The present invention is a Continuation of U.S. patent application Ser. No. 09/407,308, filed Sep. 28, 1999, which is a Divisional of U.S. patent application Ser. No. 08/990,644, filed Dec. 15, 1997, now U.S. Pat. No. 6,090,637 which claims priority to Provisional Application Ser. No. 60/037,993, filed Feb. 13, 1997 and entitled LOW-DEFECT BETE BUFFER LAYER.
The United States government has certain rights in this invention pursuant to Contract No. ARPA/ARO DAAH04-94-C0049.
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Number | Date | Country |
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195 42 241 | May 1997 | DE |
0 556 461 | Aug 1993 | EP |
7-66494 | Mar 1995 | JP |
7-232999 | Sep 1995 | JP |
8-70155 | Mar 1996 | JP |
8-97518 | Apr 1996 | JP |
08148765 | Jul 1996 | JP |
WO 9718592 | May 1997 | WO |
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Number | Date | Country | |
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60/037993 | Feb 1997 | US |
Number | Date | Country | |
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Parent | 09/407308 | Sep 1999 | US |
Child | 09/688594 | US |