Ground feature for disk drive head suspension flexures

Information

  • Patent Grant
  • 9093117
  • Patent Number
    9,093,117
  • Date Filed
    Thursday, March 21, 2013
    11 years ago
  • Date Issued
    Tuesday, July 28, 2015
    9 years ago
Abstract
Various embodiments concern an electrical interconnect of a head suspension. The electrical interconnect can comprise a spring metal layer and a dielectric layer having an aperture with a portion of the spring metal layer being exposed through the dielectric layer within the aperture. The electrical interconnect can further comprise a trace layer disposed on the dielectric layer and extending into the aperture to connect with the spring metal layer. Part of the spring metal layer within the aperture may not be covered by the trace layer. The exposure of the spring metal layer through the aperture can be due to the width of the trace layer being less than the width of the aperture and/or the exposure can be due to expected misregistration. A polymer covercoat can be applied over the aperture to protect the trace layer from corrosion.
Description
FIELD OF THE INVENTION

The invention relates generally to integrated lead or wireless flexures of the type incorporated into disk drive head suspensions.


BACKGROUND

Integrated lead or wireless suspensions and flexures (i.e., suspension components) are used to support read/write transducers in disk drives or other dynamic data storage systems. Flexures of type used in connection with disk drive head suspensions are generally known and commercially available. These devices typically include leads or traces formed in a copper or other conductive material layer over a stainless steel or other spring metal layer. A layer of dielectric insulating material such as polyimide separates the traces from the spring metal layer. The flexures are mounted to other components such as a stainless steel load beam in one embodiment of the invention. Subtractive and/or additive processes such as photolithography, wet and dry etching and deposition processes can be used to fabricate the flexures.


Plated ground features are often incorporated into disk drive head suspension flexures. These ground features are, for example, used to electrically interconnect the traces though apertures in the dielectric insulating layer to the underlying stainless steel layer. For example, they can be used to electrically interconnect so-called interleaved traces through the stainless steel layer. Ground features of these types and associated methods of manufacture are disclosed, for example, in the Tronnes U.S. Pat. No. 7,875,804 and the Peltoma U.S. Pat. No. 7,384,531.


The copper or other conductive material of the traces to which the ground features are connected are often plated with relatively non-corrosive materials such as NiAu (nickel-gold). NiAu does not, however, adhere well to stainless steel. A plated ground feature must therefore be large enough (e.g., in diameter) to cover the aperture through the insulating layer and the portion of the stainless steel layer exposed by that aperture. Furthermore, because of the need to accommodate layer-to-layer misregistration due to limitations inherent in the photolithography and deposition processes used to form ground features, the ground features are typically made even larger than the insulating layer apertures.


There remains, however, a continuing need for smaller ground features which can reduce the space taken up by the ground features to allow for other features to also be used and/or miniaturization of the assemblies.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is an isometric illustration of a first side of a portion of a first flexure on which electrical interconnects in accordance with the present invention can be fabricated.



FIG. 2 is an isometric illustration of a second side of the portion of the flexure shown in FIG. 1.



FIG. 3A is cross sectional view of a prior art interconnect of a head suspension.



FIG. 3B is an image taken by an electron microscope of a prior art interconnect.



FIG. 4A is an overhead view of an interconnect of a head suspension in accordance with various embodiments of the present invention.



FIG. 4B is cross sectional view of the interconnect of FIG. 4A.



FIG. 4C is an image taken by an electron microscope of an interconnect of a head suspension in accordance with various embodiments of the present invention.



FIG. 5A is an overhead view of an interconnect of a head suspension in accordance with various embodiments of the present invention.



FIG. 5B is cross sectional view of the interconnect of FIG. 5A.



FIG. 5C is an image taken by an electron microscope of an interconnect of a head suspension in accordance with another embodiment of the present invention.





SUMMARY

Aspects of the present disclosure concern a reduced-size (e.g. diameter) interconnect. The ground feature and the region surrounding the ground feature can be covered by polymer covercoat material. Because the plated ground feature and surrounding region are covered by covercoat, design specifications, and in particular minimum and other size specifications, the interconnect can accommodate layer-to-layer misregistrations that may result in exposed stainless steel regions. Some embodiments of the disclosure include plated ground features with diameters smaller than the apertures in the insulating layer.


Some embodiments of the disclosure include a stainless steel or other spring metal layer and a plurality of copper or other conducive material traces. A layer of polyimide or other dielectric insulating material separates the traces from the stainless steel layer at locations other than those of the interconnects. An aperture extends through the dielectric layer at the interconnect. The interconnect can include a portion of the trace extending over edge portions of the insulating material aperture and into contact with the spring metal layer. An insulating or covercoat layer of dielectric insulating material such as polyimide can cover the area around the interconnect, including any exposed portion of the spring metal layer in the aperture that is not covered by the trace. The trace has a width at the interconnect that can be less than or equal to the diameter of the dielectric layer aperture in some embodiments. In some other embodiments, the width of the trace is equal to or larger than the diameter of the aperture at the interconnect. Irrespective of the relative widths and/or diameters of the traces and aperture, the process and other manufacturing specifications do not require that the width of the trace at the interconnect be large enough to cover the entire aperture given expected ranges of layer-to-layer misregistrations due to expected process variations. In other words, the width of the trace can be so narrow with respect to the diameter of the aperture that it is anticipated that portions of the spring metal layer may (but need not) be exposed at the interconnect location. The size of the covercoat layer over the interconnect is sufficiently large to cover the aperture in the insulating layer, given anticipated misregistrations due to process variations, and will thereby cover any exposed portions of the spring metal layer at the interconnect. Portions of the trace at the location of the interconnect may not be plated by corrosion resistant materials such as Au or Ni & Au. Other portions of the traces can be plated with corrosion resistant materials such as Au or Ni & Au. The trace layer portion of the interconnect can be formed at the same time (i.e., during the same process steps) as the trace being interconnected to the stainless steel layer. In other embodiments the plated conductor layer portion of the interconnect can be formed separately from the trace.


