Number | Name | Date | Kind |
---|---|---|---|
3617824 | Shinoda et al. | Nov 1971 | |
4109372 | Geffken | Aug 1978 | |
4180596 | Crowder et al. | Dec 1979 | |
4283439 | Higashinakagawa et al. | Aug 1981 | |
4285761 | Fatula et al. | Aug 1981 | |
4339869 | Reihl et al. | Jul 1982 |
Entry |
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G. J. van Gurp and C. Langereis, "Cobalt Silicide Layers on Si. I. Structure and Growth," Journal of Applied Physics, vol. 46, No. 10, pp. 4301-4307 (1975). |
R. K. Watts et al., "Electron Beam Lithography for Small MOSFETs," IEDM Digest (Wash., D.C., 1980), pp. 772-775. |