Claims
- 1. An end-effector for handling a microelectronic workpiece, comprising:
a body; a plurality of spaced-apart abutments carried by the body, the plurality of abutments defining a workpiece-receiving area; an actuator carried by the body and associated with at least one of the abutments, the actuator being adapted to move the associated abutment inwardly toward the workpiece-receiving area from a retracted position; and a detector operatively associated with the actuator, the detector being adapted to generate an error signal if the associated abutment fails to engage an edge of a workpiece when the actuator moves the associated abutment inwardly.
- 2. The end-effector of claim 1 wherein the actuator carries a flag, the detector monitoring a position of the flag.
- 3. The end-effector of claim 1 wherein the actuator carries a flag and the detector comprises spaced-apart first and second flag sensors.
- 4. The end-effector of claim 3 wherein the first flag sensor is positioned to detect movement of the flag as the actuator moves the associated abutment inwardly of the retracted position.
- 5. The end-effector of claim 3 wherein the second flag sensor is positioned to detect movement of the flag beyond a position of the flag when the associated abutment engages the edge of the workpiece.
- 6. The end-effector of claim 1 wherein the abutment is adapted to move the associated abutment outwardly from a workpiece-engaging position to the retracted position to release the workpiece.
- 7. The end-effector of claim 6 wherein the detector is adapted to generate the error signal when the associated abutment moves inwardly beyond the workpiece-engaging position.
- 8. The end-effector of claim 1 wherein the actuator is slidably received in a channel member, the channel member defining a forward ramp at its inward end.
- 9. An end-effector for handling a microelectronic workpiece, comprising:
a body; a plurality of abutments carried by the body at locations adapted to selectively engage an edge of a workpiece; and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments.
- 10. The end-effector of claim 9 further comprising an actuator associated with at least one of the abutments, the actuator moving the associated abutment between a retracted position and a deployed position.
- 11. The end-effector of claim 10 wherein the actuator carries a flag, the detector monitoring a position of the flag.
- 12. The end-effector of claim 10 wherein the actuator carries a flag and the detector comprises spaced-apart first and second flag sensors.
- 13. The end-effector of claim 12 wherein the first flag sensor is positioned to detect movement of the flag as the associated abutment is moved between the retracted position and the deployed position.
- 14. The end-effector of claim 12 wherein the second flag sensor is positioned to detect movement of the flag beyond a position of the flag when the associated abutment is in its deployed position.
- 15. The end-effector of claim 9 wherein one of the abutments is a moveable abutment moveable between a retracted position and a workpiece-engaging position, the moveable abutment engaging the edge of the workpiece when in its workpiece-engaging position and releasing the edge of the workpiece when in its retracted position.
- 16. The end-effector of claim 15 wherein the moveable abutment moves in a first direction in moving from its retracted position to its workpiece-engaging position, the detector detecting movement of the moveable abutment in the first direction beyond the workpiece-engaging position.
- 17. The end-effector of claim 16 wherein the detector is adapted to generate an error signal when the moveable abutment moves beyond the workpiece-engaging position.
- 18. An end-effector for handling a microelectronic workpiece, comprising:
a body; spaced-apart, stationary first and second abutments carried by the body, and a moveable third abutment carried by the body opposite the first and second abutments, the three abutments together defining a workpiece-receiving area; an actuator comprising a shaft having an inward end carrying the third abutment and being adapted to move inwardly from a retracted position to a deployed position wherein the third abutment engages a workpiece; and a detector comprising spaced-apart first and second position sensors positioned adjacent a path of travel of the actuator, the first position sensor generating a first signal when the actuator moves inwardly a predetermined distance from the retracted position, the second position sensor generating a second signal when the actuator moves inwardly beyond the deployed position, the detector being adapted to generate an error signal if the second position sensor generates the second signal.
- 19. The end-effector of claim 18 wherein each of the first and second abutments comprises a sloped base sloping upwardly at an incline angle in a direction away from the third abutment, a sloped shoulder sloping upwardly from an upper edge of the base in a direction away from the third abutment, the shoulder having an incline angle greater than the incline angle of the base, and an overhang sloping upwardly from the shoulder in a direction toward the third abutment, the overhang and the shoulder together defining an angular edge-receiving recess.
