Claims
- 1. A method for color inspection of a device present on a surface, the method comprising:
computing spatial feature data related to first, second and third components of light in a first color space and received from at least one associated device present on a second surface; computing only data related to the first component of light in the first color space and received from the device if the values of the second and third components of the light in the first color space and received from the at least one associated device are respectively smaller than first and second predefined values; and reporting a defect if the value of the first component of the light in the first color space and received from the device is smaller than a threshold value defined by the value of the first component of the light in the first color space and received from the at least one associated device.
- 2. The method of claim 1 further comprising:
computing spatial feature data related to the second component of the light in the first color space and received from the device only if the value of the second component of the light in the first color space and received from the at least one associated device is greater than the first predefined value; and reporting a defect if the values of the first and second components of the light in the first color space and received from the device are not within a two-dimensional region defined by the values of the first and second components of the light in the first color space and received from the at least one associated device.
- 3. The method of claim 2 further comprising:
computing spatial feature data related to the third component of the light in the first color space and received from the device only if the value of the third component of the light in the first color space and received from the at least one associated device is greater than the second predefined value; and reporting a defect if the values of the first, second and third components of the light in the first color space and received from the device are not within a three-dimensional region defined by the values of the first, second and third components of the light in the first color space and received from the at least one associated device.
- 4. The method of claim 3 wherein said first component of the light in the first color space is related to the brightness component of the received light.
- 5. The method of claim 4 wherein said second component of the light in the first color space is related to the hue component of the received light.
- 6. The method of claim 5 wherein said third component of the light in the first color space is related to the saturation component of the received light.
- 7. The method of claim 6 wherein the at least one associated device further comprises at least first and second associated devices each disposed on a different surface, and wherein the brightness component of the lights received from the at least first and second associated devices is related to template match score of luma components of the lights received from the at least first and second associated devices, wherein the luma components of the lights define a dimension in a second color space.
- 8. The method of claim 7 wherein the hue component of the lights received from the at least first and second associated devices is related to respective spatial average of first chroma components of the lights received from the at least first and second associated devices, wherein the first chroma components of the lights define a second dimension in the second color space.
- 9. The method of claim 8 wherein the saturation component of the lights received from the at least first and second associated devices is related to respective spatial average of second chroma components of the lights received from the at least first and second associated devices, wherein the first chroma components of the lights defines a third dimension in the second color space.
- 10. The method of claim 9 wherein the brightness component of the light received from the device is related to template match score of luma components of the lights received from each of the device and the first and second associated devices.
- 11. The method of claim 10 wherein the hue component of the light received from the device is related to average of the first chroma components of the light received from the device.
- 12. The method of claim 11 wherein the saturation component of the light received from the device is related to average of the second chroma components of the light received from the device.
- 13. The method of claim 12 wherein the luma component in the second color space of the lights received from each of the at least first and second associated devices is equal to respective luma component Y in a third color space of the lights received from the at least first and second associated devices.
- 14. The method of claim 13 wherein the first chroma component in the second color space of the lights received from each of the at least first and second associated devices is related to respective chroma components Cb and Cr in the third color space of the lights received from each of the at least first and second associated devices.
- 15. The method of claim 14 wherein the first chroma component in the second color space of the light received from each of the at least first and second associated devices is equal to the respective arctangent of the ratio of the chroma components Cb and Cr in the third color space of the lights received from each of the at least first and second associated devices.
- 16. The method of claim 14 wherein the second chroma component in the second color space of the lights received from each of the at least first and second associated devices is related to the respective chroma components Cb and Cr in the third color space of each of the lights received from each of the at least first and second associated devices.
- 17. The method of claim 16 wherein the second chroma component in the second color space of the lights received from each of the at least first and second associated devices is equal to the respective square root of the sum of squares of the chroma color components Cb and Cr in the third color space of the lights received from each of the at least first and second associated devices.
- 18. The method of claim 16 wherein the luma component in the second color space of the light received from the device is related to luma component Y in the third color space of the light received from device.
