 Kumar Oct 2006 A1
20060260360 Dick Nov 2006 A1
20070003441 Wohleb Jan 2007 A1
20070009673 Fukazawa et al. Jan 2007 A1
20070017870 Belov Jan 2007 A1
20070048456 Keshner Mar 2007 A1
20070049048 Rauf Mar 2007 A1
20070051629 Donlik Mar 2007 A1
20070065680 Schultheis Mar 2007 A1
20070076833 Becker Apr 2007 A1
20070102344 Konrad May 2007 A1
20070123920 Inokuti May 2007 A1
20070148326 Hastings Jun 2007 A1
20070166187 Song Jul 2007 A1
20070184657 Iijima Aug 2007 A1
20070187229 Aksenov Aug 2007 A1
20070187280 Haines Aug 2007 A1
20070205096 Nagashima Sep 2007 A1
20070215009 Shimazu Sep 2007 A1
20070215046 Lupke Sep 2007 A1
20070218265 Harris Sep 2007 A1
20070224236 Boden Sep 2007 A1
20070229844 Holz Oct 2007 A1
20070231655 Ha Oct 2007 A1
20070232066 Bicker Oct 2007 A1
20070235890 Lewis Oct 2007 A1
20070243618 Hatchett Oct 2007 A1
20070251458 Mund Nov 2007 A1
20070258894 Melker et al. Nov 2007 A1
20070259184 Martin Nov 2007 A1
20070281108 Weikart Dec 2007 A1
20070281117 Kaplan Dec 2007 A1
20070287950 Kjeken Dec 2007 A1
20070287954 Zhao Dec 2007 A1
20070298189 Straemke Dec 2007 A1
20080011232 Ruis Jan 2008 A1
20080017113 Goto Jan 2008 A1
20080023414 Konrad Jan 2008 A1
20080027400 Harding Jan 2008 A1
20080045880 Kjeken Feb 2008 A1
20080050567 Kawashima Feb 2008 A1
20080050932 Lakshmanan Feb 2008 A1
20080053373 Mund Mar 2008 A1
20080069970 Wu Mar 2008 A1
20080071228 Wu Mar 2008 A1
20080081184 Kubo Apr 2008 A1
20080090039 Klein Apr 2008 A1
20080093245 Periasamy Apr 2008 A1
20080102206 Wagner May 2008 A1
20080109017 Herweck May 2008 A1
20080110852 Kuroda May 2008 A1
20080113109 Moelle May 2008 A1
20080118734 Goodwin May 2008 A1
20080131628 Abensour Jun 2008 A1
20080131638 Hutton Jun 2008 A1
20080139003 Pirzada Jun 2008 A1
20080145271 Kidambi Jun 2008 A1
20080187681 Hofrichter Aug 2008 A1
20080195059 Sudo Aug 2008 A1
20080202414 Yan Aug 2008 A1
20080206477 Rius Aug 2008 A1
20080210550 Walther Sep 2008 A1
20080220164 Bauch Sep 2008 A1
20080223815 Konrad Sep 2008 A1
20080233355 Henze Sep 2008 A1
20080260966 Hanawa Oct 2008 A1
20080268252 Garces Oct 2008 A1
20080277332 Liu Nov 2008 A1
20080289957 Takigawa Nov 2008 A1
20080292806 Wei Nov 2008 A1
20080295772 Park Dec 2008 A1
20080303131 Mcelerea Dec 2008 A1
20080312607 Delmotte Dec 2008 A1
20080314318 Han Dec 2008 A1
20090004091 Kang Jan 2009 A1
20090004363 Keshner Jan 2009 A1
20090017217 Hass Jan 2009 A1
20090022981 Yoshida Jan 2009 A1
20090029402 Papkovsky Jan 2009 A1
20090031953 Ingle Feb 2009 A1
20090032393 Madocks Feb 2009 A1
20090039240 Van Nijnatten Feb 2009 A1
20090053491 Loboda Feb 2009 A1
20090061237 Gates Mar 2009 A1
20090065485 O'Neill Mar 2009 A1
20090069790 Yokley Mar 2009 A1
20090081797 Fadeev Mar 2009 A1
20090099512 Digregorio Apr 2009 A1
20090104392 Takada Apr 2009 A1
20090117268 Lewis May 2009 A1
20090117389 Amberg-Schwab May 2009 A1
20090122832 Feist May 2009 A1
20090134884 Bosselmann May 2009 A1
20090137966 Rueckert May 2009 A1
20090142227 Fuchs Jun 2009 A1
20090142514 O'Neill Jun 2009 A1
20090147719 Kang Jun 2009 A1
20090149816 Hetzler Jun 2009 A1
20090155490 Bicker Jun 2009 A1
20090162571 Haines Jun 2009 A1
20090166312 Giraud Jul 2009 A1
20090176031 Armellin Jul 2009 A1
20090214801 Higashi Aug 2009 A1
20090220948 Oviso et al. Sep 2009 A1
20090263668 David Oct 2009 A1
20090274851 Goudar Nov 2009 A1
20090280268 Glukhoy Nov 2009 A1
20090297730 Glukhoy Dec 2009 A1
20090306595 Shih Dec 2009 A1
20090326517 Bork Dec 2009 A1
20100021998 Sanyal Jan 2010 A1
20100028238 Maschwitz Feb 2010 A1
20100034985 Krueger Feb 2010 A1
20100042055 Sudo Feb 2010 A1
20100075077 Bicker Mar 2010 A1
20100086808 Nagata Apr 2010 A1
20100089097 Brack Apr 2010 A1
20100104770 Goudar Apr 2010 A1
20100105208 Winniczek Apr 2010 A1
20100132762 Graham, Jr. Jun 2010 A1
20100145284 Togashi Jun 2010 A1
20100149540 Boukherroub Jun 2010 A1
20100174239 Yodfat Jul 2010 A1
20100174245 Halverson Jul 2010 A1
20100178490 Cerny Jul 2010 A1
20100185157 Kawamura Jul 2010 A1
20100186740 Lewis Jul 2010 A1
20100190036 Komvopoulos Jul 2010 A1
20100193461 Boutroy Aug 2010 A1
20100195471 Hirokane Aug 2010 A1
20100198554 Skliar Aug 2010 A1
20100204648 Stout Aug 2010 A1
20100230281 Park Sep 2010 A1
20100231194 Bauch Sep 2010 A1
20100237545 Haury Sep 2010 A1
20100264139 Kawachi Oct 2010 A1
20100273261 Chen Oct 2010 A1
20100275847 Yamasaki Nov 2010 A1
20100279397 Crawford Nov 2010 A1
20100298738 Felts Nov 2010 A1
20100298779 Hetzler Nov 2010 A1
20110037159 Mcelerea Feb 2011 A1
20110046570 Stout Feb 2011 A1
20110056912 Matsuyama Mar 2011 A1
20110062047 Haines Mar 2011 A1
20110065798 Hoang Mar 2011 A1
20110079582 Yonesu Apr 2011 A1
20110093056 Kaplan Apr 2011 A1
20110111132 Wei May 2011 A1
