Electric potential shaping apparatus for holding a semiconductor wafer during electroplating

Abstract

An apparatus for depositing an electrically conductive layer on the surface of a wafer comprises a flange. The flange has a cylindrical wall and an annulus attached to a first end of the cylindrical wall. The annulus shields the edge region of the wafer surface during electroplating reducing the thickness of the deposited electrically conductive layer on the edge region. Further, the cylindrical wall of the flange can be provided with a plurality of apertures adjacent the wafer allowing gas bubbles entrapped on the wafer surface to readily escape.

Description

FIELD OF INVENTION

The present invention relates generally to an apparatus for treating the surface of a substrate and more particularly to an apparatus for electroplating a layer on a semiconductor wafer.

BACKGROUND OF THE INVENTION

The manufacture of semiconductor devices often requires the formation of electrical conductors on semiconductor wafers. For example, electrically conductive leads on the wafer are often formed by electroplating (depositing) an electrically conductive layer such as copper on the wafer and into patterned trenches.

Electroplating involves making electrical contact with the wafer surface upon which the electrically conductive layer is to be deposited (hereinafter the “wafer plating surface”). Current is then passed through a plating solution (i.e. a solution containing ions of the element being deposited, for example, a solution containing Cu ++ ) between an anode and the wafer plating surface (the wafer plating surface being the cathode). This causes an electrochemical reaction on the wafer plating surface which results in the deposition of the electrically conductive layer.

To minimize variations in characteristics of the devices formed on the wafer, it is important that the electrically conductive layer be deposited uniformly (have a uniform thickness) over the wafer plating surface. However, conventional electroplating processes produce nonuniformity in the deposited electrically conductive layer due to the “edge effect” described in Schuster et al., U.S. Pat. No. 5,000,827, herein incorporated by reference in its entirety. The edge effect is the tendency of the deposited electrically conductive layer to be thicker near the wafer edge than at the wafer center.

To offset the edge effect, Schuster et al. teaches non-laminar flow of the plating solution in the region near the edge of the wafer, i.e. teaches adjusting the flow characteristics of the plating solution to reduce the thickness of the deposited electrically conductive layer near the wafer edge. However, the range over which the flow characteristics can be adjusted is limited and difficult to control. Thus, it is desirable to have a method of offsetting the edge effect which does not rely on adjustment of the flow characteristics of the plating solution.

Another conventional method of offsetting the edge effect is to make use of “thieves” adjacent the wafer. By passing electrical current between the thieves and the anode during the electroplating process, electrically conductive material is deposited on the thieves which otherwise would have been deposited on the wafer plating surface near the wafer edge where the thieves are located. This improves the uniformity of the deposited electrically conductive layer on the wafer plating surface. However, since electrically conductive material is deposited on the thieves, the thieves must be removed periodically and cleaned adding to the maintenance cost and downtime of the apparatus. Further, additional power supplies must be provided to power the thieves adding to the capital cost of the apparatus. Accordingly, it is desirable to avoid the use of thieves.

Nonuniformity of the deposited electrically conductive layer can also result from entrapment of air bubbles on the wafer plating surface. The air bubbles disrupt the flow of ions and electrical current to the wafer plating surface creating nonuniformity in the deposited electrically conductive layer. One conventional method of reducing air bubble entrapment is to immerse the wafer vertically into the plating solution. However, mounting the wafer vertically adds complexity and hinders automation of the electroplating process. Accordingly, it is desirable to have an apparatus for electroplating a wafer which allows the wafer to be immersed horizontally into the plating solution and yet avoids air bubble entrapment.

SUMMARY OF THE INVENTION

In accordance with the present invention, an apparatus for depositing an electrically conductive layer on the surface of a substrate such as a wafer comprises a flange. The flange has a cylindrical wall and an annulus extending inward from the cylindrical wall, the annulus having an inner perimeter which defines a flange central aperture. The apparatus also includes a cup for supporting the wafer along a peripheral region thereof. The cup has a cup central aperture defined by an inner perimeter of the cup, the cup being positioned above the flange.

In one embodiment, the diameter of the flange central aperture is less than the diameter of the cup central aperture. The annulus of the flange thus extends under the edge region of the wafer surface and reduces the electric current flux to this edge region during electroplating. This, in turn, reduces the thickness of the deposited electrically conductive layer on the edge region of the wafer surface. Of importance, the thickness of the deposited electrically conductive layer on the edge region of the wafer surface is reduced without the use of thieves.

