The present invention relates to semiconductor photonic and opto-electronic devices. In particular, the present invention relates to an integrated optical wavelength multiplexers and demultiplexers and method of making the same.
Optical gratings are well known in the art and are used to disperse optical spectra spatially. Such gratings are commonly used in optical spectrometers to analyze the spectral composition of an optical beam. There is always a trade off between the length of an optical spectrometer and its resolution. Thus, if a higher wavelength resolution is required, the length required is also longer. Consider an example of a typical 1-meter long grating spectrometer in the market, which has a wavelength resolution of about Δλ=0.1 nm at λ=1000 nm or Δλ/λ=10−4. The dimensionless quantity for the length of the spectrometer L is and L/λ and L/λ=106 in this example. The dimensionless product of the relative resolution Δλ/λ and the relative physical size L/λ of the spectrometer is dependent on the design of the spectrometer and in this example, spectrometer gives (Δλ/λ)×(L/λ)=100=RS. This factor (RS) is generally referred to as the “resolution vs size” factor. RS basically measures the compactness of a spectrometer for a given resolution power. The smaller the RS value, the more compact is the spectrometer. Only a few conventional spectrometers have RS factor less than about 10. This is primarily because of the various limitations in the current art (as will be described below).
It is known in the art that a relatively compact spectrometer can be achieved using a curved grating. The schematics of such a grating spectrometer is shown in
Let the diffraction full angle from the entrance slit 1 be θdiv (defined by the angle of beam propagation at full-width half-maximum (FWHM) of the beam intensity) As is well known to those skilled in the art, θdiv=2λ/d (in Radian). Let length L be the distance between the grating center and entrance slit 1, which is also approximately the distance between the grating center and the exit slit 4. As is well known to those skilled in the art, the resolution of the spectrometer increases with decreasing slit size w2. The imaging through the curved grating requires w1 and w2 to be about equal. A smaller slit size w1, however, leads to a larger diffraction angle θdiv. It can be shown that the Rowland design works reasonably well up to θdiv<4°, the Rowland design could not give a sharp enough focus at the exit slit 4 (for Δλ<0.1 nm), thereby limiting the size of w2 and hence the resolution of the spectrometer. A diffraction angle of θdiv=4° corresponds to a slit size of about 25 microns (for λ=1000 nm). In the current art, it is typically difficult to make slit size smaller than 25 microns, and Rowland design is adequate for most present spectrometers with slit sizes larger than 25 microns.
Aberration limitation: In the case of the Rowland design, when θdiv>4Degree(s) (DEG), serous aberration in the refocusing beam will occur to limit wavelength resolution. This is shown in
As discussed above, a curved-grating spectrometer is well specified by the geometrical configurations of its components as shown in
The shape of each groove centered at Xi is not critical to the resolution power of the grating and hence is not necessary to be a part of the main specification. However, the groove shape is related to the diffraction efficiency. For example, in order to increase the diffraction efficiency at a particular diffraction angle θ2, it is typically made a planar surface for each groove, oriented in such a way that it acts like a tiny mirror reflecting the input ray towards the angle θ2, a process typically referred to as blazing to angle θ2 (for a given wavelength λ). A section of each groove which reflects light is physically a two-dimensional surface of a particular shape, not a one-dimensional curve. However, the geometric shape of a groove is usually referred to as a one-dimensional curve of a particular shape. This is because there is no variation in the grating shape in the direction perpendicular to the plane where grating lies. Especially, spectrometers within a planar waveguide are strictly two-dimensional in their nature and the shape of grating or grooves will be referred to with a curve, not with surface.
Conventional Rowland design spectrometers are specifically configured by the design rule described below in conjunction with
Referring to
The detector is also located on the same Rowland circle as the entrance slit SL2. In the Rowland design, the distance S2 of the detector to the grating center is related to the angle of diffraction θ2 by S2=R*Cos(θ2).
