for wet etching

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CPC
H01L21/67075

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67075for wet etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Atomic layer etching for smoothing of arbitrary surfaces
- Patent number 12,217,968
- Issue date Feb 4, 2025
- California Institute of Technology
- Harold Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilayer coating for corrosion resistance
- Patent number 12,191,120
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Amir H. Tavakoli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contact conductive feature formation and structure
- Patent number 12,148,659
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ken-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating platform, thermal treatment and manufacturing method
- Patent number 12,142,497
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two-step decapsulation technique for semiconductor package having s...
- Patent number 12,106,973
- Issue date Oct 1, 2024
- Silicon Laboratories Inc.
- Erwin Hendarto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of controlling oxygen vacancy concentration in a semiconduct...
- Patent number 12,080,801
- Issue date Sep 3, 2024
- The Board of Trustees of the University of Illinois
- Edmund G. Seebauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical liquid preparation device, and substrate processing device
- Patent number 12,064,739
- Issue date Aug 20, 2024
- SCREEN Holdings Co., Ltd.
- Hajime Nishide
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
System for storing chemical liquid and method for adjusting gas con...
- Patent number 12,053,745
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Yu Kuo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Semiconductor device and fabrication method thereof
- Patent number 12,051,737
- Issue date Jul 30, 2024
- Semiconductor Manufacturing International (Shanghai) Corporation
- Nan Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning apparatus and wafer cleaning method using the same
- Patent number 12,042,828
- Issue date Jul 23, 2024
- Samsung Electronics Co., Ltd.
- Seung Min Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device and manufacturing method thereof
- Patent number 12,010,837
- Issue date Jun 11, 2024
- Kioxia Corporation
- Yusuke Shima
- G11 - INFORMATION STORAGE
Information Patent Grant
Slurry distribution device for chemical mechanical polishing
- Patent number 11,986,926
- Issue date May 21, 2024
- Applied Materials, Inc.
- Yen-Chu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for combining CMP process tracking data with 3D printed...
- Patent number 11,986,922
- Issue date May 21, 2024
- Applied Materials, Inc.
- Jason G. Fung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical-resistant protective film forming composition containing h...
- Patent number 11,965,059
- Issue date Apr 23, 2024
- NISSAN CHEMICAL CORPORATION
- Shigetaka Otagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for integrating gate dielectric layers of diff...
- Patent number 11,961,740
- Issue date Apr 16, 2024
- Shanghai Huali Integrated Circuit Corporation
- Lian Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,948,804
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Takumi Honda
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Monolithic platen
- Patent number 11,919,126
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Lung Lai
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,921,428
- Issue date Mar 5, 2024
- Kioxia Corporation
- Yoshihiro Uozumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamically adjusted purge timing in wet atomic layer etching
- Patent number 11,915,941
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Jacques Faguet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of manufacturing
- Patent number 11,915,946
- Issue date Feb 27, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jhon Jhy Liaw
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and system for filtrating liquid
- Patent number 11,839,839
- Issue date Dec 12, 2023
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Sangyong Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slurry distribution device for chemical mechanical polishing
- Patent number 11,806,835
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Yen-Chu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning method and apparatus therefore
- Patent number 11,810,796
- Issue date Nov 7, 2023
- Lam Research AG
- Christoph Semmelrock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having an air gap and method for fabricating t...
- Patent number 11,791,390
- Issue date Oct 17, 2023
- SK Hynix Inc.
- Se-Han Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and manufacturing method of semicondu...
- Patent number 11,784,064
- Issue date Oct 10, 2023
- Kioxia Corporation
- Yasuhito Yoshimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method fabricating the same
- Patent number 11,751,377
- Issue date Sep 5, 2023
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Hyunyoung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming memory devices, and associated devices and systems
- Patent number 11,735,473
- Issue date Aug 22, 2023
- Micron Technology, Inc.
- Jukuan Zheng
- G11 - INFORMATION STORAGE
Information Patent Grant
Implantation enabled precisely controlled source and drain etch depth
- Patent number 11,721,743
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Qintao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Endpoint detection for chemical mechanical polishing based on spect...
- Patent number 11,715,672
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Dominic J. Benvegnu
- B24 - GRINDING POLISHING
Information Patent Grant
Contact conductive feature formation and structure
