Claims
- 1. An electrolytic copper plating method using a reducing agent, comprising dipping a catalyzed, electrically nonconductive substrate in a solution which contains a copper salt, a copper-reducing agent for the acceleration of copper deposition, said copper-reducing agent being selected from the group consisting of dimethylamineborane, a hydrazine and its salts, hypophosphorous acid and its salts, and is present in said solution at a concentration at 0.5 to 20 g/l, and a copper-complexing agent and which has a pH value of about 6 to 7.5, and subjecting said catalyzed, electrically nonconductive substrate to electrolysis in said solution at a temperature of about 20.degree. C. to 30.degree. C., thereby forming an electrically conductive film of copper on said nonconductive substrate.
- 2. An electrolytic copper plating method as claimed in claim 1, wherein said complexing agent is at least one selected from the group consisting of a polyamine and its salts, an aminocarboxylic acid and its salts, an amine alkanol compound, and a hydroxycarboxylic acid and its salts.
- 3. An electrolytic copper plating method as claimed in claim 1, wherein at least one additive is further added to said solution to improve the properties of said solution and the resulting, electrolytically deposited film.
Priority Claims (1)
Number |
Date |
Country |
Kind |
3-205101 |
Aug 1991 |
JPX |
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Parent Case Info
This is a continuation of application Ser. No. 07/929,164, filed Aug. 11, 1992, now abandoned.
US Referenced Citations (5)
Foreign Referenced Citations (1)
Number |
Date |
Country |
WO8200666 |
Mar 1982 |
WOX |
Continuations (1)
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Number |
Date |
Country |
Parent |
929164 |
Aug 1992 |
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