Number | Name | Date | Kind |
---|---|---|---|
3458311 | Alles | Jul 1969 | |
4020762 | Peterson | May 1977 | |
4093684 | Parts et al. | Jun 1978 | |
4165395 | Chang | Aug 1979 | |
4195108 | Gazard et al. | Mar 1980 | |
4469775 | Lynch et al. | Sep 1984 | |
4555471 | Barzynski et al. | Nov 1985 | |
4806506 | Gibson, Jr. | Feb 1989 | |
4894315 | Feinberg et al. | Jan 1990 | |
5085976 | Gibson, Jr. et al. | Feb 1992 | |
5171650 | Ellis et al. | Dec 1992 |
Number | Date | Country |
---|---|---|
41 07 378A1 | Sep 1992 | DE |
0 459 655A2 | Dec 1991 | EP |
1 529 590 | Oct 1978 | GB |
52-25329 | Jul 1977 | JP |
1-118842 | May 1989 | JP |
WO 9012342 | Oct 1990 | WO |
WO 9206410 | Apr 1992 | WO |
Entry |
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Patent Abstracts of Japan, vol. 007, No. 138 (P-204), Jun. 16, 1983 & JP-A-58 052646 (Dainippon Insatsu KK), Mar. 28, 1983, Abstract. |
B. F. Griffing, “On Operational Two Level Photoresist Technology”, Conference: International Electron Devices Meeting, Washington, DC (Dec. 7-9, 1981), PP 562-565, IEEE. |