- 19. The method of claim 18 wherein the first chroma component in the second color space of the light received from the device is related to the chroma components Cb and Cr in the third color space of the light received from device.
- 20. The method of claim 19 wherein the first chroma component in the second color space of the light received from the device is equal to the arctangent of the ratio of the chroma color components Cb and Cr in the third color space of the light received from the device.
- 21. The method of claim 19 wherein the second chroma component in the second color space of the light received from the device is related to the chroma components Cb and Cr in the third color space of the light received from the device.
- 22. The method of claim 21 wherein the second chroma component in the second color space of the light received from the device is equal to the square root of the sum of squares of the chroma color components Cb and Cr in the third color space of the light received from the device.
- 23. The method of claim 22 wherein the Y, Cb and Cr components in the third color space of the lights received from the device and from each of the at least first and second associated devices are related to respective gamma-corrected red, green and blue components of the lights received therefrom.
- 24. The method of claim 23 wherein the gamma-corrected red, green and blue components of the lights received from the device and from each of the at least first and second associated devices are bilinearly interpolated from their respective red, green and blue components of the lights generated by an image sensor.
- 25. The method of claim 24 wherein the lights received from the device and from each of the at least first and second associated devices are filtered by a Bayer color filter before being received by the image sensor.
- 26. An apparatus for color inspection of a device present on a surface, the apparatus comprising:
spatial feature extractor operative to extract first, second and third components of light in a first color space and received from at least one associated device; control module operative to instruct the spatial feature extractor to extract only a first component in the first color space of light received from the device if the values of the second and third components of the light in the first color space and received from the at least one associated device are smaller than respective first and second predefined values; and reporting module operative to report a defect if the value of the first component of the light in the first color space and received from the device is smaller than a threshold value defined by the value of the first component of the light in the first color space and received from the at least one associated device.
- 27. The apparatus of claim 26 wherein the control module is operative to instruct the spatial feature extractor to extract a second component in the first color space of the light received from the device only if the value of the second component of the light in the first color space and received from the at least one associated device is greater than the first predefined value, wherein the reporting module is operative to report a defect if the values of the first and second components of the light in the first color space and received from the device is not within a two-dimensional region defined by the values of the first and second components of the light in the first color space and received from the at least one associated device.
- 28. The apparatus of claim 27 wherein the control module is operative to instruct the feature extractor to extract a third component of the light in the first color space and received from the device only if the value of the third component of the light in the first color space and received from the at least one associated device is greater than the second predefined value, wherein the reporting module is operative to report a defect if the values of the first, second and third components of light in the first color space and received from the device is not within a three-dimensional region defined by the values of the first, second and third components of the light in the first color space and received from the at least one associated device.
- 29. The apparatus of claim 28 wherein said first component of the light in the first color space is related to the brightness of the received light.
- 30. The apparatus of claim 29 wherein said second component of the light in the first color space is related to the hue component of the received light.
- 31. The apparatus of claim 30 wherein said third component of the light in the first color space is related to the saturation component of the received light.
- 32. The apparatus of claim 31 wherein the at least one associated device further comprises at least first and second associated devices each disposed on a different surface, the apparatus further comprising a first module operative to compute a template match score of luma components in a second color space of the lights received from the at least first and second associated devices, said template match score being related to the brightness component in the first color space of the lights received from each of the at least first and second associated devices.
- 33. The apparatus of claim 32 further comprising a second module operative to compute an average of first chroma components in the second color space of the lights received from each of the at least first and second associated devices, said average of the first chroma components being related to the hue components in the first color space of the lights received from each of the at least first and second associated devices.
- 34. The apparatus of claim 32 further comprising a third module operative to compute an average of second chroma components in the second color space of the lights received from each of the at least first and second associated devices, said average of the second chroma components being related to the saturation components in the first color space of the lights received from each of the at least first and second associated devices.