The thickness of the deposited electrically conductive layer on the edge region of the wafer can be varied by adjusting the diameter of the flange central aperture. To further decrease the thickness of the layer in this region, the diameter of the flange central aperture is decreased; conversely, to increase the thickness of the layer, the diameter is increased. Thus, the thickness profile of the deposited electrically conductive layer across the wafer surface can be readily adjusted by simply modifying the diameter of the flange central aperture.

The flange can further include a plurality of apertures extending through the cylindrical wall of the flange. By locating these apertures adjacent the cup and near the edge region of the wafer surface, air bubbles entrapped on the wafer surface can readily escape through the apertures. To further enhance removal of entrapped air bubbles, the wafer can be rotated while the plating solution is directed towards the center of the wafer surface.

By modifying the width of the apertures in the cylindrical wall of the flange, the electric current flux at the edge region of the wafer surface is adjusted. This, in turn, adjusts the thickness of the deposited electrically conductive layer on the edge region of the wafer surface. Thus, the thickness profile of the deposited electrically conductive layer across the wafer surface can also be readily adjusted by simply modifying the width of the apertures in the cylindrical wall of the flange.

In accordance with another embodiment of the present invention, a method of depositing an electrically conductive layer on the wafer surface includes providing a cup attached to a flange, the cup having an inner perimeter which defines a cup central aperture, the flange having an annulus. The wafer is then mounted in the cup so that the wafer surface is exposed through the cup central aperture. The cup and flange are then placed into a plating solution, the plating solution contacting the wafer surface. An electrical field and electric current flux is then produced between the wafer surface and an anode in the plating solution wherein the annulus of the flange shapes the electric current flux and reduces the thickness of the deposited electrically conductive layer on the edge region of the wafer surface.

These and other objects, features and advantages of the present invention will be more readily apparent from the detailed description of the preferred embodiments set forth below taken in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagrammatical view of an electroplating apparatus having a wafer mounted therein in accordance with the present invention.

FIGS. 2A and 2B are cross-sectional views of a cup having a wafer mounted therein illustrating equipotential surfaces and electric current flux lines, respectively, during electroplating in accordance with the related art.

FIGS. 3A and 3B are cross-sectional views of a flange and a cup having a wafer mounted therein illustrating equipotential surfaces and electric current flux lines, respectively, during electroplating in accordance with the present invention.

FIGS. 4 , 5 , 6 and 7 are cross-sectional views of cups formed integrally with various flanges in accordance with alternative embodiments of the present invention.

FIGS. 8 and 9 are graphs of the plated thickness versus distance from the wafer center for various flanges in accordance with the present invention.

FIGS. 10A and 10B are top and bottom perspective views, respectively, of a cup formed integrally with a flange in accordance with the present invention.

FIG. 11 is a top plan view, partially in section, of the cup and flange of FIGS. 10A and 10B in accordance with this embodiment of the present invention.

FIG. 12 is a cross-sectional view of the cup and flange taken along the line XII—XII of FIG. 11 in accordance with this embodiment of the present invention.

FIG. 13 is a detailed cross-sectional view of a portion XIII from FIG. 12 of the cup and flange in accordance with this embodiment of the present invention.

FIG. 14 is a top perspective view of a flange in accordance with an alternative embodiment of the present invention.

FIG. 15 is a top plan view of the flange of FIG. 14 in accordance with this embodiment of the present invention.

FIG. 16 is a cross-sectional view of the flange taken along the line XVI—XVI of FIG. 15 in accordance with this embodiment of the present invention.

FIG. 17 is a cross-sectional view of the flange taken along the line XVII—XVII of FIG. 15 in accordance with this embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Several elements in the following figures are substantially similar. Therefore similar reference numbers are used to represent similar elements.

FIG. 1 is a diagrammatical view of an electroplating apparatus 30 having a wafer 38 mounted therein in accordance with the present invention. Apparatus 30 includes a clamshell 32 mounted on a rotatable spindle 40 which allows rotation of clamshell 32 . Clamshell 32 comprises a cone 34 , a cup 36 and a flange 48 . Flange 48 has formed therein a plurality of apertures 50 . A clamshell lacking a flange 48 yet in other regards similar to clamshell 32 is described in detail in Patton et al., co-filed Application Ser. No. 08/969,984, cited above.