Portions of the trace at the location of the interconnect (e.g., portions covered by the covercoat) may not plated by corrosion resistant materials such as Au or Ni & Au. In some embodiments, portions of the trace can have coatings, such as electroless Ni, that can be deposited on the trace without being deposited on the spring metal layer. Other portions of the traces can be plated with corrosion resistant materials such as Au or Ni & Au. Besides corrosion resistance, the plating layer can facilitate an electrical connection (solder, ultrasonic bonding, conductive resin, etc.) to other hard disk drive components and allow for low resistance electrical probing.


Another embodiment includes an enlarged-diameter plated interconnect portion having a diameter larger than the adjacent trace portion at the interconnect. The enlarged-diameter plated region, which can be the same material as the trace or other conductive material such as nickel, can have a diameter that is smaller than, equal to, or larger than the diameter of the aperture in the insulating layer. Like the embodiment described above, the diameter of the plated region can be so narrow with respect to the diameter of the aperture that it is anticipated that portions of the spring metal layer may (but need not) be exposed at the interconnect location. The size of the covercoat layer over the interconnect is sufficiently large to cover the aperture in the insulating layer, given anticipated misregistrations due to process variations, and will thereby cover any exposed portions of the spring metal layer at the interconnect.


Other embodiments of the disclosure include at least one trace adjacent to the interconnect. The trace is separated from the interconnect by a minimum distance that is sufficient to accommodate anticipated misregistrations due to process variations and to prevent the trace from extending into the aperture of the interconnect. The covercoat layer over the interconnect can extend over portions of the adjacent trace. At interconnect locations within the region of the covercoat, specifications for the sizes of the trace and aperture do not need margins to account for anticipated layer-to-layer misregistration. At locations spaced from the covercoat layer-covered portions of the interconnect, conventional or otherwise known margins can be used to account for anticipated misregistration.


In some embodiments of the invention the width of the interconnect is about 15 μm and the diameter of the aperture is about 20 μm. An adjacent trace can be about 25 μm from the edge of the aperture. Other embodiments of the invention include larger and smaller apertures, traces and trace spacings.


DETAILED DESCRIPTION OF THE INVENTION


FIGS. 1 and 2 are illustrations of the opposite sides of a portion of a wireless or integrated lead flexure 10 (i.e., a suspension component) on which interconnects in accordance with the present invention can be fabricated. The “lead” or “copper” side of the flexure is shown in FIG. 1, and the “stainless steel” side is shown in FIG. 2. The flexure 10 can be formed from a laminated sheet of material including a spring metal layer 12 and a conductor layer 14 separated by a dielectric layer 16. The spring metal layer, which is typically stainless steel (a conductive material), is formed into structural portions such as a tongue 18 and side spring arms 20. The conductor layer 14, which can be copper or a copper alloy, is formed into a number of integrated traces 22 (e.g., as leads). Traces 22 terminate at the end of the tongue 18 at bond pads 24. Portions of the dielectric layer 16 are also removed, but generally remain at locations where the traces 22 overlay the spring metal layer 12. Flexures such as 10 are generally known and commercially available from a number of manufacturers including Hutchinson Technology Incorporated of Hutchinson, Minn. The flexure 10 can be manufactured from a laminated sheet of material using conventional or otherwise known photolithography and etching processes. However, the interconnects in accordance with the invention can be incorporated into other types of suspensions and suspension components, including those manufactured by other processes.


At various locations, electrical connections can be made between the traces 22 and the spring metal layer 12. For example, the spring metal layer 12 can provide an electrical grounding connection for one or more of the traces 22 at one or more interconnects. Such interconnects can establish electrical connections through the dielectric layer 16, as further discussed herein.



FIGS. 3A-B show some aspects of prior art interconnects. Specifically, FIG. 3A shows a cross sectional view of an interconnect 300. As shown in FIG. 3A, a dielectric layer 322 extends over a spring metal layer 320. The dielectric layer 322 can electrically separate an electrical trace of flexure supported by the spring metal layer 320. However, an aperture 340 in the dielectric layer 322 exposes a portion of the spring metal layer 320 to allow for an electrical connection with the spring metal layer 320. Trace layer 326 is disposed within the aperture 340 to make contact with the spring metal layer 320 and establish an electrical connection between a circuit of the flexure and the spring metal layer 320. A covercoat layer 324 can be provided over the trace layer 326 and the dielectric layer 322, as shown.


