Number | Name | Date | Kind |
---|---|---|---|
4251317 | Foote | Feb 1981 | |
4302273 | Howard | Nov 1981 | |
4675067 | Valley | Jun 1987 | |
4840701 | Stern | Jun 1989 |
Entry |
---|
Chapter Nine, "Agitation and Mixing of Liquids," Unit Operations of Chemical Engineering, McCabe and Thiele, Wiley Press. |
Wet Chemical Wafer Cleaning, Lecture notes of Werner Kern, Semiconductor Wafer Cleaning Technology (2-day course), Sep. 23-24, 1991. |