20110117202 Bourke, Jr. May 2011 A1
20110117288 Honda May 2011 A1
20110137263 Ashmead Jun 2011 A1
20110152820 Chattaraj Jun 2011 A1
20110159101 Kurdyumov et al. Jun 2011 A1
20110160662 Stout Jun 2011 A1
20110160663 Stout Jun 2011 A1
20110174220 Laure Jul 2011 A1
20110186537 Rodriguez San Juan et al. Aug 2011 A1
20110220490 Wei Sep 2011 A1
20110252899 Felts Oct 2011 A1
20110253674 Chung Oct 2011 A1
20110313363 D'Souza et al. Dec 2011 A1
20110319758 Wang Dec 2011 A1
20110319813 Kamen Dec 2011 A1
20120003497 Handy Jan 2012 A1
20120004339 Chappa Jan 2012 A1
20120021136 Dzengeleski Jan 2012 A1
20120031070 Slough Feb 2012 A1
20120035543 Kamen Feb 2012 A1
20120052123 Kurdyumov et al. Mar 2012 A9
20120053530 Zhao Mar 2012 A1
20120058351 Zhao Mar 2012 A1
20120065612 Stout Mar 2012 A1
20120097527 Kodaira Apr 2012 A1
20120097870 Leray Apr 2012 A1
20120108058 Ha May 2012 A1
20120109076 Kawamura May 2012 A1
20120123345 Felts May 2012 A1
20120141913 Lee Jun 2012 A1
20120143148 Zhao Jun 2012 A1
20120149871 Saxena Jun 2012 A1
20120171386 Bicker Jul 2012 A1
20120175384 Greter Jul 2012 A1
20120183954 Diwu Jul 2012 A1
20120205374 Klumpen Aug 2012 A1
20120231182 Stevens Sep 2012 A1
20120234720 Digregorio Sep 2012 A1
20120252709 Felts Oct 2012 A1
20130041241 Felts Feb 2013 A1
20130046375 Chen Feb 2013 A1
20130057677 Weil Mar 2013 A1
20130072025 Singh Mar 2013 A1
20130081953 Bruna et al. Apr 2013 A1
20130190695 Wu Jul 2013 A1
20130209704 Krueger Aug 2013 A1
20130296235 Alarcon Nov 2013 A1
20140010969 Bicker Jan 2014 A1
20140052076 Zhao Feb 2014 A1
20140054803 Chen Feb 2014 A1
20140099455 Stanley Apr 2014 A1
20140110297 Trotter Apr 2014 A1
20140147654 Walther May 2014 A1
20140151320 Chang Jun 2014 A1
20140151370 Chang Jun 2014 A1
20140187666 Aizenberg Jul 2014 A1
20140190846 Belt Jul 2014 A1
20140221934 Janvier Aug 2014 A1
20140251856 Larsson Sep 2014 A1
20140305830 Bicker Oct 2014 A1
20150165125 Foucher Jun 2015 A1
20150224263 Dugand Aug 2015 A1
Foreign Referenced Citations (316)
Number Date Country
414209 Oct 2006 AT
504533 Jun 2008 AT
2002354470 May 2007 AU
2085805 Dec 1992 CA
2277679 Jul 1997 CA
2355681 Jul 2000 CA
2571380 Jul 2006 CA
2718253 Sep 2009 CA
2268719 Aug 2010 CA
2546041 Apr 2003 CN
1711310 Dec 2005 CN
2766863 Mar 2006 CN
1898172 Jan 2007 CN
201002786 Jan 2008 CN
101147813 Mar 2008 CN
201056331 May 2008 CN
102581274 Jul 2012 CN
1147836 Apr 1969 DE
1147838 Apr 1969 DE
3632748 Apr 1988 DE
3908418 Sep 1990 DE
4214401 Mar 1993 DE
4204082 Aug 1993 DE
4316349 Nov 1994 DE
4438359 May 1996 DE
19707645 Aug 1998 DE
19830794 Jan 2000 DE
19912737 Jun 2000 DE
10010831 Sep 2001 DE
10154404 Jun 2003 DE
10201110 Oct 2003 DE
10242698 Mar 2004 DE
10246181 Apr 2004 DE
10353540 May 2004 DE
102004017236 Oct 2005 DE
102006061585 Feb 2008 DE
102008023027 Nov 2009 DE
0121340 Oct 1984 EP
0251812 Jan 1988 EP
0275965 Jul 1988 EP
0284867 Oct 1988 EP
0306307 Mar 1989 EP
0329041 Aug 1989 EP
0343017 Nov 1989 EP
0396919 Nov 1990 EP
0482613 Oct 1991 EP
0484746 Oct 1991 EP
0495447 Jul 1992 EP
0520519 Dec 1992 EP
0535810 Apr 1993 EP
0375778 Sep 1993 EP
0571116 Nov 1993 EP
0580094 Jan 1994 EP
0603717 Jun 1994 EP
0619178 Oct 1994 EP
0645470 Mar 1995 EP
0697378 Feb 1996 EP
0709485 May 1996 EP
0719877 Jul 1996 EP
0728676 Aug 1996 EP
0787824 Aug 1997 EP
0787828 Aug 1997 EP
0814114 Dec 1997 EP
0833366 Apr 1998 EP
0879611 Nov 1998 EP
0940183 Sep 1999 EP
0962229 Dec 1999 EP
0992610 Apr 2000 EP
1119034 Jul 2001 EP
0954272 Mar 2002 EP
1245694 Oct 2002 EP
1388594 Jan 2003 EP
1317937 Jun 2003 EP
1365043 Nov 2003 EP
1367145 Dec 2003 EP
1388593 Feb 2004 EP
1439241 Jul 2004 EP
1447459 Aug 2004 EP
1990639 Feb 2005 EP
1510595 Mar 2005 EP
1522403 Apr 2005 EP
1901067 Aug 2005 EP
1507894 Dec 2005 EP
1507723 Mar 2006 EP
1653192 May 2006 EP
1810758 Jul 2007 EP
1356260 Dec 2007 EP
1870117 Dec 2007 EP
1881088 Jan 2008 EP
1507887 Jul 2008 EP
1415018 Oct 2008 EP
2199264 Nov 2009 EP
1388594 Jan 2010 EP
2178109 Apr 2010 EP
1507895 Jul 2010 EP
2218465 Aug 2010 EP
2243751 Oct 2010 EP
2251671 Nov 2010 EP
2261185 Dec 2010 EP
2369038 Sep 2011 EP
1960279 Oct 2011 EP
2602354 Jun 2013 EP
2639330 Sep 2013 EP
891892 Nov 1942 FR
752822 Jul 1956 GB
1363762 Aug 1974 GB
1513426 Jun 1978 GB
1566251 Apr 1980 GB
2210826 Jun 1989 GB
2231197 Nov 1990 GB
2246794 Feb 1992 GB
2246795 Feb 1992 GB
2387964 Oct 2003 GB
56027330 Mar 1981 JP
58154602 Sep 1983 JP
59087307 May 1984 JP
59154029 Sep 1984 JP
S61183462 Aug 1986 JP
S62180069 Aug 1987 JP
S62290866 Dec 1987 JP
63124521 May 1988 JP
1023105 Jan 1989 JP
H01225775 Sep 1989 JP
1279745 Nov 1989 JP
2501490 May 1990 JP
3183759 Aug 1991 JP
H03260065 Nov 1991 JP
H03271374 Dec 1991 JP
4000373 Jan 1992 JP
4000374 Jan 1992 JP
4000375 Jan 1992 JP