In prior art embodiments, the entire surface of the spring metal layer 320 within the aperture 340 is covered by the trace layer 326. Specifically, in the embodiment of FIG. 3A, the width 330 of the aperture 340 is 0.070 millimeters while the width 332 of the trace layer 326 is 0.120 millimeters, such that the trace layer 326 fully spans over the aperture 340 and continues laterally over the dielectric layer 322.


The relatively large size of the trace layer 326 is further accounted for by a design requirement to fully cover the aperture 340 with the trace layer 326 despite misregistration. The automated technique for forming the aperture 340 and the trace layer 326 may be expected to laterally deviate from targeted locations within a margin of error. Misregistration, as used herein, refers to the difference between the actual placement of an element from the targeted placement. The trace layer 326 has a width 332 that is significantly greater than the width 330 of the aperture 340 to ensure that even if the trace layer 326 is deposited laterally offset from targeted center alignment with the aperture 340 by an amount within an expected margin of error, the aperture 340 will still be entirely covered by the trace layer 326 such that the spring metal layer 320 is not exposed within the aperture 340. The covercoat layer 324 can have a width 334 larger than the width 332 of the trace layer 326 to provide further margin to accommodate misregistrations of the trace layer 326 and/or the covercoat layer 324. Likewise, the dielectric layer 322 can have a width 336 larger than the width 332 of the trace layer 326 to provide further margin to accommodate lateral misregistrations of the trace layer 326. The expanded width 332 of the trace layer 326 to ensure complete coverage over the width 330 of the aperture 340 increases the overall footprint of the interconnect 300. FIG. 3B illustrates an overhead view taken by an electron microscope of a trace extending over, and completely covering, an aperture in a dielectric layer, consistent with the illustrated embodiment of FIG. 3A. The covercoat layer 324 is not shown in FIG. 3B.



FIG. 4A illustrates an overhead view of an interconnect 400 while FIG. 4B illustrates a corresponding cross sectional view of the interconnect 400. The interconnect 400 makes a mechanical and an electrical connection between the trace layer 426 and the metal spring layer 420. The metal spring layer 420 can be configured as any metal spring layer referenced herein. For example, the metal spring layer 420 can be constructed of stainless steel, the metal spring layer 420 can provide a substantial majority of the mechanical support for a head suspension, the metal spring layer 420 can serve as a mounting support for flexure, and the metal spring layer 420 can serve as an electrical ground. The metal spring layer 420 can comprise a first side and a second side. The first side can correspond to a top side and the second side can correspond to a bottom side of the metal spring layer 420. The trace layer 426 can be formed from a conductive metal such as copper. The trace layer 426 can be part of an electrical circuit for powering one or more read/write transducers or other energy supplying or consuming components of a memory storage drive.


A covercoat layer 424 is shown in FIG. 4B but is not shown in FIG. 4A in order to show other components which would otherwise be partially or fully obscured by the covercoat layer 424. A dielectric layer 422 is provided over the metal spring layer 420 and, except for the aperture 440, is between, and electrically separates, the metal spring layer 420 and the trace layer 426. The dielectric layer 422 has a first side and a second side. The first side can correspond to a top side and the second side can correspond to a bottom side of the dielectric layer 422. The second side of the dielectric layer 422 is disposed on the first side (i.e. the top side) of the metal spring layer 420. The aperture 440 is a void in the dielectric layer 422 that extends from the first side to the second side of the dielectric layer 422. The aperture 440 allows the trace layer 426 to contact the metal spring layer 420 through the dielectric layer 422 to provide an electrical ground for the trace layer 426 to the metal spring layer 420. The aperture 440 is shown as a circle in FIG. 4A, however the aperture 440 can alternatively be a square, rectangle, oval, or other shape.


As shown in FIGS. 4A-B, a portion of the first side of the spring metal layer 420 is exposed through the aperture 440 (disregarding the covercoat layer 424). The portion of the metal spring layer 420 is exposed through the aperture 440 because the aperture 440 is not entirely covered by the trace layer 426. As shown, the width 432 of the trace layer 426 is less than the width 430 of the aperture 440, such that the portion of the metal spring layer 420 exposed through the dielectric layer 422. In some embodiments, the width 432 of the trace layer 426 is equal to the width 430 of the aperture 440. Even in embodiments where the width 432 of the trace layer 426 is the equal to the width 430 of the aperture 440, expected misregistration in the placement of the trace layer 426 relative to the aperture 440 can allow a portion of the metal spring layer 420 to not be covered by the trace layer 426 and expose a portion of the spring metal layer 420 through the aperture 440.