- Patent number 11,676,859
- Issue date Jun 13, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ken-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE, SEMICONDUCTOR PROCESSING SYSTEM, A...
- Publication number 20250014932
- Publication date Jan 9, 2025
- HUAYING RESEARCH CO., LTD
- Sophia Ziying WEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE AND SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20250014919
- Publication date Jan 9, 2025
- HUAYING RESEARCH CO., LTD
- Sophia Ziying WEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED TUNGSTEN GALVANIC CORROSION IN WET CLEANING FOR ADVANCED SE...
- Publication number 20250006554
- Publication date Jan 2, 2025
- Intel Corporation
- Ramanan Ehamparam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING DEVICE AND ETCHING METHOD THEREOF
- Publication number 20240429069
- Publication date Dec 26, 2024
- ZEUS CO., LTD.
- Seung Hoon LEE
- B08 - CLEANING
Information Patent Application
PROCESSING METHOD AND PROCESSING SYSTEM
- Publication number 20240404852
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Yohei YAMASHITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD
- Publication number 20240387203
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...
- Publication number 20240387220
- Publication date Nov 21, 2024
- DAIKIN FINETECH, LTD.
- Yasunori DEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER RECEIVER, ELECTROCHEMICAL POROSIFICATION APPARATUS AND METHOD...
- Publication number 20240376629
- Publication date Nov 14, 2024
- Socpra Sciences et Genie s.e.c.
- Philippe-Olivier PROVOST
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME
- Publication number 20240355911
- Publication date Oct 24, 2024
- Semiconductor Manufacturing International (Shanghai) Corporation
- Nan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR STORING CHEMICAL LIQUID AND METHOD FOR ADJUSTING GAS CON...
- Publication number 20240350985
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Yu KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE
- Publication number 20240342672
- Publication date Oct 17, 2024
- SCREEN Holdings Co., Ltd.
- Hajime NISHIDE
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COMPOSITE SUBSTRATE FOR FABRICATION OF BETA GALLIUM OXIDE DEVICES
- Publication number 20240347339
- Publication date Oct 17, 2024
- Syrnatec, Inc.
- Yash Suresh Mirchandani
- B24 - GRINDING POLISHING
Information Patent Application
SELECTIVE ETCHING METHOD AND ETCHING ASSEMBLY
- Publication number 20240312790
- Publication date Sep 19, 2024
- ASM IP HOLDING B.V.
- Eva Tois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL-RESISTANT PROTECTIVE FILM FORMING COMPOSITION CONTAINING H...
- Publication number 20240301126
- Publication date Sep 12, 2024
- NISSAN CHEMICAL CORPORATION
- Shigetaka OTAGIRI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND SUB...
- Publication number 20240288775
- Publication date Aug 29, 2024
- Tokyo Electron Limited
- Soichiro OKADA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240268109
- Publication date Aug 8, 2024
- KIOXIA Corporation
- Yusuke Shima
- G11 - INFORMATION STORAGE
Information Patent Application
SUBSTRATE LIQUID-TREATMENT DEVICE
- Publication number 20240192111
- Publication date Jun 13, 2024
- Tokyo Electron Limited
- Hiroshi MARUMOTO
- G01 - MEASURING TESTING
Information Patent Application
MONOLITHIC PLATEN
- Publication number 20240181598
- Publication date Jun 6, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Tsung-Lung LAI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD
- Publication number 20240162060
- Publication date May 16, 2024
- SCREEN Holdings Co., Ltd.
- Masaki INABA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Semiconductor Devices and Methods of Manufacturing
- Publication number 20240162059
- Publication date May 16, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhon Jhy Liaw
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD THEREOF
- Publication number 20240136199
- Publication date Apr 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Chi LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHODS AND CLUSTER TOOLS FOR FORMING SEMICONDUCTOR DEVICES
- Publication number 20240038553
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Benjamin Colombeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR ETCHING THE PERIPHERY EDGE OF A SUBSTRATE
- Publication number 20230268221
- Publication date Aug 24, 2023
- DEVICEENG CO., LTD
- Taek Youb LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Contact Conductive Feature Formation and Structure
- Publication number 20230268228
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ken-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING APPARATUS AND WAFER CLEANING METHOD USING THE SAME
- Publication number 20230249230
- Publication date Aug 10, 2023
- Samsung Electronics Co., Ltd.
- Seung Min SHIN
- B08 - CLEANING
Information Patent Application
CHEMICAL PLANARIZATION
- Publication number 20230143013
- Publication date May 11, 2023
- CHEMPOWER CORPORATION
- Sudhanshu Misra
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SEMICONDUCTOR EDGE PROCESSING APPARATUS AND METHODS
- Publication number 20230135250
- Publication date May 4, 2023
- Huaying Research Co., Ltd.
- Sophia Ziying WEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO-STEP DECAPSULATION TECHNIQUE FOR SEMICONDUCTOR PACKAGE HAVING S...
- Publication number 20230138508
- Publication date May 4, 2023
- Silicon Laboratories Inc.
- Erwin Hendarto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230094318
- Publication date Mar 30, 2023
- SCREEN Holdings Co., Ltd.
- Yosuke YASUTAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF PROCESSING OBJECT
- Publication number 20230092336
- Publication date Mar 23, 2023
- KIOXIA Corporation
- Shinsuke MURAKI
- H01 - BASIC ELECTRIC ELEMENTS

