I. Definition
As used herein, the phrase “group III-V” refers to a compound semiconductor including at least one group III element and at least one group V element. By way of example, a group III-V semiconductor may take the form of a III-Nitride semiconductor. “III-Nitride” or “III-N” refers to a compound semiconductor that includes nitrogen and at least one group III element such as aluminum (Al), gallium (Ga), indium (In), and boron (B), and including but not limited to any of its alloys, such as aluminum gallium nitride (AlxGa(1-x)N), indium gallium nitride (InyGa(1-y)N), aluminum indium gallium nitride (AlxInyGa(1-x-y)N), gallium arsenide phosphide nitride (GaAsaPbN(1-a-b)), aluminum indium gallium arsenide phosphide nitride (AlxInyGa(1-x-y)AsaPbN(1a-b)), for example. III-N also refers generally to any polarity including but not limited to Ga-polar, N-polar, semi-polar, or non-polar crystal orientations. A III-N material may also include either the Wurtzitic, Zincblende, or mixed polytypes, and may include single-crystal, monocrystalline, polycrystalline, or amorphous structures. Gallium nitride or GaN, as used herein, refers to a III-N compound semiconductor wherein the group III element or elements include some or a substantial amount of gallium, but may also include other group III elements in addition to gallium.
In addition, as used herein, the phrase “group IV” refers to a semiconductor that includes at least one group IV element such as silicon (Si), germanium (Ge), and carbon (C), and may also include compound semiconductors such as silicon germanium (SiGe) and silicon carbide (SiC), for example. Group IV also refers to semiconductor materials which include more than one layer of group IV elements, or doping of group IV elements to produce strained group IV materials, and may also include group IV based composite substrates such as single-crystal or polycrystalline SiC on silicon, silicon on insulator (SOI), separation by implantation of oxygen (SIMOX) process substrates, and silicon on sapphire (SOS), for example.
It is noted that, as used herein, the terms “low voltage” or “LV” in reference to a transistor or switch describes a transistor or switch with a voltage range of up to approximately fifty volts (50V). It is further noted that use of the term “midvoltage” or “MV” refers to a voltage range from approximately fifty volts to approximately two hundred volts (approximately 50V to 200V). Moreover, the term “high voltage” or “HV,” as used herein, refers to a voltage range from approximately two hundred volts to approximately twelve hundred volts (approximately 200V to 1200V), or higher.
II. Background Art
In high power and high performance circuit applications, group III-V power devices, such as III-Nitride or other group III-V field-effect transistors (FETs) or high mobility electron transistors (HEMTs), are often desirable for their high efficiency and high-voltage operation. III-Nitride and other group III-V HEMTs operate using polarization fields to generate a two-dimensional electron gas (2DEG) allowing for high current densities with low resistive losses. Such III-Nitride or other group III-V HEMTs may be implemented as high side and/or low side power switches in a DC-DC power converter, for example.
When utilized as a high side power switch, a III-Nitride or other group III-V HEMT may be driven by a high side driver stage that may contain silicon based driver and pre-driver switches, and may be further implemented with a level shifter also including silicon based switches. However, silicon based switches typically have higher device capacitances than III-Nitride or other group III-V based switches. As a result, one disadvantage of using silicon based switches in the level shifter and high side driver stage is the adverse effect that their higher capacitance can have on the speed and overall performance of the high side power switch. Moreover, in some applications it may be desirable to have as many of the features of the high side driver and level shifter be monolithically integrated on a common die with the high side power switch as possible. Such monolithic integration may enable advantageous reduction in the size and cost of the high side switching circuitry, while improving performance by reducing the parasitic inductances and capacitances associated with device layout and interconnection.
The present disclosure is directed to a group III-V voltage converter with monolithically integrated level shifter, high side driver, and high side power switch, substantially as shown in and/or described in connection with at least one of the figures, and as set forth more completely in the claims.
The following description contains specific information pertaining to implementations in the present disclosure. One skilled in the art will recognize that the present disclosure may be implemented in a manner different from that specifically discussed herein. The drawings in the present application and their accompanying detailed description are directed to merely exemplary implementations. Unless noted otherwise, like or corresponding elements among the figures may be indicated by like or corresponding reference numerals. Moreover, the drawings and illustrations in the present application are generally not to scale, and are not intended to correspond to actual relative dimensions.
