John Baliga, Associate Editor, “Advanced Process Control: Soon to be a Must”, Jul. 1999, Semiconductor International, 8 page cover story with sub-story entitled “The APC Framework and Process Technology Transfer” to Alan Weber appearing on the 5th page.* |
Voshchenkov et al., “Smarter Tools by Design”, 1997, Extended Abstract of Presentation at the 1997 AVEM Fall Seminar, 4 pages total.* |
Edgar et al., “Automatic Control in Microelectronics Manufacturing Practices, Challenges, and Possibilities”, dated May 1, 1998 with publication confirmed in Automatica in Nov. 2000, 98 pages total. |