This application is a continuation of application Ser. No. 489,919, filed Apr. 29, 1983, now abandoned.
Number | Name | Date | Kind |
---|---|---|---|
3338209 | Bhola | Aug 1967 | |
3366516 | McAleer et al. | Jan 1968 | |
3386866 | Ebert et al. | Jun 1968 | |
3607378 | Rugglero | Sep 1971 | |
3619283 | Carpenter et al. | Nov 1971 | |
3781152 | Keller et al. | Dec 1973 | |
4232063 | Rosler et al. | Nov 1980 | |
4239955 | Cho | Dec 1980 | |
4258658 | Politycki et al. | Apr 1981 |
Number | Date | Country |
---|---|---|
1398758 | Apr 1965 | FRX |
1462335 | Dec 1965 | FRX |
2439895 | May 1980 | FRX |
51187 | Oct 1978 | JPX |
Entry |
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Workpiece Holder, IBM Technical Disclosure, vol. 20, No 1, Jun. 1977, pp. 228. |
L. H. Kaplan et al, Deposition Method for Aluminum Oxide Films, IBM Technical Disclosure Bulletin, vol. 7, No. 5, Oct. 1964, pp. 414-415. |
K. Ulbrich, Laminar Diffuser Head for Continuous CVD Devices with U-Shaped Carriers, IBM Technical Disclosure Bulletin, vol. 22, No. 9, Feb. 1980, pp. 3972, 3973. |
Number | Date | Country | |
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Parent | 489919 | Apr 1983 |