As noted above, in high power and high performance circuit applications, group III-V power devices, such as III-Nitride or other group III-V field-effect transistors (FETs) or high mobility electron transistors (HEMTs), are often desirable for their high efficiency and high-voltage operation. Ill-Nitride and other group III-V HEMTs operate using polarization fields to generate a two-dimensional electron gas (2DEG) allowing for high current densities with low resistive losses. Such III-Nitride or other group III-V HEMTs may be implemented as high side and/or low side power switches in a DC-DC power converter, for example.
As also noted above, when utilized as a high side power switch, a III-Nitride or other group III-V HEMT may be driven by a high side driver stage that may contain silicon based driver and pre-driver switches, and may be further implemented with a level shifter also including silicon based switches. However, silicon based switches typically have higher device capacitances than III-Nitride or other group III-V based switches. As a result, one disadvantage of using silicon based switches in the level shifter and high side driver stage is the adverse effect that their higher capacitance can have on the speed and overall performance of the high side power switch. Moreover, in some applications it may be desirable to have as many of the features of the high side driver and level shifter be monolithically integrated on a common die with the high side power switch as possible.
By way of example, several specific integrated power circuits are disclosed in U.S. Pat. No. 7,863,877, entitled “Monolithically Integrated III-Nitride Power Converter”, filed on Dec. 4, 2007, and issued on Jan. 4, 2011; U.S. Pat. No. 8,148,964, entitled “Monolithic III-Nitride Power Converter”, filed on Nov. 29, 2010, and issued on Apr. 3, 2012; U.S. Pat. No. 8,476,885, entitled “Monolithic Group III-V Power Converter”, filed on Mar. 27, 2012, and issued on Jul. 2, 2013; and U.S. Pat. No. 8,063,616, entitled “Integrated III-Nitride Power Converter Circuit”, filed on Jan. 11, 2008, and issued on Mar. 22, 2011. The above identified patents are hereby incorporated fully by reference into the present application.
The present application is directed to implementations of a monolithically integrated high side block configured to overcome the deficiencies associated with conventional implementations utilizing silicon based transistors to provide high side driver and level shifter circuitry. In various implementations, a monolithically integrated high side block according to the present inventive concepts may integrate a high side group III-V power switch, as well as the high side driver and level shifter for the high side group III-V power switch, on a common die. Moreover, the switching devices utilized in either or both of the high side driver and level shifter may be implemented as group III-V depletion mode (i.e., normally on), group III-V enhancement mode (i.e., normally off), or enhancement mode composite devices. The monolithically integrated high side block disclosed herein enables advantageous reduction in the size and cost of the high side power switching circuitry, while improving performance by reducing parasitic inductances and capacitances associated with device layout and interconnection.
Group III-V high side power switch 180 is coupled to group III-V high side driver 150, and is configured to be driven by drive signal 116 generated by group III-V high side driver 150. As also shown in
It is noted that, although not explicitly shown in
In certain implementations, common die 102 includes a silicon or silicon-on-insulator substrate. When such a die is used for integration, additional elements and device configurations may also be formed in the silicon substrate. These may include additional integration elements such as vias described in U.S. Pat. No. 7,821,034, entitled “Integrated III-Nitride Devices”, filed on Jan. 8, 2007, and issued on Oct. 26, 2010; U.S. Pat. No. 6,611,002, entitled “Gallium Nitride Material Devices and Methods Including Backside Vias”, filed on Feb. 23, 2001, and issued on Aug. 26, 2003; U.S. Pat. No. 7,566,913, entitled “Gallium Nitride Material Devices Including Conductive Regions and Methods Associated with the Same”, filed on Dec. 4, 2006, and issued on Jul. 28, 2009; U.S. Pat. No. 7,999,288, entitled “High Voltage Durability III-Nitride Semiconductor Device”, filed on Dec. 14, 2009, and issued on Aug. 16, 2011; and U.S. patent application Ser. No. 14/140,222, entitled “Semiconductor Structure Including a Spatially Confined Dielectric Region”, filed on Dec. 24, 2013. The above identified patents and patent application are hereby incorporated fully by reference into the present application.
