The invention relates generally to integrated lead or wireless flexures of the type incorporated into disk drive head suspensions.
Integrated lead or wireless suspensions and flexures (i.e., suspension components) are used to support read/write transducers in disk drives or other dynamic data storage systems. Flexures of type used in connection with disk drive head suspensions are generally known and commercially available. These devices typically include leads or traces formed in a copper or other conductive material layer over a stainless steel or other spring metal layer. A layer of dielectric insulating material such as polyimide separates the traces from the spring metal layer. The flexures are mounted to other components such as a stainless steel load beam in one embodiment of the invention. Subtractive and/or additive processes such as photolithography, wet and dry etching and deposition processes can be used to fabricate the flexures.
Plated ground features are often incorporated into disk drive head suspension flexures. These ground features are, for example, used to electrically interconnect the traces though apertures in the dielectric insulating layer to the underlying stainless steel layer. For example, they can be used to electrically interconnect so-called interleaved traces through the stainless steel layer. Ground features of these types and associated methods of manufacture are disclosed, for example, in the Tronnes U.S. Pat. No. 7,875,804 and the Peltoma U.S. Pat. No. 7,384,531.
The copper or other conductive material of the traces to which the ground features are connected are often plated with relatively non-corrosive materials such as NiAu (nickel-gold). NiAu does not, however, adhere well to stainless steel. A plated ground feature must therefore be large enough (e.g., in diameter) to cover the aperture through the insulating layer and the portion of the stainless steel layer exposed by that aperture. Furthermore, because of the need to accommodate layer-to-layer misregistration due to limitations inherent in the photolithography and deposition processes used to form ground features, the ground features are typically made even larger than the insulating layer apertures.
There remains, however, a continuing need for smaller ground features which can reduce the space taken up by the ground features to allow for other features to also be used and/or miniaturization of the assemblies.
Aspects of the present disclosure concern a reduced-size (e.g. diameter) interconnect. The ground feature and the region surrounding the ground feature can be covered by polymer covercoat material. Because the plated ground feature and surrounding region are covered by covercoat, design specifications, and in particular minimum and other size specifications, the interconnect can accommodate layer-to-layer misregistrations that may result in exposed stainless steel regions. Some embodiments of the disclosure include plated ground features with diameters smaller than the apertures in the insulating layer.
Some embodiments of the disclosure include a stainless steel or other spring metal layer and a plurality of copper or other conducive material traces. A layer of polyimide or other dielectric insulating material separates the traces from the stainless steel layer at locations other than those of the interconnects. An aperture extends through the dielectric layer at the interconnect. The interconnect can include a portion of the trace extending over edge portions of the insulating material aperture and into contact with the spring metal layer. An insulating or covercoat layer of dielectric insulating material such as polyimide can cover the area around the interconnect, including any exposed portion of the spring metal layer in the aperture that is not covered by the trace. The trace has a width at the interconnect that can be less than or equal to the diameter of the dielectric layer aperture in some embodiments. In some other embodiments, the width of the trace is equal to or larger than the diameter of the aperture at the interconnect. Irrespective of the relative widths and/or diameters of the traces and aperture, the process and other manufacturing specifications do not require that the width of the trace at the interconnect be large enough to cover the entire aperture given expected ranges of layer-to-layer misregistrations due to expected process variations. In other words, the width of the trace can be so narrow with respect to the diameter of the aperture that it is anticipated that portions of the spring metal layer may (but need not) be exposed at the interconnect location. The size of the covercoat layer over the interconnect is sufficiently large to cover the aperture in the insulating layer, given anticipated misregistrations due to process variations, and will thereby cover any exposed portions of the spring metal layer at the interconnect. Portions of the trace at the location of the interconnect may not be plated by corrosion resistant materials such as Au or Ni & Au. Other portions of the traces can be plated with corrosion resistant materials such as Au or Ni & Au. The trace layer portion of the interconnect can be formed at the same time (i.e., during the same process steps) as the trace being interconnected to the stainless steel layer. In other embodiments the plated conductor layer portion of the interconnect can be formed separately from the trace.
