Reaction chambers Selection of material therefor

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CPC
C30B25/08

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CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B25/00Single-crystal growth by chemical reaction of reactive gases

Current Industry

C30B25/08Reaction chambers Selection of material therefor

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for manufacturing hexagonal crystals
- Patent number 12,247,315
- Issue date Mar 11, 2025
- LNBS CO. LTD.
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support device for a reaction chamber of an epitaxial rea...
- Patent number 12,195,877
- Issue date Jan 14, 2025
- LPE S.P.A.
- Silvio Preti
- C30 - CRYSTAL GROWTH
Information Patent Grant
Gas-phase reactor system-with a reaction chamber, a solid precursor...
- Patent number 12,195,876
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- John Tolle
- C30 - CRYSTAL GROWTH
Information Patent Grant
Multi-layer EPI chamber body
- Patent number 12,188,148
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Shu-Kwan Lau
- C30 - CRYSTAL GROWTH
Information Patent Grant
Growth of A-B crystals without crystal lattice curvature
- Patent number 12,168,839
- Issue date Dec 17, 2024
- Freiberger Compound Materials GMBH
- Berndt Weinert
- C30 - CRYSTAL GROWTH
Information Patent Grant
Epitaxial growth apparatus and method of producing epitaxial wafer
- Patent number 12,129,543
- Issue date Oct 29, 2024
- Sumco Corporation
- Haku Komori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming large area single crystal diamond substrates wi...
- Patent number 12,098,475
- Issue date Sep 24, 2024
- Board of Trustees of Michigan State University
- Timothy A. Grotjohn
- C30 - CRYSTAL GROWTH
Information Patent Grant
Chamber architecture for epitaxial deposition and advanced epitaxia...
- Patent number 12,060,651
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-thermal CVD chambers with shared gas delivery and exhaust system
- Patent number 12,037,701
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Zhiyuan Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 12,040,217
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
- Patent number 11,946,158
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Ruggero Anzalone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gallium nitride vapor phase epitaxy apparatus used in vapor phase e...
- Patent number 11,869,767
- Issue date Jan 9, 2024
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Shugo Nitta
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus and methods for alignment of a susceptor
- Patent number 11,859,307
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Edric Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular reactor for microwave plasma-assisted deposition
- Patent number 11,859,279
- Issue date Jan 2, 2024
- DIAM CONCEPT
- Alix Gicquel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-phase reactor system-with a reaction chamber, a solid precursor...
- Patent number 11,814,747
- Issue date Nov 14, 2023
- ASM IP Holding B.V.
- John Tolle
- C30 - CRYSTAL GROWTH
Information Patent Grant
Reaction chamber
- Patent number 11,773,505
- Issue date Oct 3, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Gang Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Group III nitride crystal substrate having a diameter of 4 inches o...
- Patent number 11,718,927
- Issue date Aug 8, 2023
- Sumitomo Chemical Company, Limited
- Takehiro Yoshida
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
- Patent number 11,692,283
- Issue date Jul 4, 2023
- STMicroelectronics S.r.l.
- Ruggero Anzalone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Linear lamp array for improved thermal uniformity and profile control
- Patent number 11,680,338
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Brian Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
HVPE apparatus and methods for growing indium nitride and indium ni...
- Patent number 11,661,673
- Issue date May 30, 2023
- Ostendo Technologies, Inc.
- Alexander L. Syrkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of utilizing a degassing chamber to reduce arsenic outgassin...
- Patent number 11,649,559
- Issue date May 16, 2023
- Applied Materials, Inc.
- Xinyu Bao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for making transition metal dichalcogenide crystal
- Patent number 11,608,267
- Issue date Mar 21, 2023
- Tsinghua University
- Hao Li
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 11,587,821
- Issue date Feb 21, 2023
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tantalum carbide coated carbon material, manufacturing method there...
- Patent number 11,555,255
- Issue date Jan 17, 2023
- Shin-Etsu Chemical Co., Ltd.
- Chikara Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor-liquid reaction device, reaction tube, film forming apparatus
- Patent number 11,499,247
- Issue date Nov 15, 2022
- National University Corporation Tokyo University of Agriculture and Technology
- Akinori Koukitu
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vapor phase growth method
- Patent number 11,482,416
- Issue date Oct 25, 2022
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- C30 - CRYSTAL GROWTH
Information Patent Grant
System for horizontal growth of high-quality semiconductor single c...
- Patent number 11,479,875
- Issue date Oct 25, 2022
- SICRYSTAL GMBH
- Erwin Schmitt
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat-insulating shield member and single crystal manufacturing appa...
- Patent number 11,453,958
- Issue date Sep 27, 2022
- Showa Denko K.K.
- Yohei Fujikawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Crystal growth apparatus
- Patent number 11,447,890
- Issue date Sep 20, 2022
- Showa Denko K.K.
- Shunsuke Noguchi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Chamber components for epitaxial growth apparatus
- Patent number 11,441,236
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Shinichi Oki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTI-LAYER EPI CHAMBER BODY
