Number | Name | Date | Kind |
---|---|---|---|
4694143 | Nishimura et al. | Sep 1987 | |
4755654 | Crowley et al. | Jul 1988 | |
4888302 | Ramesh | Dec 1989 | |
5155336 | Gronet et al. | Oct 1992 | |
5418885 | Hauser et al. | May 1995 | |
5490728 | Scheitinger et al. | Feb 1996 |
Entry |
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Wolf, S. and R.N. Tauber, eds. "Silcon Processing for the VLSI Era vol. 1:Process Technology" Lattice Press, Sunset Beach, CA. pp. 56-61. |