Claims
- 1. A method for scanning a field with an image from a one-to-one projection lens, comprising the steps of:
- providing a first optical magnification correction to an image incident on the one-to-one projection lens;
- passing the magnification corrected image through at least a portion of the one-to-one projection lens;
- providing a second optical magnification correction to the image after the step of passing; and
- scanning the field with the image having the second optical magnification correction.
- 2. The method of claim 1, further comprising the step of adjusting the second optical magnification while scanning the field.
- 3. The method of claim 1, further comprising the step of:
- imparting a relative velocity between a reticle and a blank in the direction of the scanning, a third magnification correction to the image being determined by the relative velocity.
- 4. The method of claim 3, wherein the third magnification correction is in a range of zero to 100 parts per million.
- 5. The method of claim 3, wherein the reticle and blank are mounted on respective stages, and the step of imparting includes moving one of the stages relative to the other stage.
- 6. The method of claim 3, wherein the step of imparting including varying the relative velocity, thereby varying the third magnification correction while scanning.
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is a division of application Ser. No. 08/409,251, filed Mar. 22, 1995 pending.
This disclosure is related to and incorporates by reference in their entirety co-filed and commonly owned U.S. patent applications Ser. No. 08/412,232, still pending, entitled "Scanning Lithography System having Double Pass Wynne-Dyson Optics"; and application Ser. No. 08/410,601, still pending, entitled "Scanning Lithography System with Opposing Motion".
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Non-Patent Literature Citations (1)
Entry |
Goodall, F., et al., "Excimer Lasers As Deep UV Sources for Photolithographic System", Microelectronic Engineering, 5:445-452 (1986). |
Divisions (1)
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Number |
Date |
Country |
Parent |
409251 |
Mar 1995 |
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