Claims
- 1. A gravity-fed in-line continuous processing system comprising:
at least one processing chamber disposed between a first load lock and a second load lock, the second load lock disposed lower than the first load lock; a first device for isolating the processing chamber from the first load lock; a second device for isolating the processing chamber from the second load lock; and at least one track through the processing chamber and the first and second load locks, the track structured and arranged such that an article slides thereon under the force of gravity.
- 2. The system of claim 1 in which the processing chamber, the first load lock and the second load lock are all angled with respect to horizontal.
- 3. The system of claim 1 in which the track is angled with respect to the horizontal.
- 4. The system of claim 1 in which the track, the processing chamber, the first load lock and the second load lock are all angled with respect to the horizontal.
- 5. The system of claim of claim 2 in which the angle with respect to the horizontal is greater than about 33° but less than about 43°.
- 6. The system of claim 5 in which the angle with respect to the horizontal is about 40°.
- 7. The system of claim 1 in which the first load lock is an input load lock.
- 8. The system of claim 1 in which the second load lock is an output load lock.
- 9. The system of claim 1 in which the first device is structured and arranged to prevent the article from sliding under the force of gravity when the first device is closed.
- 10. The system of claim 1 in which the second device is structured and arranged to prevent the article from sliding under the force of gravity when the second device is closed.
- 11. The system of claim 1 in which the first device is structured and arranged to allow the article to slide on the track from the first load lock to the processing chamber when the first device is open.
- 12. The system of claim 1 in which the second device is structured and arranged to allow the article to slide on the track from the processing chamber to the second load lock when the second device is open.
- 13. The system of claim 1 in which the first device is a first rotary barrel gate valve.
- 14. The system of claim 13 in which the second device is a second rotary barrel gate valve.
- 15. The system of claim 1 including a plurality of tracks through the processing chamber and the first and second load locks.
- 16. The system of claim 15 in which all tracks are angled with respect to horizontal.
- 17. The system of claim 16 in which each of the plurality of tracks are structured and arranged such that articles in each of the plurality of tracks slide thereon under the force of gravity for simultaneously processing a plurality of articles.
- 18. The system of claim 17 in which the plurality of tracks are parallel to one another.
- 19. The system of claim 17 in which the parallel tracks of the first load lock, the tracks of the processing chamber, and the tracks of the second load lock are aligned with one another.
- 20. The system of claim 1 further including an input tray disposed adjacent the first load lock.
- 21. The system of claim 1 further including an output tray disposed adjacent the output load lock.
- 22. The system of claim 1 in which the processing chamber is a vacuum sputtering chamber.
- 23. The system of claim 1 in which the first load lock is structured and arranged for venting from a first pressure to a second pressure.
- 24. The system of claim 23 in which the first load lock is structured and arranged for evacuating from a first pressure to a second pressure.
- 25. The system of claim 1 in which the second load lock is structured and arranged for venting from a first pressure to a second pressure.
- 26. The system of claim 25 in which the second load lock is structured and arranged for evacuating from a first pressure to a second pressure.
- 27. The system of claim 23 where the first pressure is a vacuum and the second pressure is atmospheric pressure.
- 28. The system of claim 24 where the first pressure is atmospheric pressure and the second pressure is a vacuum.
- 29. The system of claim 25 where the first pressure is a vacuum and the second pressure is atmospheric pressure.
- 30. The system of claim 26 where the first pressure is atmospheric pressure and the second pressure is vacuum.
- 31. The system of claim 1 further including a third device between the first load lock and atmosphere.
- 32. The system of claim 1 further including a fourth device between the second load lock and atmosphere.
- 33. The system of claim 31 in which the third device is a third rotary barrel gate valve.
- 34. The system of claim 32 in which the fourth device is a fourth rotary barrel gate valve.
- 35. The system of claim 1 in which the article is plastic.
- 36. The system of claim 35 in which the plastic is polystyrene.
- 37. The system of claim 1 in which the article is polystyrene plastic cutlery.
- 38. The system of claim 20 further including a take-out robot for transferring articles from an injection molding machine to the input tray.
- 39. The system of claim 1 in which the first load lock, the second load lock, the first device, the second device and the processing chamber are sequenced such that sets of articles may be processed simultaneously.
- 40. The system of claim 1 in which each of the processing chamber, the first and second load locks and the first and second devices are angled with respect to the horizontal.
- 41. The system of claim 1 in which the first device includes a body, at least one passage through the body defining an inlet and an outlet, a first actuator for rotating the body, a second actuator for translating the body, and a sealing portion on the body for sealing the body with respect to an opening into a chamber adjacent the body.
