Number | Name | Date | Kind |
---|---|---|---|
4280766 | Goss | Jul 1981 | |
4286878 | Pircher | Sep 1981 | |
4298283 | Makosch et al. | Nov 1981 | |
4358201 | Makosch | Nov 1982 | |
4552457 | Giallorenzi et al. | Nov 1985 | |
4652744 | Bowers et al. | Mar 1987 | |
4714348 | Makosch | Dec 1987 |
Number | Date | Country |
---|---|---|
0226658 | Jan 1987 | EPX |
Entry |
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SPIE vol. 316 High Resolution Soft X-Ray Optics (1981) "Surface Profiling by Electro-Optical Phase Measurements", by G. Makosch et al. pp. 42-53. |
Photographic Sciences Corporation, 1987, "MP2000 Non-Contact Surface Profiler". |