Claims
- 1. A non-grafted copolymer which can be used as a base polymer of a high-resolution resist, the copolymer characterized by 40 to 99 mole % of vinyl benzoic acid tert. butyl ester as a first component and 1 to 60 mole % of an anhydride of an unsaturated carboxylic acid as a second component, the copolymer being further characterized as being without an acrylic acid component and the copolymer being soluble in an organic solvent.
- 2. The copolymer according to claim 1 wherein the second component is maleic acid anhydride.
- 3. A non-grafted copolymer characterized by 40 to 99 mole % of methacrylic acid tert. butyl ester as a first component and 1 to 60 mole % of an anhydride of an unsaturated carboxylic acid as a second component, the copolymer being further characterized as being without an acrylic acid component.
- 4. The copolymer according to claim 3 wherein the second component is maleic acid anhydride.
Priority Claims (1)
Number |
Date |
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Kind |
40 41 000.5 |
Dec 1990 |
DEX |
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Parent Case Info
This application is continuation, of application Ser. No. 08/153,836 filed Nov. 17, 1993, now abandoned which is a continuation, of application Ser. No. 07/811,831 filed Dec. 20, 1991 now abandoned.
US Referenced Citations (4)
Foreign Referenced Citations (6)
Number |
Date |
Country |
0102450 |
May 1983 |
EPX |
0388484 |
Mar 1989 |
EPX |
0395917 |
Apr 1990 |
EPX |
0394740 |
Apr 1990 |
EPX |
0394741 |
Apr 1990 |
EPX |
1495850 |
Nov 1969 |
DEX |
Non-Patent Literature Citations (2)
Entry |
Abstract of DE 1495 850. |
"Macromolecules", vol. 21 (1988) pp. 1475 to 1482. |
Continuations (2)
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Number |
Date |
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Parent |
153836 |
Nov 1993 |
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Parent |
811831 |
Dec 1991 |
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