- 42. A gravity-fed in-line continuous processing system comprising:
at least one processing chamber disposed between a first load lock and a second load lock, the second load lock disposed lower than the first load lock; a first device for isolating the processing chamber from the first load lock and a second device for isolating the processing chamber from the second load lock; the processing chamber, the first load lock, the second load lock, the first device and the second device are all angled with respect to the horizontal, each having a plurality of tracks, the plurality of tracks structured and arranged such that a plurality of articles slide thereon under the force of gravity from the first load lock, through the processing chamber, and to the second load lock.
- 43. A gravity-fed in-line continuous processing system comprising:
at least one vacuum sputtering chamber disposed between a first load lock and a second load lock, the second load lock disposed lower than the first load lock; a first rotary barrel gate valve for isolating the vacuum sputtering chamber from the first load lock, the first rotary gate valve structured and arranged to prevent an article from sliding under the force of gravity when the first rotary gate valve is closed and to allow the article to slide therethrough under the force of gravity when the first rotary gate valve is open; and a second rotary barrel gate valve for isolating the vacuum sputtering chamber from the second load lock, the second rotary gate valve structured and arranged to prevent an article from sliding under the force of gravity when the second rotary gate valve is closed and to allow an article to slide therethrough under the force of gravity when the second rotary gate valve is open.
- 44. A gravity-fed in-line continuous processing system comprising:
at least one processing chamber disposed between a first load lock and a second load lock, the second load lock disposed lower than the first load lock; a first rotary barrel gate valve for isolating the processing chamber from the first load lock, the first rotary gate valve structured and arranged to prevent an article from sliding under the force of gravity when the first rotary gate valve is closed and to allow the article to slide therethrough under the force of gravity when the first rotary gate valve is open; a second rotary barrel gate valve for isolating the processing chamber from the second load lock, the second rotary gate valve structured and arranged to prevent the article from sliding under the force of gravity when the second rotary gate valve is closed and to allow the article to slide therethrough under the force of gravity when the second rotary gate valve is open; a third rotary barrel gate valve for isolating the first load lock from atmosphere, the third rotary gate valve structured and arranged to prevent the article from sliding under the force of gravity when the third rotary gate valve is closed and to allow the article to slide therethrough under the force of gravity when the third rotary gate valve is open; an input tray terminating at the third rotary barrel gate valve; a fourth rotary barrel gate valve for isolating the second load lock from atmosphere, the fourth rotary gate valve structured and arranged to prevent the article from sliding under the force of gravity when the fourth rotary gate valve is closed and to allow the article to slide therethrough under the force of gravity when the fourth rotary gate valve is open; an output tray adjacent the fourth rotary barrel gate valve; and a plurality of tracks angled through the first load lock, the processing chamber, and the second load lock interconnecting the input tray and the output tray to urge, under the force of gravity, articles through the first load lock, the processing chamber, and the second load lock.
- 45. A gravity-fed in-line continuous processing system comprising:
at least one processing chamber module disposed between a first load lock module and a second load lock module, the second load lock module disposed lower than the first load lock module; a first device for isolating the processing chamber module from the first load lock module; a second device for isolating the processing chamber module from the second load lock module; and at least one track through the processing chamber module and the first and second load lock modules, the track structured and arranged such that an article slides thereon under the force of gravity.
- 46. The system of claim 45 including a plurality of processing chamber modules.
- 47. The system of claim 45 including a plurality of load lock modules.
- 48. A gravity-fed in-line continuous processing system comprising:
at least one processing chamber including at least one track therethrough, the track structured and arranged such that an article slides thereon under the force of gravity.
- 49. The system of claim 48 in which the processing chamber is angled with respect to the horizontal.
- 50. The system of claim 48 in which the at least one track is angled with respect to the horizontal.
- 51. A gravity-fed in-line continuous processing system comprising:
means for processing disposed between first means for alternating between a first pressure and a second pressure and a second means for alternating between the first pressure and the second pressure, the second means for alternating disposed lower than the first means for alternating; first means for isolating the means for processing from the first means for alternating; second means for isolating the means for processing from the second means for alternating; and at least one track through the means for processing and the first and second means for alternating, the track structured and arranged such that an article slides thereon under the force of gravity.
- 52. A gravity-fed in-line continuous processing system comprising:
at least one means for processing disposed between a first means for alternating between a first pressure and a second pressure and a second means for alternating between the first pressure and the second pressure, the second means for alternating disposed lower than the first means for alternating; first means for isolating the means for processing from the first means for alternating, the first means for isolating structured and arranged to prevent an article from sliding under the force of gravity when the first means for isolating is closed and to allow the article to slide therethrough under the force of gravity when the first means for isolating is open; second means for isolating the means for processing from the second means for alternating, the second means for isolating structured and arranged to prevent the article from sliding under the force of gravity when the second means for isolating is closed and to allow the article to slide therethrough under the force of gravity when the second means for isolating is open; third means for isolating the first means for alternating from atmosphere, the third means for isolating structured and arranged to prevent the article from sliding under the force of gravity when the third means for isolating is closed and to allow the article to slide therethrough under the force of gravity when the third means for isolating is open; an input tray terminating at the third means for isolating; fourth means for isolating the second means for alternating from atmosphere, the fourth means for isolating structured and arranged to prevent the article from sliding under the force of gravity when the fourth means for isolating is closed and to allow the article to slide therethrough under the force of gravity when the fourth means for isolating is open; an output tray adjacent the fourth means for isolating; and a plurality of tracks angled through the first means for alternating, the means for processing, and the second means for alternating interconnecting the input tray and the output tray to urge, under the force of gravity, articles through the first means for alternating, the means for processing, and the second means for alternating.