During operation, an input light beam from the entrance slit will propagate to the grating and the different frequency components of the light beam will be dispersed by the grating to different directions. Part of the dispersed light then propagates to the output detector. The medium in which the light propagates in can be air or a material medium with an effective refractive index of propagation “n”. In the case of free space, “n” is the material refractive index. In the case of a planar waveguide, “n” is the effective refractive index of propagation within the planar waveguide.
The relation between θ1, θ2, and the initial groove spacing d is given by the grating formula,
d*(Sin(θ2)−Sin(θ1))=m*λc/n (0)
where m is the diffraction order, n is the effective refractive index of propagation of the medium, λc is the center of the operation wavelength. This grating formula is a so-called far-field approximation, which is valid only when S1 and S2 are much larger than d.
Initial groove positions are X0=(0,0), X1=(d, R−(R2−d2)1/2) and X−1=(−d, R−(R2−d2)1/2). These three initial grooves with position vectors X0, X1, and X−1, are located on a circle of radius R and have the initial groove spacing old along a chord (CD in
All other grooves, specified by its position vector Xi's, are located on the same circle of radius R defined by the initial three groove positions X0, X1, and X−1. Xi's are also equally spaced along a chord that is parallel to the tangent of the grating-center curve. In other words, the projection of the displacement vector Xi−Xi−1 on this chord always has the same length. Specifically, the position vectors of these grooves can be written as Xi=(d*i, R−(R2−(d*i)2)1/2), and X−i=(−d*i, R−(R2−(d*i)2)1/2), where “*” denotes numerical multiplication and “i” is a positive integer denoting the ith groove so that “i” can take any of the values 0,1,2,3,4, . . . etc.
For example, if the radius of curvature at the grating center is r=100 μm, the Rowland circle, where the entrance slit and the detector are located, has the radius of 50 μm. Here, we assume that tangent line at the grating-center curve is parallel to the x-axis. Since the Rowland circle is tangent to the grating-center curve, it circles by passing both the grating center X0=(0,0) and a point (0, 50). If the angle of the entrance slit is θ1=45°, the distance of the entrance slit to the grating center is S1=R*Cos(θ1)=70.71 μm. In terms of (x,y)-coordinate, the entrance slit is located at (−50, 50). It is well-known that grating is more efficient if the propagation direction of the diffracted light from the grating is nearly parallel and opposite to the propagation direction of the input beam. Such a scheme is known as Littrow configuration and is widely used for a high-efficiency spectrometer. A Littrow configuration in the Rowland design will be equivalent to having the angle of detector being almost equal to the angle of the entrance slit, i.e., θ1≈θ2. Besides being at the Littrow configuration, the groove spacing d at the grating center has to be properly chosen so that it satisfies grating formula Eq. 0. For example, when the center wavelength λc is 1550 nm and the angle of entrance slit is θ1=45°, the diffraction order of m=12 of a grating with the groove spacing of d=4.2 μm at its center propagate toward a detector located at θ2=37.37°, which is close to the Littrow configuration. The detector location can be fine tuned by changing the initial groove spacing d. The lower the groove spacing d, the larger the detector angle θ2. For the groove spacing d=4.2 μm and radius of curvature R=100 μm, the initial three positions of grooves are X0=(0,0), X1=(4.2, 0.088) and X−1=(−4.2, 0.088).
In the Rowland design, other grooves are located such that their spacing is the same along a chord parallel to the grating tangent at the center. Therefore, the position vectors of other grooves are Xi=(d*i, R−(R2−(d*i)2)1/2)=(4.2*i, 100−(1002−(4.2*i)2)1/2), and X−i=(−d*i, R−(R2−(d*i)2)1/2)=(−4.2*i, 100−(1002−(4.2*i)2)1/2). The position vectors of the grooves are listed in the following table for the case of Rowland design with R=100 μm, d=4.2 μm, m=12, θ1=45°, and θ2=37.37° for an operation wavelength of λc=1550 nm.
