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5227658 | Beyer et al. | Jul 1993 | |
5413952 | Pages et al. | May 1995 | |
5539241 | Abidi et al. | Jul 1996 | |
5798557 | Salatino et al. | Aug 1998 | |
5915168 | Salatino et al. | Jun 1999 | |
5949144 | Delgado et al. | Sep 1999 | |
6013573 | Yagi | Jan 2000 |
Number | Date | Country |
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0043014 | Jun 1982 | EP |
0076935 | Apr 1983 | EP |
0523450 | Jan 1993 | EP |
WO 9417558A | Apr 1994 | WO |
Entry |
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IEDM, 1986, pp. 184-187, XP002039418, S. Sugiyama, et al.: Micro-diaphragm Pressure Sensor:, p. 184, col. 2, line 37—p. 185, line 32; figure 3. |
European Patent Search. Serial No. 97108480.1 No Date. |