- Publication number 20250101629
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Shu-Kwan LAU
- C30 - CRYSTAL GROWTH
Information Patent Application
GROUP III NITRIDE CRYSTAL MANUFACTURING APPARATUS AND MANUFACTURING...
- Publication number 20250092565
- Publication date Mar 20, 2025
- Panasonic Holdings Corporation
- Junichi TAKINO
- C30 - CRYSTAL GROWTH
Information Patent Application
GAS-PHASE REACTOR SYSTEM-WITH A REACTION CHAMBER, A SOLID PRECURSOR...
- Publication number 20250092566
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- John Tolle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING GALLIUM NITRIDE (GAN) SINGLE-CRYSTAL SUBSTRATE...
- Publication number 20250092572
- Publication date Mar 20, 2025
- Peking University
- Xinqiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTOR FOR EPITAXIAL DEPOSITION OF SEMICONDUCTOR MATERIAL ON SUBST...
- Publication number 20250084559
- Publication date Mar 13, 2025
- LPE S.p.A.
- Maurilio Giuseppe Meschia
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS W...
- Publication number 20250087485
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Chen-Ying WU
- C30 - CRYSTAL GROWTH
Information Patent Application
GALLIUM OXIDE FILM, AND MANUFACTURING DEVICE AND MANUFACTURING METH...
- Publication number 20250034752
- Publication date Jan 30, 2025
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Masaru HORI
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESS FOR PRODUCING COATED SUBSTRATES AND COATED SUBSTRATE AND US...
- Publication number 20250003080
- Publication date Jan 2, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Kevin SCHUCK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT
- Publication number 20240368803
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shikai LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
- Publication number 20240318351
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Zhiyuan YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREPARATION OF SHAPED CRYSTALLINE LAYERS
- Publication number 20240309549
- Publication date Sep 19, 2024
- Ivan TIMOKHIN
- C30 - CRYSTAL GROWTH
Information Patent Application
MANUFACTURING DEVICE AND MANUFACTURING METHOD FOR GROUP III NITRIDE...
- Publication number 20240309551
- Publication date Sep 19, 2024
- Panasonic Holdings Corporation
- Junichi TAKINO
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING THERMOE...
- Publication number 20240309547
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING TURBINE...
- Publication number 20240309548
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Awse MA'AYA
- C30 - CRYSTAL GROWTH
Information Patent Application
HIGHLY REFLECTIVE METALLIC ALLOYS FOR COMPONENTS OF SEMICONDUCTOR P...
- Publication number 20240295048
- Publication date Sep 5, 2024
- Applied Materials, Inc.
- Shawn Thanhson Le
- C30 - CRYSTAL GROWTH
Information Patent Application
DIAMOND SUBSTRATE AND METHOD FOR MANUFACTURING SAME
- Publication number 20240279842
- Publication date Aug 22, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hitoshi NOGUCHI
- C01 - INORGANIC CHEMISTRY
Information Patent Application
REACTION CHAMBER WITH COVERING SYSTEM AND EPITAXIAL REACTOR
- Publication number 20240271319
- Publication date Aug 15, 2024
- LPE S.P.A.
- Srinivas Yarlagadda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CELL ARCHITECTURAL STRUCTURES FOR ENHANCED THERMAL MANAGEMENT IN EP...
- Publication number 20240254653
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Amir H. TAVAKOLI
- C30 - CRYSTAL GROWTH
Information Patent Application
PRE-HEAT RINGS AND PROCESSING CHAMBERS INCLUDING BLACK QUARTZ, AND...
- Publication number 20240247404
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Nimrod SMITH
- C30 - CRYSTAL GROWTH
Information Patent Application
CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...
- Publication number 20240209544
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE-SIZE DIAMOND, MPCVD DEVICE AND PREPARATION METHOD OF LARGE-SI...
- Publication number 20240183067
- Publication date Jun 6, 2024
- ZHENGZHOU RESEARCH INSTITUTE FOR ABRASIVES & GRINDING CO., LTD.
- Xiaolei Wu
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF PRODUCING EPITAXIAL LAYER WAFERS IN A CHAMBER OF A DEPOSI...
- Publication number 20240150932
- Publication date May 9, 2024
- Siltronic AG
- Hannes Hecht
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUP III-V SEMICONDUCTOR DEVICE AND METHOD OF FABRICATION OF SAME...
- Publication number 20240105450
- Publication date Mar 28, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Yoganand Saripalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION REACTOR IN POLYSILICON PRODUCTION PROCESS
- Publication number 20240084480
- Publication date Mar 14, 2024
- Advanced Material Solutions
- Chad Fero
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and Device for Producing a SiC Solid Material
- Publication number 20240060211
- Publication date Feb 22, 2024
- Zadient Technologies SAS
- Ivo Crössmann
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and Device for Producing a SiC Solid Material
- Publication number 20240026566
- Publication date Jan 25, 2024
- Zadient Technologies SAS
- Ivo Crössmann
- C30 - CRYSTAL GROWTH
Information Patent Application
FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...
- Publication number 20240018658
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS-PHASE REACTOR SYSTEM-WITH A REACTION CHAMBER, A SOLID PRECURSOR...
- Publication number 20240011189
- Publication date Jan 11, 2024
- ASM IP HOLDING B.V.
- John Tolle
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR CVD DEPOSITION OF N-TYPE DOPED SILICON CARBIDE AND EPITA...
- Publication number 20230313410
- Publication date Oct 5, 2023
- LPE S.P.A.
- Silvio Preti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD
- Publication number 20230313411
- Publication date Oct 5, 2023
- NuFlare Technology, Inc.
- Yoshiaki DAIGO
- C30 - CRYSTAL GROWTH

