Number | Name | Date | Kind |
---|---|---|---|
5427649 | Kim et al. | Jun 1995 | |
5529953 | Shoda | Jun 1996 | |
5602053 | Zheng et al. | Feb 1997 | |
5614765 | Avanzino et al. | Mar 1997 | |
5705430 | Avanzino et al. | Jan 1998 | |
5726100 | Givens | Mar 1998 | |
5783485 | Ong et al. | Jul 1998 | |
5795823 | Avanzino et al. | Aug 1998 | |
5814557 | Venkatramam et al. | Sep 1998 |
Entry |
---|
S. Wolf et al, "Silicon Processing For The VLSI Era", vol. 1, Lattice Press, Sunset Beach, CA, 1986, p. 443 (no month). |