Portions of the trace at the location of the interconnect (e.g., portions covered by the covercoat) may not plated by corrosion resistant materials such as Au or Ni & Au. In some embodiments, portions of the trace can have coatings, such as electroless Ni, that can be deposited on the trace without being deposited on the spring metal layer. Other portions of the traces can be plated with corrosion resistant materials such as Au or Ni & Au. Besides corrosion resistance, the plating layer can facilitate an electrical connection (solder, ultrasonic bonding, conductive resin, etc.) to other hard disk drive components and allow for low resistance electrical probing.
Another embodiment includes an enlarged-diameter plated interconnect portion having a diameter larger than the adjacent trace portion at the interconnect. The enlarged-diameter plated region, which can be the same material as the trace or other conductive material such as nickel, can have a diameter that is smaller than, equal to, or larger than the diameter of the aperture in the insulating layer. Like the embodiment described above, the diameter of the plated region can be so narrow with respect to the diameter of the aperture that it is anticipated that portions of the spring metal layer may (but need not) be exposed at the interconnect location. The size of the covercoat layer over the interconnect is sufficiently large to cover the aperture in the insulating layer, given anticipated misregistrations due to process variations, and will thereby cover any exposed portions of the spring metal layer at the interconnect.
Other embodiments of the disclosure include at least one trace adjacent to the interconnect. The trace is separated from the interconnect by a minimum distance that is sufficient to accommodate anticipated misregistrations due to process variations and to prevent the trace from extending into the aperture of the interconnect. The covercoat layer over the interconnect can extend over portions of the adjacent trace. At interconnect locations within the region of the covercoat, specifications for the sizes of the trace and aperture do not need margins to account for anticipated layer-to-layer misregistration. At locations spaced from the covercoat layer-covered portions of the interconnect, conventional or otherwise known margins can be used to account for anticipated misregistration.
In some embodiments of the invention the width of the interconnect is about 15 μm and the diameter of the aperture is about 20 μm. An adjacent trace can be about 25 μm from the edge of the aperture. Other embodiments of the invention include larger and smaller apertures, traces and trace spacings.
At various locations, electrical connections can be made between the traces 22 and the spring metal layer 12. For example, the spring metal layer 12 can provide an electrical grounding connection for one or more of the traces 22 at one or more interconnects. Such interconnects can establish electrical connections through the dielectric layer 16, as further discussed herein.
In prior art embodiments, the entire surface of the spring metal layer 320 within the aperture 340 is covered by the trace layer 326. Specifically, in the embodiment of
The relatively large size of the trace layer 326 is further accounted for by a design requirement to fully cover the aperture 340 with the trace layer 326 despite misregistration. The automated technique for forming the aperture 340 and the trace layer 326 may be expected to laterally deviate from targeted locations within a margin of error. Misregistration, as used herein, refers to the difference between the actual placement of an element from the targeted placement. The trace layer 326 has a width 332 that is significantly greater than the width 330 of the aperture 340 to ensure that even if the trace layer 326 is deposited laterally offset from targeted center alignment with the aperture 340 by an amount within an expected margin of error, the aperture 340 will still be entirely covered by the trace layer 326 such that the spring metal layer 320 is not exposed within the aperture 340. The covercoat layer 324 can have a width 334 larger than the width 332 of the trace layer 326 to provide further margin to accommodate misregistrations of the trace layer 326 and/or the covercoat layer 324. Likewise, the dielectric layer 322 can have a width 336 larger than the width 332 of the trace layer 326 to provide further margin to accommodate lateral misregistrations of the trace layer 326. The expanded width 332 of the trace layer 326 to ensure complete coverage over the width 330 of the aperture 340 increases the overall footprint of the interconnect 300.
A covercoat layer 424 is shown in
As shown in
As discussed herein, the trace layer 426 is susceptible to corrosion. A first option to resist corrosion of the trace layer 426 is to plate the trace layer 426. The trace layer 426 can be plated with Au, Ni & Au, and/or other metal. A second option is to coat the trace layer 426 with a polymer, such as polyimide. The covercoat layer 424 can be a polymer coating. It will be understood that only a small portion of the trace layer 426 is shown in
The width 432 of the trace layer 426 can be about 5 μm or greater. In some embodiments, the width 432 of the trace layer 426 can be about 15 μm. In some embodiments, the width 432 of the trace layer 426 can be about 5-15 μm. Other dimensions are also contemplated.
