Claims
- 1. A method of forming a plurality of apertures in a metal sheet having a central portion and an exterior portion, as well as a cone side and a grade side, comprising the steps of:
- applying a coating of a photoresist material to said cone side and said grade side of said metal sheet to form first photoresist layers having a central portion and an exterior portion thereon;
- providing a pattern of first openings in the first photoresist layer on said grade side of said sheet, the first openings on said grade side being the same in the exterior portion and in the central portion of the first photoresist layer;
- providing a pattern of first openings in the first photoresist layer on the cone side of said sheet, the first openings on said cone side being different in the exterior portion than in the central portion of the first photoresist layer;
- etching said metal sheet through the first openings in the first photoresist layers to form openings extending partially into said metal sheet, said openings in said metal sheet substantially corresponding, in shape, to the first openings in said patterns in the first photoresist layers;
- applying a second coating of a photoresist material to said cone side and said grade side of said metal sheet to form a second photoresist layer having a central portion and an exterior portion on each side of said metal sheet;
- providing a pattern of second openings in the second photoresist layer, at least on the cone side of said metal sheet, the second openings being different in the exterior portion of the second photoresist layer than in the central portion thereof;
- etching said metal sheet through the second openings in the second photoresist layer to form a shadow mask having apertures with openings substantially corresponding to the first and second openings in said patterns of the first and second photoresist layers.
- 2. The method as described in claim 1, further including the step of stripping the first photoresist layers after etching said metal sheet through the first openings in the first photoresist layers.
- 3. The method as described in claim 1, wherein the first openings in the first photoresist layer and the second openings in the second photoresist layer, on the cone side of said metal sheet in the exterior portion thereof, are offset relative to the first openings in the first photoresist layer and the second openings in the second photoresist layer on the grade side of said metal sheet.
- 4. The method as described in claim 1, wherein said openings of said apertures in the exterior portions of said metal sheet are radially elongated on the cone side of said metal sheet.
- 5. A method of forming a plurality of apertures in a metal sheet used as an aperture mask in a CRT, said aperture mask having a central portion and an exterior portion, as well as a cone side spaced from a screen of said CRT and a grade side facing an electron gun of said CRT, said electron gun providing a plurality of electron beams that are incident on said screen, the method comprising the steps of:
- applying a coating of a photoresist material to said cone side and said grade side of said metal sheet to form first photoresist layers having a central portion and an exterior portion thereon;
- providing a pattern of first openings in the first photoresist layer on said grade side of said metal sheet, the first openings on said grade side being the same in the exterior portion and in the central portion of the first photoresist layer;
- providing a pattern of first openings in the first photoresist layer on the cone side of said metal sheet, the first openings in the exterior portion on the cone side of the first photoresist layer being offset relative to the corresponding first openings in the first photoresist layer on the grade side of said metal sheet;
- etching said metal sheet through the first openings in the first photoresist layers to form openings extending partially into said metal sheet, said openings in said metal sheet substantially corresponding, in shape, to said pattern of first openings in the first photoresist layers;
- stripping said first photoresist layers from metal sheet;
- applying a second coating of a photoresist material to said cone side and said grade side of said metal sheet to form second photoresist layers having a central portion and an exterior portion on each side of said metal sheet;
- providing a pattern of second openings in the second photoresist layers, the second openings in the exterior portion of the cone side of the second photoresist layer being offset relative to the corresponding second openings in the second photoresist layer on the grade side of said metal sheet, the second openings in the exterior portion of the second photoresist layers being smaller than the first openings in the first photoresist layers;
- etching said metal sheet through the second openings in the second photoresist layers to form said aperture mask having apertures with openings on the cone side that are elongated in the direction of the incident electron beams and offset relative to the corresponding openings on the grade side of said aperture mask.
Parent Case Info
This is a division of application Ser No. 08/321,131, filed Oct. 14, 1994, now abandoned.
US Referenced Citations (14)
Foreign Referenced Citations (1)
Number |
Date |
Country |
2166107 |
Aug 1973 |
FRX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
321131 |
Oct 1994 |
|