for wet etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Atomic layer etching for smoothing of arbitrary surfaces

Multilayer coating for corrosion resistance

Contact conductive feature formation and structure

Heating platform, thermal treatment and manufacturing method

Two-step decapsulation technique for semiconductor package having s...

Method of controlling oxygen vacancy concentration in a semiconduct...

Chemical liquid preparation device, and substrate processing device

System for storing chemical liquid and method for adjusting gas con...

Semiconductor device and fabrication method thereof

Wafer cleaning apparatus and wafer cleaning method using the same

Semiconductor memory device and manufacturing method thereof

Slurry distribution device for chemical mechanical polishing

Techniques for combining CMP process tracking data with 3D printed...

Chemical-resistant protective film forming composition containing h...

Manufacturing method for integrating gate dielectric layers of diff...

Substrate processing method and substrate processing apparatus

Monolithic platen

Substrate processing method and substrate processing apparatus

Dynamically adjusted purge timing in wet atomic layer etching

Semiconductor devices and methods of manufacturing

Apparatus and system for filtrating liquid

Slurry distribution device for chemical mechanical polishing

Wafer cleaning method and apparatus therefore

Semiconductor device having an air gap and method for fabricating t...

Substrate treatment apparatus and manufacturing method of semicondu...

Semiconductor device and method fabricating the same

Methods for forming memory devices, and associated devices and systems

Implantation enabled precisely controlled source and drain etch depth

Endpoint detection for chemical mechanical polishing based on spect...

Contact conductive feature formation and structure

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESSING DEVICE, SEMICONDUCTOR PROCESSING SYSTEM, A...

SEMICONDUCTOR PROCESSING DEVICE AND SEMICONDUCTOR PROCESSING SYSTEM

REDUCED TUNGSTEN GALVANIC CORROSION IN WET CLEANING FOR ADVANCED SE...

ETCHING DEVICE AND ETCHING METHOD THEREOF

PROCESSING METHOD AND PROCESSING SYSTEM

HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD

SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...

WAFER RECEIVER, ELECTROCHEMICAL POROSIFICATION APPARATUS AND METHOD...

SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME

SYSTEM FOR STORING CHEMICAL LIQUID AND METHOD FOR ADJUSTING GAS CON...

CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE

COMPOSITE SUBSTRATE FOR FABRICATION OF BETA GALLIUM OXIDE DEVICES

SELECTIVE ETCHING METHOD AND ETCHING ASSEMBLY

CHEMICAL-RESISTANT PROTECTIVE FILM FORMING COMPOSITION CONTAINING H...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND SUB...

SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF

SUBSTRATE LIQUID-TREATMENT DEVICE

MONOLITHIC PLATEN

SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD

Semiconductor Devices and Methods of Manufacturing

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD THEREOF

PROCESSING METHODS AND CLUSTER TOOLS FOR FORMING SEMICONDUCTOR DEVICES

DEVICE FOR ETCHING THE PERIPHERY EDGE OF A SUBSTRATE

Contact Conductive Feature Formation and Structure

WAFER CLEANING APPARATUS AND WAFER CLEANING METHOD USING THE SAME

CHEMICAL PLANARIZATION

SEMICONDUCTOR EDGE PROCESSING APPARATUS AND METHODS

TWO-STEP DECAPSULATION TECHNIQUE FOR SEMICONDUCTOR PACKAGE HAVING S...

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF PROCESSING OBJECT