- 20. A method of grasping a microelectronic workpiece, comprising:
providing an end-effector having a plurality of abutments, an actuator, and a detector, at least one of the abutments comprising a moveable abutment; positioning a microelectronic workpiece between the abutments of the end-effector; moving the moveable abutment inwardly using the actuator; and monitoring action of the actuator using the detector and generating an error signal if the moveable abutment fails to engage an edge of the workpiece.
- 21. The method of claim 20 wherein the actuator carries a flag and the detector comprises a first flag sensor, monitoring action of the actuator comprising detecting a position of the flag with the first flag sensor.
- 22. The method of claim 21 wherein the first flag sensor detects movement of the flag as the actuator moves the moving abutment inwardly from a retracted position.
- 23. The method of claim 21 wherein the first flag sensor comprises a first light source, detecting the position of the flag comprising detecting interruption of a path of light from the first light source.
- 24. The method of claim 21 wherein the detector includes a second flag sensor, monitoring action of the actuator further comprising detecting a different second position of the flag with the second flag sensor.
- 25. The method of claim 24 wherein the second flag sensor comprises a second light source, detecting the second position of the flag comprising detecting interruption of a path of light from the second light source.
- 26. The method of claim 24 wherein the second flag sensor detects movement of the flag as the actuator moves the third abutment inwardly beyond a position wherein the third abutment grasps the edge of the workpiece.
- 27. A transfer device for handling microelectronic workpieces, comprising:
a transport unit configured to move along a transport path; a lift assembly carried by the transport unit; an arm carried by the lift assembly; and a first end-effector rotatably coupled to the arm, the first end-effector comprising a body, a plurality of abutments carried by the body at locations adapted to selectively engage an edge of a workpiece, and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments.
- 28. An end-effector for handling a microelectronic workpiece, comprising:
a body; a resilient first compressive member carried by the body and having a first abutment at one end thereof; a first tensile member carried by the body and having a second abutment at one end thereof, the second abutment being spaced from the first abutment to receive a workpiece therebetween; an actuator coupled to the first compressive member and the first tensile member, the actuator being adapted to move the first abutment and the second abutment to selectively grasp and release a workpiece, the first compressive member resiliently deforming when the actuator urges the first abutment against the workpiece.
- 29. An end-effector for handling a microelectronic workpiece, comprising:
a body; first and second resilient members carried by the body, the first resilient member carrying a first abutment and the second resilient member carrying a second abutment spaced from the first abutment; first and second tensile members carried by the body, the first tensile member carrying a third abutment and the second tensile member carrying a fourth abutment spaced from the third abutment; and an actuator carried by the body and coupled to the first and second resilient members and to the first and second tensile members, the actuator being adapted to move the first, second, third and fourth abutments to selectively grasp or release a workpiece therebetween.
- 30. The end-effector of claim 29 wherein the body includes a first guide slidably receiving the first resilient member, the first guide deforming the first resilient member from a relaxed shape.
- 31. The end-effector of claim 30 wherein the body includes a second guide slidably receiving the second resilient member, the second guide deforming the second resilient member from a relaxed shape.
- 32. The end-effector of claim 29 wherein the actuator comprises first and second rotatable members, the first resilient member and the first tensile member being coupled to the first rotatable member and the second resilient member and the second tensile member being coupled to the second rotatable member.
- 33. The end-effector of claim 32 wherein the first rotatable member comprises a first gear and the second rotatable member comprises a second gear, the first and second gears being connected to a common drive gear.
- 34. The end-effector of claim 33 wherein angular orientation of the first gear with respect to both the second gear and the drive gear may be adjusted, thereby adjusting retracted positions of the first and third abutments.
- 35. The end-effector of claim 34 wherein angular orientation of the second gear with respect to both the first gear and the drive gear may be adjusted, thereby adjusting retracted positions of the second and fourth abutments.
- 36. The end-effector of claim 29 further comprising a first abutment housing adapted to slidably receive the first abutment, a second abutment housing adapted to slidably receive the second abutment, a third abutment housing adapted to slidably receive the third abutment, and a fourth abutment housing adapted to slidably receive the fourth abutment.
- 37. The end-effector of claim 29 wherein the first and fourth abutments define a first antipodal pair of abutments and the second and third abutments define a second antipodal pair of abutments.
