Number | Date | Country | Kind |
---|---|---|---|
54-169610 | Dec 1979 | JPX |
Number | Date | Country |
---|---|---|
138589 | Nov 1979 | DEX |
Entry |
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Dill et al., "The Impact of Ion Implantation on Silicon Device and Circuit Technology", Solid State Technology, Dec. 1972, pp. 27-35. |
Duffy et al., "Impurity Profile Control During Ion Implantation", IBM Tech. Discl. Bull. 12 (1), Jun. 1969, p. 27. |