During the electroplating cycle, wafer 38 is mounted in cup 36 . Clamshell 32 and hence wafer 38 are then placed in a plating bath 42 containing a plating solution. As indicated by arrow 46 , the plating solution is continually provided to plating bath 42 by a pump 44 . Generally, the plating solution flows upwards to the center of wafer 38 and then radially outward and across wafer 38 through apertures 50 as indicated by arrows 52 . Of importance, by directing the plating solution towards the center of wafer 38 , any gas bubbles entrapped on wafer 38 are quickly removed through apertures 50 . Gas bubble removal is further enhanced by rotating clamshell 32 and hence wafer 38 .

The plating solution then overflows plating bath 42 to an overflow reservoir 56 as indicated by arrows 54 . The plating solution is then filtered (not shown) and returned to pump 44 as indicated by arrow 58 completing the recirculation of the plating solution.

A DC (or pulsed) power supply 60 has a negative output lead electrically connected to wafer 38 through one or more slip rings, brushes and contacts (not shown). The positive output lead of power supply 60 is electrically connected to an anode 62 located in plating bath 42 . During use, power supply 60 biases wafer 38 to have a negative potential relative to anode 62 causing an electrical current to flow from anode 62 to wafer 38 . (As used herein, electrical current flows in the same direction as the net positive ion flux and opposite the net electron flux.) This causes an electrochemical reaction (e.g. Cu ++ +2e=Cu) on wafer 38 which results in the deposition of the electrically conductive layer (e.g. copper) on wafer 38 . The ion concentration of the plating solution is replenished during the plating cycle, for example by dissolving a metallic anode (e.g. Cu=Cu ++ +2e − ). Shields 53 and 55 are provided to shape the electric field between anode 62 and wafer 38 . The use and construction of anodes and shields are further described in Reid et al., co-filed application Ser. No. 08/969,196 and Reid et al., co-filed application Ser. No. 08/969,267, both cited above.

FIGS. 2A and 2B are cross-sectional views of a cup 70 having a wafer 38 mounted therein illustrating equipotential surfaces and electric current flux lines, respectively, during electroplating in accordance with the related art. A cup similar to cup 70 is described in detail in Patton et al., co-filed application Ser. No. 08/969,984, cited above. For purposes of clarity, the plating solution and anode are not illustrated in FIGS. 2A and 2B but it is understood that cup 70 including wafer 38 is immersed in a plating solution and that an electrical potential (a voltage differential) exists between a conventional electrically conductive seed layer 74 on a plating surface 76 of wafer 38 and the anode (See anode 62 in FIG. 1 ). Copper on titanium nitride or on tantalum are examples of suitable electrically conductive seed layers.

Referring to FIGS. 2A and 2B , cup 70 is fitted with a compliant seal 72 which forms a seal between cup 70 and plating surface 76 . Electrical contacts 78 make the electrical connection with seed layer 74 (electrical contacts 78 are electrically connected to the negative output of a power supply, e.g. see power supply 60 of FIG. 1 ). By forming a seal between cup 70 and plating surface 76 , compliant seal 72 prevents the plating solution from entering a region 77 and contaminating contacts 78 , wafer edge 84 and wafer backside 86 .

In FIG. 2A , equipotential surfaces V 1 , V 2 , V 3 , V 4 , V 5 and V 6 represent surfaces of constant electrical potential within the plating solution. Since seed layer 74 is biased with a negative potential compared to the anode, equipotential surface V 1 has the most negative potential and the electrical potential increases (becomes less negative) from equipotential surface V 1 to equipotential surface V 6 .

As shown in FIG. 2A , under central region 80 of plating surface 76 of wafer 38 , equipotential surfaces V 1 through V 6 are substantially parallel to one another demonstrating the uniformity of the electric current flux under central region 80 . However under edge region 82 of plating surface 76 of wafer 38 (directly adjacent compliant seal 72 ), equipotential surface V 1 to V 6 are bunched together and are moved upwards towards wafer 38 demonstrating nonuniformity of the electric current flux under edge region 82 .

Referring now to FIG. 2B , electric current flux lines I 1 to I 10 are illustrated, although for clarity only flux lines I 1 , I 5 and I 10 are labeled. The density of the flux lines at any particular region (the number per unit area perpendicular to the flux lines) is proportional to the magnitude of the electric current flux at the particular region. As shown in FIG. 2B , the spacing between flux lines I 5 to I 10 under central region 80 is substantially uniform as is the magnitude of the electric current flux. However flux lines I 1 to I 5 under edge region 82 are spaced closer together than flux lines I 5 to I 10 indicating that the magnitude of the electric current flux under edge region 82 is greater than under central region 80 . Flux lines I 1 to I 5 are spaced together since cup 70 is formed of, or alternatively coated with, a dielectric which shapes the electric current flux. Since the electric current flux per unit area is proportional to the number of flux lines entering the unit area, the electric current flux per unit area of edge region 82 is greater than the electric current flux per unit area of central region 80 . Since the amount of electrically conductive material deposited per unit area is directly related to the electric current flux per unit area, the thickness of the electrically conductive layer deposited on plating surface 76 is thickest on edge region 82 .

FIGS. 10A and 10B are top and bottom perspective views, respectively, of a cup 36 F formed integrally with a flange 48 F in accordance with the one embodiment of the present invention. As best shown in FIG. 10B , flange 48 F comprises a vertical cylindrical wall 51 F and an annulus 49 F. More particularly, a first end of wall 51 F is integrally attached to cup 36 F and a second end of wall 51 F is integrally attached to annulus 49 F. Extending from the inner cylindrical surface to the outer cylindrical surface of wall 51 F are a plurality of apertures 50 F which are circular holes. The advantages of flange 48 F are similar to the advantages discussed below in regards to flange 48 A of FIGS. 3A and 3B .

FIGS. 3A and 3B are cross-sectional views of a cup 36 A having a wafer 38 mounted therein and a flange 48 A integral with cup 36 A illustrating equipotential surfaces and electric current flux lines, respectively, during electroplating in accordance with the present invention. For purposes of clarity, the plating solution and anode are not illustrated in FIGS. 3A and 3B but it is understood that cup 36 A including wafer 38 and flange 48 A are immersed in a plating solution and that an electrical potential exists between seed layer 74 and the anode.

In accordance with this embodiment, flange 48 A includes an annulus 49 A which horizontally extends inward beyond inner perimeter 90 of cup 36 A. Thus, annulus 49 A has an inner perimeter 92 which defines a flange central aperture having a diameter less than the cup central aperture defined by inner perimeter 90 of cup 36 A. Flange 48 A and cup 36 A are formed from a dielectric material or alternatively, from an electrically conductive material having an insulative coating. For example, flange 48 A and cup 36 A are formed of an electrically insulating material such as polyvinylidene fluoride (PVDF) or chlorinated polyvinyl chloride (CPVC). Instead of forming flange 48 A integrally with cup 36 A, flange 48 A can also be formed separately from cup 36 A and then attached to cup 36 A. For example, flange 48 A can be bolted to cup 36 A.

Extending horizontally (substantially parallel to the plane defined by inner perimeter 90 of cup 36 A) and through a vertical cylindrical wall 51 A of flange 48 A are a plurality of apertures 50 A. By locating apertures 50 A adjacent cup 36 A and near edge region 82 of plating surface 76 , any gas bubbles entrapped on plating surface 76 are readily released through apertures 50 A.

Referring to FIG. 3A , equipotential surfaces V 11 , V 12 , V 13 , V 14 , V 15 and V 16 representing surfaces of constant electric potential within the plating solution are illustrated. Equipotential surface V 11 has the most negative potential and the electrical potential increases from equipotential surface V 11 to equipotential surface V 16 . The substantially uniform spacing between equipotential surfaces V 11 to V 16 demonstrates the uniformity of the electric current flux near wafer 38 . Of importance, the equipotential surfaces V 11 , V 12 and V 13 have substantially uniform spacing under both edge region 82 and central region 80 thus demonstrating the uniformity of the electric current flux in these regions.

Referring now to FIG. 3B , electric current flux lines I 11 to I 20 are illustrated although for clarity only flux lines I 11 , I 12 , I 18 and I 20 are labeled. As shown in FIG. 3B , the spacing between flux lines I 12 to I 18 is reduced adjacent inner perimeter 92 of annulus 49 A indicating a greater magnitude of the electric current flux in this region. However, flux lines I 12 to I 18 spread from annulus 49 A to plating surface 76 and are substantially uniformly spaced at plating surface 76 . Flux line I 11 extends through aperture 50 A thus contributing to the magnitude of the electric current flux at edge region 82 . Flux lines I 18 to I 20 are uniformly spaced from one another and are substantially unaffected by annulus 49 A and cup 36 A.

Of importance, flux lines I 11 to I 20 are substantially uniformly spaced at plating surface 76 in both edge region 82 and central region 80 . Thus the magnitude of the electric current flux at plating surface 76 is uniform. Since the amount of electrically conductive material deposited per unit area of plating surface 76 is directly related to the electric current flux per the unit area, the thickness of the deposited electrically conductive layer on plating surface 76 is substantially uniform. In one embodiment, the thickness uniformity of the deposited electrically conductive layer is within 2%, i.e. the thickness of the deposited electrically conductive layer at any given point is within 2% of the average thickness of the deposited electrically conductive layer.

FIGS. 4 , 5 , 6 and 7 are cross-sectional views of cups formed integrally with various flanges in accordance with alternative embodiments of the present invention. For clarity, the cones (see cone 34 of FIG. 1 ) are not illustrated in FIGS. 4 , 5 , 6 and 7 .

Referring to FIG. 4 , a wafer 38 is mounted in a cup 36 B. Wafer 38 is pressed down on to compliant seal 72 B by a cone (not shown). This forms the electrical connection between contacts 78 B and seed layer 74 on plating surface 76 . As shown in FIG. 4 , cup 36 B has an inner perimeter 90 B which defines a cup central aperture A CB having a diameter ID CB . Flange 48 B has an annulus 49 B having an inner perimeter 92 B which defines a flange central aperture A FB having a diameter ID FB . Since diameter ID FB is less than diameter ID CB , annulus 49 B extends under the edge region of plating surface 76 effectively shielding the edge region, i.e. flange 483 reduces the electric current flux to the edge region of plating surface 76 . This, in turn, reduces the thickness of the deposited electrically conductive layer on the edge region of plating surface 76 .

Referring now to FIG. 5 , cup 36 C is substantially similar to cup 36 B (FIG. 4 ). However, in the FIG. 5 embodiment, the annulus 49 C of flange 48 C extends further under the edge region towards the center of plating surface 76 than does annulus 49 B (FIG. 4 ). Thus, flange 48 C shields more of the edge region of plating surface 76 than does flange 48 B.

FIG. 8 is a graph of the resulting thickness in microns (μm) of the deposited electrically conductive layer (the “plated thickness”) versus distance in millimeters (mm) from the center of wafer 38 for flanges 48 B and 48 C in accordance with the present invention. More particularly, trace 100 B is for flange 48 B ( FIG. 4 ) where the inner diameter ID FB of annulus 49 B is 7.33 inch (18.62 cm.) and trace 102 C is for flange 48 C ( FIG. 5 ) where the inner diameter IDFC of annulus 49 C is 7.13 in. (18.11 cm.). As shown in FIG. 8 , the plated thickness gradually increases from about 1.32 μm at the wafer center to about 1.73 μm at about 80 mm from the wafer center in both traces 100 B and 102 C. The plated thickness for trace 102 C then decreases to about 1.35 μm at about 93 mm from the wafer center. This abrupt falloff of plated thickness at the edge region results from the relatively large shielding effect of flange 48 C. In contrast, the plated thickness for trace 100 B decreases only slightly from about 1.78 μm at about 87 mm from the wafer center to about 1.65 μm at about 93 mm from the wafer center. Without flanges 48 B, 48 C, traces 100 B, 102 C, respectively, would not fall off (would not have a negative slope) at the edge region of the wafer.

As shown by traces 102 C, 100 B, the plated thickness profile across the plating surface is readily adjusted by simply modifying the inner diameter of the flange. More particularly, by decreasing the inner diameter of the flange the plated thickness on the edge region is reduced; conversely, by increasing the inner diameter of the flange the plated thickness of the edge region is increased.

Referring now to FIG. 6 , cup 36 D is substantially similar to cup 36 B (FIG. 4 ). However, in the FIG. 6 embodiment, the width W HD of apertures 50 D extending through flange 48 D is greater than the width W HB of apertures 50 B extending through flange 48 B. Forming flange 48 D with apertures 50 D having a greater width W HD increases the electric current flux through apertures 50 D (see flux line Ill in FIG. 3 B). Increasing the electric current flux results in a greater plating thickness on the edge region of wafer plating surface 76 .

FIG. 9 is a graph of the resulting plated thickness in microns versus distance in millimeters from the center of wafer 38 for flanges 48 B and 48 D in accordance with the present invention. More particularly, trace 110 B is for flange 48 B ( FIG. 4 ) having apertures 50 B with widths W HB equal to 0.05 in. (0.13 cm.) and trace 112 D is for flange 48 D ( FIG. 6 ) having apertures 50 D with widths W HD equal to 0.10 in. (0.25 cm.).

As shown in FIG. 9 , at about 85 mm from the wafer center the plating thickness of trace 110 B decreases abruptly from about 1.68 μm to about 1.42 μm at about 93 mm from the wafer center due to the shielding of the edge region of plating surface 76 from flange 48 B. In contrast, as shown by trace 112 D, the plating thickness only decreases slightly over this same edge region from approximately 1.67 μm to 1.62 μm due to the increased electric current flux through apertures 50 D. (Note that the anode to wafer spacing was greater by approximately 1.0 cm in FIG. 8 than in FIG. 9 thus accounting for the differences in traces 100 B, 110 B of FIGS. 8 , 9 , respectively.)

Thus, as shown by traces 110 B, 112 D in FIG. 9 , the plated thickness profile across the plating surface is readily adjusted by simply modifying the width of the apertures in the flange. More particularly, by increasing the width of the apertures in the flange the plated thickness on the edge region is increased; conversely, by decreasing the width of the apertures in the flange the plated thickness on the edge region is decreased. This is a significant advantage over the prior art in which the severe limitations of adjusting the flow characteristics of the plating solution limits adjustment of the plated thickness profile.

Referring again to FIGS. 4 , 5 and 6 , annuluses 49 B, 49 C and 49 D have inner perimeters 92 B, 92 C and 92 D which are surfaces perpendicular to the planes defined by flange central apertures A FB , A FC , A FD , respectively (i.e. inner perimeters 92 B, 92 C and 92 D are perpendicular to the plane defined by wafer plating surface 76 ). In contrast, referring now to FIG. 7 , annulus 49 E of flange 48 E has an inner perimeter 92 E sloped relative to the plane defined by flange central aperture A FE . More particularly, inner perimeter 92 E flares inward from a first diameter equal to inner diameter ID CE of inner perimeter 90 E of cup 36 E to a second lesser diameter ID FE . This embodiment results in a less abrupt change in the plating thickness at the edge region of plating surface 76 compared to flanges 48 B, 48 C and 48 D of FIGS. 4 , 5 and 6 , respectively.

FIGS. 10A and 10B are top and bottom perspective views, respectively, of a cup 36 F formed integrally with a flange 48 F in accordance with another embodiment of the present invention. As shown in FIG. 10A , cup 36 F has an inner perimeter 90 F which defines a cup central aperture A CF . Threaded bolt holes 120 are provided in cup 36 F for bolting one or more contact strips to cup 36 F. These contact strips are not illustrated in FIGS. 10A and 10B for purposes of clarity.

Referring now to FIG. 10B , flange 48 F comprises a vertical cylindrical wall 51 F and an annulus 49 F. More particularly, a first end of wall 51 F is integrally attached to cup 36 F and a second end of wall 51 F is integrally attached to annulus 49 F. Extending from the inner cylindrical surface to the outer cylindrical surface of wall 51 F are a plurality of apertures 50 F which are circular holes. Annulus 49 F has an inner perimeter 92 F which defines a flange central aperture A FF . Flange central aperture A FF has a diameter less than the diameter of cup central aperture A CF ( FIG. 10A ) and less than the inner diameter of wall 51 F.

FIG. 11 is a top plan view, partially in section, of cup 36 F integral with flange 48 F in accordance with the FIGS. 10A and 10B embodiment of the present invention. Cup 36 F and flange 48 F are formed of an electrically insulating material such as CPVC. Illustrative specifications for various characteristics of cup 36 F and flange 48 F shown in FIG. 11 are provided in Table I below.

TABLE I
CHARACTER-
ISTIC	DESCRIPTION	SPECIFICATION
A	registration notch	2X R .158 In. (180°
		APART)
B	registration notch	45° × 0.50 In.
	champfer	CHAMPFER, 2 PLCS (BOTH
		SLOTS)
C	alignment pin	0.138 In. × .390 In.
	receptacle	DP. C′SINK 45° × .030
		In. DE. 2 PLCS, 180°
		APART
D	contact mounting	DRILL 0.104 In. × .300
	holes	In. DP (.340 In. MAX
		DP. AT DRILL POINT)
		BOTTOM TAP 6-32 THRD,
		24 PLCS
E	registration notch	10.380 In.
	center diameter
F	alignment pin	8.860 In.
	receptacle
	diameter
G	contact strip arc	8X 45.0°
H	contact mounting	22.5°
	hole arc angles
I	contact mounting	8X 45.0°
	hole arc angles
J	contact mounting	7.0°
	hole arc angles

FIG. 12 is a cross-sectional view of cup 36 F and flange 48 F taken along the line XII—XII of FIG. 11 in accordance with this embodiment of the present invention. Illustrative specifications for various characteristics of cup 36 F and flange 48 F shown in FIG. 12 are provided in Table II below.