Moving to
Group III-V level shifter 220A receiving control signal 212 and providing level shifted control signal 214 corresponds in general to group III-V level shifter 120 receiving control signal 112 and providing level shifted control signal 114, in
Group III-V transistor 224 of group III-V level shifter 220A may take the form of a III-Nitride or other group III-V FET or HEMT, and may be implemented as either a depletion mode (normally on) or as an enhancement mode (normally off) FET or HEMT. Alternatively, in some implementations, it may be advantageous or desirable to implement group III-V transistor 224 as a composite transistor including at least one depletion mode group III-V depletion mode device and at least one enhancement mode device. One example of such a composite transistor, formed as an enhancement mode transistor from the cascoded combination of a depletion mode III-Nitride HEMT with an enhancement mode silicon or other group IV FET is shown and described below by reference to
As another alternative, a composite device using a depletion mode high voltage (HV) III-V device and a low voltage (LV) or midvoltage (MV) enhancement mode group III-V device can be used. It is noted that the features HV, LV, and MV are defined above in the Definition section of the present application. Examples of such composite devices can be found in U.S. Pat. No. 8,264,003, entitled “Merged Cascode Transistor”, filed on Mar. 20, 2007, and issued on Sep. 11, 2012; and U.S. patent application Ser. No. 14/539,885, entitled “Dual-Gated Group III-V Merged Transistor”, filed on Nov. 12, 2014. The above identified patent and patent application are hereby incorporated fully by reference into the present application.
Referring to
Group III-V level shifter 220B receiving control signal 212 and providing level shifted control signal 214 corresponds in general to group III-V level shifter 120 receiving control signal 112 and providing level shifted control signal 114, in
Any or all of group III-V transistors 225, 226, and 228 may take the form of III-Nitride or other group III-V FETs or HEMTs, and may be implemented as either depletion mode (normally on) or as enhancement mode (normally off) FETs or HEMTs. Alternatively, in some implementations, it may be advantageous or desirable to implement one or more of group III-V transistors 225, 226, and 228 as a composite transistor including at least one group III-V device and at least one group IV device. As also noted above, one example of such a composite transistor, formed as an enhancement mode transistor from the cascoded combination of a depletion mode III-Nitride HEMT with an enhancement mode silicon FET is shown and described below by reference to
Continuing to
According to the implementation shown in
In implementations in which high side driver stage 350 includes pre-driver 330, pre-driver 330 may include group III-V transistors 332 and 334 coupled to driver stage group III-V transistor 342, and group III-V transistors 336 and 338 coupled to driver stage group III-V transistor 344. As shown in
Continuing to
In one implementation, group III-V transistor 480A may take the form of a group III-V HEMT having drain 482, source 484, and gate 486, such as a III-Nitride HEMT. In some implementations, group III-V transistor 480A may be implemented as a depletion mode or enhancement mode insulated-gate FET (IGFET), junction FET (JFET), accumulation mode FET (AccuFet), or as a depletion mode or enhancement mode heterostructure FET (HFET) or HEMT, for example. In some implementations, group III-V transistor 480A may take the form of an enhancement mode metal-insulator-semiconductor FET (MISFET), such as a metal-oxide-semiconductor FET (MOSFET), or as a composite III-Nitride device including a depletion mode III-Nitride device and an enhancement mode III-Nitride device. Moreover, when implemented as group III-V high side power switch 180, in
Referring to
Several examples of cascoded III-Nitride switches are disclosed in U.S. Pat. No. 8,017,978, entitled “Hybrid Semiconductor Device”, filed on Mar. 10, 2006, and issued on Sep. 13, 2011; U.S. Pat. No. 8,084,783, entitled “GaN-Based Device Cascoded with an Integrated FET/Schottky Diode Device”, filed on Nov. 9, 2009, and issued on Dec. 27, 2011; U.S. patent application Ser. No. 13/433,864, entitled “Stacked Composite Device Including a Group III-V Transistor and a Group IV Lateral Transistor”, filed on Mar. 29, 2012, and published as U.S. Patent Application Publication Number 2012/0256188 on Oct. 11, 2012; U.S. patent application Ser. No. 13/434,412, entitled “Stacked Composite Device Including a Group III-V Transistor and a Group IV Vertical Transistor”, filed on Mar. 29, 2012, and published as U.S. Patent Application Publication Number 2012/0256189 also on Oct. 11, 2012; and U.S. patent application Ser. No. 13/780,436, entitled “Group III-V and Group IV Composite Switch”, filed on Feb. 28, 2013, and published as U.S. Patent Application Publication Number 2013/0240898 on Sep. 19, 2013. Additional techniques to integrate cascoded III-Nitride and silicon based switches are described in U.S. Pat. No. 7,915,645, entitled “Monolithic Vertically Integrated Composite Group III-V and Group IV Semiconductor Device and Method For Fabricating Same”, filed on May 28, 2009, and issued on Mar. 29, 2011. The above identified patents and patent applications are hereby incorporated fully by reference into the present application.
