Number | Name | Date | Kind |
---|---|---|---|
3559346 | Paola | Feb 1971 | |
3731435 | Boettcher et al. | May 1973 | |
4256535 | Banks | Mar 1981 | |
4270316 | Kramer et al. | Jun 1981 | |
4373991 | Banks | Feb 1983 | |
4435247 | Basi et al. | Mar 1984 | |
4519168 | Cesna | May 1985 | |
4600469 | Fusco et al. | Jul 1986 | |
4726150 | Nishio et al. | Feb 1988 | |
4918869 | Kitta | Apr 1990 | |
4918870 | Torbert et al. | Apr 1990 | |
4944119 | Gill, Jr. et al. | Jul 1990 | |
5081795 | Tanaka et al. | Jan 1992 | |
5095661 | Gill, Jr. et al. | Mar 1992 | |
5193316 | Olmstead | Mar 1993 | |
5205082 | Shendon et al. | Apr 1993 | |
5230184 | Bukhman | Jul 1993 | |
5232875 | Tuttle et al. | Aug 1993 | |
5255474 | Gawa et al. | Oct 1993 | |
5329732 | Karlsrud et al. | Jul 1994 | |
5398459 | Okumura et al. | Mar 1995 | |
5423716 | Strasbaugh | Jun 1995 | |
5441444 | Nakajima | Aug 1995 | |
5449316 | Strasbaugh | Sep 1995 | |
5476414 | Hirose et al. | Dec 1995 | |
5527209 | Volodarsky et al. | Jun 1996 | |
5569062 | Karlsrud | Oct 1996 | |
5584746 | Tanaka et al. | Dec 1996 | |
5584751 | Kobayashi et al. | Dec 1996 | |
5588902 | Tominaga et al. | Dec 1996 | |
5624299 | Shendon | Apr 1997 | |
5635083 | Breivogel et al. | Jun 1997 | |
5643053 | Shendon | Jul 1997 |
Number | Date | Country |
---|---|---|
0156746 A1 | Oct 1985 | EPX |
0653270 A1 | Aug 1994 | EPX |
8631087 | Apr 1987 | DEX |
61-25768 | Feb 1986 | JPX |
63-114870 | May 1988 | JPX |
63-300858 | Dec 1988 | JPX |
1-109066 | Apr 1989 | JPX |
1-216768 | Aug 1989 | JPX |
2-243263 | Sep 1990 | JPX |
WO 9419153 | Sep 1994 | WOX |
Entry |
---|
Research Disclosure, n. 322, Feb. 1, 1991, p. 95, XPO 00168310 "Pressurized Wafer Holder for Uniform Polishing". |