4014440 Jan 1992 JP
H04124273 Apr 1992 JP
H0578844 Mar 1993 JP
05-006688 Apr 1993 JP
H05263223 Oct 1993 JP
6010132 Jan 1994 JP
6289401 Oct 1994 JP
7041579 Feb 1995 JP
7068614 Mar 1995 JP
7126419 May 1995 JP
7-304127 Nov 1995 JP
8025244 Jan 1996 JP
8084773 Apr 1996 JP
H08296038 Nov 1996 JP
9005038 Jan 1997 JP
10008254 Jan 1998 JP
10-130844 May 1998 JP
11-108833 Apr 1999 JP
11106920 Apr 1999 JP
H11256331 Sep 1999 JP
11344316 Dec 1999 JP
2000064040 Feb 2000 JP
2000109076 Apr 2000 JP
2001033398 Feb 2001 JP
2001231841 Aug 2001 JP
2002177364 Jun 2002 JP
2002206167 Jul 2002 JP
2002371364 Dec 2002 JP
2003171771 Jun 2003 JP
2003-268550 Sep 2003 JP
2003294431 Oct 2003 JP
2003305121 Oct 2003 JP
2004002928 Jan 2004 JP
2004008509 Jan 2004 JP
2004043789 Feb 2004 JP
2004100036 Apr 2004 JP
2004156444 Jun 2004 JP
2004168359 Jun 2004 JP
2004169087 Jun 2004 JP
2004203682 Jul 2004 JP
2004-253683 Sep 2004 JP
2004307935 Nov 2004 JP
2005035597 Feb 2005 JP
2005043285 Feb 2005 JP
2005132416 May 2005 JP
2005160888 Jun 2005 JP
2005-200044 Jul 2005 JP
2005200044 Jul 2005 JP
2005-241524 Sep 2005 JP
2005-290560 Oct 2005 JP
2005271997 Oct 2005 JP
2005290561 Oct 2005 JP
2006-064416 Mar 2006 JP
2006111967 Apr 2006 JP
2006160268 Jun 2006 JP
2006-224992 Aug 2006 JP
2006249577 Sep 2006 JP
2007050898 Mar 2007 JP
2007231386 Sep 2007 JP
2007246974 Sep 2007 JP
2008-132766 Jun 2008 JP
2008174793 Jul 2008 JP
2009-062620 Mar 2009 JP
2009062620 Mar 2009 JP
2009079298 Apr 2009 JP
2009084203 Apr 2009 JP
2009185330 Aug 2009 JP
2010155134 Jul 2010 JP
2012210315 Nov 2012 JP
5362941 Dec 2013 JP
10-2005-0100367 Oct 2005 KR
10-2006-0029694 Apr 2006 KR
10-068559481 Feb 2007 KR
1530913 Dec 1989 SU
200703536 Jan 2007 TW
WO9324243 Dec 1993 WO
WO9400247 Jan 1994 WO
WO9426497 Nov 1994 WO
WO9524275 Sep 1995 WO
WO9711482 Mar 1997 WO
WO9713802 Apr 1997 WO
WO98-27926 Jul 1998 WO
WO9845871 Oct 1998 WO
WO9917334 Apr 1999 WO
WO9941425 Aug 1999 WO
WO9950471 Oct 1999 WO
WO0038566 Jul 2000 WO
WO0104668 Jan 2001 WO
WO0125788 Apr 2001 WO
WO0154816 Aug 2001 WO
WO0156706 Aug 2001 WO
WO0170403 Sep 2001 WO
WO0243116 May 2002 WO
WO0249925 Jun 2002 WO
WO02056333 Jul 2002 WO
WO02072914 Sep 2002 WO
WO03033426 Sep 2002 WO
WO02076709 Oct 2002 WO
WO03014415 Feb 2003 WO
WO03038143 May 2003 WO
WO03040649 May 2003 WO
WO03044240 May 2003 WO
WO2005035147 Apr 2005 WO
WO2005052555 Jun 2005 WO
WO2005051525 Jun 2005 WO
WO2005103605 Nov 2005 WO
WO2006012281 Feb 2006 WO
WO2006027568 Mar 2006 WO
WO2006029743 Mar 2006 WO
WO2006044254 Apr 2006 WO
WO2006048650 May 2006 WO
WO2006048276 May 2006 WO
WO2006048277 May 2006 WO
WO2006069774 Jul 2006 WO
WO2006135755 Dec 2006 WO
WO2007028061 Mar 2007 WO
WO2007035741 Mar 2007 WO
WO2007036544 Apr 2007 WO
WO2007081814 Jul 2007 WO
WO2007089216 Aug 2007 WO
WO2007112328 Oct 2007 WO
WO2007120507 Oct 2007 WO
WO2007133378 Nov 2007 WO
WO2007134347 Nov 2007 WO
WO2008014438 Jan 2008 WO
WO2008024566 Feb 2008 WO
WO2008040531 Apr 2008 WO
WO2008047541 Apr 2008 WO
WO2008067574 Jun 2008 WO
WO2008071458 Jun 2008 WO
WO2008093335 Aug 2008 WO
2008121478 Oct 2008 WO
WO2009015862 Feb 2009 WO
WO2009020550 Feb 2009 WO
WO2009021257 Feb 2009 WO
WO2009030974 Mar 2009 WO
WO2009030975 Mar 2009 WO
WO2009030976 Mar 2009 WO
WO2009031838 Mar 2009 WO
WO2009040109 Apr 2009 WO
WO2009053947 Apr 2009 WO
WO2009112053 Sep 2009 WO
WO2009117032 Sep 2009 WO
WO2009118361 Oct 2009 WO
WO2009158613 Dec 2009 WO
WO2010047825 Apr 2010 WO
WO2010095011 Aug 2010 WO
WO2010132579 Nov 2010 WO
WO2010132581 Nov 2010 WO
WO2010132584 Nov 2010 WO
WO2010132585 Nov 2010 WO
WO2010132589 Nov 2010 WO
WO2010132591 Nov 2010 WO
WO2010034004 Nov 2010 WO
WO2010132579 Nov 2010 WO
WO2010132579 Nov 2010 WO
WO2010132589 Nov 2010 WO
WO2010132591 Nov 2010 WO
WO2011029628 Mar 2011 WO
WO2011007055 Jun 2011 WO
WO2011080543 Jul 2011 WO
WO2011082296 Jul 2011 WO
WO2011090717 Jul 2011 WO
WO2011143329 Nov 2011 WO
WO2011143509 Nov 2011 WO
WO2011143509 Nov 2011 WO
WO2011137437 Nov 2011 WO
WO2011143329 Nov 2011 WO
WO2011159975 Dec 2011 WO
WO2012003221 Jan 2012 WO
WO2012009653 Jan 2012 WO
WO2013045671 Apr 2013 WO
WO2013071138 May 2013 WO
WO2013071138 May 2013 WO
WO2013170044 Nov 2013 WO
WO2013170052 Nov 2013 WO
WO2014008138 Jan 2014 WO
WO2014059012 Apr 2014 WO
WO2014071061 May 2014 WO
WO2014078666 May 2014 WO
WO2014085346 Jun 2014 WO
WO2014085348 Jun 2014 WO
WO2014134577 Sep 2014 WO
WO2014144926 Sep 2014 WO
WO2014164928 Oct 2014 WO
Non-Patent Literature Citations (192)
Entry
US 5,645,643, 07/1997, Thomas (withdrawn)
Arganguren, Mirta I., Macosko, Christopher W., Thakkar, Bimal, and Tirrel, Matthew, “Interfacial Interactions in Silica Reinforced Silicones,” Materials Research Society Symposium Proceedings, vol. 170, 1990, pp. 303-308.