The width 430 of the aperture 440 can be about 35 μm, or greater in some other embodiments. In some embodiments, the aperture 440 can be based on the thickness of the dielectric layer 422 (i.e. the distance from the first side of the aperture 440 to the second side of the aperture 440). For example, the width 430 of the aperture 440 can be about half the thickness of the dielectric layer 422 or greater. In some embodiments, the width 430 of the aperture 440 is about 35 μm or greater. Different dimensions of the elements of the interconnect 400 can be used based on expected misregistration of the elements to ensure that the trace layer 426 is still placed such that at least a portion of the trace layer 426 contacts the metal spring layer 420 within the aperture 440. The intended placement of the trace layer 426 within the aperture 440 can be center aligned, wherein the center of the trace layer 426 is targeted to align with the center of the aperture 440. However, it may be known that a particular level of misregistration, in this case misalignment between the center of the trace layer 426 and the center of the aperture 440, is to be expected based on the equipment and techniques used. As such, the widths of the elements can be based on the expected misregistration of the elements to ensure that trace layer 426 contacts the metal spring layer 420 through the aperture 440, even if some of metal spring layer 420 is not covered by the trace layer 426 through the aperture 440. In some cases, the width 430 of the aperture 440 can set as a function of the width 432 of the trace layer 426 and the registration margin. For example, the width 430 of the aperture 440 can be based on the following equation:
VW≧2*(RM+FM)−TW
wherein VW=aperture 440 width 430; RM=registration margin; FM=functional PGF conductor minimum; and TW=trace layer 426 width 432. RM refers to the minimum design distance required to account for process variation resulting from aligning two different layers. A RM value can determined by defining an acceptable process capability based on known tolerances, which is typically 3 to 6 times one standard deviation of measured process variation. In some examples, the RM can be 20-25 μm. RM+FM, or other misregistration metric, can alternatively be a total maximum misregistration that is additive between two or more placed elements. FM refers to the minimum contact area between the conductor layer and spring metal layer that is necessary to ensure a reliable electrical connection. The FM can be variable based on the type of materials used and can be determined through reliability testing. In some cases, FM may also be determined based on the maximum electrical resistance allowed by the design to meet performance requirements.
Furthermore, the relatively small width 432 of the trace layer 426 and the relatively small width 430 of the aperture 440 allows for closer placement of various other components.
AT≧(VW/2)−(TW/2)+RM
TW refers to the trace layer 426 width 432. In the cases, the RM function used in the above equation can specifically refer to the registration margin of the dielectric layer 422. Another measure of the grounding configuration is the distance from the centerline of the trace layer 426 to the edge of the covercoat layer 424. In some embodiments, the distance from the centerline of the trace layer 426 to the edge of the covercoat layer 424 can be set as a function of the trace layer 426 width 432 and the registration margin. For example, the distance from the centerline of the trace layer 426 to the edge of the covercoat layer 424 can be greater than or equal to half of the trace layer 426 width 432 plus the registration margin. In some other embodiments, the distance from the centerline of the trace layer 426 to the edge of the covercoat layer 424 (DE) can be greater than or equal to half of the aperture 440 width 430 plus the registration margin. The distance from the centerline of the trace layer 426 to the edge of the dielectric layer 422 can be greater than or equal to DE plus an edge registration margin. The edge registration margin can be about 15 μm, in some embodiments.
Conventional or otherwise known additive trace suspension assembly (TSA+) photolithography, deposition and wet and dry etching processes can be used to fabricate the ground features of the invention. For example, the void of the aperture 440 can be formed by removing material (e.g., via etching) from the dielectric layer 422. The aperture 440 can be etched through the dielectric layer 422 to expose the metal spring layer 420 at the location of the interconnect 400. Trace layer 426 can be formed separately and then placed on the dielectric layer 422 and/or can be formed by building up (e.g., by electroplating). For example, the trace layer 426 can be built up from a seed layer deposited on the stainless steel surface of the metal spring layer 420 within the aperture 440. The seed layer can comprise CrCu.
