Number | Name | Date | Kind |
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4863755 | Hess et al. | Sep 1989 | |
4972061 | Duley et al. | Nov 1990 | |
5015353 | Hubler et al. | May 1991 | |
5468978 | Dowben | Nov 1995 | |
5902702 | Nakao et al. | May 1999 |
Entry |
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B.W. Smith et al, "The Effects of Excimer Laser Radiation on a Henvated Phase Shift Masking Materials" SPIE, 1997, vol. 3051, p. 236-244. |