Patent Cooperation Treaty, International Preliminary Examining Authority, Notification of Transmittal of International Preliminary Report on Patentability, in international application No. PCT/US2011/036097, dated Nov. 13, 2012.
Australian Government, IP Australia, Patent Examination Report No. 1, in Application No. 2010249031, dated Mar. 13, 2014. (4 pages).
Australian Government, IP Australia, Patent Examination Report No. 1, in Application No. 2013202893, dated Mar. 13, 2014. (4 pages).
European Patent Office, Communication pursuant to Article 93(3) EPC, in Application No. 11 731 554.9 dated Apr. 15, 2014. (7 pages).
PCT, Notification Concerning Transmittal of International Preliminary Report on Patentability, in International application No. PCT/US2012/064489, dated May 22, 2014. (10 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2013/071750, dated Apr. 4, 2014. (13 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2014/019684, dated May 23, 2014. (16 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2014/023813, dated May 22, 2014. (11 pages).
European Patent Office, Communication pursuant to Article 94(3) EPC, in Application No. 11 736 511.4, dated Mar. 28, 2014.
PCT, Notification Concerning Transmittal of International Preliminary Report on Patentability, in International application No. PCT/US2011/042387, dated Jan. 17, 2013. (7 pages).
State Intellectual Property Office of the People's Republic of China, Notification of the First Office Action, in Application No. 201180032145.4, dated Jan. 30, 2014. (16 pages).
PCT, Notification Concerning Transmittal of International Preliminary Report on Patentability, in International application No. PCT/US2011/044215, dated Jan. 31, 2013. (14 pages).
Da Silva Sobrinho A S et al., “Transparent barrier coatings on polyethylene terephthalate by single-and dual-frequency plasma-enhanced chemical vapor deposition”, Journal of Vacuum Science and Technology; Part A, AVS/AIP, Melville, NY, US, vol. 16, No. 6, Nov. 1, 1998 (Nov. 1, 1998), pp. 3190-3198, XP01200471, ISSN: 0734-2101, DOI: 10.1116/1.581519 (9 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2014/029531, dated Jun. 20, 2014 (12 pages).
State Intellectual Property Office of the People's Republic of China, Notification of the Third Office Action, with translation, in Application No. 201080029199.0, dated Jun. 27, 2014 (19 pages).
Intellectual Property Office of Singapore, Invitation to Respond to Written Opinion, in Application No. 2012083077, dated Jun. 30, 2014 (12 pages).
PCT, Notification of Transmittal of International Preliminary Report on Patentability, in International application No. PCT/US13/40368, dated Jul. 16, 2014 (6 pages).
State Intellectual Property Office of the People's Republic of China, Notification of the Fourth Office Action in Application No. 201080029199.0, dated Mar. 18, 2015 (15 pages).
Hlobik, Plastic Pre-Fillable Syringe Systems (http://www.healthcarepackaging.com/package-type/Containers/plastic-prefillablesyringe-systems, Jun. 8, 2010).
PCT, Written Opinion of the International Preliminary Examining Authority, International application No. PCT/SU2013/071752, dated May 6, 2015.
Hopwood J Ed—CRC Press: “Plasma-assisted deposition”, Aug. 17, 1997 (Aug. 17, 1997), Handbook of Nanophase Materials, Chapter 6, pp. 141-197, XP008107730, ISBN: 978-0-8247-9469-9.
Bose, Sagarika and Constable, Kevin, Advanced Delivery Devices, Design & Evaluation of a Polymer-Based Prefillable Syringe for Biopharmaceuticals With Improved Functionality & Performance, JR Automation Technologies, May 2015.
PCT, Written Opinion of the International Preliminary Examining Authority, in International application No. PCT/US2013/071750, dated Jan. 20, 2015 (9 pages).
PCT, Written Opinion of the International Preliminary Examining Authority, in International application No. PCT/US2013/064121, dated Nov. 21, 2014 (7 pages).
Japanese Patent Office, Decision of Rejection in Application No. 2012-510983, dated Jan. 20, 2015 (4 pages).
Australian Government, IP Australia, Patent Examination Report No. 1, in Application No. 2010249033, dated Dec. 19, 2014 (7 pages).
Australian Government, IP Australia, Patent Examination Report No. 1, in Application No. 2011252925, dated Dec. 2, 2014 (3 pages).
Australian Government, Patent Examination Report No. 2 in Application No. 2010249031 dated Apr. 21, 2015.
Japanese Patent Office, Notice of Reasons for Refusal in application No. 2013-510276, dated Mar. 31, 2015.
Tao, Ran et al., Condensationand Polymerization of Supersaturated Monomer Vapor, ACS Publications, 2012 American Chemical Society, ex.doi.org/10.1021/la303462q/Langmuir 2012, 28, 16580-16587.
State Intellectual Property Office of Teh People's Republic of China, Notification of First Office Action in Application No. 201080029201.4, dated Mar. 37, 2013. (15 pages).
Japanese Patent Office, Notice of Reasons for Refusal, Patent Application No. 2013-510276, mailed Mar. 8, 2016 (15 pages).
Patent Cooperation Treaty, Notification of Transmittal of International Preliminary Report on Patentability, in Application No. PCT/US2010/034576, dated Sep. 14, 2011.
Patent Cooperation Treaty, Notification of Transmittal of International Preliminary Report on Patentability, in Application No. PCT/US2010/034568, dated Sep. 14, 2011.
Patent Cooperation Treaty, International Search Report and Written Opinion, in Application No. PCT/US2011/036358, dated Sep. 9, 2011.
Patent Cooperation Treaty, International Search Report and Written Opinion, in Application No. PCT/US2011/036340, dated Aug. 1, 2011.
MacDonald, Gareth, “West and Daikyo Seiko Launch Ready Pack”, http://www.in-pharmatechnologist.com/Packaging/West-and-Daikyo-Seiko-launch-Ready-Pack, 2 pages, retrieved from the internet Sep. 22, 2011.
Kumer, Vijai, “Development of Terminal Sterilization Cycle for Pre-Filled Cyclic Olefin Polymer (COP) Syringes”, http://abstracts.aapspharmaceutica.com/ExpoAAPS09/CC/forms/attendee/index.aspx? content=sessionInfo&sessionId=401, 1 page, retrieved from the internet Sep. 22, 2011.
