1. Field of the Invention
The field of the invention is that of the detection of high frequency electromagnetic waves. The invention can be applied to a very wide range of bandwidths, but the preferred field of application is the terahertz frequency domain.
This frequency domain located at the boundary between the far infrared and the millimetric waves presents a number of interesting technical and industrial aspects in as much as the absorption or reflection properties of the material can be substantially different in this range of wavelengths. Of notable mention are the applications in the medical imaging field and the applications for certain control and security systems. These devices are also used for applications in metrology.
2. Description of the Prior Art
The detection of very high frequency electromagnetic waves is, however, relatively difficult to achieve and represents a major obstacle to the development of the terahertz technologies. The current offering of sensors is relatively weak and the sensors are complex. The most commonly used sensors are the bolometers which measure the thermal variation of a supraconducting film induced by the electrical field of the wave to be detected. While the bolometers present very good sensitivities, they must nevertheless operate at very low temperatures of the order of a few Kelvins, so imposing very heavy usage constraints. It is also possible to use so-called Golay cells where the assessment of the incident power is done notably by means of the optical measurement of the change of pressure of a gaseous cell, induced by the incident electromagnetic wave. Although very sensitive, these sensors are extremely fragile and support only low levels of illumination.
The object of the invention is to propose a detection device which is sensitive in this high frequency spectral band and which does not present the above drawbacks. As will be seen, the device can operate at ambient temperature and does not include complex components. Furthermore, by producing a matrix of sensors according to the invention, it then becomes possible to perform either terahertz imaging or terahertz spectroscopy.
The core of the invention involves using a so-called active material with an absorption coefficient in the optical domain that depends on the intensity of the terahertz signal to be detected. By measuring the variations of the absorption coefficient, the intensity of the terahertz signal is thus determined. By this means, a frequency transposition is performed in a frequency domain where the measurement no longer poses technical problems.
Throughout the text of the description and the figures, the following conventions have been adopted:
More specifically, the subject of the invention is a sensor of an electromagnetic signal sent in a first bandwidth, characterized in that it mainly comprises:
Advantageously, the active medium can comprise a solid or epitaxial semiconductor material on a substrate that is transparent to the optical signal, and the wavelength of the optical signal is then chosen to be greater than the absorption wavelength of this semiconductor material, the modification of the absorption being performed by Franz-Keldysh effect. The active medium can also be a symmetrical quantum well structure, the wavelength of the optical signal is then more or less adjacent to that of an inter-band or intra-band transition of said structure, the modification of the absorption being achieved by quantumly confined Stark effect. For example, the structure comprises a stack with several tens of flat layers, parallel to each other and a few tens of Angstroms thick, the constituent materials of the layers being alternately Ga0.53In0.47As and Al0.52In0.48As, the layers being epitaxial on an iron-doped semi-insulating InP substrate. The active medium can also be a dissymmetrical quantum well structure. In this case, the wavelength of the optical signal is equal to that of an inter-band or intra-band transition of said structure.
Advantageously, the active medium comprises a diffraction array adapted to operate in the bandwidth of the electromagnetic signal. If the medium has a quantum structure, the part of the electromagnetic signal diffracted by said array then has a direction more or less parallel to the mean plane of the layers of constituent materials of the quantum well structure.
Advantageously, the active medium comprises at least one antenna adapted to the first bandwidth of the signal to be detected, the optical signal being focused by the sending means in the vicinity of said antenna. In this case, the active medium can comprise a hemispherical lens centered on the antenna and produced in a material that is more or less transparent to the electromagnetic signal. It is also possible to use an active medium that has, in the area of the antenna, the form of a thin membrane, the thickness of said membrane being very much less than the mean wavelength of the electromagnetic signal.