The covercoat layer 524 is shown in
While the width 532 of the trace layer 526 is greater than the width 530 of the aperture 540 (unlike in the embodiment of
The width 532 of the trace layer 526 can be about 40 μm while the width 530 of the aperture 540 can be about 20 μm, however other dimensions are possible. Different dimensions of the elements of the interconnect 500 can be used based on one or more relationships to the expected misregistration of the elements to ensure that the trace layer 526 is still placed such that at least a portion of the trace layer 526 contacts the metal spring layer 520 within the aperture 540. The intended placement of the trace layer 526 within the aperture 540 can be center aligned, wherein the center of the trace layer 526 is targeted to align with the center of the aperture 540. However, it may be known that a particular level of misregistration, in this case misalignment between the center of the trace and the center of the aperture 540, is to be expected based on the equipment and techniques used. As such, the widths of the elements can be based on the expected misregistration of the elements to ensure that trace layer 526 contacts the metal spring layer 520 through the aperture 540, even if some of metal spring layer 520 is not covered by the trace layer 526 through the aperture 540.
Even through the width 532 of the trace layer 526 is greater than or equal to the width 530 of the aperture 540 in
The width 532 of the trace layer 526 and the width 530 of the aperture 540 are each considerably smaller than the width 330 of the aperture 340 and the width 332 of the trace layer 326 of the embodiment of
Although the present invention has been described with reference to preferred embodiments, those skilled in the art will recognize that changes can be made in form and detail without departing from the spirit and scope of the invention.
This application claims the benefit of U.S. Provisional Application Ser. No. 61/614,304 filed on Mar. 22, 2012 and entitled Plated Ground Feature Under Covercoat for Disk Drive Head Suspension Flexures, which is incorporated herein by reference for all purposes.
Number | Name | Date | Kind |
---|---|---|---|
4168214 | Fletcher et al. | Sep 1979 | A |
4422906 | Kobayashi | Dec 1983 | A |
4659438 | Werner et al. | Apr 1987 | A |
5320272 | Melton et al. | Jun 1994 | A |
5521778 | Boutaghou et al. | May 1996 | A |
5608591 | Klaassen | Mar 1997 | A |
5651723 | Bjornard et al. | Jul 1997 | A |
5657186 | Kudo et al. | Aug 1997 | A |
5666717 | Matsumoto et al. | Sep 1997 | A |
5694270 | Katsuhide Sone et al. | Dec 1997 | A |
5737152 | Balakrishnan | Apr 1998 | A |
5754368 | Shiraishi et al. | May 1998 | A |
5773889 | Love et al. | Jun 1998 | A |
5796552 | Akin, Jr. et al. | Aug 1998 | A |
5812344 | Balakrishnan | Sep 1998 | A |
5818662 | Shum | Oct 1998 | A |
5857257 | Inaba | Jan 1999 | A |
5862010 | Simmons et al. | Jan 1999 | A |
5898544 | Krinke et al. | Apr 1999 | A |
5914834 | Gustafson | Jun 1999 | A |
5995328 | Balakrishnan | Nov 1999 | A |
5995329 | Shiraishi et al. | Nov 1999 | A |
6046887 | Uozumi et al. | Apr 2000 | A |
6156982 | Dawson | Dec 2000 | A |
6215622 | Ruiz et al. | Apr 2001 | B1 |
6229673 | Shinohara et al. | May 2001 | B1 |
6249404 | Doundakov et al. | Jun 2001 | B1 |
6278587 | Mei | Aug 2001 | B1 |
6307715 | Berding et al. | Oct 2001 | B1 |
6330132 | Honda | Dec 2001 | B1 |
