Claims
- 1. An optical device comprising a polymer comprising at least one repeating unit derived from a compound of the following formula:
- 2. The optical device of claim 1 wherein W is X.
- 3. The optical device of claim 2 wherein X is selected from the group consisting of substituted or unsubstituted alkenyls, substituted or unsubstituted alkynyls, substituted or unsubstituted aralkyls, substituted or unsubstituted heterocyclic groups, and substituted or unsubstituted vinyl ether groups.
- 4. The optical device of claim 3 wherein X is selected from the group consisting of substituted or unsubstituted alkenyls and substituted or unsubstituted vinyl ether groups.
- 5. The optical device of claim 4 wherein X is vinyl, CF3CF═CF—, CF2═CF—, CFCl═CF—, or a group derived from ethylvinylether, trimethylolpropane vinyl ether, butylvinyl ether, trimethylol propane divinyl ether, cyclohexylmethyl vinyl ether, pentaerytherital vinylether, glycerolmonovinyl ether, pentaerytherital divinyl ether, glycerol divinyl ether, or pentaerytheriotal trivinyl ether.
- 6. The optical device of claim 1 wherein W is X—O—.
- 7. The optical device of claim 4 wherein X is vinyl, CF3CF═CF—, CF2═CF—, CFCl═CF—.
- 8. The optical device of claim 6 wherein X is selected from the group consisting of substituted or unsubstituted alkenyls, substituted or unsubstituted alkynyls, substituted or unsubstituted aralkyls, and substituted or unsubstituted heterocyclic groups.
- 9. The optical device of claim 7 wherein X is selected from the group consisting of substituted or unsubstituted alkenyls.
- 10. The optical device of claim 4 wherein X is vinyl, CF3CF═CF—, CF2═CF—, or CFCl═CF—.
- 11. The compound according to claim 1 wherein Y is derived from a monovalent moiety selected from the group consisting of unsubstituted or substituted alkyls, and unsubstituted or substituted aryls.
- 12. The compound according to claim 11 wherein Y is selected from the group consisting of —CH2CH2—, —CH(CH3)CH2—, —C(CH2OZ)2CH2—, and —C(CH3)2CH2—.
- 13. The compound according to claim 11 wherein Y is a moiety of the following formula: —C6H4-p(O-Z)p-, wherein p is from about 0 to about 4.
- 14. The compound according to claim 13 wherein Y is —C6H4-.
- 15. The compound according to claim 1 wherein each Z is independently selected from the group consisting fluorinated alkyls, fluorinated alkenyls, and fluorinated aryls.
- 16. The compound according to claim 15 wherein each Z is independently selected from the group consisting of —CHF—CF3, —CF2CHF2, —C(Cl)F—CHF2, —CF2—CH(Cl)F, —CF2CHFCF3, —CHFCF2CF3, —CF2CF2CHF2, —CF(CF2CF3)—CH(CF3)2, —CF(CF3)—CH2—CF(CF3)2, —CF(CF3)—CHF—CF(CF3)2, —C(Cl)═CF2, —C(F)═C(Cl)F, —CF═CF—CF3, —CF2—CF═CF2, —CF═CF—CF3, and —C(C2F5)═C(CF3)2.
- 17. A photoresist comprising a polymer comprising at least one repeating unit derived from a compound of the following formula:
- 18. The photoresist of claim 17, wherein the mol ratio of fluorine to hydrogen in said compound is greater than about 7:3.
- 19. The photoresist of claim 18, wherein the mol ratio of fluorine to hydrogen in said compound is no less than about 7:1.
- 19. A photolithographic process for manufacturing a chip comprising:
applying to a substrate a photoresist comprising a polymer comprising at least one repeating unit derived from a compound of the following formula: W—Y—O-Z (1) wherein W is hydrogen, X or X—O—, X is a monovalent unsaturated organic moiety; Y is a divalent organic moiety; and Z a monovalent fluorinated organic moiety; exposing said substrate and said photoresist to light having a wavelength no greater than about 440 nm.
- 20. The photolithographic process of claim 19, wherein said wavelength is no greater than about 200 nm.
- 21. The photolithographic process of claim 19, wherein said wavelength is no greater than about 160 nm.
- 22. The photolithographic process of claim 21, wherein the mol ratio of fluorine to hydrogen in said compound is no less than about 7:1.
- 23. The chip made from the process of claim 19.
- 24. A waveguide comprising a polymer comprising at least one repeating unit derived from a compound of the following formula:
- 25. An optical package comprising a component comprising a polymer having at least one repeating unit derived from a compound of the following formula:
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application claims priority to U.S. Provisional Application Ser. No. 60/299,049, which was filed with the United States Patent and Trademark Office on Jun. 18, 2001, and is incorporated herein by reference.
Provisional Applications (1)
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Number |
Date |
Country |
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60299049 |
Jun 2001 |
US |