Claims
- 1. A highly purified Ti material comprising:
- an oxygen content of not more than 350 ppm;
- Fe, Ni and Cr contents of not more than 15 ppm each;
- Na and K contents of not more than 0.5 ppm each;
- a reduction of area of not less than 70%; and
- a thermal conductivity of not less than 16 W/mK.
- 2. The highly purified Ti material according to claim 1, wherein said Ti material has U and Th contents of not more than 1 ppb each.
- 3. The highly purified Ti material according to claim 1, wherein
- the Ti material has an oxygen content of not more than 250 ppm;
- Fe, Ni and Cr contents of not more than 10 ppm each;
- Na and K contents of not more than 0.1 ppm each
- a reduction of area of not less than 80%; and
- a thermal conductivity of not less than 17 W/mK.
- 4. The highly purified Ti material according to claim 1, wherein
- the Ti material has an oxygen content of not more than 200 ppm;
- Fe, Ni and Cr contents of not more than 5 ppm each;
- Na and K contents of not more than 0.05 ppm each
- a reduction of area of not less than 85%; and
- a thermal conductivity of not less than 18 W/mK.
- 5. The sputtering target consisting of the highly purified Ti material according to claim 1 and shaped into a desired form.
Priority Claims (1)
Number |
Date |
Country |
Kind |
1-181877 |
Jul 1989 |
JPX |
|
Parent Case Info
This application is a continuation of application Ser. No. 07/550,682, filed Jul. 10, 1990, now abandoned.
US Referenced Citations (3)
Number |
Name |
Date |
Kind |
4678506 |
Bania |
Jul 1987 |
|
4793854 |
Shimotori et al. |
Dec 1988 |
|
4891066 |
Shimotori et al. |
Jan 1990 |
|
Foreign Referenced Citations (1)
Number |
Date |
Country |
248338 |
Sep 1987 |
EPX |
Continuations (1)
|
Number |
Date |
Country |
Parent |
550682 |
Jul 1990 |
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