Reaction chambers Selection of material therefor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for manufacturing hexagonal crystals

Substrate support device for a reaction chamber of an epitaxial rea...

Gas-phase reactor system-with a reaction chamber, a solid precursor...

Multi-layer EPI chamber body

Growth of A-B crystals without crystal lattice curvature

Epitaxial growth apparatus and method of producing epitaxial wafer

Methods for forming large area single crystal diamond substrates wi...

Chamber architecture for epitaxial deposition and advanced epitaxia...

Multi-thermal CVD chambers with shared gas delivery and exhaust system

Substrate lift mechanism and reactor including same

Apparatus for growing a semiconductor wafer and associated manufact...

Gallium nitride vapor phase epitaxy apparatus used in vapor phase e...

Apparatus and methods for alignment of a susceptor

Modular reactor for microwave plasma-assisted deposition

Gas-phase reactor system-with a reaction chamber, a solid precursor...

Reaction chamber

Group III nitride crystal substrate having a diameter of 4 inches o...

Apparatus for growing a semiconductor wafer and associated manufact...

Linear lamp array for improved thermal uniformity and profile control

HVPE apparatus and methods for growing indium nitride and indium ni...

Method of utilizing a degassing chamber to reduce arsenic outgassin...

Method for making transition metal dichalcogenide crystal

Substrate lift mechanism and reactor including same

Tantalum carbide coated carbon material, manufacturing method there...

Vapor-liquid reaction device, reaction tube, film forming apparatus

Vapor phase growth method

System for horizontal growth of high-quality semiconductor single c...

Heat-insulating shield member and single crystal manufacturing appa...

Crystal growth apparatus

Chamber components for epitaxial growth apparatus

Patents Applicationslast 30 patents

MULTI-LAYER EPI CHAMBER BODY

GROUP III NITRIDE CRYSTAL MANUFACTURING APPARATUS AND MANUFACTURING...

GAS-PHASE REACTOR SYSTEM-WITH A REACTION CHAMBER, A SOLID PRECURSOR...

METHOD FOR PREPARING GALLIUM NITRIDE (GAN) SINGLE-CRYSTAL SUBSTRATE...

REACTOR FOR EPITAXIAL DEPOSITION OF SEMICONDUCTOR MATERIAL ON SUBST...

APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS W...

GALLIUM OXIDE FILM, AND MANUFACTURING DEVICE AND MANUFACTURING METH...

PROCESS FOR PRODUCING COATED SUBSTRATES AND COATED SUBSTRATE AND US...

REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

PREPARATION OF SHAPED CRYSTALLINE LAYERS

MANUFACTURING DEVICE AND MANUFACTURING METHOD FOR GROUP III NITRIDE...

PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING THERMOE...

PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING TURBINE...

HIGHLY REFLECTIVE METALLIC ALLOYS FOR COMPONENTS OF SEMICONDUCTOR P...

DIAMOND SUBSTRATE AND METHOD FOR MANUFACTURING SAME

REACTION CHAMBER WITH COVERING SYSTEM AND EPITAXIAL REACTOR

CELL ARCHITECTURAL STRUCTURES FOR ENHANCED THERMAL MANAGEMENT IN EP...

PRE-HEAT RINGS AND PROCESSING CHAMBERS INCLUDING BLACK QUARTZ, AND...

CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...

LARGE-SIZE DIAMOND, MPCVD DEVICE AND PREPARATION METHOD OF LARGE-SI...

METHOD OF PRODUCING EPITAXIAL LAYER WAFERS IN A CHAMBER OF A DEPOSI...

GROUP III-V SEMICONDUCTOR DEVICE AND METHOD OF FABRICATION OF SAME...

CHEMICAL VAPOR DEPOSITION REACTOR IN POLYSILICON PRODUCTION PROCESS

Method and Device for Producing a SiC Solid Material

Method and Device for Producing a SiC Solid Material

FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...

GAS-PHASE REACTOR SYSTEM-WITH A REACTION CHAMBER, A SOLID PRECURSOR...

METHOD FOR CVD DEPOSITION OF N-TYPE DOPED SILICON CARBIDE AND EPITA...

VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD