Patent Application
20240006181
This application claims priority to UK Patent App. 2209674.7 filed Jul. 1, 2022, the disclosure of which is hereby incorporated by reference.
This invention relates to a method of plasma etching a silicon carbide semiconductor substrate. This invention also relates to a plasma etching apparatus.
Silicon carbide (SiC) is a wideband gap (3.28 eV for 4H—SiC) semiconductor that can support very high breakdown voltages of approximately 2.2 MV/cm, which is approximately seven times the breakdown voltage of pure silicon with greater than twice the thermal conductivity of pure silicon. SiC is widely used in high power, high frequency applications such as battery chargers for electric vehicles, inverters and energy storage and transmission due to the thermal and frequency benefits over established Si IGBT (insulated-gate bipolar transistor) technology.
In order to fabricate SiC devices, MOSFETs, Schottky diodes or MEMS-based structures, the relatively inert SiC material needs to be patterned with a mask and is typically etched using an anisotropic plasma etch process. Masks can be either metallic, for example Ni, metal-based, such as ITO, or dielectric SiO2 or SiN. As disclosed in US 2016/016385 A1, when etching trenches in the SiC surface, there is frequently the requirement to produce a well-defined taper in the range of 85-90° to the horizontal. The “positive” taper (less than 90°), as shown in
Dry etched silicon carbide trenches can be between 1-10 μm wide and between 1-10 μm deep and can have a flat or rounded base post plasma etch. Post etch it is possible to round the base through the use of a high temperature H2 annealing process.
Traditionally, sulfur hexafluoride (SF6) is the main gas used to plasma etch SiC at high etch rates, with etch rates of between 600 and 1000 nm/min being achievable. Typically, SF6 is combined with He or Ar, and O2. The high powers and low pressures required both to break the strong bonds in SiC and to prevent “micro-trenching”, the formation of secondary trenches at the trench base corner, can cause the side-wall profile of the etched trenches to have a “re-entrant” profile (i.e. a sidewall taper of greater than 90°), as shown in
Previous attempts have been made to overcome the drawbacks of fluorine-based etch chemistries. For example, “Low-damage etching of silicon carbide in Cl2-based plasmas” by F. A. Khan et al., Journal of The Electrochemical Society, 149 (7) G420-G423 (2002) attempted to etch vias in SiC substrates using etch mixtures of SF6 with BCl3 or HCl. However, the etch rates achievable with these etch mixtures were lower than standard SF6 etch chemistries.
Therefore, there is a need in the art to provide an improved method of plasma etching a silicon carbide semiconductor to form a feature which enables fine tuning of the taper within the feature without a reduction in etch rate when compared to the established SiF6/O2 etch process.
The present invention, in at least some of its embodiments, seeks to address the above described problems, desires and needs.
According to a first embodiment of the present invention there is provided a method of plasma etching a silicon carbide semiconductor substrate to form a feature, the method comprising the steps of providing a substrate with a mask formed thereon on a substrate support in a chamber, the mask having an opening, wherein the substrate is formed from silicon carbide; and performing a plasma etch step to anisotropically etch the substrate through the opening to produce a feature. The plasma etch step comprises generating a plasma from an etchant gas mixture comprising at least one fluorine-containing component and chlorine gas.
It has been found by the present inventors that the combination of at least one fluorine-containing component and chlorine gas in the etchant gas mixture allows for fine tuning of the taper of the feature without sacrificing other etch characteristics such as etch rate and selectivity.
The at least one fluorine-containing component can comprise SF6, SiF4 or a combination thereof. The at least one fluorine-containing component can comprise both SF6 and SiF4. The etchant gas mixture can further comprise SiCl4.
The etchant gas mixture can further comprise an oxygen-containing component. The oxygen-containing component can comprise O2, H2O, N2O and/or O3. The oxygen-containing component can be O2 gas.
The flow rate of each of the at least one fluorine containing component, chlorine gas and, when present, SiCl4 and the oxygen-containing component can be at most 100 sccm. If SF6 is present, the flow rate can be from 30 sccm to 60 sccm. If SiF4 is present, the flow rate can be from 20 sccm to 98 sccm. If SiCl4 is present, the flow rate can be from 5 sccm to 95 sccm. If present, the flow rate of the Oxygen-containing component can be from 5 sccm to 95 sccm, optionally from 50 sccm to 80 sccm.
The etchant gas mixture can further comprise an inert gas component. The inert gas component can be helium (He) or argon (Ar). The inert gas component can consist of argon. If present, the flow rate of the inert gas component can be at most 500 sccm. If present, the flow rate of the inert gas component can be at least 300 sccm.
The etchant gas mixture can consist of or consist essentially of at least one fluorine-containing component, chlorine gas, SiCl4, an oxygen-containing component and an inert gas component. The etchant gas mixture can consist of or consist essentially of SF6, SiF4, chlorine gas, SiCl4, O2 and Ar.
The plasma etch step can comprise the step of altering a fluorine-containing components flow rate and a chlorine-containing components flow rate in order to change a fluorine-containing component: chlorine containing component ratio and thereby change the profile angle of the feature. The plasma etch step can comprise the step of setting a SF6 flow rate and a Cl2 flow rate and altering a SiF4 flow rate and a SiCl4 flow rate in order to change a fluorine-containing component: chlorine containing component ratio and thereby change the profile angle of the feature. The fluorine-containing component: chlorine containing component ratio can be kept constant during the duration of the plasma etch step. Alternatively, the fluorine-containing component: chlorine containing component ratio can be altered during the duration of the plasma etch step.
The plasma etch step can be performed using a plasma source that supplies a power of from 800 W to 2500 W to the plasma. The plasma source can supply a power of 2200 W to the plasma. An electrical power of from 700 W to 1400 W can applied to the substrate support during the plasma etch step. The electrical power applied to the substrate support during the plasma etch step can be about 1300 W. The electrical power applied to the substrate during the secondary etching process can be a RF bias power.
The substrate support can be maintained at a temperature of between 10° C. and ° C. The substrate support can be maintained at a temperature of about 20° C. The chamber can be cooled to a temperature of 55° C. The chamber can be cooled by water cooling.
The pressure within the chamber can be from 2 mTorr (0.267 Pa) to 20 mTorr (2.67 Pa). The pressure within the chamber can be about 10 mTorr (1.33 Pa). The mask can be a hard mask, such as an inorganic dielectric mask. The mask can comprise a silicon-containing component, such as SiO2 or SiN. The mask can comprise SiO2.
The plasma generated in the plasma etch step can be an inductively coupled plasma. The plasma etch step can be performed using an inductively coupled plasma (ICP) etch apparatus.
The substrate can be at least one layer of epitaxial silicon carbide deposited on a carrier wafer. The carrier wafer can be formed of silicon carbide.
According to a second embodiment of the present invention there is provided a plasma etch apparatus for plasma etching a substrate to form a feature using the method according to the first embodiment of the present invention, the apparatus comprising: a chamber; a substrate support disposed within the chamber for supporting a substrate thereon; at least one gas inlet for introducing a gas or gas mixture into the chamber at a flow rate; a plasma generating means for sustaining a plasma in the chamber; a power supply for supplying an electrical bias power to the substrate support; and a controller configured to operate the plasma etch apparatus to generate a plasma from an etchant gas mixture comprising at least one fluorine-containing component and chlorine gas.
The at least one gas inlet can comprise a first gas inlet for introducing at least one fluorine-containing component into the chamber and a second gas inlet for introducing chlorine gas into the chamber, and the controller can be configured to form an etchant gas mixture in the chamber comprising at least one fluorine-containing component and chlorine gas and generate a plasma from the etchant gas mixture.
The at least one gas inlet can comprise a third gas inlet for introducing SiF4 intro the chamber and a fourth gas inlet for introducing SiCl4 into the chamber, and the controller can be configured to form an etchant gas mixture in the chamber comprising the at least one fluorine-containing component that can comprise SiF4, chlorine gas and SiCl4 and generate a plasma from the etchant gas mixture.
The at least one gas inlet can comprise a fifth gas inlet for introducing an oxygen-containing component intro the chamber and a sixth gas inlet for introducing an inert gas component into the chamber, and the controller can configured to form an etchant gas mixture in the chamber comprising the at least one fluorine-containing component, chlorine gas, the oxygen-containing component and the inert gas component and generate a plasma from the etchant gas mixture.
Each of the first gas inlet to sixth gas inlet can be the same as at least one of the other gas inlets.
For the avoidance of doubt, whenever reference is made herein to ‘comprising’ or ‘including’ and like terms, the invention is also understood to include more limiting terms such as ‘consisting’ and ‘consisting essentially’.
Whilst the invention has been described above, it extends to any inventive combination of the features set out above, or in the following description, drawings or claims. For example, any features disclosed in relation to the first embodiment of the invention can be combined with any features of the second embodiment of the invention and vice versa.
Aspects of methods and apparatuses in accordance with the invention will now be described with reference to the accompanying drawings, in which:
A plasma etching tool suitable for performing the method of the present invention is an Omega™ Synapse™ ICP etch system available from SPTS Technologies Limited of Newport, UK. A plasma etch apparatus 20 typically comprises a substrate support (or platen) 22, also known as a wafer support, disposed within a chamber 23 for supporting a substrate. A bias power can be supplied to the substrate by a RF power supply 250 via an impedance matching network (not shown) and an electrode 252. Typical RF frequencies for operation of the RF power supply can be between about 380 kHz and 13.56 MHz. Process gases can be introduced into the chamber 23 via one or more gas inlets 25, 26. In one embodiment, at least six gas inlets 26 can be present. However, in the illustrated embodiment, two gas inlets 25, 26 are provided, and the gases from which the plasma is generated are introduced to the chamber 23 through the two gas inlets 25, 26. A plasma generating means 28, such as an inductive coil, can be used to generate and sustain a plasma within the chamber 23 as is known in the art (e.g. using a RF power supply and impedance matching network). In the illustrated embodiment, the plasma generating means is an RF inductive coil 28 contained within a housing 29. The gases can be removed from the chamber 23 via a pumping port 27. Also provided is a controller (not shown) which is configured to control the apparatus to perform the process sequence described herein.
An exemplary method according to a first embodiment of the present invention will be described in combination with
In a first step 101, the substrate 30 to be etched is positioned on the substrate support 22 in a plasma etch apparatus 20 with the face to be etched facing upwards. A pre-etch can optionally be performed to prepare the substrate 30 prior to the plasma etch, for example to remove unwanted material from the open areas of the mask layer 32.
In a second step 102, a plasma etch step is performed to selectively etch the SiC substrate 30 so that the trench structure is formed. Numeral 34b represents the feature as illustrated in
The etch gas mixture used to generate the plasma consists of SF6, Cl2, SiF4, SiCl4, O2 and Ar gases. The flow rate of each of SF6, Cl2, SiF4, SiCl4 and O2 is at most 100 sccm. The SF6 flow rate can be from 30 sccm to 60 sccm, the SiF4 flow rate can be from 20 sccm to 98 sccm, the SiCl4 flow rate can be from 5 sccm to 95 sccm and the O2 flow rate can be from 5 sccm to 95 sccm, optionally from 50 sccm to 80 sccm. The Ar flow rate can be from 300 sccm to 500 sccm.
The present inventors have found that by controlling the F:Cl flow rate ratio, the resultant trench profile angle can be altered whilst maintaining the desired etch characteristics such as etch rate and selectivity. One of the most effective means of altering the resultant trench profile angle whilst maintaining the etch rate is by maintaining the flow rate of SF6 and Cl2 at a set value and altering the flow rate of SiF4 and SiCl4 as a means of altering the overall F:Cl ratio. By maintaining a minimum SF6 and Cl2 flow rate, the etch rate and selectivity of the plasma etch step is maintained, but the alteration of the SiF4 and SiCl4 flow rates can fine-tune the resultant trench profile angle. For example, lowering the SiCl4 flow rate and raising the SiF4 flow rate can increase the profile angle (increased towards 90°), whilst raising the SiCl4 flow rate and lowering the SiF4 flow rate can decrease the profile angle (reduced from 90°).
The ratio of F:Cl can be kept constant throughout the plasma etch step. Alternatively, the F:Cl ratio can be altered during the plasma etch step. Changing the F:Cl ratio can dynamically change the taper of the resultant trench, providing changes in taper as the etch progresses. This change in trench angle can reduce “field-bunching”, where the electric field is susceptible to concentrating at a particular location within the trench, such as at the corners of trench.
During the plasma etch step, the chamber pressure can be in the range of about 2 mTorr (0.267 Pa) to about 20 mTorr (2.67 Pa), preferably about 10 mTorr (1.33 Pa). During the plasma etch step, the plasma source power can be in the range of about 800 W to about 2500 W, optionally about 2200 W. During the plasma etch step, the bias power applied to the substrate can be a RF bias power. RF frequencies for the RF bias power can be between about 2 MHz and about 13.56 MHz. Typically, the platen 22 temperature setpoint is between about 10° C. and about 30° C., preferably about 20° C., whilst the chamber walls are cooled to a temperature of about 55° C. using water. A platen temperature of around 20° C. and a chamber wall temperature of about 55° C. is used due to the presence of chlorine in the etch gas mixture.
The plasma etch step results in the formation of a trench 34b. The trench 34b comprises a base 36b that is approximately parallel to the surface of the substrate 30 on which the mask 32 is formed. The trench 34b further comprises an opening 40b adjacent to the surface of the substrate 30 on which the mask 32 is formed.
The trench 34b further comprises sidewalls 38b between the base 36b and the opening 40b of the trench 34b. Preferably, the sidewalls 38b have a taper of between about 87° and about 90° to the plane perpendicular to the direction of anisotropic etching.
The duration of the plasma etch step depends on the thickness of the substrate and the desired dimensions of the trench 34b in a manner known in the art.
The resultant substrate 30b comprises a fully formed feature 34b which has an opening 40b and a substantially flat base 36b as shown in
The trench 34b can be subjected to a number of post-processing steps, such as mask removal, smoothing or polishing to provide the final feature.
An exemplary set of process parameters for the plasma etch step of the method of the first embodiment is shown in Table 1. The exemplary process was performed in the Omega™ Synapse™ etch apparatus at a temperature of 20° C. with source and bias RF power supplies, when used, operating at 13.56 MHz.
A trench etched by a plasma generated with the above parameters had a profile angle of 88.5°. While keeping all other parameters used in the example process in table 1 constant, lowering the SiCl4 flow to 0 sccm and raising the SiF4 flow to 98 sccm (i.e. raising the F:Cl ratio) changed the profile angle from 88.5° to 88.9°. Conversely, changing the flow (from that in table 1) to 90 sccm SiCl4 and 20 sccm SiF4 (i.e. lowering the F:Cl ratio), changed the profile angle from 88.5° to 87.6°. Most other etch characteristics, including the etch rate and selectivity for example, are not significantly altered by these process adjustments.
Structures formed using the exemplary process parameters above had uniform and smooth base and sidewalls that were acceptable for use as trenches.
Flat-based trenches etched using two different chemistry regimes, fluorinated and combined fluorinated and chlorinated chemistry were investigated. The results are summarised in Table 2.
The fluorinated chemistry example shows a highly vertical profile angle with only moderate etch rate and has uniformity and selectivity towards the poor end of device manufacturer requirements. On the other hand, provided reasonable ratios of the gases are used, the combined fluorinated and chlorinated chemistry results in a desirable profile angle as standard and hence provides the opportunity to optimise other process characteristics. As shown in the table, combined fluorinated and chlorinated etch chemistry provides the highest etch rate and selectivity of the two chemistries, along with an excellent uniformity.
The method of the first embodiment of the present invention can provide smooth and uniform features formed in silicon carbide semiconductor in a flexible and simple process with finely tuned profile angles that does not sacrifice other etch characteristics such as selectivity and etch rate.
Although the present disclosure has been described with respect to one or more particular embodiments, it will be understood that other embodiments of the present disclosure may be made without departing from the scope of the present disclosure. Hence, the present disclosure is deemed limited only by the appended claims and the reasonable interpretation thereof.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2209674.7 | Jul 2022 | GB | national |