As discussed herein, the trace layer 426 is susceptible to corrosion. A first option to resist corrosion of the trace layer 426 is to plate the trace layer 426. The trace layer 426 can be plated with Au, Ni & Au, and/or other metal. A second option is to coat the trace layer 426 with a polymer, such as polyimide. The covercoat layer 424 can be a polymer coating. It will be understood that only a small portion of the trace layer 426 is shown in FIGS. 4A-B and that the trace layer 426 extends along the first side (i.e. top surface) of the dielectric layer 422 to other portions of a head suspension. The covercoat layer 424 can be placed over a majority of the trace layer 426 (including those portions not shown in FIG. 4A) while the uncoated portions can be plated with Au or Ni & Au to protect the entirely of the trace layer 426 from corrosion. The use of plating instead of the covercoat layer 424 can be useful in areas where a terminal connection is to be made to the trace layer 426. However, such Au or Ni & Au plating may not be desired along the interconnect 400 because gold does not typically bond well with the stainless steel of the metal spring layer 420. Therefore, at least the portion of the trace layer 426 within the aperture 440 may not be plated with a corrosion resisting metal. As such, the covercoat layer 424 extends over the trace layer 426 along the aperture 440, as shown in FIG. 4B. In some embodiments, the corrosion resisting plating can be generally applied to the trace layer 426 but the plating can be selectively removed from the section of the trace layer 426 that extends, or is planned to extend, along the aperture 440. In some alternative embodiments, the corrosion resisting plating can be generally applied to the trace layer 426 but may not be applied to the section of the trace layer 426 that extends, or is planned to extend, along the aperture 440. In either case, a section of the trace layer 426 within the aperture 440 can be unplated such that the copper (or other base substrate metal) of the trace layer 426 is exposed within aperture 440. The unplated and exposed copper (or other base substrate metal) of the trace layer 426 can be protected from corrosion by application of the covercoat layer 424 over the aperture 440 as shown. The covercoat layer 424 can extend laterally beyond the aperture 440 to account for expected misregistration of the elements, as discussed herein.


The width 432 of the trace layer 426 can be about 5 μm or greater. In some embodiments, the width 432 of the trace layer 426 can be about 15 μm. In some embodiments, the width 432 of the trace layer 426 can be about 5-15 μm. Other dimensions are also contemplated.


The width 430 of the aperture 440 can be about 35 μm, or greater in some other embodiments. In some embodiments, the aperture 440 can be based on the thickness of the dielectric layer 422 (i.e. the distance from the first side of the aperture 440 to the second side of the aperture 440). For example, the width 430 of the aperture 440 can be about half the thickness of the dielectric layer 422 or greater. In some embodiments, the width 430 of the aperture 440 is about 35 μm or greater. Different dimensions of the elements of the interconnect 400 can be used based on expected misregistration of the elements to ensure that the trace layer 426 is still placed such that at least a portion of the trace layer 426 contacts the metal spring layer 420 within the aperture 440. The intended placement of the trace layer 426 within the aperture 440 can be center aligned, wherein the center of the trace layer 426 is targeted to align with the center of the aperture 440. However, it may be known that a particular level of misregistration, in this case misalignment between the center of the trace layer 426 and the center of the aperture 440, is to be expected based on the equipment and techniques used. As such, the widths of the elements can be based on the expected misregistration of the elements to ensure that trace layer 426 contacts the metal spring layer 420 through the aperture 440, even if some of metal spring layer 420 is not covered by the trace layer 426 through the aperture 440. In some cases, the width 430 of the aperture 440 can set as a function of the width 432 of the trace layer 426 and the registration margin. For example, the width 430 of the aperture 440 can be based on the following equation:

VW≧2*(RM+FM)−TW


wherein VW=aperture 440 width 430; RM=registration margin; FM=functional PGF conductor minimum; and TW=trace layer 426 width 432. RM refers to the minimum design distance required to account for process variation resulting from aligning two different layers. A RM value can determined by defining an acceptable process capability based on known tolerances, which is typically 3 to 6 times one standard deviation of measured process variation. In some examples, the RM can be 20-25 μm. RM+FM, or other misregistration metric, can alternatively be a total maximum misregistration that is additive between two or more placed elements. FM refers to the minimum contact area between the conductor layer and spring metal layer that is necessary to ensure a reliable electrical connection. The FM can be variable based on the type of materials used and can be determined through reliability testing. In some cases, FM may also be determined based on the maximum electrical resistance allowed by the design to meet performance requirements.


Furthermore, the relatively small width 432 of the trace layer 426 and the relatively small width 430 of the aperture 440 allows for closer placement of various other components. FIG. 4A-B show an adjacent trace 450 that extends parallel with the trace layer 426. The adjacent trace 450 can be placed with a separation distance 438 between the trace layer 426 and the adjacent trace 450. The separation distance 438 can prevent the adjacent trace 450 from being placed within the aperture 440, which would unintentionally ground the adjacent trace 450. The separation distance 438 can be measured from the closest edges of the respective conductors. The separation distance 438 can be about 15 μm. In some embodiments, the separation distance 438 is about 15 μm or greater. In some cases, the separation distance 438 can set as a function of the width 432 of the trace layer 426, the width 430 of the aperture 440, and the registration margin. For example, the separation distance 438 (AT) can be based on the following equation:

AT≧(VW/2)−(TW/2)+RM


TW refers to the trace layer 426 width 432. In the cases, the RM function used in the above equation can specifically refer to the registration margin of the dielectric layer 422. Another measure of the grounding configuration is the distance from the centerline of the trace layer 426 to the edge of the covercoat layer 424. In some embodiments, the distance from the centerline of the trace layer 426 to the edge of the covercoat layer 424 can be set as a function of the trace layer 426 width 432 and the registration margin. For example, the distance from the centerline of the trace layer 426 to the edge of the covercoat layer 424 can be greater than or equal to half of the trace layer 426 width 432 plus the registration margin. In some other embodiments, the distance from the centerline of the trace layer 426 to the edge of the covercoat layer 424 (DE) can be greater than or equal to half of the aperture 440 width 430 plus the registration margin. The distance from the centerline of the trace layer 426 to the edge of the dielectric layer 422 can be greater than or equal to DE plus an edge registration margin. The edge registration margin can be about 15 μm, in some embodiments.


