Membership
Tour
Register
Log in
Acting in response to an ongoing measurement without interruption of processing
Follow
Industry
CPC
H01L22/26
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L22/00
Testing or measuring during manufacture or treatment; Reliability measurements
Current Industry
H01L22/26
Acting in response to an ongoing measurement without interruption of processing
Industries
Overview
Organizations
People
Information
Impact
Please log in for detailed analytics
Patents Grants
last 30 patents
Information
Patent Grant
Dynamic and localized temperature control for epitaxial deposition...
Patent number
12,341,038
Issue date
Jun 24, 2025
Applied Materials, Inc.
Sathya Shrinivas Chary
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Method and system for etch depth control in III-V semiconductor dev...
Patent number
12,334,352
Issue date
Jun 17, 2025
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Wayne Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pressure control device
Patent number
12,334,355
Issue date
Jun 17, 2025
Fujikin Incorporated
Kaoru Hirata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabrication of thin-film encapsulation layer for light-emitting device
Patent number
12,334,402
Issue date
Jun 17, 2025
Kateeva, Inc.
Eliyahu Vronsky
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Adaptive control of variability in device performance in advanced s...
Patent number
12,322,618
Issue date
Jun 3, 2025
Applied Materials, Inc.
Samer Banna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pressure signals during motor torque monitoring to provide spatial...
Patent number
12,311,494
Issue date
May 27, 2025
Applied Materials, Inc.
Thomas Li
B24 - GRINDING POLISHING
Information
Patent Grant
Method for forming semiconductor structure
Patent number
12,300,551
Issue date
May 13, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Hsin Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma enhanced film formation method
Patent number
12,300,466
Issue date
May 13, 2025
Tokyo Electron Limited
Toshihiko Iwao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for thermal control of devices in an electronics...
Patent number
12,292,484
Issue date
May 6, 2025
AEHR Test Systems
Jovan Jovanovic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Critical dimension error analysis method
Patent number
12,288,725
Issue date
Apr 29, 2025
Shanghai IC R&D Center Co., Ltd.
Xueru Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Backside deposition tuning of stress to control wafer bow in semico...
Patent number
12,276,922
Issue date
Apr 15, 2025
Tokyo Electron Limited
Daniel Fulford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate-all-around integrated circuit structures having embedded GeSnB...
Patent number
12,272,727
Issue date
Apr 8, 2025
Intel Corporation
Cory Bomberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for monitoring semiconductor processes
Patent number
12,266,552
Issue date
Apr 1, 2025
Inficon, Inc.
Matan Lapidot
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for thermal control of devices in electronics tester
Patent number
12,265,136
Issue date
Apr 1, 2025
AEHR Test Systems
Jovan Jovanovic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Normal-incidence in-situ process monitor sensor
Patent number
12,261,030
Issue date
Mar 25, 2025
Tokyo Electron Limited
Ching Ling Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for real-time quality control of a film in a sp...
Patent number
12,255,110
Issue date
Mar 18, 2025
Samsung Electronics Co., Ltd.
Gaurav Kumar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Polishing pad and method of fabricating semiconductor device using...
Patent number
12,246,408
Issue date
Mar 11, 2025
SK ENPULSE CO., LTD.
Eun Sun Joeng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch feedback for control of upstream process
Patent number
12,237,158
Issue date
Feb 25, 2025
Applied Materials, Inc.
Priyadarshi Panda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology and process control for semiconductor manufacturing
Patent number
12,236,364
Issue date
Feb 25, 2025
Nova Ltd.
Eitan Rothstein
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of manufacturing semiconductor devices using directional pro...
Patent number
12,230,507
Issue date
Feb 18, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Ya-Wen Yeh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of forming micro interconnect struc...
Patent number
12,230,559
Issue date
Feb 18, 2025
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Francis J. Carney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamber component condition estimation using substrate measurements
Patent number
12,216,455
Issue date
Feb 4, 2025
Applied Materials, Inc.
Chunlei Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition system and method
Patent number
12,211,756
Issue date
Jan 28, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Wen-Hao Cheng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process tool for analyzing bonded workpiece interface
Patent number
12,205,855
Issue date
Jan 21, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Hau-Yi Hsiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nozzle having real time inspection functions
Patent number
12,191,175
Issue date
Jan 7, 2025
Taiwan Semiconductor Manufacturing Company Ltd.
Kai-Lin Chuang
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Laser processing apparatus and method of correcting converged spot...
Patent number
12,191,216
Issue date
Jan 7, 2025
Disco Corporation
Kentaro Odanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Variable graduated capacitor structure and methods for forming the...
Patent number
12,191,247
Issue date
Jan 7, 2025
Taiwan Semiconductor Manufacturing Company Limited
Jheng-Hong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Implanting system for fabricating semiconductor device structure
Patent number
12,183,643
Issue date
Dec 31, 2024
NANYA TECHNOLOGY CORPORATION
Tzu-Ching Tsai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Device and method for ensuring planarity of a semiconductor wafer d...
Patent number
12,180,592
Issue date
Dec 31, 2024
EPILUVAC AB
Roger Nilsson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film-thickness measuring method, method of detecting notch portion,...
Patent number
12,183,642
Issue date
Dec 31, 2024
Ebara Corporation
Osamu Nabeya
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250201525
Publication date
Jun 19, 2025
SEMES CO., LTD.