6349017 | Schott | Feb 2002 | B1 |
6459549 | Tsuchiya et al. | Oct 2002 | B1 |
6480359 | Dunn et al. | Nov 2002 | B1 |
6490228 | Killam | Dec 2002 | B2 |
6539609 | Palmer et al. | Apr 2003 | B2 |
6600631 | Berding et al. | Jul 2003 | B1 |
6647621 | Roen et al. | Nov 2003 | B1 |
6661617 | Hipwell, Jr. et al. | Dec 2003 | B1 |
6704165 | Kube et al. | Mar 2004 | B2 |
6735052 | Dunn et al. | May 2004 | B2 |
6762913 | Even et al. | Jul 2004 | B1 |
6797888 | Ookawa et al. | Sep 2004 | B2 |
6831539 | Hipwell, Jr. et al. | Dec 2004 | B1 |
6833978 | Shum et al. | Dec 2004 | B2 |
6841737 | Komatsubara et al. | Jan 2005 | B2 |
6856075 | Houk et al. | Feb 2005 | B1 |
6882506 | Yamaoka et al. | Apr 2005 | B2 |
6891700 | Shiraishi et al. | May 2005 | B2 |
6900967 | Coon et al. | May 2005 | B1 |
6942817 | Yagi et al. | Sep 2005 | B2 |
6950288 | Yao et al. | Sep 2005 | B2 |
7064928 | Fu et al. | Jun 2006 | B2 |
7079357 | Kulangara et al. | Jul 2006 | B1 |
7099117 | Subrahmanyam et al. | Aug 2006 | B1 |
7129418 | Aonuma et al. | Oct 2006 | B2 |
7142395 | Swanson et al. | Nov 2006 | B2 |
7158348 | Erpelding et al. | Jan 2007 | B2 |
7161767 | Hernandez et al. | Jan 2007 | B2 |
7177119 | Bennin et al. | Feb 2007 | B1 |
7218481 | Bennin et al. | May 2007 | B1 |
7307817 | Mei | Dec 2007 | B1 |
7322241 | Kai | Jan 2008 | B2 |
7382582 | Cuevas | Jun 2008 | B1 |
7384531 | Peltoma et al. | Jun 2008 | B1 |
7385788 | Kubota et al. | Jun 2008 | B2 |
7388733 | Swanson et al. | Jun 2008 | B2 |
7391594 | Fu et al. | Jun 2008 | B2 |
7403357 | Williams | Jul 2008 | B1 |
7417830 | Kulangara | Aug 2008 | B1 |
7459835 | Mei et al. | Dec 2008 | B1 |
7509859 | Kai | Mar 2009 | B2 |
7625654 | Vyas et al. | Dec 2009 | B2 |
7629539 | Ishii et al. | Dec 2009 | B2 |
7649254 | Graydon et al. | Jan 2010 | B2 |
7697237 | Danielson | Apr 2010 | B1 |
7710687 | Carlson et al. | May 2010 | B1 |
7710688 | Hentges et al. | May 2010 | B1 |
7804663 | Hirano et al. | Sep 2010 | B2 |
7813084 | Hentges | Oct 2010 | B1 |
7826177 | Zhang et al. | Nov 2010 | B1 |
7832082 | Hentges et al. | Nov 2010 | B1 |
7872344 | Fjelstad et al. | Jan 2011 | B2 |
7875804 | Tronnes et al. | Jan 2011 | B1 |
7914926 | Kimura et al. | Mar 2011 | B2 |
7929252 | Hentges et al. | Apr 2011 | B1 |
8144430 | Hentges et al. | Mar 2012 | B2 |
8149542 | Ando | Apr 2012 | B2 |
8174797 | Iriuchijima | May 2012 | B2 |
8199441 | Nojima | Jun 2012 | B2 |
8228642 | Hahn et al. | Jul 2012 | B1 |
8248731 | Fuchino | Aug 2012 | B2 |
8248734 | Fuchino | Aug 2012 | B2 |
8248735 | Fujimoto et al. | Aug 2012 | B2 |
8248736 | Hanya et al. | Aug 2012 | B2 |
8296929 | Hentges et al. | Oct 2012 | B2 |
8339748 | Shum et al. | Dec 2012 | B2 |
8553364 | Schreiber et al. | Oct 2013 | B1 |
8634166 | Ohnuki et al. | Jan 2014 | B2 |
20020075606 | Nishida et al. | Jun 2002 | A1 |
20020118492 | Watanabe et al. | Aug 2002 | A1 |
20030089520 | Ooyabu et al. | May 2003 | A1 |
20030135985 | Yao et al. | Jul 2003 | A1 |
20040181932 | Yao et al. | Sep 2004 | A1 |
20040221447 | Ishii et al. | Nov 2004 | A1 |
20040264056 | Jang et al. | Dec 2004 | A1 |
20050117257 | Thaveeprungsriporn et al. | Jun 2005 | A1 |
20060274452 | Arya | Dec 2006 | A1 |
20070041123 | Swanson et al. | Feb 2007 | A1 |
20070227769 | Brodsky et al. | Oct 2007 | A1 |
20080247131 | Hitomi et al. | Oct 2008 | A1 |
20080273269 | Pro | Nov 2008 | A1 |
20090135523 | Nishiyama et al. | May 2009 | A1 |
20090176120 | Wang | Jul 2009 | A1 |