Advantageously, the optical probe can operate by reflection, the sensor comprising optical means able to reflect the optical signal after it has passed through the absorbent medium. If the medium includes an antenna, the antenna can comprise at least one electrode used as mirror for the optical signal. It is also possible to improve the absorption of the optical signal by using a resonant optical cavity in which the active medium is located, the optical signal being focused by the sending means in the vicinity of said cavity. In this context, the opto-mechanical means comprise at least one separation optic placed so as to separate the sent optical signal before passing through the active medium from the optical signal reflected by the active medium. The separation of the sent and received beams can be obtained by using a polarized optical signal, the reflection and transmission coefficients of the separation optic then depending on the polarization of said signal.
Advantageously, the optical probe can also include a reference optical pathway comprising:
The optical signal is sent in the ultraviolet range or in the visible range or in the infrared range.
The invention also applies to a matrix or an array comprising a plurality of individual sensors, having the above characteristics, the individual photodetectors then being grouped together in a matrix of CCD (Charge-Coupled Device) type.
In this case, it is preferable for the active medium to be common to all the individual sensors of the matrix and for the sending means also to be common to all the individual sensors of the matrix, the single optical signal sent being separated into a plurality of individual signals dedicated to each individual sensor by means of a matrix of micro-optics.
The invention will be better understood, and other advantages will become apparent, on reading the description that follows, given by way of nonlimiting example, and with the help of the appended figures in which:
a and 4b represent the absorption variations as a function of the wavelength of the optical signal in the presence or in the absence of electrical field from the electromagnetic signal, in the case where the active medium is of semiconductor type;
a, 5b and 6a, 6b represent the absorption variations as a function of the wavelength of the optical signal in the presence or in the absence of electrical field of the electromagnetic signal, in the case where the active medium is of quantum well type;
A sensor according to the invention is represented in
To detect the continuous electromagnetic signal, the physical effect that modifies the absorption of the active medium in the presence of the electromagnetic signal should cause absorption fluctuations with non-zero mean.
The measurement of the mean absorption variation, by probing the active medium with an optical probe, will make it possible to quantify the power of the incident electromagnetic wave on the sensor. This measurement can be performed, for example, with a photodiode, the sensitivity of which is adapted to the wavelengths of the sent optical signal and the bandwidth of which is less than the frequency of the electromagnetic signal to be characterized.
There are various types of material presenting absorption coefficients α with non-zero mean variation.
A first type of active medium consists of a semiconductor which can be solid or epitaxial on a substrate that is transparent to the optical signal. More specifically, for the substrate to be transparent, it is sufficient for the wavelength of the optical signal to be greater than the absorption wavelength of the substrate. The modification of the absorption in the active medium is due to the Franz-Keldysh effect induced by the electrical field of the incident electromagnetic signal. This effect is independent of the sign of the electrical field. Consequently, the variation of the absorption of the active medium is non-zero on average. The Franz-Keldysh effect is a rapid effect, the absorption variation taking place in times less than 100 femtoseconds, enabling electromagnetic signals in the terahertz frequency domain to be detected.
a represents the absorption as a function of the wavelength for a semiconductor material. The solid-line curve denoted E≠0 represents the absorption in the presence of the electromagnetic signal and the broken-line curve denoted E=0 represents the absorption in the absence of the electromagnetic signal. The variation of the absorption coefficient denoted Δα is maximum for wavelengths λ0 very slightly greater than the absorption wavelength λg of the semiconductor material. Thus, as can be seen in
In order to increase the sensitivity to the electrical field of the electromagnetic signal, the semiconductor active medium can be replaced by a stack of layers of material forming symmetrical quantum wells. As indicated in
For a symmetrical structure, this effect is independent of the sign of the applied electrical field, so enabling continuous electromagnetic signals to be detected.
Furthermore, this effect is rapid and makes it possible to detect electromagnetic fields up to the terahertz frequency domain. Finally, the quantum confinement is reflected in an increased sensitivity of the absorption to the electromagnetic field E.
As an example, a structure with multiple quantum wells forming the active medium consists of a stack comprising 50 flat layers, parallel to each other and 100 Angstroms thick, the stack having an overall thickness of 500 nanometers. The constituent materials of the layers are alternately Ga0.53In0.47As and Al0.52In0.48As. These layers are epitaxial on an iron-doped semi-insulating InP substrate. The wavelength corresponding to the inter-band transition in a quantum well is 1.55 microns.
