Edel et al., "Stress Relief by Counter Doping" I.B.M. Tech. Discl. Bull., vol 13, No. 3, Aug. 1970, p. 632. _ |
Carlsen, G. S., "Multiple Diffusion-from Single Diffusion" Ibid., vol. 9, No. 10, Mar. 1967, pp. 1456-1458. |
Fair et al., "Effect of Complex Formation on Diffusion of Arsenic in Silicon" J. Applied Phys., vol. 44, No. 1, Jan. 1973, pp. 273-279. _ |
Fair, R. B., "Quantitative Theory-Base Diffusion-with Arsenic Emitters" Ibid., vol. 44, No. 1, Jan. 1973, pp. 283-291. _ |
Saraswat et al., "A New Bipolar Process-Borsenic" IEEE J. of Solid-State Circuits, vol. SC-11, No. 4, pp. 495-500, Aug. 1976. _ |
Gereth et al., "Localized Enhanced Diffusion in NPN Silicon Structures" J. Electrochem. Soc., vol. 112, No. 3, Mar. 1965, pp 323-329. _ |