Number | Name | Date | Kind |
---|---|---|---|
3970382 | Fisher et al. | Jul 1976 | |
4447128 | Ferrer | May 1984 | |
4570252 | Drexler | Feb 1986 | |
4831452 | Takanashi et al. | May 1989 | |
4875076 | Torigoe et al. | Oct 1989 | |
5055871 | Pasch | Oct 1991 | |
5137363 | Kosugi et al. | Aug 1992 | |
5162642 | Okamotsu et al. | Nov 1992 | |
5274420 | Chastang et al. | Dec 1993 |
Number | Date | Country |
---|---|---|
2-5405 | Oct 1990 | JPX |
2-208919 | Dec 1990 | JPX |
Entry |
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Rabek, J. F., et al, "Coordination Complexes Between Iron (III) Chloride and Polyether, Polyester, and Poly(ether ester), Marcomolecules," vol. 24, No. 4, pp. 836-841, 1991. |
Noguchi, et al., "Subhalf Micron Lithography System with Phase-Shifting Effect", Cannon, Inc., 14 pages. |