Quinn, F.J., “Biotech Lights Up the Glass Packaging Picture”, http://www.pharmaceuticalcommerce.com/frontEnd/main.php?idSeccion=840, 4 pages, retrieved from the internet Sep. 21, 2011.
Wen, Zai-Qing et al., Distribution of Silicone Oil in Prefilled Glass Syringes Probed with Optical and Spectroscopic Methods, PDA Journal of Pharmaceutical Science and Technology 2009, 63, pp. 149-158.
ZebraSci—Intelligent Inspection Products, webpage, http://zebrasci.com/index.html, retrieved from the internet Sep. 30, 2011.
Google search re “cyclic olefin polymer resin” syringe OR vial, http://www.google.com/search?sclient=psy-ab&hl=en&lr=&source=hp&q=%22cyclic+olefin+polymer+resin%22+syringe+OR+vial&btnG=Search&pbx=1&oq=%22cyclic+olefin+polymer+resin%22+syringe+OR+vial&aq, 1 page, retrieved from the internet Sep. 22, 2011.
Taylor, Nick, “West to Add CZ Vials as Glass QC Issues Drive Interest”, ttp://twitter.com/WestPharma/status/98804071674281986, 2 pages, retrieved from the internet Sep. 22, 2011.
Patent Cooperation Treaty, International Preliminary Examining Authority, Notification of Transmittal of International Preliminary Report on Patentability, in international application No. PCT/US2010/034571, dated Jun. 13, 2011.
Patent Cooperation Treaty, International Preliminary Examining Authority, Written Opinion of the International Preliminary Examining Authority, in international application No. PCT/US2010/034586, dated Aug. 23, 2011.
Patent Cooperation Treaty, International Preliminary Examining Authority, Written Opinion of the International Preliminary Examining Authority, in international application No. PCT/US2010/034568, dated May 30, 2011.
Silicone Oil Layer, Contract Testing, webpage, http://www.siliconization.com/downloads/siliconeoillayercontracttesting.pdf, retrieved from the internet Oct. 28, 2011.
Patent Cooperation Treaty, Notification of Transmittal of International Preliminary Report on Patentability, in PCT/US2010/034577, dated Nov. 24, 2011.
Patent Cooperation Treaty, Notification of Transmittal of International Preliminary Report on Patentability, in PCT/US2010/034582, dated Nov. 24, 2011.
Patent Cooperation Treaty, Notification of Transmittal of International Preliminary Report on Patentability, in PCT/US2010/034586, dated Dec. 20, 2011.
Patent Cooperation Treaty, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, in PCT/US2011/036097, dated Dec. 29, 2011.
“Oxford instruments plasmalab 80plus”, XP55015205, retrieved from the Internet on Dec. 20, 2011, URL:http://www.oxfordplasma.de/pdf—inst/plas—80.pdf.
Patent Cooperation Treaty, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, in PCT/US2011/044215, dated Dec. 29, 2011.
Japanese Patent Office, Notice of Reason(s) for Rejection in Patent application No. 2012-510983, dated Jan. 7, 2014. (6 pages).
Chinese Patent Office, Notification of the Second Office Action in Application No. 201080029199.0, dated Jan. 6, 2014. (26 pages).
Chinese Patent Office, Notification of the First Office Action in Application No. 201180023474.2, dated Dec. 23, 2013. (18 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2013/067852, dated Jan. 22, 2014. (9 pages).
Sahagian, Khoren; Larner, Mikki; Kaplan, Stephen L., “Altering Biological Interfaces with Gas Plasma: Example Applications”, Plasma Technology Systems, Belmont, CA, In SurFACTS in Biomaterials, Surfaces in Biomaterials Foundation, Summer 2013, 18(3), p. 1-5.
Daikyo Cyrystal Zenith Insert Needle Syringe System, West Delivering Innovative Services, West Pharmaceutical Services, Inc., 2010.
Daikyo Crystal Zenigh Syringes, West Pharmaceutical Services, Inc., www. WestPFSsolutions.com, #5659, 2011.
Zhang, Yongchao and Heller, Adam, Reduction of the Nonspecific Binding of a Target Antibody and of Its Enzyme-Labeled Detection Probe Enabling Electrochemical Immunoassay of Antibody through the 7 pg/mL-100 ng/ mL (40 fM-400 pM) Range, Department of Chemical Engineering and Texas Materials Institute, University of Texas at Austin, Anal. Chem. 2005, 7, 7758-7762. (6 pages).
Principles and Applications of Liquid Scintillation Counting, LSC Concepts—Fundamentals of Liquid Scintillation Counting, National Diagnostics, 2004, pp. 1-15.
Chikkaveeraiah, Bhaskara V. and Rusling, Dr. James, Non Specific Binding (NSB) in Antigen-Antibody Assays, University of Connecticut, Spring 2007. (13 pages).
Sahagian, Khoren; Larner, Mikki; Kaplan, Stephen L., “Cold Gas Plasma in Surface Modification of Medical Plastics”, Plasma Technology Systems, Belmont, CA, Publication pending. Presented at SPE Antec Medical Plastics Division, Apr. 23, 2013, Ohio.
Lipman, Melissa, “Jury Orders Becton to Pay $114M in Syringe Antitrust Case”, © 2003-2013, Portfolio Media, Inc., Law360, New York (Sep. 20, 2013, 2:53 PM ET), http://www.law360.com/articles/474334/print?section=ip, [retrieved Sep. 23, 2013].
Wikipedia, the free encyclopedia, http://en.wikipedia.org/wiki/Birefringence, page last modified Sep. 18, 2013 at 11:39. [retrieved on Oct. 8, 2013]. (5 pages).
Wikipedia, the free encyclopedia, http://en.wikipedia.org/wiki/Confocal—microscopy, page last modified Aug. 28, 2013 at 11:12. [retrieved on Oct. 8, 2013]. (4 pages).
Wang, Jun et al., “Fluorocarbon thin film with superhydrophobic property prepared by pyrolysis of hexafluoropropylene oxide”, Applied Surface Science, vol. 258, 2012, pp. 9782-9784 (4 pages).
Wang, Hong et al., “Ozone-Initiated Secondary Emission Rates of Aldehydes from Indoor surfaces in Four Homes”, American Chemical Society, Environment Science & Technology, vol. 40, No. 17, 2006, pp. 5263-5268 (6 pages).
Lewis, Hilton G. Pryce, et al., “HWCVD of Polymers: Commercialization and Scale-Up”, Thin Solid Films 517, 2009, pp. 3551-3554.
Wolgemuth, Lonny, “Challenges With Prefilled Syringes: The Parylene Solution”, Frederick Furness Publishing, www.ongrugdelivery.com, 2012, pp. 44-45.
History of Parylene (12 pages).
SCS Parylene HTX brochure, Stratamet Thin Film Corporation, Fremont, CA, 2012, retrieved from the Internet Feb. 13, 2013, http://www.stratametthinfilm.com/parylenes/htx. (2 pages).
SCS Parylene Properties, Specialty Coating Systems, Inc., Indianapolis, IN, 2011. (12 pages).