Conventional or otherwise known additive trace suspension assembly (TSA+) photolithography, deposition and wet and dry etching processes can be used to fabricate the ground features of the invention. For example, the void of the aperture 440 can be formed by removing material (e.g., via etching) from the dielectric layer 422. The aperture 440 can be etched through the dielectric layer 422 to expose the metal spring layer 420 at the location of the interconnect 400. Trace layer 426 can be formed separately and then placed on the dielectric layer 422 and/or can be formed by building up (e.g., by electroplating). For example, the trace layer 426 can be built up from a seed layer deposited on the stainless steel surface of the metal spring layer 420 within the aperture 440. The seed layer can comprise CrCu.



FIG. 4C illustrates an electron microscope image of a conductor extending into an aperture to connect with a stainless steel layer, the aperture formed within a dielectric layer overtop the stainless steel layer. As shown, the width of the conductor is less than the width of the aperture. Portions of the stainless steel spring layer are exposed through the aperture on opposing lateral sides of the trace layer.



FIG. 5A illustrates an overhead view of an interconnect 500. The interconnect 500 makes a mechanical and an electrical connection between the trace layer 526 and the metal spring layer 520. The metal spring layer 520 can be configured as any metal spring layer referenced herein. The trace layer 526 can be configured as any conductor referenced herein (e.g., a copper trace). The trace layer 526 can be part of an electrical circuit for powering one or more read/write transducers or other components of a memory storage drive.


The covercoat layer 524 is shown in FIG. 5B but is not shown in FIG. 5A in order to show other components in FIG. 5A which would otherwise be partially or fully under the covercoat layer 524. The metal spring layer 520 can comprise a first side and a second side. The first side can correspond to a top side and the second side can correspond to a bottom side of the metal spring layer 520. A dielectric layer 522 is provided over the metal spring layer 520 and, except for the aperture 540, is between, and electrically separates, the metal spring layer 520 and the trace layer 526. The dielectric layer 522 has a first side and a second side. The first side can correspond to a top side and the second side can correspond to a bottom side of the dielectric layer 522. The second side of the dielectric layer 522 is disposed on the first side (i.e. the top side) of the metal spring layer 520. The aperture 540 is a void in the dielectric layer 522 that extends from the first side to the second side of the dielectric layer 522. The aperture 540 in the dielectric layer 522 allows the trace layer 526 to contact the metal spring layer 520 to provide an electrical ground for the trace layer 526 to the metal spring layer 520. The aperture 540 is shown as a circle in FIG. 5A, however the aperture 540 can alternatively be a square, rectangle, oval, or other shape.


While the width 532 of the trace layer 526 is greater than the width 530 of the aperture 540 (unlike in the embodiment of FIGS. 4A-B), the width 530 of the aperture 540 and the width 532 of the trace layer 526 are still generally smaller than conventional interconnects. As with the embodiment of FIGS. 4A-B, the trace layer 526 can be plated with a corrosion resistant plating (e.g., Au or Ni & Au) except for a portion of the trace layer 526 that is proximate and/or within the aperture 540. With the plating absent, the trace layer 526 can make a reliable connection with the metal spring layer 520 through the aperture 540. Moreover, the width 532 of the trace layer 526 can allow some degree of misregistration.


The width 532 of the trace layer 526 can be about 40 μm while the width 530 of the aperture 540 can be about 20 μm, however other dimensions are possible. Different dimensions of the elements of the interconnect 500 can be used based on one or more relationships to the expected misregistration of the elements to ensure that the trace layer 526 is still placed such that at least a portion of the trace layer 526 contacts the metal spring layer 520 within the aperture 540. The intended placement of the trace layer 526 within the aperture 540 can be center aligned, wherein the center of the trace layer 526 is targeted to align with the center of the aperture 540. However, it may be known that a particular level of misregistration, in this case misalignment between the center of the trace and the center of the aperture 540, is to be expected based on the equipment and techniques used. As such, the widths of the elements can be based on the expected misregistration of the elements to ensure that trace layer 526 contacts the metal spring layer 520 through the aperture 540, even if some of metal spring layer 520 is not covered by the trace layer 526 through the aperture 540.


Even through the width 532 of the trace layer 526 is greater than or equal to the width 530 of the aperture 540 in FIG. 5B, the dimensional equations presented in connection with FIG. 4B can be applicable to the dimensions of the embodiment of FIG. 5B. For example, the separation distance 538 can be calculated similarly to the separation distance 438.


The width 532 of the trace layer 526 and the width 530 of the aperture 540 are each considerably smaller than the width 330 of the aperture 340 and the width 332 of the trace layer 326 of the embodiment of FIGS. 2A-B. The relatively small width 532 of the trace layer 526 and the relatively small width 530 of the aperture 540 can allow other components to be smaller to accommodate another parts or closer proximity. For example, the separation distance 538 between the edge of the adjacent conductor 550 and the center of the trace layer 526 and/or aperture 540 can be about 35 μm.



FIG. 5C illustrates an electron microscope image of a conductor extending into an aperture to connect with a stainless steel layer, the aperture formed within a dielectric layer overtop the stainless steel layer. As shown, the width of the conductor is greater than the width of the aperture. A dimple is shown in the conductor where the conductor extends into the aperture in the dielectric layer to make a connection with the stainless steel layer.


