Number | Date | Country | Kind |
---|---|---|---|
196 14 459 | Apr 1996 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4686764 | Adams et al. | Aug 1987 | |
4732042 | Adams | Mar 1988 | |
4999317 | Lu et al. | Mar 1991 |
Number | Date | Country |
---|---|---|
0588603 | Apr 1993 | EPX |
0537710 | Mar 1994 | EPX |
3606850 | Sep 1987 | DEX |
3814444 | Nov 1988 | DEX |
4216150 | Nov 1992 | DEX |
Entry |
---|
"Phase Separation in Interactions of Tantalum-Chromium Alloy on SI", C. J. Palmstrom, J. Gyulai and J. W. Mayer, J. Vac. Sci. Technol. A 1(2), Apr.-Jun. 1983, 0734-2101/83/020452-03, 1983 American Vacuum Society, pp. 452-454. |