Claims
- 1. A method of quantifying thickness and impurity profile defining parameters in impurity profile containing thin membranes, comprising providing, and obtaining ellipsometric data from both first and second sides of an impurity profile containing thin membrane, and providing a mathematical model of said impurity profile defining parameters comprising membrane thickness and impurity profile defining parameters, then regressing said mathematical model onto data obtained from each side of said impurity profile containing thin membrane by a selection from the group consisting of:
utilizing the data sets obtained from front and back of the thin membrane simultaneously; utilizing the data sets obtained from front and back of the thin membrane independently; and utilizing the data sets obtained from front and back of the thin membrane both independently and simultaneously. to evaluate said membrane thickness and impurity profile defining parameters.
- 2. A method of quantifying thickness and impurity profile defining parameters in impurity profile containing thin membranes comprised of two substantially parallel surfaces that are separated by a thickness, said method comprising, in any functional order, the steps of:
a. providing an impurity profile containing thin membrane comprised of two substantially parallel surfaces that are separated by a thickness, and providing a spectroscopic ellipsometer system capable of producing spectroscopic data sets at at least one angle of incidence of a beam of electromagnetic radiation to a surface of said impurity profile containing thin membrane when it is mounted in said spectroscopic ellipsometer system; b. determining a range of wavelengths over which the impurity profile containing thin membrane is essentially transparent and the effect of the presence of said impurity profile has essentially negligible effect; c. determining a range of wavelengths over which the impurity profile containing thin membrane is essentially transparent, but over which the effect of the presence of said impurity profile has a non-negligible effect; d. utilizing substantially wavelengths in the range determined in step b., by an approach selected from the group consisting of:
reflection ellipsometry; and transmission ellipsometry; obtaining a spectroscopic data set; e. utilizing substantially wavelengths in the range determined in step c., by reflection ellipsometry as applied to one surface of said impurity profile containing thin membrane, obtaining a spectroscopic data set; f. utilizing substantially wavelengths in the range determined in step c., by reflection ellipsometry as applied to a surface of said impurity profile containing thin membrane offset from that utilized in step e. by said thickness, obtaining a spectroscopic data set; g. providing a mathematical model for said impurity profile containing thin membrane including a parameter that quantifies thickness; h. providing a mathematical model for said impurity profile containing thin membrane including parameters that quantify impurity profile defining parameters; i. using the spectroscopic data set obtained in step d., regressing the mathematical model provided in step g. thereonto to evaluate the parameter that quantifies thickness; j. using the thickness arrived at in step i. and the spectroscopic data sets obtained in at least one of the steps e. and f., simultaneously regressing the mathematical model provided in step h. thereonto to evaluate the parameters that quantify the impurity profile.
- 3. A method of quantifying thickness and impurity profile defining parameters in impurity profile containing thin membranes comprised of two substantially parallel surfaces that are separated by a thickness, said method comprising, in any functional order, the steps of:
a. providing an impurity profile containing thin membrane comprised of two substantially parallel surfaces that are separated by a thickness, and providing a spectroscopic ellipsometer system capable of producing spectroscopic data sets at at least one angle of incidence of a beam of electromagnetic radiation to a surface of said impurity profile containing thin membrane when it is mounted in said spectroscopic ellipsometer system; b. determining a range of wavelengths over which the impurity profile containing thin membrane is essentially transparent and the effect of the presence of said impurity profile has essentially negligible effect; c. determining a range of wavelengths over which the impurity profile containing thin membrane is essentially transparent, but over which the effect of the presence of said impurity profile has a non-negligible effect; d. utilizing substantially wavelengths in the range determined in step b., by an approach selected from the group consisting of:
reflection ellipsometry; and transmission ellipsometry; obtaining a spectroscopic data set; e. utilizing substantially wavelengths in the range determined in step c., by reflection ellipsometry as applied to one surface of said impurity profile containing thin membrane, obtaining a spectroscopic data set; f. utilizing substantially wavelengths in the range determined in step c., by reflection ellipsometry as applied to a surface of said impurity profile containing thin membrane offset from that utilized in step e. by said thickness, obtaining a spectroscopic data set; g. providing a mathematical model for said impurity profile containing thin membrane including parameters that quantify thickness and impurity profile defining parameters; h. using all obtained spectroscopic data sets, simultaneously regressing the mathematical model thereonto to evaluate the parameters that quantify thickness and the impurity profile defining parameters.
Parent Case Info
[0001] This Application is a Continuation-In-Part of Provisional Application Ser. No. 60/183,977 filed Feb. 22, 2000.
Provisional Applications (1)
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Number |
Date |
Country |
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60183977 |
Feb 2000 |
US |