the wafers being placed on a robot blade, or gripped by a gripper for conveyance

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CPC
H01L21/68707

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/68707the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Robot for simultaneous substrate transfer
- Patent number 12,170,220
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 12,162,698
- Issue date Dec 10, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit enclosure system
- Patent number 12,165,905
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate conveying robot and substrate conveying robot system
- Patent number 12,162,145
- Issue date Dec 10, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Haruhiko Tan
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus and methods for handling semiconductor part carriers
- Patent number 12,165,906
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ren-Hau Wu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing system and transfer method
- Patent number 12,165,893
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated semiconductor substrate polishing and cleaning
- Patent number 12,154,810
- Issue date Nov 26, 2024
- GlobalWafers Co., Ltd.
- ShinBae Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Factory interface robots usable with integrated load locks
- Patent number 12,142,508
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Wafer processing tools and methods thereof
- Patent number 12,142,513
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Jagan Rangarajan
- B24 - GRINDING POLISHING
Information Patent Grant
Automated transfer of edge ring requiring rotational alignment
- Patent number 12,142,466
- Issue date Nov 12, 2024
- Lam Research Corporation
- Damon Tyrone Genetti
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Vacuum apparatus
- Patent number 12,142,512
- Issue date Nov 12, 2024
- NuFlare Technology, Inc.
- Yoshiaki Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sonar sensor in processing chamber
- Patent number 12,136,556
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer robot for transferring substrate in vacuum chamber
- Patent number 12,131,939
- Issue date Oct 29, 2024
- T-Robotics Co., Ltd.
- Soo Jong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate mapping device, method of mapping by the device, and meth...
- Patent number 12,131,925
- Issue date Oct 29, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Masaya Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer system, transfer device, and transfer method
- Patent number 12,131,937
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment and transport of substrate and focus ring
- Patent number 12,131,936
- Issue date Oct 29, 2024
- Keisuke Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage apparatus and substrate processing system
- Patent number 12,125,729
- Issue date Oct 22, 2024
- Kioxia Corporation
- Kohei Watabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of an electronics processing system
- Patent number 12,115,683
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Replacing end effectors in semiconductor processing systems
- Patent number 12,119,256
- Issue date Oct 15, 2024
- ASM IP Holding B.V.
- Dongyang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate handling device and processing chamber
- Patent number 12,109,681
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- You-Hua Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device
- Patent number 12,106,982
- Issue date Oct 1, 2024
- SCREEN Holdings Co., Ltd.
- Masaki Inaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Acoustic cleaving apparatus and methods of acoustic cleaving
- Patent number 12,103,200
- Issue date Oct 1, 2024
- Crystal Sonic, Inc.
- Mariana Bertoni
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Wafer transfer device and wafer transfer method
- Patent number 12,100,606
- Issue date Sep 24, 2024
- SHENYANG KINGSEMI CO., LTD.
- Tianyao Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer robot and robot system
- Patent number 12,090,670
- Issue date Sep 17, 2024
- Kabushiki Kaisha Yaskawa Denki
- Osamu Harada
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Automated dry-in dry-out dual side polishing of silicon substrates...
- Patent number 12,094,740
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Manoj A. Gajendra
- B08 - CLEANING
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,087,560
- Issue date Sep 10, 2024
- Semes Co., Ltd.
- Dukhyun Son
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transfer apparatus and processing system
- Patent number 12,087,608
- Issue date Sep 10, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Mengyang Xin
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing module and method of moving a workpiece
- Patent number 12,080,571
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer robot for transferring substrate in vacuum chamber
- Patent number 12,080,586
- Issue date Sep 3, 2024
- T-Robotics Co., Ltd.
- Soo Jong Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ROBOT BLADE
- Publication number 20240416529
- Publication date Dec 19, 2024
- Samsung Electronics Co., Ltd.
- Kyunghoon Joo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
DEDICATED SULFURIC-PEROXIDE PROCESS MODULE FOR POST-CMP CLEANING PL...
- Publication number 20240412985
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Clinton SAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer Apparatus And Processing System
- Publication number 20240404858
- Publication date Dec 5, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Mengyang Xin
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20240404780
- Publication date Dec 5, 2024
- HITACHI HIGH-TECH CORPORATION
- Masahiro KAMIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER HANDLING ASSEMBLY
- Publication number 20240395586
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Adriaan Garssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240391706
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240393705
- Publication date Nov 28, 2024
- SEMES CO., LTD.
- Sang Hyun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE
- Publication number 20240395580
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240379396
- Publication date Nov 14, 2024
- BROOKS AUTOMATION US, LLC
- Levid E. Hanley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING AND TRANSFER EQUIPMENT, WAFER TREATMENT EQUIPMENT, TRANSFE...
- Publication number 20240379405
- Publication date Nov 14, 2024
- EBARA CORPORATION
- KOTARO TOYOSAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND TEACHING METHOD
- Publication number 20240379392
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SONAR SENSOR IN PROCESSING CHAMBER
- Publication number 20240371668
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240363372
- Publication date Oct 31, 2024
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR CURTAIN FOR DEFECT REDUCTION
- Publication number 20240355660
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Chih LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFERRING APPARATUS
- Publication number 20240355666
- Publication date Oct 24, 2024
- Samsung Electronics Co., Ltd.
- Sung-Il Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR CHANGING THE TEMPERATURE OF A WAFER
- Publication number 20240347352
- Publication date Oct 17, 2024
- METRYX LTD.
- Gregor Robert ELLIOTT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR INSPECTION STATIONS
- Publication number 20240339344
- Publication date Oct 10, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Yan-Hong LIU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20240339340
- Publication date Oct 10, 2024
- ASM IP HOLDING B.V.
- Jeroen Fluit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSFERRING CARRIERS
- Publication number 20240327136
- Publication date Oct 3, 2024
- Samsung Electronics Co., Ltd.
- Minkyun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...
- Publication number 20240312800
- Publication date Sep 19, 2024
- KIOXIA Corporation
- Hakuba KITAGAWA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
AUTOMATIC TEACHING APPARATUS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20240312821
- Publication date Sep 19, 2024
- Kabushiki Kaisha Yaskawa Denki
- Jung-ho YUN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
APPARATUS FOR TRANSPORTING SEMICONDUCTOR WAFER
- Publication number 20240312818
- Publication date Sep 19, 2024
- UK ROBOTICS. CO., LTD.
- Woo Jong YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND TOOL FOR RESTRICTING SUBSTRATE A SUPPORT BEAD INSIDE AN...
- Publication number 20240297066
- Publication date Sep 5, 2024
- Applied Materials, Inc.
- Liurui LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...
- Publication number 20240282600
- Publication date Aug 22, 2024
- SCREEN Holdings Co., Ltd.
- Oma NAKAJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRATHIN CONFORMAL COATINGS FOR ELECTROSTATIC DISSIPATION IN SEMIC...
- Publication number 20240284650
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Gayatri Natu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JIG, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD OF OPERATING...
- Publication number 20240282618
- Publication date Aug 22, 2024
- KIOXIA Corporation
- Kentaku ARAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240269862
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Takayuki HATANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...
- Publication number 20240274448
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...
- Publication number 20240266197
- Publication date Aug 8, 2024
- Siliconware Precision Industries Co., Ltd.
- Tang-Hsin KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CENTERING DEVICE, CENTERING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240258144
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Itsuki KAJINO
- H01 - BASIC ELECTRIC ELEMENTS