- 38. An end-effector for handling a microelectronic workpiece, comprising:
a body carrying a first abutment, a second abutment, a third abutment, and a fourth abutment, the abutments being spaced from one another to define a workpiece-receiving area therebetween; and an actuator resiliently connected to the first and second abutments and connected to the third and fourth abutments, the actuator being adapted to urge each of the abutments inwardly toward the workpiece-receiving area to grip a workpiece received therein.
- 39. The end-effector of claim 38 wherein the first and fourth abutments define a first antipodal pair of abutments and the second and third abutments define a second antipodal pair of abutments.
- 40. The end-effector of claim 38 wherein the first abutment is coupled to the actuator by a resilient first rod, the second abutment is coupled to the actuator by a resilient second rod, the third abutment is coupled to the actuator by a third rod, and the fourth abutment is coupled to the actuator by a fourth rod.
- 41. The end-effector of claim 40 wherein the actuator includes first and second rotatable members, the first and third rods being coupled to the first rotatable member and the second and fourth rods being coupled to the second rotatable member.
- 42. The end-effector of claim 41 wherein the first rotatable member has a first rotational axis, the first rod being coupled to the first rotatable member radially outwardly of the first rotational axis, and the fourth rod being coupled to the first rotatable member radially outwardly of the first rotational axis at a location spaced from the first rod.
- 43. The end-effector of claim 42 wherein the second rotatable member has a second rotational axis, the second rod being coupled to the second rotatable member radially outwardly of the second rotational axis, and the third rod being coupled to the second rotatable member radially outwardly of the second rotational axis at a location spaced from the first rod.
- 44. The end-effector of claim 38 wherein the first abutment is coupled to the actuator by a resilient first rod and the second abutment is coupled to the actuator by a resilient second rod.
- 45. The end-effector of claim 44 wherein the first rod is adapted for movement by the actuator inwardly from a retracted position, the first rod in its retracted position being bent from a relaxed shape.
- 46. The end-effector of claim 45 wherein the first rod is adapted to bend further when urged against an edge of the workpiece.
- 47. The end-effector of claim 45 wherein the second rod is adapted for movement by the actuator inwardly from a retracted position, the second rod in its retracted position being bent from a relaxed shape.
- 48. The end-effector of claim 47 wherein the second rod is adapted to bend further when urged against an edge of the workpiece.
- 49. An end-effector for handling a microelectronic workpiece, comprising:
a body carrying a first channel, a second channel, a first abutment, a second abutment, a third abutment, and a fourth abutment; an actuator; a first resilient member coupling the first abutment to the actuator, the first resilient member being slidably received in the first channel; and a second resilient member coupling the second abutment to the actuator, the second resilient member being slidably received in the second channel.
- 50. The end-effector of claim 49 wherein the first resilient member has a relaxed shape and the first abutment is moveable between a retracted position and a workpiece-engaging position, the first channel deflecting the first resilient member away from its relaxed shape when the first abutment is in its retracted position.
- 51. The end-effector of claim 50 wherein the second resilient member has a relaxed shape and the second abutment is moveable between a retracted position and a workpiece-engaging position, the second channel deflecting the second resilient member away from its relaxed shape when the second abutment is in its retracted position.
- 52. The end-effector of claim 49 wherein the actuator comprises first and second rotatable members, the first resilient member being coupled to the first rotatable member and the second resilient member being coupled to the second rotatable member.
- 53. The end-effector of claim 49 further comprising a third member coupling the third abutment to the actuator and a fourth member coupling the fourth abutment to the actuator.
- 54. The end-effector of claim 53 further comprising a third channel carried by the base and a fourth channel carried by the base, the third member being slidably received in the third channel and the fourth member being slidably received in the fourth channel.
- 55. The end-effector of claim 53 wherein the third and fourth members are positioned to be placed in tension when the actuator urges the third and fourth abutments against a workpiece.
- 56. The end-effector of claim 55 wherein each of the first and second resilient members has a straight relaxed shape, the first channel bending the first resilient member to lend it resiliency and the second channel bending the second resilient member to lend it resiliency.
- 57. A transfer device for handling microelectronic workpieces, comprising:
a transport unit configured to move along a transport path; a lift assembly carried by the transport unit; an arm carried by the lift assembly; and a first end-effector rotatably coupled to the arm, the first end-effector comprising:
a body carrying a first channel, a second channel, a first abutment, a second abutment, a third abutment, and a fourth abutment; an actuator; a first resilient member coupling the first abutment to the actuator, the first resilient member being slidably received in the first channel; and a second resilient member coupling the second abutment to the actuator, the second resilient member being slidably received in the second channel.