Werthheimer, M.R., Studies of the earliest stages of plasma-enhanced chemical vapor deposition of SiO2 on polymeric substrates, Thin Solid Films 382 (2001) 1-3, and references therein, United States Pharmacopeia 34. In General Chapters <1>, 2001.
Gibbins, Bruce and Warner, Lenna, The Role of Antimicrobial Silver Nanotechnology, Medical Device & Diagnostic Industry, Aug. 205, pp. 2-6.
MTI CVD Tube Furnace w Gas Delivery & Vacuum Pump, http://mtixtl.com/MiniCVDTubeFurnace2ChannelsGasVacuum-OTF-1200X-S50-2F.aspx (2 pages).
Lab-Built HFPO CVD Coater, HFPO Decomp to Give Thin Fluorocarbon Films, Applied Surface Science 2012 258 (24) 9782.
Technical Report No. 10, Journal of Parenteral Science and Technology, 42, Supplement 1988, Parenteral Formulation of Proteins and Peptides: Stability and Stabilizers, Parenteral Drug Association, 1988.
Technical Report No. 12, Journal of Parenteral Science and Technology, 42, Supplement 1988, Siliconization of Parenteral Drug Packaging Components, Parenteral Drug Association, 1988.
European Patent Office, Communication under Rule 71(3) EPC, in Application No. 10 162 760.2-1353, dated Oct. 25, 2013. (366 pages).
Wikipedia, the free encyclopedia, http://en.wikipedia.org/wiki/Difluorocarbene, page last modified Feb. 20, 2012 at 14:41. [retrieved on Sep. 7, 2012]. (4 pages).
O'Shaughnessy, W.S., et al., “Initiated Chemical Vapor Deposition of a Siloxane Coating for Insulation of Neutral Probes”, Thin Solid Films 517 (2008) 3612-3614. (3 pages).
Denler, et al., Investigations of SiOx-polymer “interphases” by glancing angle RBS with Li+ and Be+ ions, Nuclear Instruments and Methods in Physical Research B 208 (2003) 176-180, United States Pharmacopeia 34. In General Chapters <1>, 2003.
PCT, Invitation to Pay Additional Fees and Annex to Form PCT/ISA/206 Communication relating to the results of the partial international search in International Application No. PCT/US2013/071750, dated Feb. 14, 2014. (6 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2013/62247, dated Dec. 30, 2013. (13 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2013/043642, dated Dec. 5, 2013. (21 pages).
State Intellectual Property Office of the People's Republic of China, Notification of the Third Office Action, in Application No. 201080029201.4, dated Jul. 7, 2014 (15 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2013/064121, dated Mar. 24, 2014. (8 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2013/070325, dated Mar. 24, 2014. (16 pages).
PCT, Written Opinion of the International Preliminary Examining Authority, in International application No. PCT/USUS13/048709, dated Sep. 30, 2014 (4 pages).
PCT, Notification of Transmittal of the International Preliminary Report on Patentability, in International application No. PCT/USUS13/048709, dated Oct. 15, 2014 (7 pages).
PCT, Written Opinion of the International Preliminary Examining Authority, in International application No. PCT/USUS13/064121, dated Nov. 19, 2014 (8 pages).
PCT, Written Opinion of the International Preliminary Examining Authority, in International application No. PCT/USUS13/064121, dated Nov. 21, 2014 (7 pages).
Intellectual Property Corporation of Malaysia, Substantive Examintion Adverse Report (section 30(1)/30(2)), in Application No. PI 2011005486, dated Oct. 31, 2014 (3 pages).
Patent Office of the Russian Federation, Official Action, in Application No. 2011150499, dated Sep. 25, 2014 (4 pages).
Instituto Mexicano de la Propiedad Indutrial, Official Action, in Appilcation No. MX/a/2012/013129, dated Sep. 22, 2014 (5 pages).
Allison, H.L., The Real Markets for Transparent Barrier Films, 37th Annual Technical Conference Proceedings, 1994, ISBN 1-878068-13-X, pp. 458.
Bailey, R. et al., Thin-Film Multilayer Capacitors Using Pyrolytically Deposited Silicon Dioxide, IEEE Transactions on Parts, Hybrids, and Packaging, vol. PHP-12, No. 4, Dec. 1976, pp. 361-364.
Banks, B.A., et al., Fluoropolymer Filled SiO2 Coatings; Properties and Potential Applications, Society of Vacuum Coaters, 35th Annual Technical Conference Proceedings, 1992, ISBN 1-878068-11-3, pp. 89-93.
Baouchi, W., X-Ray Photoelectron Spectroscopy Study of Sodium Ion Migration through Thin Films of SiO2 Deposited on Sodalime Glass, 37th Annual Technical Conference Proceedings, 1994, ISBN 1-878068-13-X, pp. 419-422.
Boebel, F. et al., Simultaneous In Situ Measurement of Film Thickness and Temperature by Using Multiple Wavelengths Pyrometric Interferometry (MWPI), IEEE Transaction on Semiconductor Manufacturing, vol. 6, No. 2, May 1993, pp. 112-118.
Bush, V. et al., The Evolution of Evacuated Blood Collection Tubes, BD Diagnostics—Preanalytical Systems Newsletter, vol. 19, No. 1, 2009.
Chahroudi, D., Deposition Technology for Glass Barriers, 33rd Annual Technical Conference Proceedings, 1990, ISBN 1-878068-09-1, pp. 212-220.
Chahroudi, D., et al., Transparent Glass Barrier Coatings for Flexible Film Packaging, Society of Vacuum Coaters, 34th Annual Technical Conference Proceedings, 1991, ISBN 1-878068-10-5, pp. 130-133.
Chahroudi, D., Glassy Barriers from Electron Beam Web Coaters, 32nd Annual Technical Conference Proceedings, 1989, pp. 29-39.
Czeremuszkin, G. et al., Ultrathin Silicon-Compound Barrier Coatings for Polymeric Packaging Materials: An Industrial Perspective, Plasmas and Polymers, vol. 6, Nos. 1/2, Jun. 2001, pp. 107-120.
Ebihara, K. et al., Application of the Dielectric Barrier Discharge to Detect Defects in a Teflon Coated Metal Surface, 2003 J. Phys. D: Appl. Phys. 36 2883-2886, doi: 10.108810022-3727/36123/003, IOP Electronic Journals, http://www.iop.org/EJ/abstract/0022-3727/36/23/003, printed Jul. 14, 2009.
Egitto, F.D., et al., Plasma Modification of Polymer Surfaces, Society of Vacuum Coaters, 36th Annual Technical Conference Proceedings, 1993, ISBN 1-878068-12-1, pp. 10-21.
Erlat, A.G. et al., SIOx Gas Barrier Coatings on Polymer Substrates: Morphology and Gas Transport Considerations, ACS Publications, Journal of Physical Chemistry, published Jul. 2, 1999, http://pubs.acs.org/doi/ abs/10.1021/jp990737e, printed Jul. 14, 2009.
Fayet, P., et al., Commercialism of Plasma Deposited Barrier Coatings for Liquid Food Packaging, 37th Annual Technical Conference Proceedings, 1995, ISBN 1-878068-13-X, pp. 15-16.
