Selective reaction with inorganic or organometallic reagents after image-wise exposure

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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G03F7/265Selective reaction with inorganic or organometallic reagents after image-wise exposure

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Patents Grantslast 30 patents

Information Patent Grant
Vapor phase thermal etch solutions for metal oxo photoresists
- Patent number 12,068,170
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase thermal etch solutions for metal oxo photoresists
- Patent number 12,033,866
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase thermal etch solutions for metal oxo photoresists
- Patent number 11,621,172
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lignin based laser lithography process for fabricating 3D graphene...
- Patent number 11,448,959
- Issue date Sep 20, 2022
- King Abdullah University of Science and Technology
- Wenli Zhang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Pattern formation material and pattern formation method
- Patent number 11,378,885
- Issue date Jul 5, 2022
- Kioxia Corporation
- Koji Asakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Localized functionalization of nanotextured surfaces
- Patent number 11,247,896
- Issue date Feb 15, 2022
- UChicago Argonne, LLC
- Martyna Michalska
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inspection sensitivity improvements for optical and electron beam i...
- Patent number 11,092,893
- Issue date Aug 17, 2021
- KLA Corporation
- Andrew Cross
- G01 - MEASURING TESTING
Information Patent Grant
Functionalized solid particles for sequestering metal ions
- Patent number 10,800,671
- Issue date Oct 13, 2020
- International Business Machines Corporation
- Magi Mettry
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Masked cation exchange lithography
- Patent number 10,160,906
- Issue date Dec 25, 2018
- Fondazione Istituto Italiano di Tecnologia
- Roman Krahne
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cross-linked polymer based hydrogel material compositions, methods...
- Patent number 9,760,009
- Issue date Sep 12, 2017
- CLARKSON UNIVERSITY
- Artem Melman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spin-on layer for directed self assembly with tunable neutrality
- Patent number 9,733,566
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Jeffrey Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for using post-processing methods for accelerating EUV litho...
- Patent number 9,653,319
- Issue date May 16, 2017
- Tokyo Electron Limited
- Anton J. deVilliers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method, non-transitory computer storage medium...
- Patent number 9,280,052
- Issue date Mar 8, 2016
- Tokyo Electron Limited
- Fumiko Iwao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Templates including self-assembled block copolymer films
- Patent number 9,257,256
- Issue date Feb 9, 2016
- Micron Technology, Inc.
- Dan B. Millward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Patterned fine particle film structures
- Patent number 9,200,012
- Issue date Dec 1, 2015
- EMPIRE TECHNOLOGY DEVELOPMENT LLC
- Kazufumi Ogawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of forming pattern
- Patent number 9,152,053
- Issue date Oct 6, 2015
- Kabushiki Kaisha Toshiba
- Shigeki Hattori
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface treatments for alignment of block copolymers
- Patent number 9,120,947
- Issue date Sep 1, 2015
- Board of Regents, The University of Texas System
- C. Grant Willson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electroless plating method using bleaching
- Patent number 9,122,161
- Issue date Sep 1, 2015
- Eastman Kodak Company
- Mark Edward Irving
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electroless plating method using non-reducing agent
- Patent number 9,023,560
- Issue date May 5, 2015
- Eastman Kodak Company
- Mark Edward Irving
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Primer and pattern forming method for layer including block copolymer
- Patent number 8,999,631
- Issue date Apr 7, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method of sequestering metals using thiosulfate polymers
- Patent number 8,986,924
- Issue date Mar 24, 2015
- Eastman Kodak Company
- Deepak Shukla
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Primer and pattern forming method for layer including block copolymer
- Patent number 8,956,810
- Issue date Feb 17, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Electroless plating method
- Patent number 8,936,890
- Issue date Jan 20, 2015
- Eastman Kodak Company
- Mark Edward Irving
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-photosensitive siloxane coating for processing hydrophobic phot...
- Patent number 8,728,715
- Issue date May 20, 2014
- Funai Electric Co., Ltd.
- David Bernard
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Pattern formation method
- Patent number 8,703,407
- Issue date Apr 22, 2014
- Kabushiki Kaisha Toshiba
- Yuriko Seino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Preparation of lithographic printing plates
- Patent number 8,637,223
- Issue date Jan 28, 2014
- Eastman Kodak Company
- Murray Figov
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Alternating self-assembling morphologies of diblock copolymers cont...
- Patent number 8,609,221
- Issue date Dec 17, 2013
- Micron Technology, Inc.
- Dan B. Millward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Patterned fine particle film structures
- Patent number 8,568,862
- Issue date Oct 29, 2013
- EMPIRE TECHNOLOGY DEVELOPMENT LLC
- Kazufumi Ogawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Patterning process and materials for lithography
- Patent number 8,563,231
- Issue date Oct 22, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Wei Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Directed material assembly
- Patent number 8,551,566
- Issue date Oct 8, 2013
- Massachusetts Institute of Technology
- Theodore H. Fedynyshyn
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