Although the present invention has been described with reference to preferred embodiments, those skilled in the art will recognize that changes can be made in form and detail without departing from the spirit and scope of the invention.

Claims
  • 1. An electrical interconnect of a head suspension comprising: a spring metal layer, the spring metal layer electrically conductive, the spring metal layer having a first side and a second side opposite the first side;a dielectric layer having a first side and a second side opposite the first side, the second side of the dielectric layer disposed on the first side of the spring metal layer, the dielectric layer having an aperture between the first side and the second side of the dielectric layer, a portion of the first side of the spring metal layer exposed through the dielectric layer within the aperture; anda trace layer having a first section and a second section, the trace layer formed from an electrically conductive metal, the first section of the trace layer disposed on the first side of the dielectric layer, the second section of the trace layer extending into the aperture to mechanically and electrically connect with the portion of the first side of the spring metal layer, wherein part of the portion of the first side of the spring metal layer is not covered by the trace layer;corrosion inhibiting type metal plated on the first section of the trace layer, wherein the second section of the trace layer is not plated with the corrosion inhibiting type of metal; anda covercoat layer extending over the trace at the location of the aperture and covering the unplated second section of the trace layer, the covercoat comprising a polymer layer that inhibits corrosion of the trace layer.
  • 2. The electrical interconnect of claim 1, wherein the electrical interconnect electrically grounds an electrical circuit of the trace layer to the spring metal layer.
  • 3. The electrical interconnect of claim 1, wherein the width of the trace layer is less than the width of the aperture.
  • 4. The electrical interconnect of claim 1, wherein the width of the trace layer is about 5-15 gm and the width of the aperture is about half the thickness of the dielectric layer or greater.
  • 5. The electrical interconnect of claim 1, wherein the width of the trace layer is greater than the width of the aperture.
  • 6. The electrical interconnect of claim 1, wherein the width of the trace layer is the same along the first section and the second section of the trace layer, and wherein the first section of the trace layer extends along the first side of the dielectric layer to electrically connect with an electrical consuming component supported on the metal spring layer.
  • 7. The electrical interconnect of claim 1, wherein the aperture has a circular, square, or rectangular shape.
  • 8. The electrical interconnect of claim 1, wherein the part of the portion of the first side of the spring metal layer that is not covered by the trace layer comprises a first part and a second part, and wherein the first part is located on the opposite side of the trace layer with respect to the second part.
  • 9. The electrical interconnect of claim 1, further comprising a seed layer of plating disposed on the portion of the first side of the spring metal layer, the seed layer improving bonding between the trace layer and the spring metal layer.
  • 10. A method for forming an electrical interconnect on a head suspension of the type having a spring metal layer, a dielectric layer, and a trace layer having a first section and a second section that are formed from an electrically conductive metal, the method comprising: disposing the dielectric layer along the spring metal layer, the dielectric layer having a first side and a second side, the dielectric layer disposed such that the second side of the dielectric layer is on the first side of the spring metal layer;forming an aperture between the first side and the second side of the dielectric layer, a portion of the first side of the spring metal layer exposed through the dielectric layer within the aperture; anddisposing the trace layer over the first side of the dielectric layer such that the first section of the trace layer extends along the first side of the dielectric layer and the second section of the trace layer extends into the aperture to mechanically and electrically connect with the portion of the first side of the spring metal layer, wherein part of the portion of the first side of the spring metal layer is not covered by the trace layer;plating the first section of the trace layer with a corrosion inhibiting type of metal, and wherein the second section of the trace layer in the aperture is not plated with the corrosion inhibiting type of metal; andapplying a covercoat layer over the second section of the trace layer and covering the unplated second section of the trace layer, the covercoat layer comprising a polymer layer that inhibits corrosion of the trace layer.
  • 11. The method of claim 10, wherein the electrical interconnect electrically grounds an electrical circuit of the trace layer to the spring metal layer.
  • 12. The method of claim 10, wherein the width of the trace layer is less than the width of the aperture.
  • 13. The method of claim 10, wherein the width of the trace layer is equal to or greater than the width of the aperture and the portion of the first side of the spring metal layer is exposed due to misregistration.
  • 14. The method of claim 10, wherein the width of the trace layer is the same along the first section and the second section of the trace layer.
  • 15. The method of claim 10, wherein the aperture is formed by etching and the trace layer is disposed by building up the trace layer through electroplating.
  • 16. A method for forming an electrical interconnect on a head suspension of the type having a spring metal layer, a dielectric layer, and a trace layer having a first section and a second section that are formed from an electrically conductive metal, the method comprising: disposing the dielectric layer along the spring metal layer, the dielectric layer having a first side and a second side, the dielectric layer disposed such that the second side of the dielectric layer is on the first side of the spring metal layer;forming an aperture between the first side and the second side of the dielectric layer, a portion of the first side of the spring metal layer exposed through the dielectric layer within the aperture, the aperture formed to have a first width; anddisposing the trace layer over the first side of the dielectric layer such that the first section of the trace layer extends along the first side of the dielectric layer and the second section of the trace layer extends into the aperture to mechanically and electrically connect with the portion of the first side of the spring metal layer, the first section and the second section having a second width;plating the first section of the trace layer with a corrosion inhibiting type of metal, and wherein the second section of the trace layer in the aperture is not plated with the corrosion inhibiting type of metal; andapplying a covercoat layer over the second section of the trace layer and covering the unplated second section of the trace layer, the covercoat layer comprising a polymer layer that inhibits corrosion of the trace layer;wherein the trace layer is targeted to be disposed to be centrally aligned with the aperture; and
CROSS-REFERENCE TO RELATED APPLICATION

This application claims the benefit of U.S. Provisional Application Ser. No. 61/614,304 filed on Mar. 22, 2012 and entitled Plated Ground Feature Under Covercoat for Disk Drive Head Suspension Flexures, which is incorporated herein by reference for all purposes.

