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Wafer support table and RF rod
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Patent number 12,170,190
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Issue date Dec 17, 2024
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NGK Insulators, Ltd.
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Yutaka Unno
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Screwless semiconductor processing chambers
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Patent number 12,165,909
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Issue date Dec 10, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Bo-Ru Chen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor processing tool
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Patent number 12,084,769
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Issue date Sep 10, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd
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Yung-Tsun Liu
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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Wafer placement table
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Patent number 12,040,165
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Issue date Jul 16, 2024
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NGK Insulators, Ltd.
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Tatsuya Kuno
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer holding body
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Patent number 12,033,880
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Issue date Jul 9, 2024
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Sumitomo Electric Industries, Ltd.
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Koichi Kimura
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Pedestal for substrate processing chambers
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Patent number 12,000,048
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Issue date Jun 4, 2024
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Applied Materials, Inc.
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Sarah Michelle Bobek
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Susceptor having cooling device
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Patent number 12,002,661
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Issue date Jun 4, 2024
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ASM IP Holding B.V.
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Yukihiro Mori
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 11,993,843
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Issue date May 28, 2024
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ASM IP Holding B.V.
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Seung Wook Kim
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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