Patent Application
20050011308
The present invention relates to an Fe—Co—B alloy target for forming soft magnetic films and its production method, and a magnetic recording medium and a tunnel magnetoresistive device having a soft magnetic film formed by using such an Fe—Co—B alloy target.
Recent drastic progress of magnetic recording technologies provides large-volume drives, resulting in higher recording densities of magnetic recording media. However, if a higher recording density were sought in magnetic recording media of an longitudinal magnetic recording system widely used at present, recording bits would have to be too small to record by a recording head, needing much higher coercivity. Accordingly, investigation has been conducted to provide a perpendicular magnetic recording system to increase a recording density.
The perpendicular magnetic recording system uses a magnetic film having an easy axis of magnetization orientated in a perpendicular direction to the recording surface, suffering from little decrease in read-write characteristics because of small demagnetization in bits in a high recording density, and thus suitable for a high recording density. A two-layer recording medium having a magnetic recording layer and a soft magnetic layer for an increased recording sensitivity has been developed for the perpendicular magnetic recording system. As the soft magnetic film of the two-layer recording medium, the use of a soft magnetic film of an Fe—Co—B alloy has been proposed (see US 2002/0058159A1).
Development has been actively conducted recently to provide magnetoresistive random access memories (MRAMs), etc. as devices comprising tunnel magnetoresistive (TMR) elements. The use of the soft magnetic Fe—Co—B alloy film for such TMR device has been proposed (see JP 2003-304010 A).
A magnetron sputtering method is generally used for the formation of soft magnetic films for the two-layer media and soft magnetic films for the TMR devices. The magnetron sputtering method is a method in which a magnetic flux is leaked from a magnet disposed on the back of the target to a target surface, and a plasma is focused in the leaked magnetic flux region, to achieve a high-speed film formation. Accordingly, if the target had high permeability, a sufficient leaked magnetic flux would not be formed on the target surface. Accordingly, the target should have as small permeability as possible.
Accordingly, an object of the present invention is to provide a low-permeability Fe—Co—B alloy target having sputtering characteristics suitable for soft magnetic films used for perpendicular magnetic recording media, TMR devices, etc.
Another object of the present invention is to provide a method for producing such an Fe—Co—B alloy target.
A further object of the present invention is to provide a soft magnetic film produced by using such an Fe—Co—B alloy target.
A still further object of the present invention is to provide a magnetic recording medium or a TMR device having such a soft magnetic film.
As a result of investigation on the metallographic structures of Fe—Co—B alloy targets for soft magnetic films, the inventors have found that the Fe—Co—B alloy target can be provided with low permeability by finely and uniformly dispersing boride phases existing as the second phase. The present invention has been completed based on this finding.
Thus, the Fe—Co—B alloy target of the present invention is characterized in that the largest inscribed circle depictable in regions containing no boride phases in its cross-sectional microstructure has a diameter of 30 μm or less.
The target preferably has a composition represented by the general formula of (FeXCo100−X)100−YBY (by atomic percentage), wherein 5≦X≦95, and 5≦Y≦30. The target is preferably a sintered body of atomized powder containing B. The target is also preferably a sintered body of atomized Fe—Co—B alloy powder.
The method of the present invention for producing an Fe—Co—B alloy target having a composition represented by the general formula of (FeXCo100−X)100−YBY (by atomic percentage), wherein 5≦X≦95, and 5≦Y≦30, is characterized in sintering atomized powder containing B.
The atomized Fe—Co—B alloy powder is preferably sintered. The sintering is preferably carried out by hot-isostatic pressing.
The soft magnetic film of the present invention is formed by using the above Fe—Co—B alloy target.
The magnetic recording medium of the present invention has at least one soft magnetic layer formed by using the above Fe—Co—B alloy target.
The TMR device of the present invention has at least one soft magnetic layer formed by using the above Fe—Co—B alloy target.
The feature of the present invention is that boride phases are dispersed in the Fe—Co—B alloy target as uniformly as possible, to reduce the permeability of the target.
B does not substantially dissolve in the matrix of the Fe—Co—B alloy, but is dispersed as boride phases (particles) in the matrix. The morphology and dispersion state of the boride phases largely depend on the production method of the target, accompanied by great variations in the magnetic properties of the target.
When fine boride phases are uniformly dispersed in the matrix, the resultant target has high coercivity and thus low permeability. Particularly when the largest inscribed circle depictable in regions containing no boride phases in its cross-sectional microstructure has a diameter of 30 μm or less, the Fe—Co—B alloy target has drastically decreased permeability. The diameter of the largest inscribed circle in regions having no boride phases in its cross-sectional microstructure is preferably 20 μm or less, more preferably 10 μm or less.
The boride phases and the matrix phase have extremely different sputtering rates, coarse boride phases causing the generation of irregular discharge and particles. Accordingly, it is effective to make the boride phases finer and more uniformly disperse them, to suppress the generation of irregular discharge and particles. Further, fine dispersion of the boride phases makes the target uniform in composition and thus the sputtered film more uniform in composition, resulting in stable film formation. For the above reasons, the average particle size of boride phases is preferably 5 μm or less.
Such fine structure can be obtained by pressure sintering of the Fe—Co—B mother alloy powder adjusted to have a predetermined composition. The Fe—Co—B mother alloy powder can be formed by a rapid cooling method, typically an atomizing method such as a gas-atomizing method, etc. Because the rapid solidifying of a melt makes it possible to suppress the formation of primary crystals containing no boride phases and the growth of coarser boride phases, powder having a structure in which fine boride phases are uniformly dispersed can be obtained.
The target having the structure of the present invention can be obtained by sintering the rapidly solidified powder. Particularly when the hot-isostatic pressing method is used, sintering can be advantageously conducted with the growth of boride phases extremely suppressed.