The advent in Dense Wavelength Division Multiplexing (DWDM) optical communication networks, however, requires that the multiple wavelengths in an optical fiber to be analyzed by spectral analysis devices that are much smaller in size than that of the current grating spectrometer. The challenge is to circumvent the current limitation in grating spectrometer design and fabrication methods. As discussed above, the current design basically cannot achieve the Resolution-Size factor (RS) much smaller than about 10. While several current technologies are capable of using planar waveguide technologies to make grating based spectrometers on a single silica or semiconductor substrate, they are still not able to achieve RS much smaller than 10 due to the basic limitations of the grating spectrometer design. Achieving a smaller RS factor is important for combining or integrating high-resolution grating spectrometers or wavelength multiplexer (Mux) and demultiplexer (deMux) with various photonic devices (such as lasers, modulators, or detectors in a compact module or silica/silicon/semiconductor wafer).
These wavelength-division-multiplexed (WDM) integrated photonic devices or modules would be of great importance for applications to Dense Wavelength Division Multiplexed (DWDM) networks. The costs of these integrated WDM devices are typically proportional to their sizes. The wavelength dispersion elements, such as the grating spectrometer or other form of wavelength filters and wavelength Mux/deMux, are typically about 100 times larger in size than any other photonic devices in the module or wafer. In order to reduce their costs substantially, it is desirable to reduce the size of these wavelength dispersion elements to as small a size as possible.
Thus, it is desirable to have grating based spectrometers that have an RS factor of less than 10. It is also desirable to reduce the size, and hence the cost, of integrated WDM devices that are used in DWDM networks. The present invention discloses such a device and a method for making the same.
It is an aim of the invention to provide a compact curved grating and associated compact curved grating spectrometer or wavelength Mux/deMux with integration possibility that is capable of achieving very small RS factors thereby enabling high resolution at small size.
It is another aim of the invention to provide a compact curved grating spectrometer module that can be used as an isolated optical spectrometer or discrete optical spectrometer module or wavelength Mux/deMux module with integration possibility and that can be used as an isolated optical spectrometer using discrete optical components.
It is another aim of the invention to provide a compact curved grating spectrometer module that can be used as a wavelength dispersion element in a photonic integrated circuit.
In order to attain the above-mentioned aims, a compact curved grating and associated compact curved grating spectrometer or wavelength Mux/deMux with integration possibility is provided. The compact curved grating spectrometer includes an entrance slit, a detector and a curved grating and the compact curved grating wavelength Mux/deMux with integration possibility includes as curved grating, at least an input slit or waveguide and at least an output slit or waveguide for propagating through at least an input light beam and at least an output light beam, respectively. The locations of the entrance slit and the detector or the input slit (or waveguide) and the output slit (or waveguide) can be adjusted to control the performance of the spectrometer or wavelength Mux/deMux. The distance between the grooves of the gratings depend on the location of the entrance slit or the input slit (or waveguide), the detector or the output slit (or waveguide), the center of the operation wavelength, the diffraction order and the refractive index of the medium.
The preferred embodiments of the invention will hereinafter be described in conjunction with the appended drawings provided to illustrate and not to limit the invention, wherein like designations denote like elements, and in which
The present invention discloses a system comprising a compact curved grating (CCG), it associated compact curved grating spectrometer (CCGS) or wavelength Mux/deMux (WMDM) module and a method for making the same. The system is capable of achieving very small (resolution vs. size) RS factor. The uses of CCGS or WMDM module include an isolated optical spectrometer or wavelength Mux/deMux using discrete optical components such as slits, grating, spectrometer or wavelength Mux/deMux casing, detector, detector array, or motor drive. More generally, the CCGS or WMDM module could also be used as a wavelength dispersion element in a photonic integrated circuit. The photonic integrated circuit can be based on various materials including but not limited to glass (silica) waveguide, semiconductor waveguide, polymer waveguide, or any other type of optical waveguiding devices. Semiconductor waveguides include silicon or compound semiconductor waveguides such as III-V (GaAs, InP etc). The wavelength dispersion element based on the CCGS or WMDM module in the photonic integrated circuit can be integrated with optical detector, laser, amplifier, waveguide, modulator, splitter, multimode interference devices, other wavelength filters, array-waveguide-based devices, and other photonic devices, materials, or components to achieve a multi-component photonic integrated circuit with useful functionalities. The CCG explained below is a High-Resolution Compact Curved Grating (HR-CCG) that tries to alleviate the disadvantages associated with prior art mentioned earlier, by providing a high resolution in a small (compact) module.
