Number | Name | Date | Kind |
---|---|---|---|
4020762 | Peterson | May 1977 | |
4093684 | Parts et al. | Jun 1978 | |
4132168 | Peterson | Jan 1979 | |
4555471 | Barzynski et al. | Nov 1985 |
Number | Date | Country |
---|---|---|
1529590 | Oct 1976 | GBX |
Entry |
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B. F. Griffing, "An Operational Two Level photoresist Technology", Conference: International Electron Devices Meeting. Washington, D.C. (Dec. 7-9, 1981) pp. 562-565, IEEE. |