Claims
- 1. A diffusion container for doping semiconductor elements with a dopant comprising:
- a gas-impermeable housing having an inner surface composed of pure silicon and an outer surface composed of a doped silicon having a specific electrical resistance of about 10 milliohm centimeters.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2253411 |
Oct 1972 |
DT |
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Parent Case Info
This is a division of application Ser. No. 410,758, filed Oct. 29, 1973 U.S. Pat. No. 3,899,557 issued Aug. 12, 1975.
US Referenced Citations (2)
Divisions (1)
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Number |
Date |
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Parent |
410758 |
Oct 1973 |
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