the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Robot for simultaneous substrate transfer

Substrate transport apparatus

Process kit enclosure system

Substrate conveying robot and substrate conveying robot system

Apparatus and methods for handling semiconductor part carriers

Substrate processing system and transfer method

Automated semiconductor substrate polishing and cleaning

Factory interface robots usable with integrated load locks

Substrate processing apparatus

Wafer processing tools and methods thereof

Automated transfer of edge ring requiring rotational alignment

Vacuum apparatus

Sonar sensor in processing chamber

Substrate transfer robot for transferring substrate in vacuum chamber

Substrate mapping device, method of mapping by the device, and meth...

Transfer system, transfer device, and transfer method

Alignment and transport of substrate and focus ring

Substrate storage apparatus and substrate processing system

Calibration of an electronics processing system

Replacing end effectors in semiconductor processing systems

Substrate handling device and processing chamber

Substrate processing device

Acoustic cleaving apparatus and methods of acoustic cleaving

Wafer transfer device and wafer transfer method

Transfer robot and robot system

Automated dry-in dry-out dual side polishing of silicon substrates...

Apparatus and method for treating substrate

Transfer apparatus and processing system

Substrate processing module and method of moving a workpiece

Substrate transfer robot for transferring substrate in vacuum chamber

Patents Applicationslast 30 patents

ROBOT BLADE

DEDICATED SULFURIC-PEROXIDE PROCESS MODULE FOR POST-CMP CLEANING PL...

Transfer Apparatus And Processing System

SEMICONDUCTOR PROCESSING APPARATUS

WAFER HANDLING ASSEMBLY

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

SUBSTRATE PROCESSING APPARATUS

MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE

SUBSTRATE PROCESSING APPARATUS

CLEANING AND TRANSFER EQUIPMENT, WAFER TREATMENT EQUIPMENT, TRANSFE...

PROCESSING SYSTEM AND TEACHING METHOD

SONAR SENSOR IN PROCESSING CHAMBER

SUBSTRATE PROCESSING APPARATUS

AIR CURTAIN FOR DEFECT REDUCTION

SUBSTRATE TRANSFERRING APPARATUS

DEVICE FOR CHANGING THE TEMPERATURE OF A WAFER

SYSTEMS AND METHODS FOR INSPECTION STATIONS

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

APPARATUS FOR TRANSFERRING CARRIERS

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...

AUTOMATIC TEACHING APPARATUS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

APPARATUS FOR TRANSPORTING SEMICONDUCTOR WAFER

METHOD AND TOOL FOR RESTRICTING SUBSTRATE A SUPPORT BEAD INSIDE AN...

LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...

ULTRATHIN CONFORMAL COATINGS FOR ELECTROSTATIC DISSIPATION IN SEMIC...

JIG, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD OF OPERATING...

SUBSTRATE PROCESSING APPARATUS

TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...

WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...

CENTERING DEVICE, CENTERING METHOD AND SUBSTRATE PROCESSING APPARATUS