Jinhyeok KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING SEMICONDUCTOR STRUCTURE
Publication number
20250194204
Publication date
Jun 12, 2025
NANYA TECHNOLOGY CORPORATION
Pei-Rou JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR IN-SITU CHEMICAL SEPARATION AND RECIRCULAT...
Publication number
20250187141
Publication date
Jun 12, 2025
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN INSPECTION METHOD, METHOD FOR MANUFACTURING RESIST PATTERN,...
Publication number
20250191978
Publication date
Jun 12, 2025
Resonac Corporation
Tetsuya KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METROLOGY AND PROCESS CONTROL FOR SEMICONDUCTOR MANUFACTURING
Publication number
20250181941
Publication date
Jun 5, 2025
NOVA LTD
EITAN ROTHSTEIN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20250178022
Publication date
Jun 5, 2025
SCREEN Holdings Co., Ltd.
Atsuro EITOKU
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
ETCH FEEDBACK FOR CONTROL OF UPSTREAM PROCESS
Publication number
20250157802
Publication date
May 15, 2025
Applied Materials, Inc.
Priyadarshi Panda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES USING DIRECTIONAL PRO...
Publication number
20250149343
Publication date
May 8, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Ya-Wen YEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING MICRO INTERCONNECT STRUC...
Publication number
20250149424
Publication date
May 8, 2025
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Francis J. CARNEY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250149389
Publication date
May 8, 2025
SEMES CO., LTD.
Il Young KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING MICRO INTERCONNECT STRUC...
Publication number
20250149425
Publication date
May 8, 2025
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Francis J. CARNEY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POSITIONING EQUIPMENT, BONDING EQUIPMENT, POSITIONING METHOD AND BO...
Publication number
20250140736
Publication date
May 1, 2025
Panasonic Intellectual Property Management Co., Ltd.
RYO FUJITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REAL-TIME PLASMA MEASUREMENT AND CONTROL
Publication number
20250140541
Publication date
May 1, 2025
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENDPOINT DETECTION IN DRY DEVELOPMENT OF PHOTORESIST
Publication number
20250138429
Publication date
May 1, 2025
TOKYO ELECTRON LIMITED
Qi WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20250137777
Publication date
May 1, 2025
Fuji Electric Co., Ltd.
Shunya HAYASHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY, SCREENING METHOD, AND POLISHING METHOD
Publication number
20250129279
Publication date
Apr 24, 2025
Resonac Corporation
Satoyuki NOMURA
C01 - INORGANIC CHEMISTRY
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING CAPACITOR ARRAY AND METHOD OF FORMING T...
Publication number
20250132196
Publication date
Apr 24, 2025
NANYA TECHNOLOGY CORPORATION
Yao-Hsiung KUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO IMPROVE WAFER EDGE UNIFORMITY
Publication number
20250118539
Publication date
Apr 10, 2025
Applied Materials, Inc.
Mingle Tong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD USING THE SAME
Publication number
20250108475
Publication date
Apr 3, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Jin-Hao JHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METROLOGY INTEGRATED WITH VACUUM PROCESSING
Publication number
20250112065
Publication date
Apr 3, 2025
TOKYO ELECTRON LIMITED
Ivan MALEEV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS THAT USE INFRARED (IR) SPECTROSCOPY TO MONITOR...
Publication number
20250105066
Publication date
Mar 27, 2025
TOKYO ELECTRON LIMITED
Sean Berglund
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE OFFSET AND ZONE CONTROL TUNING
Publication number
20250105035
Publication date
Mar 27, 2025
Applied Materials, Inc.
Ole LUCKNER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NOZZLE HAVING REAL TIME INSPECTION FUNCTIONS
Publication number
20250096022
Publication date
Mar 20, 2025
Taiwan Semiconductor Manufacturing company Ltd.
KAI-LIN CHUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING MONITORING
Publication number
20250096045
Publication date
Mar 20, 2025
Applied Materials, Inc.
Zuoming ZHU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY AND POLISHING METHOD
Publication number
20250084294
Publication date
Mar 13, 2025
Resonac Corporation
Satoyuki NOMURA
C01 - INORGANIC CHEMISTRY
Information
Patent Application
CHEMICAL MECHANICAL POLISHING PROCESS USING STEAM FOR POLISHING FLU...
Publication number
20250083282
Publication date
Mar 13, 2025
WESTERN DIGITAL TECHNOLOGIES, INC.,
Yohei YAMADA
B24 - GRINDING POLISHING
Information
Patent Application
DEPOSITION SYSTEM AND METHOD
Publication number
20250087536
Publication date
Mar 13, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Wen-Hao CHENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF ETCHING OR DEPOSITING A THIN FILM
Publication number
20250079141
Publication date
Mar 6, 2025
Oxford Instruments Nanotechnology Tools Limited
Andrew Newton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIDIRECTIONAL ILLUMINATION FOR HYBRID BONDING DEFECT DETECTION
Publication number
20250076212
Publication date
Mar 6, 2025
Applied Materials, Inc.
Venkatakaushik VOLETI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INK DROP MEASUREMENT PAD, INKJET PRINTER DEVICE HAVING SAME, AND ME...
Publication number
20250065619
Publication date
Feb 27, 2025
UNIJET CO., LTD.
SEOG SOON KIM
H01 - BASIC ELECTRIC ELEMENTS