- 58. A method of grasping a microelectronic workpiece, comprising:
providing an end-effector having an actuator and first, second, third and fourth abutments, the first abutment being coupled to the actuator by a first member and the second abutment being coupled to the actuator by a second member; positioning a workpiece between the first, second, third and fourth abutments; using the actuator, moving at least the first and second abutments inwardly toward the workpiece to grasp the workpiece between the first, second, third and fourth abutments, the actuator urging the first and second abutments against an edge of the workpiece and resiliently deforming the first and second members.
- 59. The method of claim 58 further comprising moving the first and second abutments outwardly to release the workpiece.
- 60. The method of claim 58 further comprising moving the third and fourth abutments inwardly toward the workpiece.
- 61. The method of claim 58 wherein the third and fourth abutments are coupled to the actuator, the method further comprising moving the third and fourth abutments inwardly toward the workpiece synchronously with moving the first and second abutments inwardly.
CROSS-REFERENCE TO RELATED APPLICATION(S)
[0001] This application claims the benefit of U.S. Provisional Patent Application Serial No. 60/305,335, filed Jul. 13, 2001, and U.S. Provisional Patent Application Serial No. 60/305,388, filed Jul. 13, 2001, both currently pending and incorporated herein in its entirety by reference.
[0002] The following applications identified in paragraphs (a)-(k) are herein incorporated by reference:
[0003] (a) U.S. application Ser. No. 09/386,566, filed Aug. 31, 1999, entitled “IMPROVED ROBOT FOR MICROELECTRONIC WORKPIECE HANDLING;”
[0004] (b) U.S. application Ser. No. 09/386,590, filed Aug. 31, 1999, and entitled “ROBOTS FOR MICROELECTRONIC WORKPIECE HANDLING;”
[0005] (c) U.S. application Ser. No. 08/990,107, filed Dec. 15, 1997, entitled “SEMICONDUCTOR APPARATUS HAVING LINEAR CONVEYOR SYSTEM;”
[0006] (d) U.S. application Ser. No. 09/114,105, filed Jul. 11, 1998, entitled “IMPROVED ROBOT FOR MICROELECTRONIC WORKPIECE HANDLING;”
[0007] (e) U.S. patent application Ser. No. 09/875,428, entitled “INTEGRATED TOOLS WITH TRANSFER DEVICES FOR HANDLING MICROELECTRONIC WORKPIECES,” filed on Jun. 5, 2001
[0008] (f) U.S. patent application Ser. No. 09/875,304, entitled “DISTRIBUTED POWER SUPPLIES FOR MICROELECTRONIC WORKPIECE PROCESSING TOOLS,” filed on Jun. 5, 2001;
[0009] (g) U.S. patent application Ser. No. 09/875,365, entitled “ADAPTABLE ELECTROCHEMICAL PROCESSING CHAMBER,” filed on Jun. 5, 2001;
[0010] (h) U.S. patent application Ser. No. 09/875,424, entitled “LIFT AND ROTATE ASSEMBLY FOR USE IN A WORKPIECE PROCESSING STATION AND A METHOD OF ATTACHING THE SAME,” filed on Jun. 5, 2001;
[0011] (i) U.S. patent application Ser. No. 09/872,151, entitled “APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROELECTRONIC WORKPIECES,” filed on May 31, 2001;
[0012] (j) U.S. patent application Ser. Nos. 09/866,391 and 09/866,463, each entitled “TUNING ELECTRODES USED IN A REACTOR FOR ELECTROCHEMICALLY PROCESSING A MICROELECTRONIC WORKPIECE,” filed on May 24, 2001; and
[0013] (k) U.S. patent application Ser. No. 09/875,300, entitled “TRANSFER DEVICES FOR HANDLING MICROELECTRONIC WORKPIECES WITHIN AN ENVIRONMENT OF A PROCESSING MACHINE AND METHODS OF MANUFACTURING AND USING SUCH DEVICES IN THE PROCESSING OF MICROELECTRONIC WORKPIECES,” filed on Jun. 5, 2001.
Provisional Applications (2)
|
Number |
Date |
Country |
|
60305335 |
Jul 2001 |
US |
|
60305388 |
Jul 2001 |
US |