TABLE II
CHARACTERISTIC	DESCRIPTION	SPECIFICATION
K	clamshell OD	09.080	In.
L	wafer seal OD	08.480	In.
M	contact mounting ID	08.280	In.
ID CF	cup central aperture	01.530	In.
	diameter
ID FF	flange central	07.330	In.
	aperture diameter
P	cup ID	08.130	In.
Q	cup OD	010.550	In.
R	Inner cup lip height	.150	In.
S	cup lip height	.310	In.
T	contact mounting hole	.521	In.
	vertical position
U	parallelism	.005	In.

FIG. 13 is a cross-sectional view of a portion XIII from FIG. 12 of cup 36 F and flange 48 F in accordance with this embodiment of the present invention. Illustrative specifications for various characteristics of cup 36 F and flange 48 F shown in FIG. 13 are provided in Table III below.

TABLE III
CHARACTERISTIC	DESCRIPTION	SPECIFICATION
V	vent hole diameter	120 PLCS. 3° APART
W	flange height	.353 In.
X	wafer seal relief	R. 020 In. × .020 In.
		DP.
Y	contact relief height	.275 In.
Z	lower cup height	1.111 In.
A1	wafer seal to hole	.022 In. REF
	distance
B1	hole vertical	1.005 In.
	position
C1	wafer seal vertical	.921 In.
	position

Note that all characteristics in Tables I, II and III are symmetrical and must be concentric with the center bore center line within 0.005 total indicated radius in inches (TIR) and that all edges should be lightly deburred.

FIG. 14 is a top perspective view of a flange 48 G in accordance with an alternative embodiment of the present invention. Flange 48 G is formed from an electrically insulative material such as PVC. Flange 48 G comprises a vertical cylindrical wall 51 G and an annulus 49 G. Wall 51 G is provided with holes 140 for mounting flange 48 G to a cup (not shown). Bolts are passed through holes 140 and into the cup to mount flange 48 G to the cup. This is in contrast to flange 48 F of FIGS. 10A , 10 B, 11 , 12 and 13 which is formed integrally with cup 36 F. Referring still to FIG. 14 , wall 51 G is formed with four apertures 50 G shaped as elongated slots. Directly below apertures 50 G and integrally attached to an end of wall 51 G is an annulus 49 G having an inner perimeter 92 G which defines a flange central aperture A FG .

FIG. 15 is a top plan view of flange 48 G of FIG. 14 in accordance with this embodiment of the present invention. Illustrative specifications for various characteristics of flange 48 G shown in FIG. 15 are provided in Table IV below.

TABLE IV
CHARACTERISTIC                   SPECIFICATION
D1                               6X 60.0°
E1                               4X 10.0°
F1                               4X 80.0°
ID                                                                        FG 7.33 In. OR 7.13 In.
H1                               010.00 In.
I1                               09.080 In.

FIG. 16 is a cross-sectional view of flange 48 G taken along the line XVI—XVI of FIG. 15 in accordance with this embodiment of the present invention. Illustrative specifications for various characteristics of flange 48 G shown in FIG. 16 are provided in Table V below.

TABLE V
CHARACTERISTIC SPECIFICATION
J1             .090 In.
K1             .400 In.
L1             1.00 In.

FIG. 17 is a cross-sectional view of flange 48 G taken along the line XVII—XVII of FIG. 15 in accordance with this embodiment of the present invention. Illustrative specifications for various characteristics of flange 48 G shown in FIG. 17 are provided in Table VI below.

TABLE VI
CHARACTERISTIC SPECIFICATION
M1             6X ¼-20 THRD
N1             .200 In.
O1             .20 In.
P1             5.9°

Having thus described the preferred embodiments, persons skilled in the art will recognize that changes may be made in form and detail without departing from the spirit and scope of the invention. For example, although the substrate is described and illustrated as a circular wafer having an electrically conductive seed layer on the plating surface, any substrate having an electrically conductive layer on a substantially planar surface (such as a wafer having a flat) or any electrically conductive substrate having a substantially planar surface can be treated. Further, instead of electroplating a layer on a substrate, the system can be used to electrochemically etch or polish a layer on a substrate. Thus the invention is limited only by the following claims.

Claims

1. An apparatus for treating a surface of a substrate comprising a flange, said flange having a cylindrical wall and an annulus attached to a first end of said cylindrical wall, said annulus having an inner perimeter which defines a flange central aperture, wherein said flange comprises an electrically conductive material having an electrically insulating coating thereon.

2. The apparatus of claim 1 wherein extending through said cylindrical wall from an inner cylindrical surface to an outer cylindrical surface are one or more apertures.

