Number | Name | Date | Kind |
---|---|---|---|
4003772 | Hanazono et al. | Jan 1977 | |
4491500 | Michaud et al. | Jan 1985 | |
4770740 | Tsuzuki et al. | Sep 1988 | |
5043294 | Willer et al. | Aug 1991 | |
5081796 | Schultz | Jan 1992 | |
5278105 | Eden et al. | Jan 1994 | |
5423716 | Strasbaugh | Jun 1995 | |
5529953 | Shoda | Jun 1996 | |
5549212 | Kanoh et al. | Aug 1996 | |
5602423 | Jain | Feb 1997 | |
5899706 | Kluwe et al. | May 1999 | |
5923563 | Lavin et al. | Jul 1999 | |
5948573 | Takahashi | Sep 1999 |
Number | Date | Country |
---|---|---|
8-222632 | Aug 1996 | JPX |
09181159 | Jul 1997 | JPX |
10321625 | Dec 1998 | JPX |
WO9627206 | Sep 1996 | WOX |
Entry |
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MRS Bulletin, "Copper-Based Metallization in ULSI Structures", Aug. 1994, pp. 15-18. |