We have improved on the current Rowland design, enabling curved-grating spectrometer with 10-100× smaller linear size (or 100-10,000× smaller area) using our HR-CCG with large-angle aberration-corrected design. The typical Rowland design can only reach a useful diffraction angle θdiff of ˜4DEG, beyond which serous aberration in the refocusing beam will occur to limit wavelength resolution. In
Referring to
Referring to
Referring to
Referring to
Referring to
Referring back to
Second, the location of detector or output slit (or waveguide) can be adjusted in order to have the best performance for a particular design goal. Thus, the location of detector or output slit (or waveguide) 506, specified by the angle θ2 with respect to the normal of grating center 504 and the distance S2 from the grating center is not necessarily on the same circle where entrance slit or input slit (or waveguide) 502 is located, nor on any other circle.
Third, The relation between θ1, θ2, and the initial groove spacing d is given by the grating formula,
d*(Sin(θ2)−Sin(θ1))=m*λc/n (1)
where m is the diffraction order, n is the effective refractive index of propagation of the medium, and λc is the center of the operation wavelength.
Fourth, the initial groove positions are X0=(0,0), X1=(d, R−(R2−d2)1/2) and X−1=(−d, R−(R2−d2)1/2) With these position vectors, three initial grooves are located on a circle radius R and have the initial groove spacing of d at the grating center. This circle segment of radius R at the grating center then forms the grating-center curve.
Fifth, locations of other grooves Xi's are obtained by two conditions. The first of these conditions being that the path-difference between adjacent grooves should be an integral multiple of the wavelength in the medium. The first condition can be expressed mathematically by:
[d1(θ1,S1,Xi)+d2(θ2,S2,Xi)]−[d1(θ1,S1,Xi−1)+d2(θ2,S2,Xi−1)]=m*λc/n, (2)
where d1(θ1,S1,Xi) is the distance from a i-th groove located at Xi to input slit (or input waveguide) 502 specified by θ1 and S1, d2(θ2,S2,Xi) is the distance from i-th groove located Xi to detector or output slit (or waveguide) 502 specified by θ2 and S2, m is the diffraction order, and n is the effective refractive index of propagation of the medium. This mathematical expression is numerically exact for the optical path difference requirement in the diffraction grating and is actively adjusted for every groove on HR-CCG.
The second of these conditions being specific for a particular design goal of a curved-grating spectrometer. The second condition in general can be mathematically expressed as
f(θ1,S1,θ2,Xi,Xi−1,λc,n,m)=constant (3)
Specific examples of the second condition are described later in the application. The unknown real variables in both equations Eq. (2) and Eq. (3) are x- and y-coordinates of the location vector Xi of the i-th groove. For given input-slit (or input-waveguide) location (θ1, S1), detector or output slit (or waveguide) 506 location (θ2, S2), and the previous, i.e., (i−1)-th, groove position Xi−1, Xi is completely specified by equations Eq. (2) and Eq. (3) for a given center wave-length λc, effective refractive index of propagation n, and the diffraction order m.
The last of the HR-CCG specification ensures that every ray from each groove focuses to a single point. This ensures HR-CCG having a large acceptance angle, and therefore a small spot size.
An exemplary embodiment of HR-CCG specified above is shown in
where Xin=(−S1*Sin(θ1), S1*Cos(θ1)) is the position vector of entrance slit SL1, Xdet=(−S2*Sin(θ2), S2*Cos(θ2)) is the position vector of detector or output slit (or waveguide) SL2, and Δθi is the difference in angular position between successive ith and (i−1)th grooves. In Eq. 4, operator “·” means the inner product in vector analysis and defined as A·B≡|A|*|B|*Cos(θ). The vertical bar “|” indicates taking the absolute value or the length of a vector. Because Δθi is constant for all grooves, it is same as the angular-position difference between the center groove at X0 and the first groove at X1, i.e.