HARDMASK COMPOSITION, HARDMASK LAYER AND METHOD OF FORMING PATTERNS
- Publication number 20240327321
- Publication date Oct 3, 2024
- Samsung SDI Co., Ltd.
- Seil CHOI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME
- Publication number 20240145245
- Publication date May 2, 2024
- Applied Materials, Inc.
- Yung-chen LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS
- Publication number 20230290646
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS
- Publication number 20230215736
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIGNIN BASED LASER LITHOGRAPHY PROCESS FOR FABRICATING 3D GRAPHENE...
- Publication number 20220397822
- Publication date Dec 15, 2022
- King Abdullah University of Science and Technology
- Wenli ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICALLY AMPLIFIED POSITIVE-TYPE PHOTOSENSITIVE RESIN COMPOSITION...
- Publication number 20220283500
- Publication date Sep 8, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Akiya KAWAUE
- C07 - ORGANIC CHEMISTRY
Information Patent Application
LIGNIN BASED LASER LITHOGRAPHY PROCESS FOR FABRICATING 3D GRAPHENE...
- Publication number 20210247692
- Publication date Aug 12, 2021
- King Abdullah University of Science and Technology
- Wenli ZHANG
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
ELECTRICALLY CONDUCTIVE MATERIAL
- Publication number 20210048750
- Publication date Feb 18, 2021
- UNIVERSITY OF EXETER
- Monica Craciun
- C01 - INORGANIC CHEMISTRY
Information Patent Application
INSPECTION SENSITIVITY IMPROVEMENTS FOR OPTICAL AND ELECTRON BEAM I...
- Publication number 20200183283
- Publication date Jun 11, 2020
- KLA Corporation
- Andrew Cross
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FUNCTIONALIZED SOLID PARTICLES FOR SEQUESTERING METAL IONS
- Publication number 20200156961
- Publication date May 21, 2020
- International Business Machines Corporation
- Magi Mettry
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Application
Ultra-High Resolution Conductive Traces Flexible Biocomposites by R...
- Publication number 20200096869
- Publication date Mar 26, 2020
- Georgia Tech Research Corporation
- Ruilong Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOSENSITIVE RESIN COMPOSITION, CURED FILM, DISPLAY DEVICE, AND P...
- Publication number 20190094692
- Publication date Mar 28, 2019
- Tokyo Ohka Kogyo Co., Ltd.
- Tatsuro ISHIKAWA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
PATTERN FORMATION MATERIAL AND PATTERN FORMATION METHOD
- Publication number 20190086805
- Publication date Mar 21, 2019
- Toshiba Memory Corporation
- Koji Asakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE TREATMENT COMPOSITION AND SURFACE TREATMENT METHOD OF RESIS...
- Publication number 20190041757
- Publication date Feb 7, 2019
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.a.r.l.
- Xiaowei WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF SEQUESTERING METALS USING THIOSULFATE POLYMERS
- Publication number 20140287366
- Publication date Sep 25, 2014
- Deepak Shukla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM...
- Publication number 20140255852
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Fumiko IWAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-PHOTOSENSITIVE SILOXANE COATING FOR PROCESSING HYDROPHOBIC PHOT...
- Publication number 20140203114
- Publication date Jul 24, 2014
- Funai Electric Co., Ltd.
- David BERNARD
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TEMPLATES INCLUDING SELF-ASSEMBLED BLOCK COPOLYMER FILMS
- Publication number 20140060736
- Publication date Mar 6, 2014
- Micron Technology, Inc.
- Dan B. Millward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PATTERNED FINE PARTICLE FILM STRUCTURES
- Publication number 20140045126
- Publication date Feb 13, 2014
- EMPIRE TECHNOLOGY DEVELOPMENT LLC
- Kazufumi OGAWA
- B82 - NANO-TECHNOLOGY
Information Patent Application
PRIMER AND PATTERN FORMING METHOD FOR LAYER INCLUDING BLOCK COPOLYMER
- Publication number 20140030652
- Publication date Jan 30, 2014
- Riken
- Takahiro Senzaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
NON-PHOTOSENSITIVE SILOXANE COATING FOR PROCESSING HYDROPHOBIC PHOT...
- Publication number 20130183450
- Publication date Jul 18, 2013
- David BERNARD
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PATTERNING PROCESS AND MATERIALS FOR LITHOGRAPHY
- Publication number 20130075364
- Publication date Mar 28, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Wei Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE TREATMENTS FOR ALIGNMENT OF BLOCK COPOLYMERS
- Publication number 20130045361
- Publication date Feb 21, 2013
- C. Grant Willson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Cross-Linked Polymer Based Hydrogel Material Compositions, Methods...
- Publication number 20120288479
- Publication date Nov 15, 2012
- Clarkson University
- Artem Melman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD OF FORMING PATTERN
- Publication number 20120238109
- Publication date Sep 20, 2012
- Shigeki Hattori
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PREPARATION OF LITHOGRAPHIC PRINTING PLATES
- Publication number 20120219915
- Publication date Aug 30, 2012
- Murray Figov
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
METHOD FOR FORMING A WIRING PATTERN BY LASER IRRADIATION
- Publication number 20120219918
- Publication date Aug 30, 2012
- Chien-Han HO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SURFACE PATTERNING WITH FUNCTIONAL POLYMERS
- Publication number 20120121861
- Publication date May 17, 2012
- BASF SE
- Werner Hölzl
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PATTERN FORMING METHOD
- Publication number 20120122036
- Publication date May 17, 2012
- JSR Corporation
- Hikaru Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMATION METHOD
- Publication number 20120058435
- Publication date Mar 8, 2012
- Yuriko SEINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Selective reaction with inorganic or organometallic reagents after image-wise exposure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vapor phase thermal etch solutions for metal oxo photoresists