US Referenced Citations (131)
Number Name Date Kind
4168214 Fletcher et al. Sep 1979 A
4422906 Kobayashi Dec 1983 A
4659438 Werner et al. Apr 1987 A
5320272 Melton et al. Jun 1994 A
5521778 Boutaghou et al. May 1996 A
5608591 Klaassen Mar 1997 A
5651723 Bjornard et al. Jul 1997 A
5657186 Kudo et al. Aug 1997 A
5666717 Matsumoto et al. Sep 1997 A
5694270 Katsuhide Sone et al. Dec 1997 A
5737152 Balakrishnan Apr 1998 A
5754368 Shiraishi et al. May 1998 A
5773889 Love et al. Jun 1998 A
5796552 Akin, Jr. et al. Aug 1998 A
5812344 Balakrishnan Sep 1998 A
5818662 Shum Oct 1998 A
5857257 Inaba Jan 1999 A
5862010 Simmons et al. Jan 1999 A
5898544 Krinke et al. Apr 1999 A
5914834 Gustafson Jun 1999 A
5995328 Balakrishnan Nov 1999 A
5995329 Shiraishi et al. Nov 1999 A
6046887 Uozumi et al. Apr 2000 A
6156982 Dawson Dec 2000 A
6215622 Ruiz et al. Apr 2001 B1
6229673 Shinohara et al. May 2001 B1
6249404 Doundakov et al. Jun 2001 B1
6278587 Mei Aug 2001 B1
6307715 Berding et al. Oct 2001 B1
6330132 Honda Dec 2001 B1
6349017 Schott Feb 2002 B1
6459549 Tsuchiya et al. Oct 2002 B1
6480359 Dunn et al. Nov 2002 B1
6490228 Killam Dec 2002 B2
6539609 Palmer et al. Apr 2003 B2
6600631 Berding et al. Jul 2003 B1
6647621 Roen et al. Nov 2003 B1
6661617 Hipwell, Jr. et al. Dec 2003 B1
6704165 Kube et al. Mar 2004 B2
6735052 Dunn et al. May 2004 B2
6762913 Even et al. Jul 2004 B1
6797888 Ookawa et al. Sep 2004 B2
6831539 Hipwell, Jr. et al. Dec 2004 B1
6833978 Shum et al. Dec 2004 B2
6841737 Komatsubara et al. Jan 2005 B2
6856075 Houk et al. Feb 2005 B1
6882506 Yamaoka et al. Apr 2005 B2
6891700 Shiraishi et al. May 2005 B2
6900967 Coon et al. May 2005 B1
6942817 Yagi et al. Sep 2005 B2
6950288 Yao et al. Sep 2005 B2
7064928 Fu et al. Jun 2006 B2
7079357 Kulangara et al. Jul 2006 B1
7099117 Subrahmanyam et al. Aug 2006 B1
7129418 Aonuma et al. Oct 2006 B2
7142395 Swanson et al. Nov 2006 B2
7158348 Erpelding et al. Jan 2007 B2
7161767 Hernandez et al. Jan 2007 B2
7177119 Bennin et al. Feb 2007 B1
7218481 Bennin et al. May 2007 B1
7307817 Mei Dec 2007 B1
7322241 Kai Jan 2008 B2
7382582 Cuevas Jun 2008 B1
7384531 Peltoma et al. Jun 2008 B1
7385788 Kubota et al. Jun 2008 B2
7388733 Swanson et al. Jun 2008 B2
7391594 Fu et al. Jun 2008 B2
7403357 Williams Jul 2008 B1
7417830 Kulangara Aug 2008 B1
7459835 Mei et al. Dec 2008 B1
7509859 Kai Mar 2009 B2
7625654 Vyas et al. Dec 2009 B2
7629539 Ishii et al. Dec 2009 B2
7649254 Graydon et al. Jan 2010 B2
7697237 Danielson Apr 2010 B1
7710687 Carlson et al. May 2010 B1
7710688 Hentges et al. May 2010 B1
7804663 Hirano et al. Sep 2010 B2
7813084 Hentges Oct 2010 B1
7826177 Zhang et al. Nov 2010 B1
7832082 Hentges et al. Nov 2010 B1
7872344 Fjelstad et al. Jan 2011 B2
7875804 Tronnes et al. Jan 2011 B1
7914926 Kimura et al. Mar 2011 B2
7929252 Hentges et al. Apr 2011 B1
8144430 Hentges et al. Mar 2012 B2
8149542 Ando Apr 2012 B2
8174797 Iriuchijima May 2012 B2
8199441 Nojima Jun 2012 B2
8228642 Hahn et al. Jul 2012 B1
8248731 Fuchino Aug 2012 B2
8248734 Fuchino Aug 2012 B2
8248735 Fujimoto et al. Aug 2012 B2
8248736 Hanya et al. Aug 2012 B2
8296929 Hentges et al. Oct 2012 B2
8339748 Shum et al. Dec 2012 B2
8553364 Schreiber et al. Oct 2013 B1
8634166 Ohnuki et al. Jan 2014 B2
20020075606 Nishida et al. Jun 2002 A1
20020118492 Watanabe et al. Aug 2002 A1
20030089520 Ooyabu et al. May 2003 A1
20030135985 Yao et al. Jul 2003 A1
20040181932 Yao et al. Sep 2004 A1
20040221447 Ishii et al. Nov 2004 A1
20040264056 Jang et al. Dec 2004 A1
