using electric discharges

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CPC
C23C16/50

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/50using electric discharges

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Patents Grantslast 30 patents

Information Patent Grant
Remote capacitively coupled plasma deposition of amorphous silicon
- Patent number 12,365,986
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for forming metal-insulator-metal capacitors
- Patent number 12,369,336
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and deposition apparatus
- Patent number 12,368,030
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor chamber components with advanced coating techniques
- Patent number 12,362,150
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films using heterogeneous p...
- Patent number 12,359,311
- Issue date Jul 15, 2025
- Lam Research Corporation
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming thermally stable carbon film
- Patent number 12,362,181
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film stress control for plasma enhanced chemical vapor deposition
- Patent number 12,362,149
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,362,151
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and substrate processing apparatus
- Patent number 12,362,142
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Takashi Chiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for conductance liners in semiconductor proce...
- Patent number 12,354,847
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- Timothy Joseph Franklin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hafnium aluminum oxide coatings deposited by atomic layer deposition
- Patent number 12,351,910
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrophobic low-dielectric-constant film and preparation method the...
- Patent number 12,351,911
- Issue date Jul 8, 2025
- JIANGSU FAVORED NANOTECHNOLOGY CO., LTD.
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Uniform in situ cleaning and deposition
- Patent number 12,347,653
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming plasma coating
- Patent number 12,347,652
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Lance A. Scudder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filter box for a substrate processing system
- Patent number 12,347,648
- Issue date Jul 1, 2025
- Lam Research Corporation
- Miguel Benjamin Vasquez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for plasma-assisted and multi-step continuous preparation of...
- Patent number 12,340,982
- Issue date Jun 24, 2025
- Anhui University of Technology
- Yang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection and location of anomalous plasma events in fabrication ch...
- Patent number 12,340,992
- Issue date Jun 24, 2025
- Lam Research Corporation
- Yukinori Sakiyama
- G01 - MEASURING TESTING
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 12,338,531
- Issue date Jun 24, 2025
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radio frequency power return path
- Patent number 12,340,984
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Luke Bonecutter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for backside deposition of a substrate
- Patent number 12,341,053
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Ronald Nasman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaped showerhead for edge plasma modulation
- Patent number 12,338,530
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Saketh Pemmasani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tunable plasma exclusion zone in semiconductor fabrication
- Patent number 12,340,987
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Che Wei Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 12,331,403
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,331,402
- Issue date Jun 17, 2025
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liner for V-NAND word line stack
- Patent number 12,328,872
- Issue date Jun 10, 2025
- Applied Materials, Inc.
- Jacqueline S. Wrench
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for and method of manufacturing semiconductor device
- Patent number 12,327,710
- Issue date Jun 10, 2025
- Samsung Electronics Co., Ltd.
- Jiye Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reciprocating rotary CVD equipment and application method
- Patent number 12,325,917
- Issue date Jun 10, 2025
- Betone Technology Shanghai, Inc.
- Xiaoliang Jin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing substrate
- Patent number 12,325,919
- Issue date Jun 10, 2025
- Tokyo Electron Limited
- Masahiro Tabata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Helium-free silicon formation
- Patent number 12,315,724
- Issue date May 27, 2025
- Applied Materials, Inc.
- Zeqiong Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polycrystalline ceramic substrate
- Patent number 12,315,721
- Issue date May 27, 2025
- QROMIS, Inc.
- Vladimir Odnoblyudov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAP-FILLING METHOD FOR A SEMICONDUCTOR DEVICE AND METHOD OF MANUFAC...
- Publication number 20250233017
- Publication date Jul 17, 2025
- WONIK IPS CO., LTD.
- Chang Gyu SONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILANOLS AND SILANEDIOLS
- Publication number 20250230175
- Publication date Jul 17, 2025
- VERSUM MATERIALS US, LLC
- DANIEL MOSER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION ON METAL-CONTAINING MASK USING PROMOTER
