Japanese Journal of Applied Physics; vol. 29; No. 10; Oct. 1990; pp. 2165-2170. |
Journal of Vacuum Science & Technology B; vol. 9, No. 2, Part 1; Mar./Apr. 1991; pp. 357-361. |
1990 Dry Process Symposium; “Sodium Contamination Free Ashing Process Using O2+H2O Plasma Downstream”; Fujimura et al.; pp. 153-156. |
Infrared Spectra of GeS, SGeS, SGeO, and OGeO in Solid Argon, J. Phys. Chem., 1992, vol. 96, pp. 6181-61-85, Hassanzadeh, et al.* |
Reaction of Selenium in a Quartz Tube. Infrared Spectra and Density Functional Theory Calculations of New Selenium-Nitrogen and Selenium-Silicon Species in Solid Argon, J. Phys. Chem., 1996, vol. 100, pp. 16667-16673, Andrews, et al. |