In this particular case, the position of entrance slit or input slit (or waveguide) SL1, exit slit or output slit (or waveguide) SL2 and the angular spacing between the grooves are Xin=(−23.49, 16.45), Xdet=(−17.26, 33.46), and Δθ1=4.13°. In this example, wave-front of the diverging input beam propagating toward the curved grating is sliced into a set of narrow beams with angular extension Δθ by the curved-grating. Each beam with angular extension Δθ undergoes reflective diffraction by each groove. At a particular wavelength, diffraction at a particular groove is equivalent to redirecting to a particular narrow beam into a detector or output slit (or waveguide) SL2 location with θ2. The position vectors Xi's calculated from Eq. (2) and Eq. (4) are listed in the Table 2. As shown in
The above example has been used for illustration purposes only and should not be construed in any way as limiting the scope of the invention.
In an alternative embodiment, the High-Resolution Compact Curved Grating has Constant Arc and the Detector or output slit (or waveguide) is located on a Circle tangent to the grating-center curve. This embodiment is described below in detail.
In this exemplary embodiment, both entrance slit or input slit (or waveguide) 602 and detector or output slit (or waveguide) 603 are located on a circle tangent to the grating-center curve as in the case of Rowland design mentioned earlier. However, grooves in this curved-grating are located such that the arc-length of each groove is the same (the Constant-Arc Case). As a result, grooves are not located on a circle nor are spaced with equal distance.
There are two commonly used shapes of grooves in the grating used in the free-space spectrometer. They are straight line and sinusoidal shape. These two shapes are widely used because of ease of manufacturing process. For a curved-grating, ideal shape of reflecting surface not a straight line, but a curved shape that can image entrance slit or input slit (or input waveguide mouth) 602 at detector or output slit (or output waveguide mouth) 603 location. Ideal aberration-free curved mirror is an ellipse with its focal point located at source and image. Therefore, as shown in
More generally, the geometrical specification of the HR-CCG with constant arc-length (the Constant-Arc Case) and detector or output slit (or waveguide) 506 at a circle tangent to the grating-center curve is as described below.
First, entrance slit or input slit (or waveguide) 602 is located on a circle tangent to the grating-center curve (so-called tangent circle). Therefore, the angle θ1 and the distance S1 of entrance slit or input slit (or waveguide) 602 with respect to the grating center is related by S1=R*Cos(θ1), where R is the radius of curvature of the grating center.
Second, the location of detector or output slit (or waveguide) can be adjusted in order to have the best performance for a particular design goal. Thus, the location of detector or output slit (or waveguide) 603, specified by the angle θ2 with respect to the normal of grating center 601 and the distance S2 from the grating center is not necessarily on the same circle where entrance slit or input slit (or waveguide) 602 is located, nor on any other circle.
Third, the relation between θ1, θ2, and the initial groove spacing d is given by the grating formula d*(Sin(θ2)−Sin(θ1))=m*λc/n where m is the diffraction order, n is the effective refractive index of propagation of the medium, and λc is the center of the operation wavelength.
Fourth, initial groove positions are X0(0,0), X1=(d, R−(R2−d2)1/2) and X−1=(−d, R−(R2−d2)1/2) With these position vectors, three initial grooves are located on a circle of radius R and have the initial groove spacing of d at the grating center. This circle segment of radius R at the grating center then forms the grating-center curve.
Fifth, the locations of other grooves Xi's are obtained by the following two conditions. The first condition being the path-difference between adjacent grooves should be an integral multiple of the wavelength m the medium, which s mathematically expressed as
[d1(θ1,S1,Xi)+d2(θ2,S2,Xi)]−[d1(θ1,S1,Xi−1)+d2(θ2,S2,Xi−1)]=m*λ/n, (6)
The second condition being the arc lengths of all the grooves are the same throughout the HR-CCG. This second condition can be mathematically expressed as
where ΔSi is the arc-length of the ith groove. This equation requires the knowledge of Xi+1, which is still unknown. However, with the constraint the fact that each Xi is located at the center of the groove, the above expression can be reduced to the following expression without Xi+1.