Vapor phase thermal etch solutions for metal oxo photoresists

Vapor phase thermal etch solutions for metal oxo photoresists

Lignin based laser lithography process for fabricating 3D graphene...

Pattern formation material and pattern formation method

Localized functionalization of nanotextured surfaces

Inspection sensitivity improvements for optical and electron beam i...

Functionalized solid particles for sequestering metal ions

Masked cation exchange lithography

Cross-linked polymer based hydrogel material compositions, methods...

Spin-on layer for directed self assembly with tunable neutrality

Method for using post-processing methods for accelerating EUV litho...

Substrate treatment method, non-transitory computer storage medium...

Templates including self-assembled block copolymer films

Patterned fine particle film structures

Method of forming pattern

Surface treatments for alignment of block copolymers

Electroless plating method using bleaching

Electroless plating method using non-reducing agent

Primer and pattern forming method for layer including block copolymer

Method of sequestering metals using thiosulfate polymers

Primer and pattern forming method for layer including block copolymer

Electroless plating method

Non-photosensitive siloxane coating for processing hydrophobic phot...

Pattern formation method

Preparation of lithographic printing plates

Alternating self-assembling morphologies of diblock copolymers cont...

Patterned fine particle film structures

Patterning process and materials for lithography

Directed material assembly

Patents Applicationslast 30 patents

HARDMASK COMPOSITION, HARDMASK LAYER AND METHOD OF FORMING PATTERNS

ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME

VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS

VAPOR PHASE THERMAL ETCH SOLUTIONS FOR METAL OXO PHOTORESISTS

LIGNIN BASED LASER LITHOGRAPHY PROCESS FOR FABRICATING 3D GRAPHENE...

CHEMICALLY AMPLIFIED POSITIVE-TYPE PHOTOSENSITIVE RESIN COMPOSITION...

LIGNIN BASED LASER LITHOGRAPHY PROCESS FOR FABRICATING 3D GRAPHENE...

ELECTRICALLY CONDUCTIVE MATERIAL

INSPECTION SENSITIVITY IMPROVEMENTS FOR OPTICAL AND ELECTRON BEAM I...

FUNCTIONALIZED SOLID PARTICLES FOR SEQUESTERING METAL IONS

Ultra-High Resolution Conductive Traces Flexible Biocomposites by R...

PHOTOSENSITIVE RESIN COMPOSITION, CURED FILM, DISPLAY DEVICE, AND P...

PATTERN FORMATION MATERIAL AND PATTERN FORMATION METHOD

SURFACE TREATMENT COMPOSITION AND SURFACE TREATMENT METHOD OF RESIS...

METHOD OF SEQUESTERING METALS USING THIOSULFATE POLYMERS

SUBSTRATE TREATMENT METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM...

NON-PHOTOSENSITIVE SILOXANE COATING FOR PROCESSING HYDROPHOBIC PHOT...

TEMPLATES INCLUDING SELF-ASSEMBLED BLOCK COPOLYMER FILMS

PATTERNED FINE PARTICLE FILM STRUCTURES

PRIMER AND PATTERN FORMING METHOD FOR LAYER INCLUDING BLOCK COPOLYMER

NON-PHOTOSENSITIVE SILOXANE COATING FOR PROCESSING HYDROPHOBIC PHOT...

PATTERNING PROCESS AND MATERIALS FOR LITHOGRAPHY

SURFACE TREATMENTS FOR ALIGNMENT OF BLOCK COPOLYMERS

Cross-Linked Polymer Based Hydrogel Material Compositions, Methods...

METHOD OF FORMING PATTERN

PREPARATION OF LITHOGRAPHIC PRINTING PLATES

METHOD FOR FORMING A WIRING PATTERN BY LASER IRRADIATION

SURFACE PATTERNING WITH FUNCTIONAL POLYMERS

PATTERN FORMING METHOD

PATTERN FORMATION METHOD