Number | Name | Date | Kind |
---|---|---|---|
3185021 | Thompson | May 1965 | |
3554649 | Ridgway | Jan 1971 | |
3922089 | Danielson et al. | Nov 1975 | |
4012147 | Walrafen | Mar 1977 | |
4462687 | Krause | Jul 1984 | |
4526470 | Kaye | Jul 1985 | |
4546256 | Denisou et al. | Oct 1985 | |
4568187 | Kita et al. | Feb 1986 | |
4729658 | Poultney | Mar 1988 | |
4743112 | Burke | May 1988 | |
4850706 | Mikes | Jul 1989 | |
4895445 | Granger | Jan 1990 | |
4984888 | Tobias | Jan 1991 | |
4995721 | Krupa et al. | Feb 1991 | |
4997281 | Stark | Mar 1991 | |
5042893 | Ona | Aug 1991 | |
5066127 | Schwenker | Nov 1991 | |
5087123 | Gerlacher et al. | Feb 1992 | |
5088823 | Smith et al. | Feb 1992 | |
5139335 | Lundeen et al. | Aug 1992 | |
5479258 | Hinnrichs et al. | Dec 1995 | |
5488474 | Fateley et al. | Jan 1996 |
Entry |
---|
Dyson, J., “Unit Magnification Optical System without Seidel Aberrations”, Journal of the Optical Society of America, vol. 49, No. 7, Jul. 1959. |
Offner, A., “New Concepts in Projection Mask Aligners,” Optical Engineering, vol. 14, No. 2, Mar.-Apr. 1975. |
Mertz, L., “Concentric spectrographs,” Applied Optics, vol. 16, No. 12, Dec. 1977. |
Kingslake, R., “Lens Design Fundamentals,” Academic Press, 1978. |