- 35. The apparatus of claim 34 wherein said first module is operative to compute a template match score of luma components in the second color space of the lights received from the device and from the at least first and second associated devices, said template match score being related to the brightness component in the first color space of the light received from the device.
- 36. The apparatus of claim 35 wherein said second module is operative to compute an average of first chroma components in the second color space of the lights received from the device and from each of the at least first and second associated devices, said average being related to the hue component in the first color space of the light received from the device.
- 37. The apparatus of claim 36 wherein said third module is operative to compute an average of second chroma components in the second color space of the lights received from the device and from each of the at least first and second associated devices, said average being related to the saturation component in the first color space of the light received from the device.
- 38. The apparatus of claim 37 further comprising a color component converter operative to convert a luma component Y in a third color space of the lights received from each of the at least first and second associated devices to the luma component in the second color space of the lights received from each of the first and second associated devices.
- 39. The apparatus of claim 38 wherein the color component converter is operative to convert chroma components Cb and Cr in the third color space of the lights received from each of the at least first and second associated devices to the first chroma component in the second color space of the lights received from each of the at least first and second associated devices.
- 40. The apparatus of claim 38 wherein the color component converter is operative to compute an arctangent of the ratio of the chroma color components Cb and Cr in the third color space of the lights received from each of the at least first and second associated devices, wherein said arctangent is related to the first chroma components in the second color space of the lights received from each of the at least first and second associated devices.
- 41. The apparatus of claim 39 wherein the color component converter is operative to convert chroma components Cb and Cr in the third color space of the lights received from each of the at least first and second associated devices to the second chroma component in the second color space of the lights received from each of the at least first and second associated devices.
- 42. The apparatus of claim 41 wherein the color component converter is operative to compute an square root of the sum of squares of chroma color components Cb and Cr in the third color space of the lights received from each of the at least first and second associated devices, wherein said square root is related to the second chroma components in the second color space of the lights received from the at least first and second associated devices.
- 43. The apparatus of claim 42 wherein the color component converter is operative to convert the luma color component Y in the third color space of the light received from the device to the luma component in the second color space of the light received from the device.
- 44. The apparatus of claim 43 wherein the color component converter is operative to convert the chroma components Cb and Cr in the third color space of the light received from the device to the first chroma component in the second color space of the light received from the device.
- 45. The apparatus of claim 44 wherein the color component converter is operative to compute an arctangent of the ratio of the chroma components Cb and Cr in the third color space of the light received from the device, wherein said arctangent is related to the first chroma component in the second color space of the light received from the device.
- 46. The apparatus of claim 44 wherein the color component converter is operative to convert the chroma components Cb and Cr in the third color space of the light received from the device to the second chroma component in the second color space of the light received from the device.
- 47. The apparatus of claim 46 wherein the color component converter is operative to compute a square root of the sum of squares of chroma components Cb and Cr in the third color space of the light received from the device, wherein said square root is related to the second chroma component in the second color space of the light received from the device.
- 48. The apparatus of claim 46 wherein the color component converter is operative to receive gamma-corrected red, green and blue color components and to generate, in response, luma, first chroma and second chroma components in the second color space.
- 49. The apparatus of claim 48 further comprising:
Bayer color filter; image sensor coupled to the Bayer color filter to receive the filtered light therefrom and to generate, in response, red, green and blue color components; interpolator operative to receive the red, green and blue color components generated by the image sensor and to generate, in response, linearly interpolated red, green and blue color components; and a gamma corrector operative to receive the linearly interpolated red, green and blue color components and to generate, in response, gamma-corrected red, green and blue color components.
CROSS-REFERENCE TO RELATED APPLICATION
[0001] The present application claims benefit of the filing date of the provisional application serial No. 60/214,466, entitled “Substrate Inspection System” and filed on Jun. 27, 2000, the entire content of which is incorporated herein by reference.
Provisional Applications (1)
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Number |
Date |
Country |
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60214466 |
Jun 2000 |
US |