- Publication number 20250224677
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Katie Lutker-Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPOSITIONS COMPRISING SILACYCLOALKANES AND METHODS USING SAME FOR...
- Publication number 20250223466
- Publication date Jul 10, 2025
- VERSUM MATERIALS US, LLC
- RAYMOND N. VRTIS
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
TREATING SILICON NITRIDE BASED DIELECTRIC FILMS
- Publication number 20250218763
- Publication date Jul 3, 2025
- Applied Materials, Inc.
- Dongjoon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218733
- Publication date Jul 3, 2025
- TES CO., LTD.
- Woo-Young CHUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS CARBON FILM AND DEPOSITION METHOD THEREOF
- Publication number 20250218773
- Publication date Jul 3, 2025
- TES CO., LTD.
- Seung Hwan JEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING HYDROGEN-CONTAINING CARBON FILM USING PECVD
- Publication number 20250215556
- Publication date Jul 3, 2025
- TES CO., LTD.
- Sungwoo LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS THAT UTILIZE PHOTOSENSITIVE ORGANOMETALLIC OXIDES FORMED BY...
- Publication number 20250207247
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Kandabara Tapily
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
- Publication number 20250207287
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXHAUST COMPONENT CLEANING METHOD AND SUBSTRATE PROCESSING APPARATU...
- Publication number 20250207249
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Toshiharu Watarai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode and Coil Configurations For Processing Chambers and Relat...
- Publication number 20250210304
- Publication date Jun 26, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE CONFIGURATIONS AND MAGNET CONFIGURATIONS FOR PROCESSING C...
- Publication number 20250210319
- Publication date Jun 26, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND INSTALLATION FOR PLASMA COATING
- Publication number 20250207260
- Publication date Jun 26, 2025
- CCR GmbH, Beschichtungstechnologie
- Valbon DAUT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRECURSOR FOR FORMING SILICON-CONTAINING THIN FILM WITH HIGH HARDNE...
- Publication number 20250201549
- Publication date Jun 19, 2025
- EGTM Co., Ltd.
- Sung Jun Ji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND D...
- Publication number 20250201628
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20250201526
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR PROCESSING CHAMBERS AND RELATED HEATING CONFIGURATIONS, MET...
- Publication number 20250201594
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUMING STSTEM, SEMICONDUCTOR PROCESS DEVICE AND VACUUMING METHOD...
- Publication number 20250197993
- Publication date Jun 19, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xiaobin SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION WITH RADIO-FREQUENCY POWER...
- Publication number 20250197995
- Publication date Jun 19, 2025
- LAM RESEARCH CORPORATION
- Jeremy David Fields
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTACT LENS PACKAGE AND METHOD AND PACKAGING MACHINE FOR PRODUCING...
- Publication number 20250194767
- Publication date Jun 19, 2025
- KOCH Pac-Systeme GmbH
- Karl Kappler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250201551
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Kazuyuki OKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETECTION CHIP AND MODIFICATION METHOD THEREFOR
- Publication number 20250186996
- Publication date Jun 12, 2025
- BOE TECHNOLOGY GROUP CO., LTD.
- Yudan YIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for Performing Plasma Treatment, and Method for Performing P...
- Publication number 20250188610
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Jianming HAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE ASSEMBLY AND PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION EQ...
- Publication number 20250188614
- Publication date Jun 12, 2025
- YINGKOU JINCHEN MACHINERY CO., LTD.
- Yuming WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND METHOD OF CLEANING INSIDE OF CHAMBER
- Publication number 20250191896
- Publication date Jun 12, 2025
- ASM IP HOLDING B.V.
- Ryo MIYAMA
- B08 - CLEANING
Information Patent Application
UNIFORM GAPFILL DEPOSITION ON SEMICONDUCTOR SUBSTRATES WITH VARYING...
- Publication number 20250191909
- Publication date Jun 12, 2025
- Applied Materials, Inc.
- Bharati Neelamraju
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Compositions and Methods Using Same for Deposition of Silicon-Conta...
- Publication number 20250188605
- Publication date Jun 12, 2025
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROBUST ONO FILMS AND METHODS OF MAKING THEREOF
- Publication number 20250185263
- Publication date Jun 5, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Saiful Islam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RE...
- Publication number 20250183066
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Abbas RASTEGAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using electric discharges

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Remote capacitively coupled plasma deposition of amorphous silicon

Method and system for forming metal-insulator-metal capacitors

Deposition method and deposition apparatus

Semiconductor chamber components with advanced coating techniques

Conformal deposition of silicon carbide films using heterogeneous p...