Felts, J., Hollow Cathode Based Multi-Component Depositions, Vacuum Technology & Coating, Mar. 2004, pp. 48-55.
Felts, J.T., Thickness Effects on Thin Film Gas Barriers: Silicon-Based Coatings, Society of Vacuum Coaters, 34th Annual Technical Conference Proceedings, 1991, ISBN 1-878068-10-5, pp. 99-104.
Felts, J.T., Transparent Barrier Coatings Update: Flexible Substrates, Society of Vacuum Coaters, 36th Annual Technical Conference Proceedings, 1993, ISBN 1-878068-12-1, pp. 324-331.
Felts, J.T., Transparent Gas Barrier Technologies, 33rd Annual Technical Conference Proceedings, 1990, ISBN 1-878068-09-1, pp. 184-193.
Finson, E., et al., Transparent SiO2 Barrier Coatings: Conversion and Production Status, 37th Annual Technical Conference Proceedings, 1994, ISBN 1-878068-13-X, pp. 139-143.
Flaherty, T. et al., Application of Spectral Reflectivity to the Measurement of Thin-Film Thickness, Opto-Ireland 2002: Optics and Photonics Technologies and Applications, Proceedings of SPIE vol. 4876, 2003, pp. 976-983.
Hora, R., et al., Plasma Polymerization: A New Technology for Functional Coatings on Plastics, 36th Annual Technical Conference Proceedings, 1993, ISBN 1-878068-12-1, pp. 51-55.
Izu, M., et al., High Performance Clear CoatTM Barrier Film, 36th Annual Technical Conference Proceedings, 1993, ISBN 1-878068-12-1, pp. 333-340.
Jost, S., Plasma Polymerized Organosilicon Thin Films on Reflective Coatings, 33rd Annual Technical Conference Proceedings, 1990, ISBN 1-878068-09-1, pp. 344-346.
Kaganowicz, G., et al., Plasma-Deposited Coatings—Properties and Applications, 23rd Annual Technical Conference Proceedings, 1980, pp. 24-30.
Kamineni, V. et al., Thickness Measurement of Thin Metal Films by Optical Metrology, College of Nanoscale Science and Engineering, University of Albany, Albany, NY.
Klemberg-Sapieha, J.E., et al., Transparent Gas Barrier Coatings Produced by Dual Frequency PECVD, 36th Annual Technical Conference Proceedings, 1993, ISBN 1-878068-12-1, pp. 445-449.
Krug, T., et al., New Developments in Transparent Barrier Coatings, 36th Annual Technical Conference Proceedings, 1993, ISBN 1-878068-12-1, pp. 302-305.
Kuhr, M. et al., Multifunktionsbeschichtungen für innovative Applikationen von Kunststoff-Substraten, HiCotec Smart Coating Solutions.
Kulshreshtha, D.S., Specifications of a Spectroscopic Ellipsometer, Department of Physics & Astrophysics, University of Delhi, Delhi-110007, Jan. 16, 2009.
Krug, T.G., Transparent Barriers for Food Packaging, 33rd Annual Technical Conference Proceedings, 1990, ISBN 1-878068-09-1, pp. 163-169.
Lee, K. et al., The Ellipsometric Measurements of a Curved Surface, Japanese Journal of Applied Physics, vol. 44, No. 32, 2005, pp. L1015-L1018.
Lelait, L. et al., Microstructural Investigations of EBPVD Thermal Barrier Coatings, Journal De Physique IV, Colloque C9, supplément au Journal de Physique III, vol. 3, Dec. 1993, pp. 645-654.
Masso, J.D., Evaluation of Scratch Resistant and Antireflective Coatings for Plastic Lenses, 32nd Annual Technical Conference Proceedings, 1989, p. 237-240.
Misiano, C., et al., New Colourless Barrier Coatings (Oxygen & Water Vapor Transmission Rate) on Plastic Substrates, 35th Annual Technical Conference Proceedings, 1992, ISBN 1-878068-11-3, pp. 28-40.
Misiano, C., et al., Silicon Oxide Barrier Improvements on Plastic Substrate, Society of Vacuum Coaters, 34th Annual Technical Conference Proceedings, 1991, ISBN 1-878068-10-5, pp. 105-112.
Mount, E., Measuring Pinhole Resistance of Packaging, Corotec Corporation website, http://www.convertingmagazine.com, printed Jul. 13, 2009.
Murray, L. et al., The Impact of Foil Pinholes and Flex Cracks on the Moisture and Oxygen Barrier of Flexible Packaging.
Nelson, R.J., et al., Double-Sided QLF® Coatings for Gas Barriers, Society of Vacuum Coaters, 34th Annual Technical Conference Proceedings, 1991, ISBN 1-878068-10-5, pp. 113-117.
Nelson, R.J., Scale-Up of Plasma Deposited SiOx Gas Diffusion Barrier Coatings, 35th Annual Technical Conference Proceedings, 1992, ISBN 1-878068-11-3, pp. 75-78.
Novotny, V. J., Ultrafast Ellipsometric Mapping of Thin Films, IBM Technical Disclosure Bulletin, vol. 37, No. 02A, Feb. 1994, pp. 187-188.
Rüger, M., Die Pulse Sind das Plus, PICVD-Beschichtungsverfahren.
Schultz, A. et al., Detection and Identification of Pinholes in Plasma-Polymerised Thin Film Barrier Coatings on Metal Foils, Surface & Coatings Technology 200, 2005, pp. 213-217.
Stchakovsky, M. et al., Characterization of Barrier Layers by Spectroscopic Ellipsometry for Packaging Applications, Horiba Jobin Yvon, Application Note, Spectroscopic Ellipsometry, SE 14, Nov. 2005.
Teboul, E., Thi-Film Metrology: Spectroscopic Ellipsometer Becomes Industrial Thin-Film Tool, LaserFocusWorld, http://www.laserfocusworld.com/display—article, printed Jul. 14, 2009.
Teyssedre, G. et al., Temperature Dependence of the Photoluminescence in Poly(Ethylene Terephthalate) Films, Polymer 42, 2001, pp. 8207-8216.
Tsung, L. et al., Development of Fast CCD Cameras for In-Situ Electron Microscopy, Microsc Microanal 14(Supp 2), 2008.
Wood, L. et al., A Comparison of SiO2 Barrier Coated Polypropylene to Other Coated Flexible Substrates, 35th Annual Technical Conference Proceedings, 1992, ISBN 1-878068-11-3, pp. 59-62.
Yang, et al., Microstructure and tribological properties of SiOx/DLC films grown by PECVD, Surface and Coatings Technology, vol. 194, Issue 1, Apr. 20, 2005, pp. 128-135.
An 451, Accurate Thin Film Measurements by High-Resoluiton Transmission Electron Microscopy (HRTEM), Evans Alalytical Group, Version 1.0, Jun. 12, 2008, pp. 1-2.
Benefits of TriboGlide, TriboGlide Silicone-Free Lubrication Systems, http://www.triboglide.com/benfits.htm, printed Aug. 31, 2009.
Patent Cooperation Treaty, Written Opinion of the International Searching Authority with International Search Report in Application No. PCT/US2012/064489, dated Jan. 25, 2013.
