the wafers being placed on a robot blade, or gripped by a gripper for conveyance

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CPC
H01L21/68707

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/68707the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer device including housing provided with fan
- Patent number 12,368,069
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- Kousei Ide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer robot apparatus based on direct drive motor
- Patent number 12,358,734
- Issue date Jul 15, 2025
- RAONTEC INC.
- Jin Ho Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated adaptive positioning systems and routines for automated...
- Patent number 12,341,040
- Issue date Jun 24, 2025
- Lam Research Corporation
- Hossein Sadeghi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Guide unit, transfer assembly and die bonding apparatus including t...
- Patent number 12,334,381
- Issue date Jun 17, 2025
- Semes Co., Ltd.
- Do-Youn Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus
- Patent number 12,334,387
- Issue date Jun 17, 2025
- Kawasaki Jukogyo Kabushiki Kaisha
- Masaya Yoshida
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Determining the center position of a semiconductor wafer
- Patent number 12,330,289
- Issue date Jun 17, 2025
- WaferPath, Inc.
- Frantisek Pavlik
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,334,386
- Issue date Jun 17, 2025
- Semes Co., Ltd.
- Kiwon Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process tool and method for handling semiconductor substrate
- Patent number 12,327,743
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Fung-Chih Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grip-based transport speeds for transporting objects at a manufactu...
- Patent number 12,325,140
- Issue date Jun 10, 2025
- Applied Materials, Inc.
- Khai T. Ngo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanical indexer for multi-station process module
- Patent number 12,322,641
- Issue date Jun 3, 2025
- Lam Research Corporation
- Michael Nordin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 12,322,629
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Tomonori Horiuchi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing system, substrate processing method, and recor...
- Patent number 12,322,631
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece handling architecture for high workpiece throughput
- Patent number 12,315,748
- Issue date May 27, 2025
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece handling architecture for high workpiece throughput
- Patent number 12,315,747
- Issue date May 27, 2025
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 12,308,262
- Issue date May 20, 2025
- Disco Corporation
- Takashi Uchiho
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer frame sorter and stocker
- Patent number 12,300,532
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method using th...
- Patent number 12,283,510
- Issue date Apr 22, 2025
- Semes Co., Ltd.
- Sang Oh Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-vacuum twin-arm robot
- Patent number 12,283,508
- Issue date Apr 22, 2025
- Kawasaki Jukogyo Kabushiki Kaisha
- Takeshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer robot for transferring substrate in vacuum chamber
- Patent number 12,278,132
- Issue date Apr 15, 2025
- T-Robotics Co., Ltd.
- Soo Jong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storing and aligning apparatus in substrate bonding equip...
- Patent number 12,278,130
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Ho Cheon Bang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transferring unit, substrate processing apparatus, and su...
- Patent number 12,278,133
- Issue date Apr 15, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, system and method for providing a fiber optic coupler
- Patent number 12,272,587
- Issue date Apr 8, 2025
- JABIL INC.
- Jeroen Bosboom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manipulator
- Patent number 12,263,574
- Issue date Apr 1, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Hao Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring system, measuring device, and measuring method
- Patent number 12,264,947
- Issue date Apr 1, 2025
- Tokyo Electron Limited
- Takayuki Hatanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annealing method
- Patent number 12,266,553
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Chang Huang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Component mounting system and component mounting method
- Patent number 12,261,070
- Issue date Mar 25, 2025
- BONDTECH CO., LTD.
- Akira Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot apparatus, systems, and methods for transporting substrates i...
- Patent number 12,255,089
- Issue date Mar 18, 2025
- Applied Materials, Inc.
- Jeffrey C. Hudgens
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus for transferring substrate in vacuum chamber
- Patent number 12,255,090
- Issue date Mar 18, 2025
- T-Robotics Co., Ltd.
- Soo Jong Lee
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus for transferring substrate in vaccum chamber
- Patent number 12,234,106
- Issue date Feb 25, 2025
- T-ROBOTICS CO., LTD.
- Soo Jong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Docking device with moveable frame and sealing component
- Patent number 12,237,196
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ANTI-SLIP COMPOSITIONS AND COMPONENTS FOR SEMICONDUCTOR WAFER HANDL...
- Publication number 20250237944
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- Chung-Ming Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD
- Publication number 20250232967
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER EQUIPMENT AND SUBSTRATE PROCESSING SYSTEM USING...
- Publication number 20250214786
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Ha Neul YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONSTRUCTING A SUBSTRATE TOPOLOGY MAP BASED ON MEASURED PROPERTIES
- Publication number 20250218831
- Publication date Jul 3, 2025
- Applied Materials, Inc.
- Saitanay Naribole
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
EXPANDING DEVICE, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMI...
- Publication number 20250218872
- Publication date Jul 3, 2025
- YAMAHA HATSUDOKI KABUSHIKI KAISHA
- Yoshikuni SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING
- Publication number 20250218837
- Publication date Jul 3, 2025
- Applied Materials, Inc.
- Clinton SAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20250210405
- Publication date Jun 26, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250210383
- Publication date Jun 26, 2025
- Samsung Electronics Co., Ltd.
- Taehee YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250210390
- Publication date Jun 26, 2025
- SCREEN Holdings Co., Ltd.
- Takahiro YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER UNIT, AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20250201612
- Publication date Jun 19, 2025
- SEMES CO., LTD.
- Kyo Bong KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER ARM AND APPARATUS USING THE SAME
- Publication number 20250201613
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Yuki Dammura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNEALING APPARATUS AND METHOD THEREOF
- Publication number 20250201604
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Chang HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAN FILTER UNIT, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME,...
- Publication number 20250201590
- Publication date Jun 19, 2025
- Samsung Electronics Co., Ltd.
- Dae-Woong CHOI
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
- Publication number 20250191940
- Publication date Jun 12, 2025
- SPTS TECHNOLOGIES LIMITED
- Phil WALLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Transport System and Substrate Position Adjustment Method
- Publication number 20250183079
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Keisuke Kondoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR HANDLING CARRIER RINGS MOUNTED WITH ELECTR...
- Publication number 20250178845
- Publication date Jun 5, 2025
- ASMPT SINGAPORE PTE. LTD
- Chak Tong SZE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS
- Publication number 20250183067
- Publication date Jun 5, 2025
- Intel Corporation
- John William Rudolph
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND POSITIONING METHOD OF CONVEYANCE ARM
- Publication number 20250183081
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Junya MIYAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS IN...
- Publication number 20250174481
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Takuya SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE PROCESSING DEVICE INCLU...
- Publication number 20250174486
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...
- Publication number 20250174477
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250174480
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Shinichi TANIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER ROBOT, METHOD OF OPERATING TRANSFER ROBOT, AND SEMICONDUCT...
- Publication number 20250174482
- Publication date May 29, 2025
- SEMES CO., LTD.
- Hee Jae BYUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...
- Publication number 20250174487
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AXIAL GAP MOTOR, ROBOT, AND ROBOT SYSTEM
- Publication number 20250175045
- Publication date May 29, 2025
- Kabushiki Kaisha Yaskawa Denki
- Masanobu KAKIHARA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MULTIPLE TRANSPORT CARRIER DOCKING DEVICE
- Publication number 20250157842
- Publication date May 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR BOND TREATING AND CLEAVING OF SILICON WAFERS
- Publication number 20250157847
- Publication date May 15, 2025
- GLOBALWAFERS CO., LTD.
- Peter Albrecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION REDUCTION IN ION IMPLANTERS USING EMBEDDED ACTUATOR FORCE...
- Publication number 20250144669
- Publication date May 8, 2025
- Applied Materials, Inc.
- Jordan B. TYE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING A WAFER
- Publication number 20250149357
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Hyuntae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Controlling Substrate Processing System and Substrate Pr...
- Publication number 20250140591
- Publication date May 1, 2025
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS

the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate transfer device including housing provided with fan

Wafer transfer robot apparatus based on direct drive motor

Integrated adaptive positioning systems and routines for automated...

Guide unit, transfer assembly and die bonding apparatus including t...

Substrate transfer apparatus

Determining the center position of a semiconductor wafer

Apparatus and method for treating substrate

Process tool and method for handling semiconductor substrate

Grip-based transport speeds for transporting objects at a manufactu...

Mechanical indexer for multi-station process module

Transfer apparatus and transfer method

Substrate processing system, substrate processing method, and recor...

Workpiece handling architecture for high workpiece throughput

Workpiece handling architecture for high workpiece throughput

Processing apparatus

Wafer frame sorter and stocker

Substrate treating apparatus and substrate treating method using th...

In-vacuum twin-arm robot

Substrate transfer robot for transferring substrate in vacuum chamber

Substrate storing and aligning apparatus in substrate bonding equip...

Substrate transferring unit, substrate processing apparatus, and su...

Apparatus, system and method for providing a fiber optic coupler

Manipulator

Measuring system, measuring device, and measuring method

Annealing method

Component mounting system and component mounting method

Robot apparatus, systems, and methods for transporting substrates i...

Apparatus for transferring substrate in vacuum chamber

Apparatus for transferring substrate in vaccum chamber

Docking device with moveable frame and sealing component

Patents Applicationslast 30 patents

ANTI-SLIP COMPOSITIONS AND COMPONENTS FOR SEMICONDUCTOR WAFER HANDL...

PROCESSING SYSTEM AND PROCESSING METHOD

SUBSTRATE TRANSFER EQUIPMENT AND SUBSTRATE PROCESSING SYSTEM USING...

CONSTRUCTING A SUBSTRATE TOPOLOGY MAP BASED ON MEASURED PROPERTIES

EXPANDING DEVICE, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMI...

SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING

SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

TRANSFER UNIT, AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

SUBSTRATE TRANSFER ARM AND APPARATUS USING THE SAME

ANNEALING APPARATUS AND METHOD THEREOF

FAN FILTER UNIT, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME,...

APPARATUS AND METHOD FOR PROCESSING A SEMICONDUCTOR SUBSTRATE

Substrate Transport System and Substrate Position Adjustment Method

APPARATUS AND METHOD FOR HANDLING CARRIER RINGS MOUNTED WITH ELECTR...

MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS

SUBSTRATE PROCESSING DEVICE AND POSITIONING METHOD OF CONVEYANCE ARM

SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS IN...

SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE PROCESSING DEVICE INCLU...

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

TRANSFER ROBOT, METHOD OF OPERATING TRANSFER ROBOT, AND SEMICONDUCT...

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...

AXIAL GAP MOTOR, ROBOT, AND ROBOT SYSTEM

MULTIPLE TRANSPORT CARRIER DOCKING DEVICE

SYSTEMS AND METHODS FOR BOND TREATING AND CLEAVING OF SILICON WAFERS

VIBRATION REDUCTION IN ION IMPLANTERS USING EMBEDDED ACTUATOR FORCE...

APPARATUS FOR PROCESSING A WAFER

Method for Controlling Substrate Processing System and Substrate Pr...