Methods of forming thermally stable carbon film

Film stress control for plasma enhanced chemical vapor deposition

Plasma processing apparatus and plasma processing method

Plasma processing method and substrate processing apparatus

Methods and apparatus for conductance liners in semiconductor proce...

Hafnium aluminum oxide coatings deposited by atomic layer deposition

Hydrophobic low-dielectric-constant film and preparation method the...

Uniform in situ cleaning and deposition

Method for forming plasma coating

Filter box for a substrate processing system

Method for plasma-assisted and multi-step continuous preparation of...

Detection and location of anomalous plasma events in fabrication ch...

Spatially tunable deposition to compensate within wafer differentia...

Radio frequency power return path

System for backside deposition of a substrate

Shaped showerhead for edge plasma modulation

Tunable plasma exclusion zone in semiconductor fabrication

Substrate processing method and substrate processing device

Integrated showerhead with thermal control for delivering radical a...

Liner for V-NAND word line stack

Apparatus for and method of manufacturing semiconductor device

Reciprocating rotary CVD equipment and application method

Apparatus for processing substrate

Helium-free silicon formation

Polycrystalline ceramic substrate

Patents Applicationslast 30 patents

GAP-FILLING METHOD FOR A SEMICONDUCTOR DEVICE AND METHOD OF MANUFAC...

SILANOLS AND SILANEDIOLS

SELECTIVE DEPOSITION ON METAL-CONTAINING MASK USING PROMOTER

COMPOSITIONS COMPRISING SILACYCLOALKANES AND METHODS USING SAME FOR...

TREATING SILICON NITRIDE BASED DIELECTRIC FILMS

SUBSTRATE PROCESSING APPARATUS

AMORPHOUS CARBON FILM AND DEPOSITION METHOD THEREOF

METHOD FOR FORMING HYDROGEN-CONTAINING CARBON FILM USING PECVD

METHODS THAT UTILIZE PHOTOSENSITIVE ORGANOMETALLIC OXIDES FORMED BY...

SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...

EXHAUST COMPONENT CLEANING METHOD AND SUBSTRATE PROCESSING APPARATU...

Electrode and Coil Configurations For Processing Chambers and Relat...

ELECTRODE CONFIGURATIONS AND MAGNET CONFIGURATIONS FOR PROCESSING C...

METHOD AND INSTALLATION FOR PLASMA COATING

PRECURSOR FOR FORMING SILICON-CONTAINING THIN FILM WITH HIGH HARDNE...

METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND D...

METHODS AND SYSTEMS FOR DEPOSITING A LAYER

MODULAR PROCESSING CHAMBERS AND RELATED HEATING CONFIGURATIONS, MET...

VACUUMING STSTEM, SEMICONDUCTOR PROCESS DEVICE AND VACUUMING METHOD...

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION WITH RADIO-FREQUENCY POWER...

CONTACT LENS PACKAGE AND METHOD AND PACKAGING MACHINE FOR PRODUCING...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

DETECTION CHIP AND MODIFICATION METHOD THEREFOR

Device for Performing Plasma Treatment, and Method for Performing P...

ELECTRODE ASSEMBLY AND PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION EQ...

SUBSTRATE TREATMENT APPARATUS AND METHOD OF CLEANING INSIDE OF CHAMBER

UNIFORM GAPFILL DEPOSITION ON SEMICONDUCTOR SUBSTRATES WITH VARYING...

Compositions and Methods Using Same for Deposition of Silicon-Conta...

ROBUST ONO FILMS AND METHODS OF MAKING THEREOF

PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RE...