Number | Name | Date | Kind |
---|---|---|---|
3994586 | Sharkins | Nov 1976 | |
3999866 | Mathisen | Dec 1976 |
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Briska et al., "Apparatus and Method for Determining the Carbon Content in Silicon Wafers", IBM Technical Disclosure Bulletin, vol. 23, No. 1, Jun.-1980, p. 225. |
Guggenheim et al., "Wafer Transport for IR Analysis", IBM Technical Disclosure Bulletin, vol. 22, No. 2, Jul.-1979, p. 586. |