The target of the present invention can be obtained by using a mixed powder of rapidly solidified Fe—B alloy powder, Co—B alloy powder, Fe—Co—B alloy powder, etc. in a predetermined composition. To obtain the target with little unevenness in composition or structure, it is preferable to use powder obtained by rapidly solidified an Fe—Co—B mother alloy adjusted to have the predetermined composition.
The pressure sintering of Fe—Co—B is preferably carried out at 700° C.-1150° C. When it is lower than 700° C., the sintering does not proceed well. On the other hand, when it exceeds 1150° C., the resultant sintered body is likely to be melted. To obtain a dense sintered body, the pressure sintering is carried out preferably at a pressure of 50 MPa or more. Because the sintered body with voids may generate nodules on the target surface and particles and splash on the resultant film surface during sputtering, the sintered body should be as dense as possible. Specifically, the relative density (density of target/theoretical density×100) of the sintered body is preferably 97% or more, more preferably 99% or more.
The Fe—Co alloy has the largest saturation magnetic moment at the composition of Fe-35at % Co; more Fe or Co from this composition results in decrease in the magnetization of the Fe—Co alloy. JP 2003-304010 A describes that the magnetic resistance (MR) effect changes with an Fe/Co ratio.
B has a function to make the soft magnetic film amorphous and the crystals finer. When the amount of B added is small, such function cannot be obtained fully. And when it is too much, the magnetic properties of the soft magnetic film are deteriorated. Accordingly, in the Fe—Co—B alloy target of the present invention having a composition of (FeXCo100−X)100−YBY, 5≦X≦95 and 5≦Y≦30 are preferable.
Because the Fe—Co—B alloy for the perpendicular magnetic recording medium has the largest saturation magnetic moment at an atomic percentage of Fe to Co of 65:35, the composition represented by the general formula of (FeXCo100−X)100−YBY is preferably 50≦X≦80 and 7≦Y ≦20, more preferably 60≦X≦70 and 9≦Y≦15.
In the case of the Fe—Co—B alloy for the TMR device represented by the general formula of (FeXCo100−X)100−YBY, 7≦X≦35 and 15≦Y≦25 are preferable, and 9≦X≦30, and 17≦Y≦23 are more preferable, to control MR characteristics and coercivity.
As impurities contained in the target of the present invention, the amounts of gas components such as oxygen, etc. decreasing soft magnetic properties are preferably as small as possible. Specifically, O is preferably 300 ppm or less, more preferably 150 ppm or less on a mass basis. N is preferably 100 ppm or less, more preferably 50 ppm or less on a mass basis.
The present invention will be explained in detail referring to Examples below without intention of restricting the present invention thereto.
Atomized alloy powders having compositions of FebalCo31.5B10, FebalCo33.25B5, FebalCo28B20, FebalCo18B10, FebalCo60B20 and FebalCo72B20, respectively, by atomic % were produced by a gas-atomizing method. Each atomized powder was charged into a soft steel capsule, evacuated and sealed, and hot-isostatic-pressed under the conditions of a pressure of 100 MPa, a temperature of 1000° C., and a holding time of 2 hours to produce a sintered body. The sintered bodies were machined to obtain targets of Examples 1-6 each having a diameter of 100 mm and a thickness of 5 mm.
Gas-atomized FebalB10 alloy powder and Gas-atomized CobalB10 alloy powder were mixed to a composition of FebalCo31.5B10. The resultant mixed powder was charged into a soft steel capsule, evacuated and sealed, and hot-isostatic-pressed under the conditions of a pressure of 100 MPa, a temperature of 1000° C., and a holding time of 2 hours to produce a sintered body. The sintered body was machined to obtain a target of Example 7 having a diameter of 100 mm and a thickness of 5 mm.
Ingots having compositions of FebalCo31.5B10, FebalCo33.25B5, FebalCo28B20, FebalCo18B10, FebalCo60B20 and FebalCo72B20, respectively, by atomic % were produced by a melt-casting method, and machined to obtain targets of Comparative Examples 1-6 each having a diameter of 100 mm and a thickness of 5 mm.
The following test piece was prepared from each target to measure its maximum permeability by a DC magnetic flux meter.
A test piece of 10 mm×10 mm was taken out from each target, and its cross-sectional microstructure was observed by an optical microscope having a magnification of 400, to determine the diameter of the largest inscribed circle depictable in regions having no boride phases in the microstructure.
The average particle size of the boride phases was determined by a cutting method, in which a 50-mm-long arbitrary line was drawn in the photomicrograph (1000 times) of each cross-sectional microstructure of the target, and the line length occupied by the boride phases was divided by the number of the boride phases. Because boride phases had layer structures having extremely large aspect ratios in their eutectic portions in the targets of Comparative Examples 1-6 produced by the melt-casting method, the average particle size of the boride phases could not be measured.
The measurement results of the maximum permeability, the diameter of the largest inscribed circle, and the average particle size of the boride phases in each target are shown in Table 1.
Note
(1)A: The atomized powder of the Fe—Co—B alloy was sintered by a hot-isostatic pressing method.
B: A mixed powder of the atomized powder of the Fe—B alloy and the atomized powder of the Co—B alloy was sintered by hot-isostatic pressing.
C: Melt-casting method.
(2)The diameter of the largest inscribed circle.
(3)The average particle size of boride phases.
It is clear from Table 1 and
As described above, because the Fe—Co—B alloy target of the present invention has a structure having boride phases finely dispersed, it can form soft magnetic films stably by magnetron sputtering. Such soft magnetic films of the Fe—Co—B alloy are suitable for perpendicular magnetic recording media, and TMR devices such as MRAM, etc.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2003-125914 | Apr 2003 | JP | national |
