Number | Name | Date | Kind |
---|---|---|---|
3063206 | Meyerhoff et al. | Nov 1962 | |
3148129 | Basseches et al. | Sep 1964 | |
3515987 | Zurbrick et al. | May 1970 | |
3803489 | Miller | Apr 1974 | |
4197679 | Sauerland | Apr 1980 | |
4199902 | Sauerland | Apr 1980 | |
4241167 | Collins et al. | Dec 1980 | |
4407094 | Bennett et al. | Oct 1983 | |
4473795 | Wood | Sep 1984 | |
4793895 | Kaanta et al. | Dec 1988 | |
4956611 | Maltiel | Sep 1990 |
Entry |
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B. Davari et al, "A New Planarization Technique . . . ", IEEE, Jul. 1989, pp. 61-64. |