- 53. A gravity-fed in-line continuous processing system comprising:
at least one processing chamber isolatable with respect to first and second chambers; and means for urging an article from the first chamber, through the processing chamber, and to the second chamber under the force of gravity.
- 54. A method for coating substrates, the method comprising:
providing at least one processing chamber; disposing the at least one processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock; isolating the processing chamber from the first load lock; isolating the processing chamber from the second load lock; and providing at least one track through the processing chamber and the first and second load locks and structuring and arranging the track such that an article slides thereon under the force of gravity.
- 55. The method of claim 54 in which the step of isolating the processing chamber from the first load lock is carried out by a first device.
- 56. The method of claim 54 in which the step of isolating the processing chamber from the second load lock is carried out by a second device.
- 57. The method of claim 54 further including the step of angling the processing chamber, the first load lock and the second load lock with respect to the horizontal.
- 58. The method of claim 57 in which the angle with respect to the horizontal is greater than 33° but less than 43°
- 59. The method of claim 58 in which the angle with respect to the horizontal is about 40°.
- 60. The method of claim 54 further including the step of angling the at least one track with respect to the horizontal.
- 61. The method of claim 54 in which the first load lock is an input load lock.
- 62. The method of claim 54 in which the second load lock is an output load lock.
- 63. The method of claim 54 further including the step of structuring and arranging the first device to prevent the article from sliding under the force of gravity when the first device is closed.
- 64. The method of claim 54 further including the step of structuring and arranging the second device to prevent the article from sliding under the force of gravity when the second device is closed.
- 65. The method of claim 54 further including the step of structuring and arranging the first device to allow the article to slide on the track from the first load lock to the processing chamber when the first device is open.
- 66. The method of claim 54 further including the step of structuring and arranging the second device to allow the article to slide on the track from the processing chamber to the second load lock when the second device is open.
- 67. The method of claim 54 in which the first device is a first rotary barrel gate valve.
- 68. The method of claim 67 in which the second device is a second rotary barrel gate valve.
- 69. The method of claim 54 further including the step of providing a plurality of tracks through the processing chamber and the first and second load locks.
- 70. The method of claim 69 further including the step of angling all tracks with respect to the horizontal.
- 71. The method of claim 70 further including the step of structuring and arranging each of the plurality of tracks such that articles in each of the plurality of tracks slide thereon under the force of gravity for simultaneously processing a plurality of articles.
- 72. The method of claim 71 in which the plurality of tracks are parallel to one another.
- 73. The method of claim 71 further including the step of aligning the parallel tracks of the first load lock, the tracks of the processing chamber, and the tracks of the second load lock with one another.
- 74. The method of claim 54 further including the step of disposing an input tray adjacent the first load lock.
- 75. The method of claim 54 further including the step of disposing an output tray adjacent the output load lock.
- 76. The method of claim 54 further including the step of structuring and arranging the first load lock for alternating between a first pressure and a second pressure.
- 77. The method of claim 76 wherein the first pressure is a vacuum and the second pressure is atmospheric pressure.
- 78. The method of claim 54 further including the step of structuring and arranging the second load lock for alternating between a first pressure and a second pressure.
- 79. The method of claim 78 wherein the first pressure is a vacuum and the second pressure is atmospheric pressure.
- 80. The method of claim 54 further including the step of providing a third device between the first load lock and atmosphere.
- 81. The method of claim 54 further including the step of providing a fourth device between the second load lock and atmosphere.
- 82. The method of claim 80 in which the third device is a third rotary barrel gate valve.
- 83. The method of claim 81 in which the fourth device is a fourth rotary barrel gate valve.
- 84. The method of claim 54 further including the step of sequencing the first load lock, the second load lock, the first device, the second device and the processing chamber such that sets of articles may be processed simultaneously.
RELATED APPLICATIONS
[0001] This application claims priority of and is related to U.S. Provisional Patent Application Serial No. 60/368,818, filed Mar. 29, 2002. This application is also related to the U.S. patent application entitled ROTARY BARREL GATE VALVE, filed on even date herewith and hereby incorporated by reference herein, and which also claims priority to U.S. Provisional Patent Application Serial No. 60/368,818 filed Mar. 29, 2002.
Provisional Applications (1)
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Number |
Date |
Country |
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60368818 |
Mar 2002 |
US |