Claims
- 1. An apparatus for determining deviation of characteristics of a sample workpiece from characteristics of a control workpiece, comprising:
- an illumination system for producing a collimated beam having substantially parallel rays;
- a positioning system for placing the sample workpiece between outer edges of said collimated beam to produce a sample image including a silhouette of the sample workpiece;
- an imaging array, normal to said collimated beam and comprising a plurality of discrete light sensing elements, for producing signals corresponding to intensities of pixels of said sample image including said silhouette; and
- a processor for producing pixel data corresponding to said signals and for determining dimensions of the sample workpiece by:
- determining a diffraction band produced by edges of said sample workpiece and having an intensity of a diffraction band of a control image produced by edges of a control workpiece of the same type as the sample workpiece;
- determining a sample distance between points located within said diffraction band of said sample image;
- determining a control distance between corresponding points located within the diffraction band of the control image;
- determining an offset between said control distance and a known distance between corresponding points of the control workpiece; and
- applying the offset to said sample distance.
- 2. The apparatus of claim 1, wherein said processor provides the further function of preprocessing said pixel data.
- 3. The apparatus of claim 2, wherein said preprocessing comprises correcting in said pixel data dark noise errors associated with said light sensing elements.
- 4. The apparatus of claim 2, wherein said preprocessing comprises correcting in said pixel data intensity deviation errors occurring at each of said light sensing elements.
- 5. The apparatus of claim 2, wherein said preprocessing comprises normalizing pixel data representative of a diffraction band generated through interaction of said sample workpiece and said collimated beam.
- 6. The apparatus of claim 1, further comprising a telecentric lens disposed between said sample workpiece and said imaging array.
- 7. An apparatus for determining deviation of characteristics of a sample workpiece from characteristics of a control workpiece, comprising:
- an illumination system for producing a collimated beam having substantially parallel rays;
- a positioning system for placing the sample workpiece between outer edges of said collimated beam to produce a sample image including a silhouette of the sample workpiece;
- an imaging array, normal to said collimated beam and comprising a plurality of discrete light sensing elements, for producing signals corresponding to intensities of pixels of said sample image including said silhouette; and
- a processor for producing pixel data corresponding to said signals and for determining dimensions of the sample workpiece comprising:
- means for detecting a diffraction band produced by edges of said sample workpiece and having an intensity of a diffraction band of a control image produced by edges of a control workpiece of the same type as the sample workpiece;
- means for determining a sample distance between points located within said diffraction band of said sample image;
- means for determining a control distance between corresponding points located within the diffraction band of the control image;
- means for determining an offset between said control distance and a known distance between corresponding points of the control workpiece; and
- means for applying the offset to said sample distance.
RELATED APPLICATIONS
This application is a continuation in part of U.S. Ser. No. 08/591,104, filed on Jan. 25, 1996, now abandoned, which is a continuation of U.S. Ser. No. 08/257,206, filed on Jun. 9, 1994, now abandoned, the entireties of which are incorporated herein by reference.
US Referenced Citations (22)
Foreign Referenced Citations (2)
Number |
Date |
Country |
5-249048 |
Sep 1993 |
JPX |
2007836 |
May 1979 |
GBX |
Continuations (1)
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Number |
Date |
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Parent |
257206 |
Jun 1994 |
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Continuation in Parts (1)
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Number |
Date |
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591104 |
Jan 1996 |
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