The above example has been illustration purposes only and should not in any way limiting the scope of the above-described embodiment or invention as a whole.
The performance of the HR-CCG with the constant arc-length and detector or output slit (or waveguide) on a tangent circle is compared with a Rowland design with the same parameters such as θ1, S1, θ2, S2, R, m, d, and λc. It is a direct comparison of a Rowland curved-grating spectrometer described in
In an alternate embodiment, High-Resolution Compact Curved Grating has a constant arc with the detector or output slit (or waveguide) being present in-line. With reference to
In another alternative embodiment, High-Resolution Compact Curved Grating has a constant angle and detector or output slit (or waveguide) SL2 present on the circle of radius R/2, as depicted in
In as yet another alternate embodiment, High-Resolution Compact Curved Grating has a constant angle with detector or output slit (or waveguide) SL2 present at an arbitrary location.
In as yet another alternate embodiment, High-Resolution Compact Curved Grating has grooves lying on or near the circle of radius R (the near-Rowland Case) where R is the radius of a circle formed by three initial groove locations X0, X1, and X2, and the detector or output slit (or waveguide) SL2 is present on the circle of radius R/2, as depicted in
[d1(θ1,S1,Xi)+d2(θ2,S2,Xi)]−[d1(θ1,S1,Xi−1)+d2(θ2,S2,Xi−1)]=m*λc/n, (9)
Secondly, the angular locations of the grooves are chosen so that each groove is located at or near the circle of radius R throughout the HR-CCG, where R is the radius of a circle formed by three initial groove locations X0, X1, and X2.
In another alternate embodiment, the High-Resolution Compact Curved Grating with grooves on or near the circle of radius R (the near-Rowland case) has detector or output slit (or waveguide) present at an arbitrary location.
First, the location of the entrance slit or input slit (or waveguide) 902 is adjustable in order to have the best performance for a particular design goal. Thus, the location of a entrance slit or input slit (or waveguide) 902 specified by angle θ1 with respect to the normal of grating center 904 and the distance S1 from grating center 904 is not necessarily on a circle as in the case for Rowland design mentioned in the prior art.
Second, the location of the detector or output slit (or waveguide) for two different wavelengths λ1 and λ2 is adjustable in order to have the best performance for a particular design goal. The location of the detector or output slit (or waveguide) 906 for wavelength λ1 is specified by the angle θ2 with respect to the normal of grating center 904 and the distance S2 from the grating center. The location of detector or output slit (or waveguide) 908 for wavelength λ2 is specified by the angle θ3 with respect to the normal of grating center 904 and the distance S3 from the grating center. Note that 906, and 908 are not necessarily on the same circle where entrance slit or input slit (or waveguide) 902 is located, nor on any other circle.
Third, the relation between θ1, θ2, θ3 and the initial groove spacing d is given by the grating formula,
d*(Sin(θ2)−Sin(θ1))=m*λ1/n (10)
d*(Sin(θ3)−Sin(θ1))=m*λ2/n (11)
where m is the diffraction order and n is the effective refractive index of propagation of the medium.
Fourth, locations of other grooves Xi's are obtained by two conditions. The first of these conditions being that the path-difference between adjacent grooves should be an integral multiple of the wavelength λ1 in the medium. The first condition can be expressed mathematically by:
[d1(θ1,S1,Xi)+d2(θ2,S2,Xi)]−[d1(θ1,S1,Xi−1)+d2(θ2,S2,Xi−1)]=m*λ1/n, (12)
where d1(θ1,S1,Xi) is the distance from the i-th groove located at Xi to entrance slit or input slit (or waveguide) 902 specified by θ1 and S1, d2(θ2,S2,Xi) is the distance from the i-th groove located at Xi to detector or output slit (or waveguide) 906 specified by θ2 and S2, m is the diffraction order, and n is the effective refractive index of propagation of the medium. This mathematical expression is numerically exact for the optical path difference requirement in the diffraction grating and is actively adjusted for every groove on HR-CCG.