It is noted that any or all of the group III-V switches or transistors shown and described in the present application may be implemented using exemplary composite transistor 480B. In other words group III-V high side power switch 180, in
Enhancement mode LV group IV transistor 470 may be implemented as an enhancement mode silicon transistor, for example. According to one implementation, enhancement mode LV group IV transistor 470 may be a silicon MISFET or MOSFET. However, in other implementations, enhancement mode LV group IV transistor 470 may include any suitable group IV material, such as silicon carbide (SiC), germanium (Ge), silicon germanium (SiGe), or a strained group IV element or compound, for example. In some implementations, as shown in
Group III-V transistor 460 may be implemented as a depletion mode IGFET, JFET, AccuFet, or HFET, for example. When implemented as an HFET, group III-V transistor 460 may be a HEMT configured to produce a 2DEG.
The combination of depletion mode group III-V transistor 460 and enhancement mode LV group IV transistor 470 provides composite transistor 480B, which according to the implementation shown in
In some implementations, composite transistor 480B may be a monolithically integrated composite transistor in which depletion mode group III-V transistor 460 and enhancement mode LV group IV transistor 470 are fabricated on a common die. However, in some implementations, LV group IV transistor 470 may be fabricated on a discrete silicon die mounted to a group III-V die on which depletion mode group III-V transistor is formed, as disclosed in U.S. Pat. No. 8,847,408, entitled “III-Nitride Transistor Stacked with FET in a Package”, filed on Mar. 22, 2011, and issued on Sep. 30, 2014. This patent is hereby incorporated fully by reference into the present application.
Continuing to
Monolithically integrated high side block 510 corresponds in general to monolithically integrated high side block 110, in
According to the implementation shown in
However, in some implementations, it may be advantageous or desirable to implement one or more of low side power switch 590 and transistors 546 and 548 as a composite transistor including at least one group III-V device and at least one group IV device. In those implementations, any or all of low side power switch 590 and transistors 546 and 548 may correspond in general to composite transistor 480B, in
In some implementations, the advantages associated with monolithic integration of transistors on a common die may be extended to low side power switch 590 and/or low side driver 598. For example, in one implementation, low side power switch 590 and low side driver 598 may be monolithically integrated together on low side common die 504. Moreover, in implementations in which larger scale monolithic integration may be advantageous or desirable, one or both of low side power switch 590 and low side driver 598 may be monolithically integrated with monolithically integrated high side block 510 on power stage common die 506.
Thus, the present application is directed to implementations of a monolithically integrated high side block configured to overcome the deficiencies associated with conventional solutions utilizing silicon based transistors to provide high side driver and level shifter circuitry. In various implementations, a monolithically integrated high side block according to the present inventive concepts may integrate a high side group III-V power switch, as well as the high side driver and level shifter for the high side group III-V power switch, on a common die. Moreover, the switching devices utilized in either or both of the high side driver and level shifter may be implemented as group III-V depletion mode (i.e., normally on), group III-V enhancement mode (i.e., normally off), or composite devices. The monolithically integrated high side block disclosed herein enables advantageous reduction in the size and cost of the high side power switching circuitry, while improving performance by reducing parasitic inductances and capacitances associated with device layout and interconnection.
From the above description it is manifest that various techniques can be used for implementing the concepts described in the present application without departing from the scope of those concepts. Moreover, while the concepts have been described with specific reference to certain implementations, a person of ordinary skill in the art would recognize that changes can be made in form and detail without departing from the scope of those concepts. As such, the described implementations are to be considered in all respects as illustrative and not restrictive. It should also be understood that the present application is not limited to the particular implementations described herein, but many rearrangements, modifications, and substitutions are possible without departing from the scope of the present disclosure.
The present application claims the benefit of and priority to a provisional application entitled “Integrated III-Nitride High Side Switch,” Ser. No. 61/913,548 filed on Dec. 9, 2013. The disclosure in this provisional application is hereby incorporated fully by reference into the present application.
Number | Date | Country | |
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61913548 | Dec 2013 | US |