20050117257 Thaveeprungsriporn et al. Jun 2005 A1
20060274452 Arya Dec 2006 A1
20070041123 Swanson et al. Feb 2007 A1
20070227769 Brodsky et al. Oct 2007 A1
20080247131 Hitomi et al. Oct 2008 A1
20080273269 Pro Nov 2008 A1
20090135523 Nishiyama et al. May 2009 A1
20090176120 Wang Jul 2009 A1
20090190263 Miura et al. Jul 2009 A1
20090294740 Kurtz et al. Dec 2009 A1
20100067151 Okawara et al. Mar 2010 A1
20100073825 Okawara Mar 2010 A1
20100097726 Greminger et al. Apr 2010 A1
20100143743 Yamasaki et al. Jun 2010 A1
20100177445 Fuchino Jul 2010 A1
20100195252 Kashima Aug 2010 A1
20100220414 Klarqvist et al. Sep 2010 A1
20100246071 Nojima et al. Sep 2010 A1
20100271735 Schreiber Oct 2010 A1
20110013319 Soga et al. Jan 2011 A1
20110228425 Liu et al. Sep 2011 A1
20110242708 Fuchino Oct 2011 A1
20110279929 Kin Nov 2011 A1
20120002329 Shum et al. Jan 2012 A1
20120113547 Sugimoto May 2012 A1
20130248231 Tobias Sep 2013 A1
Foreign Referenced Citations (9)
Number Date Country
11-186441 Jul 1999 JP
2000-106478 Apr 2000 JP
2001057039 Feb 2001 JP
2001307442 Nov 2001 JP
2002050140 Feb 2002 JP
2004300489 Oct 2004 JP
2007-115864 May 2007 JP
2007115864 Oct 2007 JP
2010-126768 Jun 2010 JP
Non-Patent Literature Citations (12)
Entry
Cheng, Yang-Tse, “Vapor deposited thin gold coatings for high temperature electrical contacts”, Electrical Contacts, 1996, Joint with the 18th International Conference on Electrical Contacts, Proceedings of the Forty-Second IEEE Holm Conference, Sep. 16-20, 1996 (abstract only).
Fu, Yao, “Design of a Hybrid Magnetic and Piezoelectric Polymer Microactuator”, a thesis submitted to Industrial Research Institute Swinburne (IRIS), Swinburne University of Technology, Hawthorn, Victoria , Australia, Dec. 2005.
Harris, N.R. et al., “A Multilayer Thick-film PZT Actuator for MEMs Applications”, Sensors and Actuators A: Physical, vol. 132, No. 1, Nov. 8, 2006, pp. 311-316.
Jing, Yang, “Fabrication of piezoelectric ceramic micro-actuator and its reliability for hard disk drives”, Ultrasonics, Ferroelectrics and Frequency Control, IEEE, vol. 51, No. 11, Nov. 2004, pp. 1470-1476 (abstract only).
Kon, Stanley et al., “Piezoresistive and Piezoelectric MEMS Strain Sensors for Vibration Detection”, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007, Proc. of SPIE vol. 6529.
Li, Longqiu et al., “An experimental study of the dimple-gimbal interface in a hard disk drive”, Microsyst Technol (2011) 17:863-868.
Pichonat, Tristan et al., “Recent developments in MEMS-based miniature fuel cells”, Microsyst Technol (2007) 13:1671-1678.
Raeymaekers, B. et al., “Investigation of fretting wear at the dimple/gimbal interface in a hard disk drive suspension”, Wear, vol. 268, Issues 11-12, May 12, 2010, pp. 1347-1353.
Raeymaekers, Bart et al., “Fretting Wear Between a Hollow Sphere and Flat Surface”, Proceedings of the STLE/ASME International Joint Tribology Conference, Oct. 19-21, 2009, Memphis, TN USA, 4 pages.
Rajagopal, Indira et al., “Gold Plating of Critical Components for Space Applications: Challenges and Solutions”, Gold Bull., 1992, 25(2), pp. 55-66.
Yoon, Wonseok et al., “Evaluation of coated metallic bipolar plates for polymer electrolyte membrane fuel cells”, The Journal of Power Sources, vol. 179, No. 1, Apr. 15, 2008, pp. 265-273.
International Search Report and Written Opinion issued in PCT/US2013/033341, mailed Jun. 14, 2013, 9 pages.
Related Publications (1)
Number Date Country
20130248231 A1 Sep 2013 US
Provisional Applications (1)
Number Date Country
61614304 Mar 2012 US