The second of these conditions being that the path-difference between adjacent grooves should be an integral multiple of the wavelength λ2 in the medium. The second condition can be expressed mathematically by
[d1(θ1,S1,Xi)+d3(θ3,S3,Xi)]−[d1(θ1,S1,Xi−1)+d3(θ3,S3,Xi−1)]=m*λ2/n, (13)
where d3(θ3,S3,Xi) is the distance from the i-th groove located at Xi to detector or output slit (or waveguide) 908 specified by θ3 and S3. This mathematical expression is numerically exact for the optical path difference requirement in the diffraction grating and is actively adjusted for every groove on HR-CCG. Solving Equations (12) and (13) together, exact locations of other grooves Xi's can be obtained.
In another embodiment, the grating so generated gives rise to a third focal spot for a third input wavelength λ3 that has a value between wavelength λ1 and wavelength λ2. The location of this third focal spot is 910 and is specified by angle θ4 with respect to the normal of grating center 904 and the distance S4 from grating center 904. The three output slit (or waveguide) locations 906, 910, 908, can be made to be located on a circle of radius Rout, called the radius of curvature of the output plane or output-plane radius.
In one embodiment, S2 and S3 are chosen so that the locations 906, 910, 908 lie on a near straight line so that Rout is large. This will ensure that the three focal points will form a nearly flat surface of reflection so that the focused beams with plane wavefront at their focal points will be reflected directly back to the entrance slit 902. Each of the reflected beam will trace back its own original physical beam propagation and hence will achive maximum reflection back into the input slit or waveguide 902
As shown in
While preferred embodiments of the invention have been illustrated and described, it will be clear that the invention is not limited to these embodiments only. Numerous modifications, changes, variations, substitutions and equivalents will be apparent to those skilled in the art without departing from the spirit and scope of the invention as described in the claims.
This application is a Continuation-In-Part of U.S. patent application Ser. No. 11/872,455 filed Oct. 15, 2007, now U.S. Pat. No. 7,623,235, which is a Continuation-In-Part of U.S. patent application Ser. No. 10/708,730, filed Mar. 20, 2004, now U.S. Pat. No. 7,283 ,233. This application is related to U.S. patent application Ser. No. 09/916,701, “Method for shifting bandgap enemy of quantum well layer” filed Jul. 26, 2001 in the names of Boon-Slew Ooi and Seng-Tiong Ho, the disclosure of which is incorporated herein by reference. This application is related to U.S. patent application Ser. No. 60/242,219, “Method for shifting bandgap energy of quantum well layer” filed Oct. 20, 2000, in the names of Boon-Siew Ooi and Seng-Tiong Ho, the disclosure of which is incorporated herein by reference. This application is related to U.S. patent application Ser. No 60/430,507, “Method for quantum-well intermixing using pre-annealing enhanced defect diffusion” filed Dec. 3, 2002, in the names of Boon-Siew Ooi and Ruiyu (Jane) Wang, the disclosure of which is incorporated herein by reference.
Number | Name | Date | Kind |
---|---|---|---|
4027975 | Turner et al. | Jun 1977 | A |
4140394 | Roos | Feb 1979 | A |
4380393 | Nagata et al. | Apr 1983 | A |
4820046 | Sohma et al. | Apr 1989 | A |
5114231 | Gautherin et al. | May 1992 | A |
6339662 | Koteles et al. | Jan 2002 | B1 |
7283233 | Ho | Oct 2007 | B1 |
Entry |
---|
U.S. Appl. No. 60/242,219, filed Oct. 20, 2000, Boon-Siew Ooi, Seng-Tiong Ho. |
U.S. Appl. No. 09/916,701, filed Jul. 26, 2001, Ooi et al. |
U.S. Appl. No. 60/430,507, filed Dec. 3, 2002, Boon-Siew Ooi, Ruiyu (Jane) Wang. |
Number | Date | Country | |
---|---|---|---|
Parent | 11872455 | Oct 2007 | US |
Child | 12623750 | US | |
Parent | 10708730 | Mar 2004 | US |
Child | 11872455 | US |