Danish Patent and Trademark Office, Singapore Written Opinion, in Application No. 201108308-6, dated Dec. 6, 2012.
Danish Patent and Trademark Office, Singapore Search Report, in Application No. 201108308-6, dated Dec. 12, 2012.
Australian Government, IP Australia, Patent Examination Report No. 1, in Application No. 2012318242, dated Apr. 30, 2014. (6 pages).
State Intellectual Property Office of the People's Republic of China, Notification of the First Office Action, in Application No. 201180023461.5, dated May 21, 2014. (25 pages).
European Patent Office, Communication pursuant to Article 94(3) EPC, in Application No. 10162758.6 dated May 27, 2014. (7 pages).
European Patent Office, Communication pursuant to Article 94(3) EPC, in Application No. 10 162 758.6-1234, dated May 8, 2012 (6 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2013/040380, dated Sep. 3, 2013. (13 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2013/040368, dated Oct. 21, 2013. (21 pages).
PCT, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, in International application No. PCT/US2013/048709, dated Oct. 2, 2013. (7 pages).
Coclite A.M. et al., “On the relationship between the structure and the barrier performance of plasma deposited silicon dioxide-like films”, Surface and Coatings Technology, Elsevier, Amsterdam, NL, vol. 204, No. 24, Sep. 15, 2010 (Sep. 15, 2010), pp. 4012-4017, XPO27113381, ISSN: 0257-8972 [retrieved on Jun. 16, 2010] abstract, p. 4014, right-hand column—p. 4015, figures 2, 3.
Brunet-Bruneau A. et al., “Microstructural characterization of ion assisted Sio2 thin films by visible and infrared ellipsometry”, Journal of Vacuum Science and Technology: Part A, AVS/AIP, Melville, NY, US, vol. 16, No. 4, Jul. 1, 1998 (Jul. 1, 1998), pp. 2281-2286, XPO12004127, ISSN: 0734-2101, DOI: 10.1116/1.581341, p. 2283, right-hand column—p. 2284, left-hand column, figures 2, 4.
Coating Syringes, http://www.triboglide.com/syringes.htm, printed Aug. 31, 2009.
Coating/Production Process, http://www.triboglide.com/process.htm, printed Aug. 31, 2009.
Munich Exp, Materialica 2005: Fundierte Einblicke in den Werkstofsektor, Seite 1, von 4, ME095-6.
Schott Developing Syringe Production in United States, Apr. 14, 2009, http://www.schott.com/pharmaceutical—packaging, printed Aug. 31, 2009.
Sterile Prefillable Glass and Polymer Syringes, Schott forma vitrum, http://www.schott.com/pharmaceutical—packaging.
Transparent und recyclingfähig, neue verpackung, Dec. 2002, pp. 54-57.
European Patent Office, Communication with European Search Report, in Application No. 10162758.6, dated Aug. 19, 2010.
Griesser, Hans J., et al., Elimination of Stick-Slip of Elastomeric Sutures by Radiofrequency Glow Discharge Deposited Coatings, Biomed Mater. Res. Appl Biomater, 2000, vol. 53, 235-243, John Wiley & Sons, Inc.
European Patent Office, Communication with extended Search Report, in Application No. EP 10162761.0, dated Feb. 10, 2011.
European Patent Office, Communication with partial Search Report, in Application No. EP 10162758.6, dated Aug. 19, 2010.
European Patent Office, Communication with extended Search Report, in Application No. EP 10162758.6, dated Dec. 21, 2010.
Yang, et al., Microstructure and tribological properties of SiOx/DLC films grown by PECVD, Surface and Coatings Technology, vol. 194 (2005), Apr. 20, 2005, pp. 128-135.
European Patent Office, Communication with extended European search report, in Application No. EP10162756.0, dated Nov. 17, 2010.
Prasad, G.R. et al., “Biocompatible Coatings with Silicon and Titanium Oxides Deposited by PECVD”, 3rd Mikkeli International Industrial Coating Seminar, Mikkeli, Finland, Mar. 16-18, 2006.
European Patent Office, Communication with extended European search report, in Application No. EP10162757.8, dated Nov. 10, 2010.
Patent Cooperation Treaty, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, in PCT/US2010/034568, dated Jan. 21, 2011.
Patent Cooperation Treaty, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, in PCT/US2010/034571, dated Jan. 26, 2011.
Patent Cooperation Treaty, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, in PCT/US2010/034576, dated Jan. 25, 2011.
Patent Cooperation Treaty, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, in PCT/US2010/034577, dated Jan. 21, 2011.
Patent Cooperation Treaty, Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, in PCT/US2010/034582, dated Jan. 24, 2011.
European Patent Office, Communication with Extended Search Report, in Application No. EP 10162755.2, dated Nov. 9, 2010.
European Patent Office, Communication with Extended Search Report, in Application No. EP 10162760.2, dated Nov. 12, 2010.
PCT, Written Opinion of the International Searching Authority with International Search Report in Application No. PCT/US2010/034586, dated Mar. 15, 2011.
Shimojima, Atsushi et al., Structure and Properties of Multilayered Siloxane-Organic Hybrid Films Prepared Using Long-Chain Organotrialkoxysilanes Containing C═C Double Bonds, Journal of Materials Chemistry, 2007, vol. 17, pp. 658-663, © The Royal Society of Chemistry, 2007.
Sone, Hayato et al., Picogram Mass Sensor Using Resonance Frequency Shift of Cantilever, Japanese Journal of Applied Physics, vol. 43, No. 6A, 2004, pp. 3648-3651, © The Japan Society of Applied Physics.
Sone, Hayato et al., Femtogram Mass Sensor Using Self-Sensing Cantilever for Allergy Check, Japanese Journal of Applied Physics, vol. 45, No. 3B, 2006, pp. 2301-2304, © The Japan Society of Applied Physics.
Mallikarjunan, Anupama et al, The Effect of Interfacial Chemistry on Metal Ion Penetration into Polymeric Films, Mat. Res. Soc. Symp. Proc. vol. 734, 2003, © Materials Research Society.
Schonher, H., et al., Friction and Surface Dynamics of Polymers on the Nanoscale by AFM, STM and AFM Studies on (Bio)molecular Systems: Unravelling the Nanoworld. Topics in Current Chemistry, 2008, vol. 285, pp. 103-156, © Springer-Verlag Berlin Heidelberg.
Lang, H.P., Gerber, C., Microcantilever Sensors, STM and AFM Studies on (Bio)molecular Systems: Unravelling the Nanoworld. Topics in Current Chemistry, 2008, vol. 285, pp. 1-28, © Springer-Verlag Berlin Heidelberg.
Hanlon, Adriene Lepiane, Pak, Chung K., Pawlikowski, Beverly A., Decision on Appeal, Appeal No. 2005-1693, U.S. Appl. No. 10/192,333, dated Sep. 30, 2005.
Australian Government, IP Australia, Patent Examination Report No. 1, in Application No. 2011252925, dated Sep. 6, 2013 (3 pages).
Related Publications (1)
Number Date Country
20150293031 A1 Oct 2015 US
Provisional Applications (1)
Number Date Country
61721092 Nov 2012 US