20090190263 | Miura et al. | Jul 2009 | A1 |
20090294740 | Kurtz et al. | Dec 2009 | A1 |
20100067151 | Okawara et al. | Mar 2010 | A1 |
20100073825 | Okawara | Mar 2010 | A1 |
20100097726 | Greminger et al. | Apr 2010 | A1 |
20100143743 | Yamasaki et al. | Jun 2010 | A1 |
20100177445 | Fuchino | Jul 2010 | A1 |
20100195252 | Kashima | Aug 2010 | A1 |
20100220414 | Klarqvist et al. | Sep 2010 | A1 |
20100246071 | Nojima et al. | Sep 2010 | A1 |
20100271735 | Schreiber | Oct 2010 | A1 |
20110013319 | Soga et al. | Jan 2011 | A1 |
20110228425 | Liu et al. | Sep 2011 | A1 |
20110242708 | Fuchino | Oct 2011 | A1 |
20110279929 | Kin | Nov 2011 | A1 |
20120002329 | Shum et al. | Jan 2012 | A1 |
20120113547 | Sugimoto | May 2012 | A1 |
20130248231 | Tobias | Sep 2013 | A1 |
Number | Date | Country |
---|---|---|
11-186441 | Jul 1999 | JP |
2000-106478 | Apr 2000 | JP |
2001057039 | Feb 2001 | JP |
2001307442 | Nov 2001 | JP |
2002050140 | Feb 2002 | JP |
2004300489 | Oct 2004 | JP |
2007-115864 | May 2007 | JP |
2007115864 | Oct 2007 | JP |
2010-126768 | Jun 2010 | JP |
Entry |
---|
Cheng, Yang-Tse, “Vapor deposited thin gold coatings for high temperature electrical contacts”, Electrical Contacts, 1996, Joint with the 18th International Conference on Electrical Contacts, Proceedings of the Forty-Second IEEE Holm Conference, Sep. 16-20, 1996 (abstract only). |
Fu, Yao, “Design of a Hybrid Magnetic and Piezoelectric Polymer Microactuator”, a thesis submitted to Industrial Research Institute Swinburne (IRIS), Swinburne University of Technology, Hawthorn, Victoria , Australia, Dec. 2005. |
Harris, N.R. et al., “A Multilayer Thick-film PZT Actuator for MEMs Applications”, Sensors and Actuators A: Physical, vol. 132, No. 1, Nov. 8, 2006, pp. 311-316. |
Jing, Yang, “Fabrication of piezoelectric ceramic micro-actuator and its reliability for hard disk drives”, Ultrasonics, Ferroelectrics and Frequency Control, IEEE, vol. 51, No. 11, Nov. 2004, pp. 1470-1476 (abstract only). |
Kon, Stanley et al., “Piezoresistive and Piezoelectric MEMS Strain Sensors for Vibration Detection”, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007, Proc. of SPIE vol. 6529. |
Li, Longqiu et al., “An experimental study of the dimple-gimbal interface in a hard disk drive”, Microsyst Technol (2011) 17:863-868. |
Pichonat, Tristan et al., “Recent developments in MEMS-based miniature fuel cells”, Microsyst Technol (2007) 13:1671-1678. |
Raeymaekers, B. et al., “Investigation of fretting wear at the dimple/gimbal interface in a hard disk drive suspension”, Wear, vol. 268, Issues 11-12, May 12, 2010, pp. 1347-1353. |
Raeymaekers, Bart et al., “Fretting Wear Between a Hollow Sphere and Flat Surface”, Proceedings of the STLE/ASME International Joint Tribology Conference, Oct. 19-21, 2009, Memphis, TN USA, 4 pages. |
Rajagopal, Indira et al., “Gold Plating of Critical Components for Space Applications: Challenges and Solutions”, Gold Bull., 1992, 25(2), pp. 55-66. |
Yoon, Wonseok et al., “Evaluation of coated metallic bipolar plates for polymer electrolyte membrane fuel cells”, The Journal of Power Sources, vol. 179, No. 1, Apr. 15, 2008, pp. 265-273. |
International Search Report and Written Opinion issued in PCT/US2013/033341, mailed Jun. 14, 2013, 9 pages. |
Number | Date | Country | |
---|---|---|---|
20130248231 A1 | Sep 2013 | US |
Number | Date | Country | |
---|---|---|---|
61614304 | Mar 2012 | US |