It is also possible to use a stack of dissymmetrical quantum wells by producing a structure in which the width of the lower-level well is different from that of the higher-level well as indicated in
To improve the sensitivity of the sensor and/or to change the direction of the field of the electromagnetic signal so as to improve the sensitivity of the active medium, it is interesting to have on the active medium means of concentrating the electromagnetic signal to be detected. The simplest way to proceed is to deposit on the surface of the semiconductor an antenna 101 adapted to the frequency of the wave to be detected as indicated in
with τ=RC, R being the radiation resistance of the antenna.
The characteristics and the form of the antenna are adapted according to the frequency and bandwidth characteristics of the electromagnetic signal. In
The material of the antenna can be gold.
Of course, the optical signal must be focused in the vicinity of said antenna, at the point where the concentration of the electromagnetic signal and the absorption variation that it induces are greatest.
As an example,
In this case, the optical signal from the probe is focused in the center of the two semicircles.
To improve the detection sensitivity, the gain of the antenna can be increased thanks to a hemispherical lens 102 centered on the antenna as indicated in
As an example, a hemispherical lens with a diameter of 5 millimeters can be centered and glued on the antenna of
A second embodiment to increase the gain of the antenna is indicated in
It is known that the quantum well structures are sensitive only to electrical fields perpendicular to the mean plane of the layers. As has been seen, it is possible to rectify the field of the electromagnetic signal by means of an antenna. It is also possible to obtain this effect by means of a diffraction array 104 arranged on the active medium and adapted to operate in the bandwidth of the electromagnetic signal as indicated in
It has been seen that the choice of the wavelength of the optical signal conditions the performance of the system. It is advantageous to choose sources emitting over a narrow and stable spectral band. Lasers are particularly well suited to this type of device. The optical signal sending means are, for example, lasers of DFB (Distributed FeedBack) type. These lasers generally emit in the near infrared. They can be fiber drawn, the emission from the laser being transmitted in a single-mode optical fiber. Their output power can easily be modulated.
The optical probe can operate either by transmission or by reflection. The second mode of operation presents the advantage of dissociating the electromagnetic signal and the optical signal which can be positioned either side of the active medium. In this case, if the medium comprises an antenna, one of the electrodes of this antenna can be used as mirror for the optical signal.
To improve the detection sensitivity, the effective interaction length of the probe with the active medium can be increased. To do this, the active medium is placed in a resonant optical cavity. This can be formed:
The optical thickness of the resonant optical cavity should be chosen so that the go and return journeys of the optical signal interfere positively.
In the case of reflection-mode operation, it is necessary for the probe to include opto-mechanical means arranged so as to separate the optical signal sent before passing through the active medium from the optical signal reflected by the active medium.
The optical probe can also comprise a reference optical pathway as indicated in
This arrangement makes it possible to obtain a detection independent of the intensity variations of the optical signal sent.
It is, of course, possible to combine a plurality of individual sensors to form a matrix or an array of sensors. In this case, the individual photodetectors are then grouped together in a matrix of CCD (Charge-Coupled Device) type.
It is also preferable, in this case, for the active medium to be common to all the individual sensors of the matrix and for the sending means also to be common to all the sensors of the matrix, the single signal that is sent being separated into a plurality of individual signals dedicated to each individual sensor by means of a matrix of micro-optics.
Such devices can be used to carry out terahertz imaging. In this case, as indicated in
It can also be used to carry out terahertz spectroscopy. In this case, as indicated in
Number | Date | Country | Kind |
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0510875 | Oct 2005 | FR | national |
The present Application is based on International Application No. PCT/EP2006/067695, filed on Oct. 24, 2006, which in turn corresponds to French Application No. 0510875, filed on Oct. 25, 2005, and priority is hereby claimed under 35 USC §119 based on these applications. Each of these applications are hereby incorporated by reference in their entirety into the present application.
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/EP06/67695 | 10/24/2006 | WO | 00 | 4/25/2008 |