3. The apparatus of claim 2 wherein said one or more apertures are circular holes.

4. The apparatus of claim 2 wherein said one or more apertures are elongated slots.

5. The apparatus of claim 1 further comprising a cup having a cup central aperture defined by an inner perimeter of said cup.

6. The apparatus of claim 5 wherein a diameter of said flange central aperture is less than a diameter of said cup central aperture.

7. The apparatus of claim 5 wherein said cylindrical wall has one or more threaded bolt holes for attaching said flange to said cup.

8. The apparatus of claim 1 further comprising an anode.

9. The apparatus of claim 8 further comprising a power supply for creating an electrical potential between said substrate and said anode.

10. The apparatus of claim 1 wherein said inner perimeter of said annulus is a surface perpendicular to the plane defined by said flange central aperture.

11. The apparatus of claim 1 wherein said inner perimeter of said annulus is a sloped surface relative to the plane defined by said flange central aperture.

12. An apparatus for treating a surface of a substrate comprising a flange, said flange having a cylindrical wall and an annulus attached to a first end of said cylindrical wall, said annulus having an inner perimeter which defines a flange central aperture, said apparatus further comprising a cup having a cup central aperture defined by an inner perimeter of said cup and a compliant seal adjacent said inner perimeter of said cup.

13. The apparatus of claim 12 further comprising a plurality of contacts adjacent said compliant seal.

14. An apparatus for treating a surface of a substrate comprising a flange, said flange having a cylindrical wall and an annulus attached to a first end of said cylindrical wall, said annulus having an inner perimeter which defines a flange central aperture, said apparatus further comprising a cup having a cup central aperture defined by an inner perimeter of said cup, wherein a second end of said cylindrical wall is attached to said cup.

15. An apparatus for treating a surface of a substrate comprising a flange, said flange having a cylindrical wall and an annulus attached to a first end of said cylindrical wall, said annulus having an inner perimeter which defines a flange central aperture, said apparatus further comprising a spindle for rotating said flange.

16. A combination for treating a surface of a substrate comprising a flange, said flange having a cylindrical wall and an annulus attached to a first end of said cylindrical wall, said annulus having an inner perimeter which defines a flange central aperture, said apparatus further comprising a plating bath containing a plating solution, said plating solution containing copper ions.

17. The combination of claim 16 further comprising a pump for recirculating said plating solution.

18. The combination of claim 16 wherein said plating solution contains ions of an electrically conductive material.

19. Apparatus for electroplating a surface of a substrate comprising:a plating bath adapted for containing a plating solution; a cup for holding a peripheral region of a substrate, said cup comprising a compliant seal surrounding a central aperture of said cup; a flange comprising a vertical wall and an annular member, an upper end of said vertical wall being connected to said cup, a lower end of said vertical wall being connected to said annular member, said vertical wall having a first inner perimeter, said annular member having a second inner perimeter, said second inner perimeter having a diameter that is smaller than a diameter of said first inner perimeter; an anode adapted for immersion in said plating solution; and a power supply having a positive terminal electrically connected to said anode.

20. The apparatus of claim 19 wherein said flange is formed separately from said cup.

21. The apparatus of claim 19 wherein said flange is formed integrally with said cup.

22. The apparatus of claim 19 wherein said vertical wall comprises a plurality of apertures.

23. The apparatus of claim 19 further comprising a clamshell mechanism, said clamshell mechanism comprising said cup and a cone.

24. The apparatus of claim 23 wherein said clamshell mechanism is mounted on a rotatable spindle.

25. The apparatus of claim 19 wherein said annular member comprises a dielectric material.

26. The apparatus of claim 25 wherein said annular member comprises a conductive material coated with a dielectric material.

27. A combination for performing electroplating comprising:a clamshell arrangement including a cup and a cone, said cup having a central aperture; a substrate held between said cup and said cone, said cup contacting said substrate in an area of contact in a peripheral region of said substrate; a plating bath containing a plating solution, said substrate being immersed in said plating solution; a flange connected to said cup, said flange comprising a wall and an annulus, said annulus having an inner perimeter portion spaced apart from said substrate and extending inward towards a center of said central aperture beyond said area of contact between said cup and said substrate, a surface of said inner perimeter portion comprising a dielectric material; an anode immersed in said plating solution; and a power supply having a positive terminal electrically connected to said anode.

28. The combination of claim 27 wherein a plurality of apertures are formed in said wall.

29. The combination of claim 27 wherein said clamshell arrangement is mounted on a rotatable member.